Confocal Scanning Laser Microscope

Contents
OLS3100/OLS3000
I. Safety guide
II . System outline/Specifications
III . Getting started with the OLS
IV . Maintenance
V. Trouble Q&A
VI . Application (PDF only)

User’s manual
Ver 6.0

Request
Thank you for your purchase of Olympus microscope at this time.
Prior to using this microscope, read this instruction manual for sure to utilize full-fledged
performance of this microscope and ensure customer’s safety. In addition, read manuals
that come with optional equipment together.
This manual is composed with 6 chapters; “Safety guide”, “System outline/Specifications”,
“Getting started with the OLS”, “Maintenance”, “Trouble Q&A” and “Application (PDF only)”.
Hold this manual by your side when using this microscope all the time and keep it with care
AX7587
after reading.
CAUTION

(1) Use or copy of this software and manual, part or whole, is prohibited without our consent.
(2) Information described in this manual may be subject to change without notice.

REGISTERED TRADEMARK

Microsoft, Microsoft Windows, Excel for Windows, Microsoft Internet Explorer are registered trademarks of
Microsoft Corporation of U.S.A.
Other company’s names and product’s names are trademarks and registered trademarks of their respective
owners.

Page 1
Manual configuration

Manual configuration
User’s manual of this system is composed with 6 chapters and each chapter describes the
details of the following topics.

I Safety guide
This chapter describes requests, reminders and type of warnings when using this
system.

1. Reminders to safety consideration .................................................. I. 1-1

2. Warning indication .......................................................................................... I. 2-1
3. Precautions for use ......................................................................................... I. 3-1

II System outline / Specifications

This chapter describes system outline and specifications.

1 System outline ................................................................................................ II. 1-1

2 Specifications ................................................................................................. II. 2-1

III Getting started with the OLS

This chapter describes basic operation method of the system.

1 Names of major operating sections ..............................................................III. 1-1

2 Summary of observation procedures ............................................................III. 2-1
3 Observation procedures ...............................................................................III. 3-1

IV Maintenance
This chapter describes maintenance of the system.

1 Software Installation......................................................................................IV. 1-1

2 Maintenance of major units...........................................................................IV. 2-1
3 Maintenance parts ........................................................................................IV. 3-1

2 Page
Manual configuration

V Trouble Q&A
This chapter describes countermeasures for troubles occurred.

1 Countermeasures for troubles..........................................................................V. 1-1

VI Application
This chapter describes method of image acquisition and various processes to be
applied for the image. This chapter is only available in PDF. See this chapter with
use of personal computer.

1 Microscope................................................................................................... VI. 1-1

2 Image display ............................................................................................... VI. 2-1
3 Image processing......................................................................................... VI. 3-1
4 Image analysis ............................................................................................. VI. 4-1
5 Convenient features ..................................................................................... VI. 5-1
Appendix A Definition of particle analysis items ...................................VI.Appendix A-1
Appendix B Definition of roughness analysis items ..............................VI.Appendix B-1

Page 3
Notations in this manual

Notations in this manual

This manual complies with the following notations.

— Notation of Caution, Note and Tip

Notation Description
It indicates caution to prevent physical damage to user or
damage to product (including furniture in peripheral area).

NOTE Indicates details of caution to prevent damage or deterioration

of products.

Hint or one point advice appears with TIP attached.

TIP

— Notation of Window, command button and dialog box

Notation Description
[Laser microscope] Name of window, dialog box, menu, list box and check box is
window enclosed inside square brackets - [ ].

<OK> button Name of button inside window or dialog box is enclosed inside
<Open file> button angle brackets - < >.

— Notations for mouse operation

Notation Description
Click It means that mouse button should be pressed and released
immediately.

Double click It means that mouse button should be pressed twice quickly.

Drag It means that mouse button should be moved while the

button is being pressed and then, released at the aimed
position.

Remarks: Unless otherwise stated in this manual, click, double-click and drag
action should be done by pressing left side button.

4 Page
Notations in this manual

— Notation for key operation

Notation Description
Enter Key is enclosed in ,

Alt + F1 Plus symbol means key combined operation.

For example, Alt + F1 means that, while
pressing Alt key, F1 key should be pressed.

Direction key , , and key are generally

called direction key.

In this manual, window or dialog box may be partly enlarged for easy reading and grayed
out characters may also be modified to read correctly in several places.

Page 5
I. Safety guide

Note to this chapter

This chapter describes cautions for safety guide of this
system. Read this chapter before using the system for
sure.
If this system were used in other methods
than those procedures described in this
manual, safety of this system is not
guaranteed and; it may also cause failure of
the system. Use this system in accordance
with this manual only.
CONTENTS

1 Reminders to safety consideration 1-1

1-1 Precautions for use .........................................................................1-1
1-1-1 Microscope .................................................................................................... 1-1
1-1-2 Stage ............................................................................................................. 1-3
1-1-3 Revolving nosepiece / Objective lens............................................................ 1-4
1-1-4 Light source unit LG-PS2 / Light guide (Option for OLS3000) ...................... 1-4
1-1-5 Anti-vibration platform (Option) ..................................................................... 1-6
1-1-6 Power cord .................................................................................................... 1-6
1-1-7 Cable ............................................................................................................. 1-7
1-1-8 Fuse .............................................................................................................. 1-7
1-1-9 Absolute alcohol ............................................................................................ 1-7
1-2 Symbol mark for safety ...................................................................1-8

2 Warning indication 2-1

2-1 Warning label ...................................................................................2-1
2-1-1 Laser warning & Class indication .................................................................. 2-1
2-1-2 High temperature warning to light source unit............................................... 2-1
2-1-3 Entanglement warning................................................................................... 2-2
2-2 Protective bin label..........................................................................2-3

3 Precautions for use 3-1

3-1 About system move.........................................................................3-1
3-2 Handling precautions ......................................................................3-1
3-3 Recommendation for use ...............................................................3-3
3-4 About care and storage ..................................................................3-4
3-5 Computer and software ..................................................................3-4
3-6 Caution .............................................................................................3-6
Reminders to safety consideration / Precautions for use

1 Reminders to safety consideration

1-1 Precautions for use
This section describes precautions that must be observed by individual user when this system is used.
Read all the following contents carefully and pay adequate attention to them.
If the system were used in any other method than those described in this manual, safety is not guaranteed and;
moreover, it may lead to failure of the system.

1-1-1 Microscope
z This product is defined as Class 2 Laser product.
In "IEC 60825-1, Safety of laser products − Part 1: Equipment classification, requirements and user’s
guide", it requires safety preventive measures for users of laser products.
Before using, read IEC 60825-1 of the latest edition carefully and then, use the products after enforcing
adequate measures.
Unless the safety measures indicated in IEC 60825-1 are provided, our company cannot insure safety of
the product since it may cause exposure of dangerous laser emission.

"Caution – Use of controls or adjustments or performance of procedures other

than those specified herein may result in hazardous radiation exposure".

z Laser beam comes from objective lens. Laser beam emitted from objective lens is spread so that no
problem may occur. However, in case that the beam is stared at directly or laser is emitted outside by
putting a mirror into light path, laser beam may enter user’s eye which is very dangerous. Do not exercise
such conduct.

z When laser is emitted, LED – “LASER” in front of laser microscope will light. User must be very careful
during laser emission.

z Holes of revolving nosepiece without objective lenses are covered with caps individually. If an objective
lens or a cap is removed from the revolving nosepiece, laser beam may enter your eyes and focus on your
retinas because laser forms a parallel flux; when it enters your eyes, it is very dangerous.
Do not remove an objective lens or a cap from the revolving nosepiece for safety’s sake.
When you need to remove the objective lens from the revolving nosepiece to store it under the different
condition, turn off the system power first and then detach it.
(When the objective lens being used is replaced with a different one, the system must be calibrated.
Contact our local sales office.)
I . Safety guide
Page I. 1-1
Reminders to safety consideration / Precautions for use

z If specimen is set or removed during laser emission (during laser scanning), the reflected light
from specimen may enter eye and it is very dangerous. Do not set or remove specimen during
laser emission.

z If the system is disassembled by removing cover with use of tool etc., laser will emit inside the system
and it is very dangerous. Disassembling may also cause failure of the system. Never disassemble
the system.

z Set the microscope on robust desk of horizontal surface such as anti-vibration platform or level block.

z Stage, microscope main unit (head section) and revolving nosepiece must be detached when moving.
When carrying the system, do not hold stage and microscope main unit (head section) as it may cause
damage to the system.

z When the system is moved with use of trailer or truck, attach fixtures to the system and use dedicated
packaging materials and carry it carefully.

z Do not get your hand caught in the microscope main unit or cut with any edge of the system.

z Do not incline microscope main unit at more than 10 degree angle. Microscope main unit may turn over
and; it may lead to your injury or system breakage.

z In case a specimen containing toxic substance should be observed, observe the handling regulations for
toxic substance. In addition, after observation, make any region clean, such as stage or objective lens
that came in contact with the specimen. Since toxic substance may splash out if the specimen falls off
when the system is moved, remove the specimen from the system first, and then move the system.

I . Safety guide
I. 1-2 Page
Reminders to safety consideration / Precautions for use

1-1-2 Stage
z Stage must be carried by holding the handle.

z In case that the system is equipped with OLS-CS150AS, an emergency stop switch is provided to
secure safety of whole system.

z In case that the system is equipped with OLS-CS150AS and when stage is moving, do not touch stage.
Finger or hand may be entangled with stage or stage holder. Be careful as it is very dangerous.

Emergency stop switch

In an event that an unexpected accident occurs, the emergency stop switch forcibly shuts down the
power supply to stage controller in order to minimize damage to human body or equipment when it is
activated and terminates the software. The emergency stop switch is designed to stop only the auto
stage. As a result, the up/down movement of the revolving nosepiece does not stop at the moment the
switch is pressed.

Photo 1-1 Emergency stop switch

When emergency stop switch is activated and when it must be released, unlock the button (turn) and turn
the controller, stage controller and control PC OFF then, boot up the software again.
• Verify safety of the system adequately and then, exercise recovery operation.
• Always place the emergency stop switch within reach of your hand so that it can be pressed
whenever an unexpected event occurs.

I . Safety guide
Page I. 1-3
Reminders to safety consideration / Precautions for use

1-1-3 Revolving nosepiece / Objective lens

z When focus is aligned or profile is measured, the motorized revolving nosepiece moves up or down.
Do not put hand in vicinity of objective lens as your finger or hand may be entangled.

z Change of objective lens is executed electrically through computer control. Do not turn the revolving
nosepiece manually. If it is turned manually, it may cause a failure. When switching objective lens, do
not put your hand in vicinity of objective lens as your finger or hand may be entangled.

z Screw objective lens firmly into revolving nosepiece and fix it. If it is loosely fitted, the objective lens may
fall off or cause breakage.

1-1-4 Light source unit LG-PS2 / Light guide (Option for OLS3000)
For details, see instruction manual that comes with light source unit.

z Turn voltage changeover switch c located at the bottom of the unit to 100-120V side.

z The main switch must be turned to 0 (OFF) and the power cable must be pulled off from the consent
when halogen lamp is changed in order to avoid burn or electric shock. Change must be executed
after lamp change lid and lamp itself are cooled down substantially.

Applicable lamp Halogen lamp (w/mirror) JCR12V-100WB (USHIO)

z Do not hold tube with bare hand when changing halogen lamp.

z Set main unit on flat base and make it sure that vent opening at the bottom is not blocked. In case that
the surface is soft as if it allows to sink the system, the vent opening may be blocked and inside
temperature may get high and the lamp will automatically go off. (When temperature comes down, the
lamp will automatically be reset.)

I . Safety guide
I. 1-4 Page
Reminders to safety consideration / Precautions for use

z Leave a space for vent opening in peripheral area of this system.

(Back side: 10cm or more, Side: 5cm or more, Top: Open)

z Use power cord that is supplied by our company as accessory. Set the power cord in a route so as not to
touch with heating area such as lamp change lid.

z Do not turn lamp ON while lamp change lid is left open. Electric shock or burn may occur and the light
source unit is broken or light guide may get deteriorated.

z Connect ground wire for sure. Otherwise, electrical safety intended by our company cannot be secured.

z Do not stare the light that comes for light guide mount opening as it may hurt your eyes. Do not put your
finger in mount opening. It may cause burn.

z Behind vent opening, there is a cooling fan. If metal piece is put in, it will cause failure of fan or electric
shock. Never exercise such conduct.

z Do not carry this system or impose vibration to this system while lamp is turned ON. It will cause
deterioration of lamp or breakage of lamp and leads to failure of the system.

z The end of injection fiber of light guide is very hot right after the system is used. Be careful.

z In order to prevent of light guide fiber breaking (light volume would be decreased when fiber is broken
off), the bent radius of the light guide should be of 60mm or more.

z Light source unit should be set to the place where power cord (rear side of light source unit) and or
power consent can be accessed easily.

I . Safety guide
Page I. 1-5
Reminders to safety consideration / Precautions for use

1-1-5 Anti-vibration platform (Option)

z Do not put your finger between float cover and float section of anti-vibration platform. Your
finger may be entangled and injury may occur.

1-1-6 Power cord

z In case of emergency, remove power cord from consent.

z Power cords for personal computer and monitor should comply with IEC1010 as well as the safety
electrical code of your country. Regarding personal computer and monitor, read instruction manual of
each unit and use them in correct manner.

z Power cord of the controller should comply with IEC1010 as well as the safety electrical code of your
country.

z To secure electrical safety, connect power cord to the 3-core type consent with ground. In case that
the ground of consent is not connected, the electrical safety intended by our company is not secured.

z Do not bend, pull or twist power cord. Cord may be broken which may lead to burn or electric shock.

z Do not connect or disconnect power cord while power switch is turned ON.

z Do not carry the product by holding power cord.

I . Safety guide
I. 1-6 Page
Reminders to safety consideration / Precautions for use

1-1-7 Cable
z Do not connect or disconnect a cable while the system is energized. It may cause electric shock or
failure of the system.

z When a cable should be connected or disconnected, do not touch an inserting port of the connector.
If an inserting port is touched, the system may get static electricity of human body and; it may cause
failure of the system.

z The connector at rear side of controller to which no cable is connected is installed with a cap. Do not
remove this cap.
When it is used without the cap, the system may get static electricity of human body and; it may cause
failure of the system.

1-1-8 Fuse
z When replacing fuse, pull off power cord first and then, replace the fuse. (See IV Maintenance – 3
Maintenance parts.)

1-1-9 Absolute alcohol

z The absolute alcohol used to clean the optics is highly flammable. Take special care in handling against
fire, main switch ON/OFF, etc.
Room ventilate is recommended while you use absolute alcohol.

I . Safety guide
Page I. 1-7
Reminders to safety consideration / Symbol mark for safety

1-2 Symbol mark for safety

Marks as shown below are attached to this system.
Understand meaning of the each mark and handle the system safely.

Mark Meaning

Laser beam is being used. Pay utmost care when handling.

Be careful so as not to entangle your finger with stage or stage holder.

Surface is hot. Do not touch.

When touched, it is very dangerous and it may cause burn.

Read instruction manual before using the system.

When mistakenly handled, user may suffer injury or product may be
damaged.

Main switch is ON state.

Main switch is OFF state.

I . Safety guide
I. 1-8 Page
Warning indication / Warning label

2 Warning indication
2-1 Warning label

Warning is displayed at the place or portion of this system where care must be paid for use and or operation.
Observe instruction where it appears without fail.

2-1-1 Laser warning & Class indication

Indication:

Position indicated: Right side of laser microscope main unit.

2-1-2 High temperature warning to light source unit

Indication:

Position indicated: Top and front of light source unit

I . Safety Guide
Page I. 2-1
Warning indication / Warning label

2-1-3 Entanglement warning

Indication:

Position indicated: Revolving nosepiece – right side, auto stage - front cover section

In case that warning label is contaminated or peeled off, contact our sales office for
replacement.

I . Safety Guide
I. 2-2 Page
Warning indication / Protective bin label

2-2 Protective bin label

Indication:

Position indicated: Laser microscope main unit (left side)

Protective bin labels are attached to places other than specified in this manual. Those labels are provided for
OLYMPUS service personnel.

I . Safety Guide
Page I. 2-3
Precautions for use / About system move

3 Precautions for use

3-1 About system move
z Assembly and setup of this system should be executed by professional engineers. When customers move
this system by themselves, disassemble this system in respective unit and then, move. When
disassembling or assembling the system, use maintenance manual for reference. Care must be paid
adequately when disassembling or assembling the system as optics equipment may get out of order.
When carrying the system with trailer or truck, attach fixtures and transfer the system with dedicated
packing materials carefully. When accuracy verification of this system after move is required, contact our
sales office. Meanwhile, remind that we hold no responsibility to malfunction or damage of the system
occurred during transportation if the system were moved by customer themselves.

NOTE At setup time of this system, stopper bolts of parts and anti-vibration platform used for
transportation of main unit and stage will be detached. Keep these bolts with care as
these may be used for re-transportation.

3-2 Handling precautions

z This system is a precision instrument. Handle this system with care so as not to give any physical shock.

z Keep a space of 10cm or more at each side and backside of the light source unit and controller in order not
to block vent opening. Behind vent opening, there are cooling fans and other electrical components, and if
metal fragments were put in, it may cause failure or electric shock.

z Behind controller and computer, there are cooling fans. If blow opening of fan were blocked, it may cause
failure. Leave a space of 10cm or more for blow opening.

z Light source unit or computer, having fan installed, is susceptible to generate vibration. If these are set on
the same table where microscope is installed, the vibration may exert influence on performance of
microscope. Do not put them on the same table.

I . Safety guide
Page I. 3-1
Precautions for use / Handling precautions

z Operating environment should be of room temperature of 10∼30 °C and humidity of 30∼70%.

Measuring environment should be of room temperature of 17∼26 °C with temperature change of ±1 °C and
humidity of 40∼60%.
Storage environment should be of room temperature of -5∼40 °C and humidity of 10∼80%. (However, no
drew is allowed).
• For MPlapo100x/MPlapo100x408 users
These objective lenses are adjusted with a high degree of accuracy. When the temperature of the
room becomes out of Measuring environment, we recommend they should be detached from the
revolving nosepiece and kept separately under the circumstance whose room temperature is 17° to
26°C. If these objective lenses have been kept under the circumstance other than this condition, they
should be adapted to the temperature in use. Especially, if they have been kept in the environment
whose room temperature is less than 5°C or beyond 35°C for several days, it may need longer time for
adaptation.

Turn off the system power first before you attach or remove an objective lens.

z Voltage fluctuation should be V±10% of the rated voltage for proper operation guaranteed.

z Environment of this system is defined to use with Pollution degree 2 (per IEC60664) and Installation
category (Overvoltage category) II (per IEC60664).

z Do not use it in a high land with an altitude of more than 2000 meters.

NOTE This system is guaranteed with accuracy measured repeatedly on image center of our
standard specimen under the above environment. If the measurement were executed
under difference condition, the accuracy measured repeatedly may not fall to the range
that can be guaranteed.

I . Safety guide
I. 3-2 Page
Precautions for use / Recommendation for use

z To use the system for a long period of time, avoid the use of the system at the following environment.
• Place where humidity changes abruptly
In case that room of cool temperature is warmed up abruptly, water drop (dew) may adhere to the
optical equipment which may cause fatal damage.
• Locations which receive direct sunlight
• Outdoor
• Locations where flammable gas breaks out
• Locations where vibration and noise occur
• Unstable floor or platform
• Locations where dust or dirt comes out
• Other locations where corrosive gas and atmosphere which may exert influence to the system occurs

3-3 Recommendation for use

z This system can be used right after power of the system is turned ON. However, to get good performance
of the system, warm up the system for 60 minutes or more.

z In case that anti-vibration platform of hand pump type is used, check air pressure of anti-vibration platform
frequently. Adjust air pressure as needed. See instruction manual that comes with anti-vibration
platform and learn how to adjust air pressure.

z It is recommended that user implements periodical check service (accuracy check, calibration and function
check, etc.) offered by our company, once or twice a year, to keep the system in good order. (Service is
available on contract basis).

I . Safety guide
Page I. 3-3
Precautions for use / About care and storage

3-4 About care and storage

z This system is a precision instrument. Handle this system with care so as not to give any physical shock.

z Never leave stains or fingerprints on the lenses and filters. Should a glass component be stained, simply
blow dirty away using a commercially available blower and wipe gently using a piece of cleaning paper (or
clean gauze).
If a lens is stained with fingerprints or oil smudges, wipe it gauze slightly moistened with commercially
available absolute alcohol.

Since the absolute alcohol is highly flammable, it must be handled carefully.

Be sure to keep it away from open flames or potential sources of electrical sparks - for
example, electrical equipment that is being switched on or off.
Also remember to always use it only in a well-ventilated room.

z When cleaning each section of the system, dip soft cloth in diluted mild detergent and wipe out. Do not
use organic detergent as it would deteriorate paint and or plastic parts.

3-5 Computer and software

Data of computer may be broken accidentally. Data acquired by customer should be

backed up frequently.

z We hold no responsibility to all losses of computer data associated with trouble occurred with use of this
system at all and do not warrant the indemnification.

z Microsoft Windows XP has been installed for use with this system.
Make backup system by yourself and keep it with care. (We do not support backup of the system).
Regarding computer and Microsoft Windows XP, instruction manuals that come with the system.

z Computer is dedicated for this system. In case that hardware is added by customer, no guarantee is given
to the system operation.

z When customer installs other software to computer, no guarantee is given to the system operation.

I . Safety guide
I. 3-4 Page
Precautions for use / Computer and software

z When free space of hard disk becomes low, data processing may get slow drastically or error may occur.
Delete data files that are not necessary frequently. Regarding method of delete, see manual of Microsoft
Windows XP.
Free space of hard disk should be at least of 200Mbyte.

z When terminating software, click [Exit] command from [File] menu for sure.
In case that the software is closed with use of <End Task> button in [Task Manager] of Windows XP, the
state of Window previously closed is not saved at next start up time. Be careful.

Fig. 3-1 [File] menu

z When screen saver starts running during image acquisition, the image acquisition would be paused. Set
screen saver disabled (None). (It is set to None at shipping time).

z When the system operation is not stable, save all image data being opened and then, close the software
once. After that, power on the controller again and restart the software. If the problem persists, restart the
control computer.

z When the software is used for a long period of time, the following message may appear. In this case, follow
the message and restart the application.

z In case forced termination of software is done, power on controller as well as control computer again and
restart the software.

z The computer is dedicated for this system. If a self-installed computer is connected with LAN by a customer,
we cannot be responsible for the system operation. In addition, no support for LAN connection is provided.

I . Safety guide
Page I. 3-5
Precautions for use / Caution

3-6 Caution

If this microscope is used under other different method than those described in this instruction manual, the
system may be damaged and no safety of the system is guaranteed. Use this system in accordance with this
instruction manual only.

I . Safety guide
I. 3-6 Page
II. System outline/Specifications

Note to this chapter

This chapter describes system outline and specifications.
Please read this chapter to understand the system and use
the system correctly.
CONTENTS

1 System outline 1-1

1-1 Principle............................................................................................1-1
1-2 Features............................................................................................1-2
1-3 System configuration ......................................................................1-3
1-3-1 System units and their functions ................................................................... 1-3
1-3-2 Block diagram................................................................................................ 1-4

2 Specifications 2-1

2-1 Specifications of each unit .............................................................2-1

2-2 Power consumption ........................................................................2-4
System outline / Principle

1 System outline
This system is a scanning type confocal laser microscope with high resolution, high contrast and drastically
enhanced resolution in light axis direction with use of confocal optics. It acquires 2D images and 3D images
(extended image and height image) and improves quality of image acquired. It also measures line width and
height difference profile and provides various display modes.

This chapter describes principle of the system, features and software configuration.

1-1 Principle
A scanning type laser microscope aims laser beam at a very small spot with objective
lens and scans over the specimen in X-Y directions.
It then captures a light from specimen with detector and outputs the image of specimen
on monitor.
In confocal optics, pinhole is placed at a
position that is optically conjugate with
focusing position (confocal plane) to Light detector

repel light that comes from place other

than focusing position. As the result, the Pinhole

part where light was repelled is truly

darkened in the image and; it is possible
to slice optically the specimen of
shouldered shape.
Contrary to it, in ordinary microscope, the
light that comes from place other than
focusing position is overlapped with
image forming light at focusing position
Laser
and whole image turns blurry. Objective lens

Specimen

II . System outline/Specifications
Page II . 1 - 1
System outline / Features

1-2 Features
1. Resonant galvano mirror scanner is used to draw an image in wide area precisely
in high speed. Field of view is very wide and the desired observation point can
easily be located.

2. Optical zooming of 1X to 6X is possible if the scanning angle of galvano mirror is

changed. Even if magnification is raised, the image would not be deteriorated as
the image is optically enlarged.

3. High speed, high precision auto focus unit of reflective type is built-in so that line
width measurement to be repeated can be made precisely and speedily.

4. In non-confocal observation, it acquires an image of deep focal point without

confocal effect. In confocal observation, it acquires an image of shallow focal
point. Non-confocal and confocal observation can be switched over easily.

5. Image memory of 1024×1024×12-bit is used and scale of image is enhanced to

acquire a sharp image.

6. Various kinds of microscope observations such as bright field of view, dark filed of
view and differential interference are possible. (It depends upon the system
configuration.)

II . System outline/Specifications
II . 1 - 2 Page
System outline / System configuration

1-3 System configuration

1-3-1 System units and their functions

Monitor
Laser microscope It displays laser scanning images
and windows to control the
Laser scanning optics
system.
and TV observation
optics are mounted.
Control PC
Computer for system
control, image saving
and measurement, etc.
Microscope Frame
Microscope and XY
stage, etc. are
installed.

XY stage
It aligns position of specimen. Controller
It controls the
system.
Photo 1-1 LEXT-OLS Series Standard type

z Other optional units

• Motorized stage (including motorized stage controller)
• Anti-vibration platform
• Light source unit (option for OLS3000)

II . System outline/Specifications
Page II . 1 - 3
System outline / System configuration

1-3-2 Block diagram

z 100V-line class OLS3100 system

II . System outline/Specifications
II . 1 - 4 Page
System outline / System configuration

z 100V-line class OLS3000 system

II . System outline/Specifications
Page II . 1 - 5
System outline / System configuration

z 100V-line class Motorized stage (Option)

II . System outline/Specifications
II . 1 - 6 Page
System outline / System configuration

z 200V-line class OLS3100 system

II . System outline/Specifications
Page II . 1 - 7
System outline / System configuration

z 200V-line class OLS3000 system

II . System outline/Specifications
II . 1 - 8 Page
System outline / System configuration

z 200V-line class Motorized stage (Option)

II . System outline/Specifications
Page II . 1 - 9
Specifications / Specifications of each unit

2 Specifications
2-1 Specifications of each unit
OLS3100 system
Unit Specifications
Laser microscope main unit Light source Semiconductor laser(λ=408±5nm*)
OLS31-SU *System dependent (individual difference)
Laser microscope frame Light source for TV White LED
OLS31-F Scan method XY integrated scanner
Detector Circle pinhole + Photo-multiplier
Z-drive Revolving nosepiece up and down motion (for
measurement)
Moving resolution 0.01µm
Scale built-in (Resolution 5nm)
Stroke 10mm
Coarse manual Z stage (for alignment)
With fine handle
Stroke 70mm (and head position adjustable
with further +30mm)
AF Laser reflection method
Dimensions(mm) 464(W)x 559(D)x 619.5(H)
*without anti-vibration platform
Mass OLS30-SU: 8.7∼9.3kg (depending upon
optional units. Revolving nosepiece and
objective lens are not included.)
OLS31-F: 20.6kg
XY stage Manual stage Stroke 100mm x 100mm
OLS-CS100 Mass 26.5kg
Motorized stage Rating AC100/115/120V 3A/1.3A
OLS-CS150AS 50/60Hz
MM6-ASPS100 Stroke 150mm x 100mm
Mass Main Stage:39kg CB:14.4kg

Revolving nosepiece 6-hole motorized For bright objective lenses

revolving nosepiece
U-D6REMC
Controller Rating AC100-120V/AC220-240V 2A/0.9A 50/60Hz
OLS30-CB Mass 8.6kg
Objective lens MPLAPO100X408 NA=0.95, WD=0.35mm
MPLAPO50X NA=0.95, WD=0.3mm
MPLFLN20X NA=0.45, WD=3.1mm
MPLFLN10X NA=0.30, WD=11.0mm
MPLFLN5X NA=0.15, WD=20.0mm

II . System outline/Specifications
Page II . 2 - 1
Specifications / Specifications of each unit

OLS3000 system
Unit Specifications
Laser microscope main unit Light source Semiconductor laser(λ=408±5nm*)
OLS30-SU *System dependent (individual difference)
Laser microscope frame Scan method XY integrated scanner
OLS30-F Detector Circle pinhole + Photo-multiplier
Z-drive Revolving nosepiece up and down motion (for
measurement)
Moving resolution 0.01µm
Scale built-in (Resolution 5nm)
Stroke 10mm
Coarse manual Z stage (for alignment)
With fine handle
Stroke 70mm (and head position adjustable
with further +30mm)
AF Laser reflection method
Dimensions(mm) 464(W)x 559(D)x 614.5(H)
*without anti-vibration platform
Mass OLS30-SU: 8.7∼9.3kg (depending upon
optional units. Revolving nosepiece and
objective lens are not included.)
OLS30-F: 20.6kg
XY stage Manual stage Stroke 100mm x 100mm
OLS-CS100 Mass 26.5kg
Motorized stage Rating AC100/115/120V 3A/1.3A
OLS-CS150AS 50/60Hz
MM6-ASPS100 Stroke 150mm x 100mm
Mass Main Stage:39kg CB:14.4kg

Revolving nosepiece 5-hole motorized For bright/dark field objective lenses

revolving nosepiece
U-D5BDREMC
6-hole motorized For bright objective lenses
revolving nosepiece
U-D6REMC
Controller Rating AC100-120V/AC220-240V 2A/0.9A 50/60Hz
OLS30-CB Mass 8.6kg

II . System outline/Specifications
II . 2 - 2 Page
Specifications / Specifications of each unit

Unit Specifications
Objective Universal MPLAPO100X NA=0.95, WD=0.35mm
lens set
MPLFL50XBD NA=0.8, WD=1.0mm
UMPLFL20XBD NA=0.46, WD=3.0mm
UMPLFL10XBD NA=0.30, WD=6.5mm
UMPLFL5XBD NA=0.15, WD=12.0mm
Laser set MPLAPO100X NA=0.95, WD=0.35mm
MPLAPO50X NA=0.95, WD=0.3mm
UMPLFL20X NA=0.46, WD=3.1mm
UMPLFL10X NA=0.30, WD=10.1mm
UMPLFL5X NA=0.15, WD=20.0mm
Light source unit Rating AC100-120V/AC200-240V 3.0A/1.8A 50/60Hz
LG-PS2
Lamp Halogen lamp (with dichroic mirror)
Lamp type JCR12V-100WB (made by USHIO)
Lamp life 1000 hrs on average
Light control Voltage control system
Color temp. 3100K (at max. light intensity)
Cooling Forced air cooling
Outer 76(W)×235(D)×120(H)mm
dimension
Mass Approx. 1.8kg

II . System outline/Specifications
Page II . 2 - 3
Specifications / Power consumption

2-2 Power consumption

This system requires one consent type line of 15A capacity (in case of 100V-line class).
Verify capacity of consent that is used before connecting the system.

z In case of 100V-line class

Light Guide
Lighting Control
Controller Personal Monitor
System (Option
for OLS3000) Computer

2A 3A 4A 0.8A
AC100/115/120V
50/60Hz
15Amax
Power Terminal (15Amax) Power Terminal (15Amax)

z In case of 200V-line class

Light Guide
Lighting Control
Controller Personal Monitor
System (Option
for OLS3000) Computer

AC220/230/240V
1A 1.8A * * 50/60Hz
10Amax

* Power consumption may be different, depending upon type of personal computer that is used.

II . System outline/Specifications
II . 2 - 4 Page
III. Getting started
with the OLS

Note to this chapter

This chapter describes basis operation method of this
system.
Please read this chapter carefully and use the system
correctly.
CONTENTS

1 Names of major operating sections 1-1

1-1 Names assigned to each section of Laser Microscope...............1-1

1-2 Names assigned to each section of software...............................1-2
1-3 Menu configuration of software .....................................................1-3

2 Summary of observation procedures 2-1

3 Observation procedures 3-1

3-1 Start...................................................................................................3-1
3-1-1 Power up ....................................................................................................... 3-1
3-1-2 Software start ................................................................................................ 3-3
3-2 Set specimen....................................................................................3-6
3-2-1 Operating method of XY stage ...................................................................... 3-6
3-2-2 Operating Method of Auto Stage (Option) ..................................................... 3-6
3-2-3 Operating method of focusing control ........................................................... 3-7
3-3 Observation of microscope image.................................................3-9
3-3-1 Displaying 2D View Image ............................................................................ 3-9
3-3-2 TV Bright field/Dark field observation .......................................................... 3-11
3-3-3 Induced-light Nomarski differential interference observation ...................... 3-12
3-3-4 Laser Nomarski differential interference observation .................................. 3-14
3-4 Observation condition setting......................................................3-15
3-4-1 Changeover of objective lens ...................................................................... 3-15
3-4-2 Zoom ........................................................................................................... 3-15
3-4-3 Successful observation method .................................................................. 3-15
3-5 Image acquisition ..........................................................................3-16
3-5-1 2D image acquisition (Confocal / Non-confocal observation / TV) .............. 3-16
3-5-2 3D image acquisition ................................................................................... 3-16
3-5-3 Save ............................................................................................................ 3-18
3-6 Analysis ..........................................................................................3-19
3-6-1 Analysis procedures .................................................................................... 3-20
3-6-2 Save analysis data ...................................................................................... 3-22
CONTENTS

3-7 Filter process ................................................................................. 3-23

3-7-1 Filter process procedures ............................................................................3-24
3-8 Display ............................................................................................ 3-27
3-8-1 Method to change Display ...........................................................................3-28
3-8-2 Laying and display a plural number of images ............................................3-30
3-9 Shutdown ....................................................................................... 3-31
Names of major operating sections / Names of major operating sections

1 Names of major operating sections

1-1 Names assigned to each section of Laser Microscope

Microscope Main Unit Fixing Handle

Filter Slider Slot

DIC Slider Slot

Revolving Nosepiece

Focusing Adjustment
Handle
Y Stage Handle

Brightfield/Darkfield
Changeover Knob

XY Stage

Microscope Frame
X Stage Handle

III . Getting started with the OLS

Page III . 1 - 1
Names of major operating sections / Names assigned to each section of software

1-2 Names assigned to each section of software

Menu Tool bar

When clicked, menu opens and list Buttons are provided here to
of commands appears. When execute function or process.
command is clicked, process
displayed would be executed.

<Control Panel
Change> buttons
Buttons are used to
change function.
[Image Display [Window] tool bar
Changeover] tool bar Window to display Intensity
These are tool bars for Profile or Height Profile in graph
Control panel display changeover in appears. When clicked, the
When any of image display section. button looks as if it is pressed
<Control Panel “Live” and “Display and each window of which
Change> button is Setting” are provided. button was pressed would
clicked, operation appear. When clicked again,
setting necessary for button would return to original
the function is set. state and the window would be
Contents differ upon Image Display Section closed.
function selected. It is the portion where
microscope image is
displayed.

Image List Section

List of images on
memory appears here.
With double-click or
drag-and-drop action,
image can be
displayed in image
display section.
Fig. 1-1 Main window and major functions

III . Getting started with the OLS

III . 1 - 2 Page
Names of major operating sections / Menu configuration of software

1-3 Menu configuration of software

z “File” menu: This is a menu related to “in and out” of file and print out.

Menu Tool bar Explanation

Open It calls out image file that is saved.

Save It saves image or analysis results and so on.

Selection is made from the following sub menus.
• Image
• Profile
• Profile Image
• Analysis data
• Analysis Image
When using button, click ▼ so that sub menu will appear.
Print Image or Measurement data, etc., can be printed out.
Selection is made from the following sub menus.
• Image
• Analysis data
• Screen
When using button, click ▼ so that sub menu will appear.
Report output It outputs measurement results to report.

Exit It quits OLS.

III . Getting started with the OLS

Page III . 1 - 3
Names of major operating sections / Menu configuration of software

z “Image” menu: This is a menu related to start live image acquisition and set method of acquisition.

Menu Tool bar Explanation

Color Live TV live image is displayed (option).

Non-confocal Live Non-confocal image is displayed.

Confocal Live Confocal image is displayed.

Acquisition Acquisition parameters are opened or saved.

Parameters Selection is made from the following sub menus.
• Load
• Save
LSM Setting Detailed items related to LSM operation are set.
TV Setting Detailed items related to TV operation are set.
Live Image Performing observation with laser microscope, a
Simplified distance in either horizontal or vertical direction is
Measurement measured.

III . Getting started with the OLS

III . 1 - 4 Page
Names of major operating sections / Menu configuration of software

z “Display” menu: This is a menu to change image display method, set fixed zoom display and display
condition.

Menu Tool bar Explanation

2D display It displays a grayscale image.
When the button ▼ is clicked, a submenu will appear and
any one of the following image types can be chosen.
• Intensity
• Height
• Color
3D display It displays a 3D image.
When the button ▼is clicked, a submenu will appear and
any one of the following display types can be chosen.
● Surface ● Texture
● Real Color ● Wire
Contour It displays contour map image.
When using button, click ▼ so that sub menu appears.
Zoom It changes zoom power.
Selection is made from the following sub menus.
• 1-fold
• 2-fold
When using button, click ▼ so that sub menu appears
and, in addition, the following magnification can be
selected.
• 1/3-fold
• 1/2-fold
Set LUT It specifies display color.

Display Color to display image information and scale can be

Information changed.
Scale Setting It can change display scale of image.

Auto-scaling Select whether auto-scaling is applied after image

after processing processing.
Auto-scaling is applied when this item is checked.

III . Getting started with the OLS

Page III . 1 - 5
Names of major operating sections / Menu configuration of software

z “Filter” menu: This is a menu to change display option in control panel.

Menu Tool bar Explanation

Spike Removal It eliminates isolated point in peak state.

Smoothing It smoothes data with average processing.

Profile Shape It compensates profile of slice (cross-section).

Correction
Surface/Tilt It compensates curved surface/tilt.
Correction
Height Noise It eliminates height noise that occurred due to
Removal saturated intensity or less intensity.
Edge It enhances edge.
Enhancement
Contrast It enhances contrast.
Enhancement
FFT Frequency filter is applied.

Digital Zoom Performs digital zooming.

Image Rotation It rotates an image.

III . Getting started with the OLS

III . 1 - 6 Page
Names of major operating sections / Menu configuration of software

z “Analysis” menu: This is a menu to change display option of control panel and execute all delete
operation of measurement results and register calibration values for the measurement.

Menu Tool bar Explanation

Distance/Area It measures distance or area.
Measurement
Line Width It measures line width or pitch.
Measurement
Geometry Analysis It measures geometrical characteristics.

Particle Analysis It extracts particle and analyzes characteristics.

Step Measurement It measures step/profile.

Volume It measure volume.

Measurement
Roughness Analysis It analyzes roughness.

Edge Measurement It measures line width inside region separated.

(Optional)
Step It measures step refractive.
Refractive(Optional)
Delete All Data It deletes all data.
Define Calibration It registers user calibration factors.

III . Getting started with the OLS

Page III . 1 - 7
Names of major operating sections / Menu configuration of software

z “Tools” menu: This is a menu in which items that can be customized for use can be programmed.

Menu Tool bar Explanation

Recipe It registers batch process for process/measurement.

Define Flatness It sets offset of height data for 3D image.

Correction
Exclude NG from It defines statistical treatment within the range set
Statistics with threshold judge.
Image Information It indicates image information.
Adjust Parfocality It performs parfocality adjustment for objective lens.

z “Options” menu: This is a menu that provides optional function other than measurement or analysis.

Menu Tool bar Explanation

Auto Stage It sets items related to auto stage control.
Control (Option)
Stitching It sets items related to image stitching.
(Option)

z “Window” menu: This is a menu to set the state of ON/OFF, etc., of each window.

Menu Tool bar Explanation

X Profile It changes display or non-display of X Profile.

Y Profile It changes display or non-display of Y Profile.

Histogram It changes display or non-display of Histogram.

Fit Profile It fits profile position to image.

Layout Window It returns the display position of window to default
state.
View Sync It sets whether live images displayed in 2 channels
individually should be scrolled together or not.
Scroll bars are linked together when this item is
checked.

III . Getting started with the OLS

III . 1 - 8 Page
Names of major operating sections / Menu configuration of software

z “Help” menu: This is a menu to start PDF manual, link to Web page and display software version
information.

Menu Tool bar Explanation

Users manual It indicates PDF manual.

Operation It displays the basic operation of this software in

Navigation animation.
Startup Operation It sets whether or not the operation navigation tool
Navigation should be started at microscope initialization.
Operation navigation tool starts when this item is
checked.
Web It displays OLYMPUS homepage in browser’s
window.
About LEXT- It displays LEXT-OLS software version information.
OLS3000

III . Getting started with the OLS

Page III . 1 - 9
Summary of observation procedures

2 Summ ary of observation procedures

Start system
• Turn system power ON
(3-1-1)
• Start LEXT-OLS software
(3-1-2)
Acquire image
(3-5)
Acquire image in either method shown
below
• 2D data acquisition
• 3D data acquisition
Set specimen
(3-2)

Save image
(3-5-3)
Observe image
(3-3)
Observe image in any one of methods
shown below
• Confocal observation (When required only)
• Non-confocal observation Execute filter process
• TV contrast field observation (3-7)
• Nomarski differential interference
observation

(When required only)

Change display method
(3-8)
Set observation condition
• Changeover objective lens
(3-4-1)
• Adjust brightness
(3-3-1) Analyze image
• Adjust focus (3-6)
(3-3-1)
• Adjust zoom
(3-4-2)
Save analysis result
(3-6-2)

Shutdown system
(3-9)

Scanning would be paused if other operations like image

NOTE
measurement, etc., were executed. In such a case, click Live Image
button again so that laser image drawing will start again.

III . Getting started with the OLS

Page III . 2 - 1
Observation procedures / Start

3 Observation procedures
This chapter describes procedures for power up, method to acquire image of 1024 x 768 size in 3D scan mode,
method to save acquired image and power shutdown.

3-1 Start

3-1-1 Power up

TIP Only to call data from hard disk or some, it is not necessary to
turn on power of controller.

1. Turn controller switch c to ON position.

It is recommended that the system is warmed up for 60

NOTE
minutes or more to execute measurement in good
accuracy.

2. If the system equipped with the auto stage (option) is used, turn on power
of stage controller. When it is up and running, an up-time tone “Peep” is
audible from stage controller.

Do not turn off power of stage controller while system

NOTE
software is running. In an event that the power is
erroneously turned off, quit the software once and then,
turn off power of controller. Turn on power of controller
and stage controller again and start up the software again.
If stage controller were powered up again without quitting
software once, the stage would not work correctly.
Exercise this procedure for sure.

3. In case TV observation is done and, if LG-PS2 Light guide is used; turn on

power of light source unit.

III . Getting started with the OLS

Page III . 3 - 1
Observation procedures / Start

4. Turn on power of control PC.

To reboot the controller PC, turn the stage controller (optional) OFF,
NOTE
then ON again. If power turns on without leaving a certain interval after
turns it off, beep alarm will occur continuously.

TIP The system may not work correctly if power up sequence were not correct.
If power up were done mistakenly, turn off all powers and power up again in
correct procedures.

III . Getting started with the OLS

III . 3 - 2 Page
Observation procedures / Start

3-1-2 Software start

1. Select user’s name and start up Windows. Log in user’s name with “LEXT”.
Remind that password is not programmed when the system is purchased.

2. After Windows was started up, double-click icon of LEXT-OLS software located on
desktop and start it up.

3. Dialog box as shown below would appear. Hang on for a while.

4. Message box “Initializing” as shown below would appear. Hang on for a while.

While this message box is displayed, do not exercise any other

NOTE
operation at all. Besides, in case the system equipped with auto
stage (option) is used, do not touch the joy stick. Hang on until this
message box disappears.

III . Getting started with the OLS

Page III . 3 - 3
Observation procedures / Start

TIP When power of controller is not turned on, message as shown below will
appear. Turn on power of controller and, after one minute, click <Retry>
button. However, in case display or analysis for the image already saved
is exercised, it is not necessary to turn on power of the controller. In this
case, click on <Offline> button and, as [Open] dialog box will appear,
open the file that should be analyzed.

5. In case the system is equipped with auto stage (option), the following message is
displayed. Confirm not to collide with each other the objective and specimen, etc. If
they do or do nearly, rotate the Fixing Handle to unlock and rotate Coarse Handle
to raise the microscope. Then click <OK> button on displayed message.

Do not touch the stage during moving.

Otherwise, your finger or hand may be caught by the stage or stage
holder.

III . Getting started with the OLS

III . 3 - 4 Page
Observation procedures / Start

TIP When the system has been shut down due to abnormal operation and
then restarted, it may freeze by displaying message “Activation is being
checked…”, though this happens very rarely.
In this case, press Ctrl + Alt + Delete key to display Task Manager of
Windows and exit LEXT-OLS3100, one time, and start LEXT-OLS
software once again.

6. Software starts and it appears as shown below.

z In case software is started for image display or analysis only

In case display or analysis and the like are exercised without acquiring an image, the
software can be started with the following methods.
• On Windows Explorer, double-click on a file of OLS image.

III . Getting started with the OLS

Page III . 3 - 5
Observation procedures / Set specimen

3-2 Set specimen

3-2-1 Operating method of XY stage

1. XY stage move
X-axis should be moved with right side handle. Handle knob c is
used for coarse move and outer handle d is used for fine move. Y-
axis should be moved with left side handle. Handle knob e is used
for coarse move and outer handle f is used for fine move.

2. Fixing sample stand, etc.

Sample stand or like should be installed with use of tap g.

NOTE Load capacity on stage is of 10 kg.

3-2-2 Operating Method of Auto Stage (Option)

This operation can only be performed on the system equipped with auto stage
(option) only.

Click on <Exch.> button on [Stage Control] window. The stage will move to sample
change position.
When <Origin> button is clicked, it will return to home position registered.

<Exch.> button

<Origin> button

III . Getting started with the OLS

III . 3 - 6 Page
Observation procedures / Set specimen

3-2-3 Operating method of focusing control

When aligning focus, watch objective lens carefully and

do not bump it to a specimen.

1. Focusing
When coarse handle c and fine handle d are turned in arrow
direction, the lens barrel section goes down (objection lens is
approaching to specimen).

TIP In case that specimen of 70 mm or more in height is

observed, see Chapter IV – Maintenance.

2. Adjusting coarse handle tuning heaviness

Heaviness of focusing coarse handle is adjustable. Turn adjusting
ring e in arrow direction so that it would get light and, in reverse
direction, it would get heavy.

NOTE When lens barrel section drops by itself or image gets

out of focus so rapidly even if focus were adjusted with
fine handle, the handle is excessively loosened. Turn
adjusting ring e in reverse direction indicated with arrow
and make turning heavier.

TIP To tighten adjusting ring e heavier, insert hex. wrench into

any of holes (4 holes) of adjusting ring and tighten.

III . Getting started with the OLS

Page III . 3 - 7
Observation procedures / Set specimen

3. Fixing focusing control

Turn fixing handle f in direction as shown in figure so that focusing
control would be fixed.

NOTE It must be fixed to execute measurement precisely.

Focusing may go wrong when focusing control is fixed. In such
a case, do focus adjustment through control PC again.

If coarse handle or fine handle is turned while focusing control is

fixed, it would cause failure. When turning handle, coarse or fine,
the focusing control must be loosened.

III . Getting started with the OLS

III . 3 - 8 Page
Observation procedures / Observation of microscope image

3-3 Observation of microscope image

3-3-1 Displaying 2D View Image

1 Displaying Live Image

Click button of live image desired while <Color (TV Observation)> (option), <Confocal>

<Color (TV Observation)> or <Non-confocal>.

button (Option)

TIP TV observation is possible with an image size of 1024 x 768 or less.

<Non-confocal> button However, when an image that is smaller than 1024 x 512 is observed and
acquired, the acquired image is saved in a size of 1024 x 768.
<Confocal> button

2 Adjusting Brightness
1. Adjust brightness suited to each observation with use of [Brightness] slider.

2. In case of TV observation and, if LG-PS2 light guide is used for light source unit,
its brightness must also be adjusted together, using the light intensity control of
the light source unit. (When a LED is used for light source unit, it should be
adjusted, using the slider only inside [Brightness].

Light intensity control

For further details, read instruction manual that comes with light source unit.

III . Getting started with the OLS

Page III . 3 - 9
Observation procedures / Observation of microscope image

3 Adjusting Focus
1. Viewing image display section, adjust focus roughly with use of Z coarse
handle c and Z fine handle d.

2. When necessary, fixing handle e for focusing control should be turned in

direction as shown in figure and locked.

3. Viewing image display section, adjust focus with use of <Z Pos. Move>
buttons.

Do not bump objective lens to specimen. Be careful.

Do not move Z coarse or fine handle while fixing handle is

locked. It would cause failure.

TIP <Z Pos. Move> buttons are provided for 3 steps, for both up and down.
<Z Pos. Move> buttons
Move stroke of each button would appear in µm unit when cursor is
placed over each button. Move stroke of each button is different,
depending upon objective lens used.

TIP It is also possible to move Z position by turning mouse wheel button.

Place mouse pointer over <Z Pos. Move> button or place the mouse
pointer over an image and then, click on mouse right button. Since a
pop up menu appears, select any one of [Small Z], [Middle Z] or [Long
Z] and check the box selected.
• Forward turn of mouse wheel button ... Ascending
• Backward turn of mouse wheel button ... Descending

III . Getting started with the OLS

III . 3 - 1 0 Page
Observation procedures / Observation of microscope image

3-3-2 TV Bright field/Dark field observation

1. Changeover of TV bright field and dark field
Set changeover knob c for bright or dark field suited to observation
method desired. (Dark filed observation can only be used when the
objective lens for dark filed is combined.)

NOTE Changeover knob should be slid firmly to stopper

position.
Laser does not light for safety reason at dark field
position.

2. How to use ND filter (OLS3000 only can use it.)

Remove cap from filter insert opening d and insert ND filter slider that
is applicable to observation into light path. When slider enters, first
click would hit to empty hole and, with second click, the filter would
enter light path.

NOTE Dirt or dust attached to filter may appear in filed of view

during observation. Clean the filter before using.

NOTE Do not insert ND filter slider into polarizer insert

opening and analyzer insert opening.

3. Kinds of ND filters
Filter used Purpose
U-25ND25 Brightness is adjusted.
(Light volume adjusting filter) (Transmission factor 25%)
U-25ND6 Brightness is adjusted.
(Light volume adjusting filter) (Transmission factor 6%)

III . Getting started with the OLS

Page III . 3 - 1 1
Observation procedures / Observation of microscope image

3-3-3 Induced-light Nomarski differential interference observation

1 Setting analyzer/polarizer

NOTE At this time, do not insert differential interference

slider into light path.

Set analyzer at empty hole position or pull it out

when laser image is observed. Analyzer may be
burnt with laser.

1-1. Using objection lens of power 10x or 20x, adjust focus

roughly.
1-2. To set analyzer U-AN360-3, remove cap and insert analyzer
c into insert opening.
1-3. Insert polarizer U-PO3 d into light path firmly, facing display
side toward front side.
1-4. Turn analyzer turning dial e and make field of view in
darkest state.

When index of dial e comes outside, it is Cross

TIP
Nicol position, more or less. Turn dial in vicinity of
the said position and search the position where
field of view gets darkest.
How to use link plate
If analyzer U-AN360-3 c and polarizer d are attached
together with fixing knob g, using link plate f that comes
as accessory, these sliders can go in or out of the light
path together at one time.

III . Getting started with the OLS

III . 3 - 1 2 Page
Observation procedures / Observation of microscope image

2. Setting of the Differential Interference Slider

2-1. Loosen knob h located in front of DIC revolving nosepiece
and remove dummy and insert differential interference slider
i, facing display side up and then, tighten knob.

2-2. When objective lens of UMPlanFI/MPlanFlN series is used,

switch lever j should be pushed in and; in case that
LMPlanFI series is used, the lever should be pulled out.

3. Observation method
3-1. Set a specimen on stage and focus on it.
U-DICR

3-2. Turn prism moving knob k of differential interference slider

i as described below and adjust background contrast.
3-3. When prism moving knob k of differential interference slider
i is turned, interference color of background would change
consecutively from gray sensitive color through red
sensitive color (-100∼600nm). Find out the optimum
interference color of contrast suited to the specimen under
observation.

4. Changing to bright field observation

4-1. Loosen knob h located in front of DIC revolving nosepiece
and pull out differential slider i gently and; when click
enters, stop the slider and tight knob h to fix the slider.
4-2. Slide analyzer (U-AN360-3) and polarizer and displace
them from light path.

III . Getting started with the OLS

Page III . 3 - 1 3
Observation procedures / Observation of microscope image

3-3-4 Laser Nomarski differential interference observation

1. Setting of the Differential Interference Slider
1-1. Loosen knob c located in front of DIC revolving
nosepiece and remove cap and insert differential
interference slider d, facing display side up and then,
tighten knob.
1-2. When objection lens of UMPlanFI series is used,
switch lever e should be pushed in and; in case that
LMPlanFI series is used, the lever should be pulled
out.

Analyzer must be set at empty hole position or it

must be pulled out. Analyzer may be burnt with
laser.

2. Observation method
2-1. Set a specimen on table plate and focus on it.
U-DICR

2-2. Turn prism moving knob f of differential interference

slider as described below and adjust contrast.
2-3. When prism moving knob f is turned, contrast of
image would change. Find out image of good
contrast that is suitable for specimen.

If a sample of high reflecting power is observed,

laser may go off due to malfunction of laser
safety system. When it occurs, a warning
message saying "Laser circuit was shut down to
protect the system from excessive beam" will
appear. Reduce the laser output and then, press
<Retry> button in the message box. (See VI.
Application 1-4-3 Detail adjustment of brightness
(Laser) )

III . Getting started with the OLS

III . 3 - 1 4 Page
Observation procedures / Observation condition setting

3-4 Observation condition setting

3-4-1 Changeover of objective lens

Change objective lens so as to get magnification desired.

3-4-2 Zoom
Using <Zoom> slider, zoom-in or out.

TIP Zoom function cannot be used for TV observation.

3-4-3 Successful observation method

TIP In case that focus is hard to align in confocal observation, use non-confocal
or TV observation method that is easier to focus and adjust focus
beforehand and then, switch to confocal observation and focus adjustment
can be done smoothly.

TIP When observation is done with use of high power objective lens, adjust
focus with use of objective lens of low power that is easier to focus and
then, change it to high power objection lens and focus adjustment can be
done smoothly.

TIP When an image of the specimen that should be observed does not appear
due to objective lens change or zoom function, adjust stage position with
use of XY coarse and fine handles.

TIP As the result of objective lens changeover or change of observation

method, focus or brightness may change. In such a case, repeat
procedures described in 3-3-1 2 Adjusting Brightness and 3 Adjusting
Focus and adjust brightness and focus.

III . Getting started with the OLS

Page III . 3 - 1 5
Observation procedures / Image acquisition

3-5 Image acquisition

3-5-1 2D image acquisition (Confocal / Non-confocal observation / TV)

1. Click <2D> button so that the panel to acquire 2D data will appear.

2. Click <2D Acquire> button so that an image will be acquired. Image acquired
appears in image display section and recorded on memory. Image files on
memory are displayed in Acquisition Image List the time acquired and extension
(.ols) are attached to the image name.

Image List

3-5-2 3D image acquisition

This section describes the acquisition method by setting upper and lower limit of
acquisition range in "Auto" mode.
In "Auto" mode, the upper limit is automatically set by setting the lower limit only of a
specimen. By this, the image can be acquired without worrying about the upper limit of
a specimen.
Regarding "Manual" mode where the upper and lower limit are set and "Range" mode
where the height of a specimen is set, see "Chapter VI. Application, 1-2-2 Acquisition of
3D image (Extended image) 1 Setting acquisition range".

1. Click <3D> button and panel to acquire 3D data would open.

<3D> button
2. Select “Fine” with <3D Acquire Change> button. As this button changes display
sequentially, i.e, “Fine”, “Fast” and “Step” when clicked, click a few times until it
displays “Fine”.
<3D Acquire Change> button

III . Getting started with the OLS

III . 3 - 1 6 Page
Observation procedures / Image acquisition

3. Select [Auto] tab. The display will change as shown below.

4. Using <Z Pos. Move> button, lower the revolving nosepiece so as to bring the
surface of a specimen (bottom surface in case a bump exists) to appear.
<Z Pos. Move> buttons

5. Click <3D Acquire> button. Hang on till acquisition is completed. When

acquisition is completed and “pressed” button returns to original state, image
acquired would appear in image display section.
<3D Acquire> button

6. To the image acquired, an image name added with the time acquired will be
assigned and the said image name will be displayed on title bar of image display
section.

When [Range] or [Pitch] is programmed, No. of steps will be required.

NOTE
When No. of steps exceeds limit value, value of [Range] or [Pitch] would
appear in yellow.

In such a case, change [Range] or [Pitch] and make No. of steps to

appropriate value. (In case that “Fine” or “Fast” is selected with <3D
Acquire Change> button, however, [Pitch] is defined with acquisition
method selected and objective lens power. Therefore, the [Pitch] cannot
be changed.

III . Getting started with the OLS

Page III . 3 - 1 7
Observation procedures / Image acquisition

3-5-3 Save
1. Select <File> - <Save> - <Image> from menu.

Alternatively, click <Save> button on tool bar.

<Save> button

2. [Save As] dialog box appears.

Folder to save

Name to save

Type of File

3. Select folder to save and input name to be saved.

(In this system, file name with time of which image was acquired and extension
(.ols) would appear. Change file name to appropriate name.)

4. Click <Save> button.

III . Getting started with the OLS

III . 3 - 1 8 Page
Observation procedures / Analysis

3-6 Analysis
This section describes general procedures for analysis method. For detailed
information for each analysis function and method, see Chapter VI – Application.

<Save Settings> button

[Select Analysis] drop down list
It saves setting condition for
It selects menu to measure.
measurement.

<Load Settings> button

<Undo> button
It loads measurement setting
It deletes data measured right
condition saved and re-runs.
before.

<Data Transfer> button

<Delete All Data> button
It transfers data measured to
It deletes all data measured.
Microsoft Excel and indicates data.

Measurement Condition Setting Area

Condition settings are done in this area.
Setting items differ, depending upon the
detail selected from [Select Analysis]
drop down list. For further details, see
Chapter 6 – Application.

III . Getting started with the OLS

Page III . 3 - 1 9
Observation procedures / Analysis

3-6-1 Analysis procedures

1. Click <Anly> button out of [Control Panel Change] button. Control panel will
change to display for analysis mode.
<Anly> button

Drop down list

2. Select item desired from [Select Analysis] drop down list.

3. Data sheet applicable would appear. [Profile Display] window would also appear
as needed.

4. On control panel, program condition settings. For further details see Chapter VI –
Application.

5. Execute measurement. Measurement should be done, depending upon the

details of measurement, either on image display section or [Profile Display] window.

III . Getting started with the OLS

III . 3 - 2 0 Page
Observation procedures / Analysis

6. Measurement results would be displayed in data sheet.

Data Sheet
It indicates data measured. Items to
be indicated differ according to
details of measurement. See
Chapter VI – Application for details.

[Profile Display] window

7. When measurement is continued, repeat procedures 5 and 6.

III . Getting started with the OLS

Page III . 3 - 2 1
Observation procedures / Analysis

3-6-2 Save analysis data

1. Select <File> - <Save> - <Analysis Data> from menu.

Click ▼located at right side of <Save> button on tool bar and select “Analysis
Data” from drop down list.
<Save> button

2. [Save As] dialog box appears.

Folder to save

Name to save

Type of File

3. Select folder to save and input name to save. The extension should be of “*.csv”.

4. Click <Save> button.

III . Getting started with the OLS

III . 3 - 2 2 Page
Observation procedures / Filter process

3-7 Filter process

This section describes general procedures regarding filter process. For details of each
filter function and process method, see Chapter VI – Application.

<Save Settings> button

[Select Filter Process] drop down list It saves condition settings for filter
It selects filter process menu. process.

<Run> button <Load Settings> button

It executes filter process in a method It calls measurement setting
selected. condition saved and re-runs.

<Undo> button <Y Profile> button

Image filter processed is returned to It displays data profile of vertical
previous state. It is only returned to one direction (for 1 line) against image.
previous state.

<Histogram> button
<X Profile> button It displays histogram of data
It displays data profile of lateral direction pertaining to lateral direction/vertical
(for 1 line) against image. direction (for 1 line) and plane (for 1
image).

Filter Process Condition Setting

Area
Condition settings of filter process
are done in this area. Setting items
differ, depending upon the detail
selected from [Select Filter Process ]
drop down list. For further details,
see Chapter 6 – Application.

III . Getting started with the OLS

Page III . 3 - 2 3
Observation procedures / Filter process

3-7-1 Filter process procedures

1. Click <Filter> button out of [Control Panel Change] buttons. Control panel will
change to display for process mode.

<Filter> button

Drop down list

2. Select filter process desired from [Select Filter Process] drop down list.

3. As needed, click <X Profile> button, <Y Profile> button or <Histogram> button and
display each profile or histogram in respective window.
<X Profile> button

<Y Profile> button

<Histogram> button

4. Set filter process method on control panel. For further details, see Chapter VI –
Application.

III . Getting started with the OLS

III . 3 - 2 4 Page
Observation procedures / Filter process

5. Click <Run> button so that filter process would be executed. Results of filter
process would be reflected to image in image display section or profile or
histogram.

Fig. 3-1 Image display section before Spike Removal

III . Getting started with the OLS

Page III . 3 - 2 5
Observation procedures / Filter process

Fig. 3-2 Image display section after Spike Removal

III . Getting started with the OLS

III . 3 - 2 6 Page
Observation procedures / Display

3-8 Display
This section describes general procedures pertaining to display methods in various
modes for the image acquired or the image called out from a file. For details of each
display function or display method, see Chapter VI – Application.

<Scale Setting> button

[Select Display] drop down list It changes display scale of image.
It selects image display menu.
<Save Settings> button
It saves setting condition for image
<Color Table> button display.
It changes color of display image.
<Load Settings> button
<Display information> button It loads and re-runs settings condition for
It changes color to display image image display.
information and scale.

Image Display Condition Setting

Area
Conditions for image display are set
in this area. Setting items differ,
depending upon image display menu
selected from [Select Display] drop
down list. For details, see Chapter 6
– Application.

III . Getting started with the OLS

Page III . 3 - 2 7
Observation procedures / Display

3-8-1 Method to change Display

1. Click <Disp> button out of [Control Panel Change] buttons. Control panel will
change to display mode.
<Disp> button

Drop down list

2. Select desired display mode from [Select Display] drop down list.

3. Set display method on control panel. For further details, see Chapter VI –
Application.

III . Getting started with the OLS

III . 3 - 2 8 Page
Observation procedures / Display

Fig. 3-3 Image display section in which 3D is displayed

TIP Image to be displayed in 3D display may appear different from actual profile, depending
on structure of the specimen under observation and condition of image acquisition.

III . Getting started with the OLS

Page III . 3 - 2 9
Observation procedures / Display

3-8-2 Laying and display a plural number of images

1. Select all images that are desired to display from Image List. Number of images
that can be displayed at one time is of max. 10 slices. In case that the image
desired does not exist in Image List, click <Open> button and call out image
desired and then, select it.

<Open> button

2. Select layout style to display from [Image Display Changeover] tool bar.

<Display 1 Image> button <Display 9 Images> button

It displays 1 image only. 9 images selected from [Image List] are
laid and displayed. Layout order is that
images listed
first in [Image List] 1 2 3
<Display 2 Images (Tile Vertical)>
appear in sequence 4 5 6
button
of 1, 2, 3...9 as shown.
2 images selected from [Image List] are
7 8 9
vertically laid and displayed. Layout order
is that image listed first in [Image List]
<Display 4 Images (Tile Vertically)
appears on top.
>button
4 images selected from [Image List] are
<Display 2 Images (Tile Horizontally)> laid and displayed. Layout order is that
button images listed first in [Image List]
2 images selected from [Image List] are appear in sequence of
laterally laid and displayed. Layout order is 1, 2, 3 and 4 as shown. 1 3
that image listed first in [Image List]
appears on left. 2 4

<Display 4 Images (Tile Horizontally) >

button
4 images selected from [Image List] are
laterally laid and displayed. Layout order is
that images listed fist in [Image List]
appear in sequence of
1, 2, 3 and 4 as shown. 1 2

3 4
III . Getting started with the OLS

III . 3 - 3 0 Page
Observation procedures / Shutdown

3-9 Shutdown
1. Select <File> - <Exit> from menu.

Exit message will appear. Click <Yes> button.

If an image that was never, not once, saved in a file after image acquisition exists, a
message as shown below will appear. When the <YES> button is clicked, the-
not-yet-saved image is abandoned and the application is closed. When the <No>
button is clicked, the shut down processing is cancelled.

When button is selected, the revolving nosepiece moves to Home Position and
objection lens is set to 5x and the software will quit.

2. Turn power of controller to OFF position.

3. Turn the stage controller OFF when using the motorized stage (optional).

4. In case TV observation is done and in case LG-PS2 Light guide is used for the light
source unit, turn the light source unit OFF.

III . Getting started with the OLS

Page III . 3 - 3 1
Observation procedures / Shutdown

5. Select [Shutdown] from Windows [Start] menu.

NOTE If power of controller is turned off while software is running,

software may not be able to quit correctly. Shutdown the
system according to the above procedures for sure.

III . Getting started with the OLS

III . 3 - 3 2 Page
IV. Maintenance

Note to this Chapter

This chapter describes procedures for enabling users to
exercise maintenance of this system correctly.

Please read this chapter carefully to use the system in a long

period of time.
CONTENTS

1 Software Installation 1-1

2 Maintenance of major units 2-1

2-1 Laser microscope main unit...........................................................2-1

2-1-1 Removal of fixtures attached for transportation of microscope main unit...... 2-1
2-1-2 Removal of fixtures attached for transportation of microscope frame ........... 2-1
2-1-3 Adjustment of installation height for microscope main unit ........................... 2-2
2-1-4 Removal of revolving nosepiece ................................................................... 2-3
2-1-5 Removal of laser microscope main unit ........................................................ 2-3
2-1-6 Attach and remove LED Illuminator............................................................... 2-4
2-2 Stage .................................................................................................2-5
2-2-1 Installation of stage ....................................................................................... 2-5
2-2-2 Stage run (move) adjustment ........................................................................ 2-6
2-2-3 Removal and attachment of turn holder ........................................................ 2-6
2-2-4 Change of aluminum plate ............................................................................ 2-6
2-3 Handling anti-vibration platform ....................................................2-6
2-4 Assemble of LG-PS2 Light Source Unit ........................................2-7
2-4-1 Installation of halogen lamp........................................................................... 2-7
2-4-2 Installation of lamp guide (incoming light side).............................................. 2-8
2-5 Computer..........................................................................................2-9
2-5-1 Dongle change .............................................................................................. 2-9

3 Maintenance parts 3-1

Software Installation

1 Software Installation
The system control OLS software is all pre-installed at the factory. CD-ROM that contains software is included in
OLS delivery package. Use this CD-ROM when software must be re-installed for some reason.
When re-installation of software is required or software installation is necessary because it is updated (version
up), contact our local sales representative and confirm the procedure.

IV. Maintenance
Page IV. 1 - 1
Maintenance of major units / Laser microscope main unit

2 Maintenance of major units

This section describes portions of the following units that require maintenance.
z Laser microscope main unit
z Stage
z LG-PS2
z Control computer

2-1 Laser microscope main unit

2-1-1 Removal of fixtures attached for transportation of microscope main unit

1. Remove fixing metal piece c of Z revolving nosepiece by turning it

manually.

2. Next, remove fixing metal piece d of Z revolving nosepiece by

turning it manually.

NOTE As these fixing metal pieces are used for

transportation, keep them with care.

2-1-2 Removal of fixtures attached for transportation of microscope frame

1. Remove fixing metal piece c used for Z-axis transportation with

use of hex. wrench of 3mm.

NOTE As fixing metal piece c is used for transportation,

keep it with care.

2. When turning screw, be careful so as not drop it inside the main

unit.

IV. Maintenance
Page IV. 2 - 1
Maintenance of major units / Laser microscope main unit

2-1-3 Adjustment of installation height for microscope main unit

1. Quit application software and turn off power of controller.

2. Remove specimen and others from stage.
3. Loosen fixing screw c of microscope main unit, using hex. wrench of
3mm.
4. Turn adjusting screw d, using hex. wrench of 6mm. To position
microscope main unit upward, turn the adjusting screw to the
direction as shown in the figure. To lower, turn it to opposite direction.

Particularly, to lower, turn adjusting screw

slowly with careful watch that the microscope
main unit goes down. Objective lens may hit to
the stage.

5. When adjustment is completed at necessary height, fasten fixing

screw c of the microscope main unit.
6. Microscope main unit can be adjusted in height, up to 30mm
maximum (specimen height, 100mm).

NOTE The maximum height means the height that

includes thickness of turn holder. As needed,
remove turn holder. For further details, see 2-2-
3 Removal and attachment of turn holder.

IV. Maintenance
IV. 2 - 2 Page
Maintenance of major units / Laser microscope main unit

2-1-4 Removal of revolving nosepiece

NOTE Handle it with utmost care so as not to give any

impact.

1. Quit application software and turn off power of controller.

If revolving nosepiece is attached or removed while

power of the system is turned on, it would cause a
failure. Turn off power of the system for sure and
then, attach or remove it.

2. Loosen fixing screw c located at right side of the system, using hex.
wrench of 3mm.
3. Pull revolving nosepiece forward.
4. When installing revolving nosepiece, push it to dead end firmly.

2-1-5 Removal of laser microscope main unit

NOTE Handle it with utmost care so as not to give any

impact.

1. Quit application software and turn off power of controller.

2. Remove revolving nosepiece.
3. Remove cable.
4. Remove fiber cable from fiber lighting unit.
5. Loosen fixing screw c, using hex. wrench of 3mm.
6. Pull out microscope main unit upward.

IV. Maintenance
Page IV. 2 - 3
Maintenance of major units / Laser microscope main unit

2-1-6 Attach and remove LED Illuminator

d
1. Quit application software and turn power of controller to OFF

c position.
2. Disconnect the cable of LED illuminator 2 from controller.
3. Insert a hex. wrench of 3mm into a hole 1 located at lower
portion of the main unit and loosen the fixing screw for LED.
4. Pull out the LED illuminator 2.
5. When it is attached, insert the LED illuminator until it fits to the
dead end.
6. Tighten the LED fixing screw.
7. Connect the cable of LED illuminator to the controller.

IV. Maintenance
IV. 2 - 4 Page
Maintenance of major units / Stage

2-2 Stage

2-2-1 Installation of stage

1. Wipe out antirust oil on the bottom of stage cleanly and verify that no dust
exists.

NOTE Remove antirust paper and protective film.

NOTE Any impact would adversely affect accuracy of the system.

Handle it with utmost care so as not to give any impact.

2. Holding carrying handle c of the stage, place it gently on stage mounting

plane of the main unit.

NOTE Do not hold any other place than the carrying handle. It
may cause a failure.

3. Remove stage carrying fixing metal pieces d (2 places), using hex.

wrench of 3mm.

NOTE As these carrying fixing metal pieces are used for

transportation, keep them with care.

4. Move XY-axe of stage respectively and insert fixing screws e that come
as accessories of stage and tighten them with use of hex. wrench of 3mm.

NOTE To align screw position, hold stage carrying handle and

align. (In an event that any force is imposed to other place
than it, it may cause a failure.) After fixing the stage,
remove carrying handle c, using hex. wrench of 3mm.

NOTE As this carrying handle is used for transportation, keep it

with care.

NOTE When inserting fixing screw, be careful so as not to drop it

inside the system.

IV. Maintenance
Page IV. 2 - 5
Maintenance of major units / Handling anti-vibration platform

2-2-2 Stage run (move) adjustment

When XY stages are installed or removed, adjust run (move) of the stage
respectively. With adjustment, alignment of XY stages would be made
easier.
1. Loosen fixing screw of stage, using hex. wrench of 3mm.
2. Place a test bar (straight edge ruler) along with stage index direction
roughly in parallel. (Adjust position of stage in a way that cross point
of center lines on image comes on straight line of straight edge ruler).
3. Displaying image, move stage and adjust direction of stage
installation thoroughly by moving stage, aligning it with center line and
see if straight edge ruler moves along with the center line.
4. Tighten fixing screws of stage.

2-2-3 Removal and attachment of turn holder

Turn holder can be removed or attached, depending upon application.
1. Move turn holder c upward and remove it.
2. Remove turn shaft d, bearing and washer with use of your fingers or
minus type screwdriver.
3. To install turn holder, reverse the above procedures.

NOTE Keep turn shaft, bearing and washer with care.

2-2-4 Change of aluminum plate

When aluminum plate misted over or scratched after long use, replace it.

NOTE Aluminum plate is adjusted to secure planarity. When it

is replaced, height adjustment is necessary.

2-3 Handling anti-vibration platform

See instruction manual of anti-vibration platform.

IV. Maintenance
IV. 2 - 6 Page
Maintenance of major units / Assemble of LG-PS2 Light Source Unit

2-4 Assemble of LG-PS2 Light Source Unit

For details, see instruction manual of light guide illumination system together.

2-4-1 Installation of halogen lamp

Halogen lamp (with mirror)

Lamp applicable JCR12V-100WB
USHIO make

NOTE Turn main switch of light source unit to O (OFF) side

and pull out power plug from power consent.

Lamp as well as its peripheral area is very hot.

When changing lamp right after the system use,
exercise it after temperature cooled down
adequately.

1. Using a coin or like, turn turn-plate d of lamp change lid c to

“OPEN” side and lift rear side of change lid slightly and remove
it.
2. Insert halogen lamp e firmly into lamp socket f.
3. Install halogen lamp to lamp holder g in proceduren∼p.

NOTE Do not push lamp socket f and push front portion

of lamp. At this time, align convex portion h of lamp
with convex portion i of lamp holder.

4. Return lamp change lid to original position and turn to “CLOSE”

side.

Removal method
Halogen lamp comes up when lever is turned down, following
procedures n∼p.

IV. Maintenance
Page IV. 2 - 7
Maintenance of major units / Assemble of LG-PS2 Light Source Unit

2-4-2 Installation of lamp guide (incoming light side)

Loosen light guide fixing screw c of the light source unit (in
counter clockwise direction) and insert light guide, facing cutout d
at incoming light side upward, into light guide mounting jack e,
and when the jack hits with light guide holder f, tighten the fixing
screw.

IV. Maintenance
IV. 2 - 8 Page
Maintenance of major units / Computer

2-5 Computer

2-5-1 Dongle change

NOTE Dongle is attached to parallel connector at backside of computer. If

this dongle is not attached, LEXT-OLS software does not start up.

Do not try to install or remove dongle when computer starts or quits.

Dongle may be damaged and LEXT-OLS software may not start up.

z In case of LPT dongle

1. Dongle as shown in left figure is attached at back side of computer.
Loosen and pull out two screws of dongle.

NOTE When printer is connected, printer cable is attached

over the dongle. Pull out printer cable first and then, pull
out the dongle.

2. Insert new dongle into parallel connector at back side of computer.

Dongle
Tighten 2 screws of dongle and secure it firmly.

TIP Connect printer cable over the dongle.

IV. Maintenance
Page IV. 2 - 9
Maintenance of major units / Computer

z In case of USB dongle

1. Pull out the dongle from USB connector of computer.
2. Insert a dongle that is to install newly to the connector, observing
correction direction.

Dongle

IV. Maintenance
IV. 2 - 1 0 Page
Maintenance parts

3 Maintenance parts
Maintenance parts are available as follows.
z Laser ...................... Change should be done by service technician. Contact Olympus local sales office.
z Scanner .................. Change should be done by service technician. Contact Olympus local sales office.
z LED Illuminator....... Regarding how to get the replacement LED illuminator, contact Olympus local
sales office. Regarding change method, see "2-1-6 Attach and remove LED
Illuminator" in this manual.
z Lamp ...................... See instruction manual of light unit.
z Fuse
• Change of fuse for light guide illuminate system should be done by service technician. Contact
Olympus local sales office.

Fuse applicable: 250V 4A Time-lag High Breaking Capacity Type

(T4A H250V)

• Exercise the following procedures for change of controller fuse.

When changing fuse, turn off power of controller and pull out
NOTE
power cord.
(Unless power cord is pulled out, fuse holder cannot be
removed.)

1. Push ends of fuse holder c, left and right, toward inside and fuse holder
can be removed.
2. Change two fuses d with new ones.

(Fig. Indicates fuse holder for controller) NOTE Fuse of specified type must be used.

Fuse applicable:
250V 4A Time-lag High Breaking Capacity Type
(T4A H250V) 2 units used
(LITTELFUSE 215004)

IV. Maintenance
Page IV. 3 - 1
Maintenance parts

• To replace fuses for stage controller, perform the following procedures.

NOTE When fuses are replaced, shut down power, pull out
the power cord and then, exercise the procedures.

1. Fuse holder d is located at power cord connecting section of

backside of stage controller c. Remove it, using a minus type
screwdriver.
2. Replace two fuses – both with new ones.

NOTE Be sure to use fuses specified. If other types are

used, it may cause a fire.

Fuse applicable:
T6.3A H250V 2 units used
(LITTELFUSE 21506.3)

IV. Maintenance
IV. 3 - 2 Page
V. Trouble Q&A

Note to this chapter

This chapter describes countermeasures when troubles
occur. Prior to contacting our company, read this chapter
and exercise the countermeasure for the trouble. In case
that the trouble is not yet recovered, then, contact our
company.
CONTENTS

1 Countermeasures for troubles 1-1

Blackout occurred when breaker was operated .......................................................................................1-1

System does not boot up ..........................................................................................................................1-1
Error or alarm message appears..............................................................................................................1-2
Microscope main unit does not respond even if it is operated .................................................................1-3
Auto stage does not work .........................................................................................................................1-3
Laser image does not appear ...................................................................................................................1-4
TV image does not appear (In case of OLS3100)....................................................................................1-5
TV image does not appear (In case of OLS3000)....................................................................................1-5
Lamp in light box does not light or brightness is not sufficient .................................................................1-5
Image looks poor ......................................................................................................................................1-6
Field of view is repelled or field of view is evenly dark .............................................................................1-7
Dirt or dust is seen in field of view ............................................................................................................1-7
Image is not stable....................................................................................................................................1-7
Measurement value abnormal ..................................................................................................................1-8
Software does not accept input through mouse or keyboard...................................................................1-8

Enquiry Sheet 1-9

Countermeasures for troubles

1 Countermeasures for troubles

Depending upon how the system is used, it may not take full performance of the system, though it is not a failure.
When trouble occurs, see the following sections and exercise appropriate action. In case that the trouble is not yet
recovered, then, contact Olympus local office immediately. User is also requested to report details of the trouble
with use of “Enquiry Sheet” attached at the end of this chapter.

Blackout occurred when breaker was operated

Cause Countermeasure or checkout Manual to refer

Turn powers of controller and control PC to OFF III. Getting started with the
position. In case that TV observation system is used, OLS 3-9
turn power of light source unit to OFF position. III. Getting started with the
When blackout is recovered, boot up the system in OLS 3-1-1
accordance with ordinary procedures. III. Getting started with the
Image or file that was not saved in hard disk would OLS 3-1-2
disappear at this time. As the computer was not
shutdown in normal manner, error may occur when
the computer is started again. In this case, contact
our local office immediately.

System does not boot up

Cause Countermeasure or checkout Manual to refer

c: Power cable is not correctly Check power cable connection and turn power of the II. System outline /
connected. Or power is not system to ON. Specifications 1-3-2
turned ON.
III. Getting started with the
OLS 3-1-1
d: Unit is not correctly Check connection of cable of each unit. II. System
connected. outline/Specifications 1-3-2

e: Power of the system was Quit Windows and press power switch located in III. Getting started with the
turned OFF during the front of control PC to turn power OFF. OLS 3-9
software boot up. Switch is also located at rear side of control PC. Turn III. Getting started with the
this switch to OFF position, too. OLS 3-1-1
Again turn switch located at rear side of control PC to III. Getting started with the
ON position and boot up the system in ordinary OLS 3-1-2
procedures.
f: File used by software may be Re-setup the software. At this time, select “Version IV. Maintenance 1-1
broken. up” for setup type. IV. Maintenance 1-2

V. Trouble Q&A
Page V. 1 - 1
Countermeasures for troubles

Error or alarm message appears

z Error message as shown below appears at software start-up time.

Fig. 1-1 Error message at start-up time

Cause Countermeasure or checkout Manual to refer

c: When system was used Click <OK> button and boot up software. III. Getting started with
previously, it was not the OLS 3-9
One time, close OLS software. Quit Windows and
closed in normal manner. press switch located in front of control PC to turn power
III. Getting started with
d: Controller is broken. OFF. the OLS 3-1-1
Switch is also located at rear side of control PC.
Turn this switch to OFF position, too. III. Getting started with
the OLS 3-1-2
Again, turn switch located at rear side of control PC
to ON position. Press switch in front of computer and
turn power ON to start up control PC again.
Start Windows and start OLS software.
In case the trouble is not yet recover, contact our
local office.

z Alarm message as shown below appears at software start-up time.

Fig. 1-2 Alarm message at start-up time

Cause Countermeasure or checkout Manual to refer

Power of controller is not turned Turn power of controller to ON position and click III. Getting started with
ON. <Retry> button. the OLS 3-1-1
In case that image data already saved are displayed III. Getting started with
or used for analysis, it is not necessary to turn power the OLS 3-1-2
of controller to ON position. In this case, click
<Cancel> button.

V. Trouble Q&A
V. 1 - 2 Page
Countermeasures for troubles

z Alarm message as shown below appears at software start-up time or software running time.

Fig. 1-3 Alarm message at start-up or running time

Cause Countermeasure or checkout Manual to refer

Dongle is detached or it is not Install dongle correctly. IV. Maintenance 2-5-1
correctly installed.
Click <OK> button on message. III. Getting started with
the OLS 3-1-2
When starting software, double click icon of LEXT-
OLS software and start the software.

Microscope main unit does not respond even if it is operated

Cause Countermeasure or checkout Manual to refer

Power of controller was turned off Although image acquisition cannot be executed, III. Getting started with
while the system was used. display or analysis of image data can be done. the OLS 3-9
When image acquisition is required, close OLS III. Getting started with
software once. Turn power of controller to ON the OLS 3-1-1
position and start OLS software again.
III. Getting started with
the OLS 3-1-2

Auto stage does not work

z Stage does not move even if joystick is operated.

Cause Countermeasure or checkout Manual to refer
Connecting cable is removed. Connect the cable. II. System outline /
Specifications 1-3-2
10 seconds or so have not been Allow about 10 seconds and then, perform the
passed over after power-in. operation.
It has already come to stopper for Measure at a position in vicinity of table center.
the end of stroke.
Emergency stop switch is Turn the switch of stage controller to { (OFF) and turn I. Safety guide 1-1-2
pressed. emergency stop switch in reset direction and then, turn III. Getting started with
the switch of stage controller to ⎪ (ON) again. the OLS 3-1-1

V. Trouble Q&A
Page V. 1 - 3
Countermeasures for troubles

z POWER LED of stage controller does not light.

Cause Countermeasure or checkout Manual to refer
Switch of stage controller is not Turn the switch to ⎪(ON). III. Getting started with
turned ON. the OLS 3-1-1
Fuse of stage controller is Replace fuses with new ones. IV. Maintenance 3
broken.
Cable is not correctly connected. Connect cable correctly. II. System outline /
Specifications 1-3-2

z EMERGENCY LED of stage controller is lighting.

Cause Countermeasure or checkout Manual to refer
Emergency stop switch is Turn the switch of stage controller to { (OFF) and turn I. Safety guide 1-1-2
pressed. emergency stop switch in reset direction and then, turn III. Getting started with
the switch of stage controller to ⎪ (ON) again. the OLS 3-1-1

Laser image does not appear

Cause Countermeasure or checkout Manual to refer

c: Light path is set to DF. Change light path to BF. III. Getting started with the
OLS 3-3-2
d: Laser scan is not started. Set control panel to [Microscope] group and click III. Getting started with the
<Confocal> button or <Non-confocal> button. OLS 3-3-1
VI. Application 1-1-1
e: Specimen is not focused. Adjusting focus, using focusing adjustment handle III. Getting started with the
or revolving nosepiece. OLS 3-2-2
III. Getting started with the
OLS 3-4-3
VI. Application 1-1-5
f: Laser beam is short. Make value of [Level] larger at tab [Laser] in LSM VI. Application 1-4-2
Detail Setting window.
g: Sensitivity to detect laser Make value of [Brightness] larger in [Laser III. Getting started with the
beam is wrong. Microscope] window. OLS 3-4-2
VI. Application 1-1-6
h: Laser bean does not appear. When the “LASER” LED located at the front of the
laser microscope does not light, reboot the
software. If the system does not come back even
after rebooting, contact local office.
h: Laser is worn out. When a message as shown below appears,
contact local sales representatives and replace the
laser.

V. Trouble Q&A
V. 1 - 4 Page
Countermeasures for troubles

TV image does not appear (In case of OLS3100)

Cause Countermeasure or checkout Manual to refer

c: LED illuminator is not Check if the cable is connected. IV. Maintenance 2-1-6
connected.
d: It is not set to optical Select <Color (TV observation)> button on toolbar. III. Getting started with the
microscope image display OLS 3-3-1
mode.
VI. Application 1-1-1
e: Light intensity is low. Adjust [Brightness] on [Microscope] window. III. Getting started with the
OLS 3-3-1
VI. Application 1-1-6
f: LED illuminator is broken. Change LED illuminator. IV. Maintenance 2-1-6

TV image does not appear (In case of OLS3000)

Cause Countermeasure or checkout Manual to refer

c: Light source unit is not Turn power of light source unit to ON. Instruction manual of Light
powered. guide system

d: It is not set to optical Select < Color (TV observation)> button on toolbar. III. Getting started with the
microscope image display OLS 3-3-1
mode.
VI. Application 1-1-1
e: Light volume is small. Turn light intensity control on light source unit and III. Getting started with the
adjust the volume. OLS 3-4-2

f: Lamp is broken. Change lamp of light source unit. Instruction manual of Light
guide system
IV. Maintenance 2-4-1

Lamp in light box does not light or brightness is not sufficient

z Lamp does not light.

Cause Countermeasure or check out Manual to refer
c: Main switch of light source Turn main switch to ⎪(ON).
unit is not turned ON.
d: Lamp is broken. Replace lamp with new one.

e: Connection like connector is Contact local office and ask to replace fuse.
not firmly secured.

V. Trouble Q&A
Page V. 1 - 5
Countermeasures for troubles

z Lamp turns ON or OFF.

Cause Countermeasure or checkout Manual to refer
c: Lamp is about to break. Replace lamp with new one.

d: Connection of connector is Connect connector correctly.

not firmly secured.

z Lamp goes off instantaneously.

Cause Countermeasure or checkout Manual to refer
c: Right type lamp is not used. Replace lamp with right type lamp.

z Brightness does not change even if light control knob is turned.

Cause Countermeasure or checkout Manual to refer
c: Lamp is not installed. Install lamp.

d: Lamp is broken. Replace lamp with right type lamp.

Image looks poor (Image is not sharp, contrast is poor or cannot be seen because fine
portions are crushed)

Cause Countermeasure or checkout Manual to refer

c: Objective lens is Clean top of objective lens. I. Safety guide 3-4
contaminated
d: Objective lens power is low. Use objective lens of high power. III. Getting started with
the OLS 3-4-1
VI. Application 1-1-2
e: Objective lens of small Use objective lens of high NA.
numerical aperture (NA) is
used.
f: Set to Non-confocal image. Select <Confocal> button. III. Getting started with
the OLS 3-3-1
VI. Application 1-1-1
g: Substance like transparent Observe specimen, using objective lens of low power. III. Getting started with
film exists between specimen If substance like transparent file exists, correct data the OLS 3-4-1
and objective lens. VI. Application 1-1-2
may not be acquired.
h: Sensitivity to detect laser Change value of [Brightness] in [Laser Microscope] III. Getting started with
beam is not correct. window. the OLS 3-4-2
VI. Application 1-1-6
i: Laser beam is not sufficient. Make value of [Level] larger at [Laser] tab in LSM VI. Application 1-4-2
Detail Setting window.

V. Trouble Q&A
V. 1 - 6 Page
Countermeasures for troubles

Field of view is repelled or field of view is evenly dark

Cause Countermeasure or checkout Manual to refer

c: Knob to change light path is Change light path firmly. III. Getting started with
positioned halfway. the OLS 3-3-2

d: Revolving nosepiece is not Push in until it hits to dovetail and fix it. IV. Maintenance 2-1-4
correctly attached.
e: Objective lens is loosely Install objective lens by screwing into revolving
installed. nosepiece firmly.

f: Filter is stopped halfway. Set correctly. III. Getting started with

the OLS 3-3-3
g: Lamp is installed on slant. Set correctly. IV. Maintenance 2-4-1

Dirt or dust is seen in field of view

Cause Countermeasure or checkout Manual to refer

c: Dirt or dust on substance Clean efficiently.
under measurement.
d: Top of objective lens is I. Safety guide 3-4
contaminated.
e: Filter slider, polarizer and I. Safety guide 3-4
analyze slider are
contaminated.
f: Lamp is installed on slant. Set correctly. IV. Maintenance 2-4-1

Image is not stable (irregularly stripped lines appear or straight line turns aliasing)

Cause Countermeasure or checkout Manual to refer

c: Anti-vibration platform is not Adjust level of anti-vibration platform. Instruction manual of
working. anti-vibration platform

d: Vibration from light source Set light source unit and computer to the place
unit or computer is separate from microscope setup place.
transmitted.
e: Vibration source exists in Change setup place. I. Safety guide 3-1
peripheral area.
f: Laser scanner is broken. Contact local sales office.

g: Revolving nosepiece or Fix it. IV. Maintenance 2-1-4

microscope main unit is
IV. Maintenance 2-1-5
loosened.

V. Trouble Q&A
Page V. 1 - 7
Countermeasures for troubles

Measurement value abnormal

Cause Countermeasure or checkout Manual to refer

c: Image intensity is saturated. Adjust brightness in a way that image intensity is III. Getting started with
not saturated. the OLS 3-4-2
VI. Application 1-1-6
d: File used by software may Re-setup software. IV. Maintenance 1
be broken. Select “Version up” for setup type.

e: Warm-up operation or After 60-minute warm up operation, acquire a III. Getting started with
adaptation to the height image again and confirm its measurement the OLS 3-1-1
temperature is insufficient. value. III. Getting started with
the OLS 3-5-2
If you find an abnormal value in the height image I. Safety guide 3-2
acquired with the objective lenses mentioned III. Getting started with
below, acquire a height image again after lenses’ the OLS 3-5-2
sufficient adaptation to the temperature and
confirm its measurement value.
Adaptation time to the temperature depends on the
storage condition/time. For more information,
contact our local sales office.
• MPLAPO100x
• MPLAPO100x408
If your problem cannot be solved even in this way,
contact our local sales office.

Software does not accept input through mouse or keyboard

Cause Countermeasure or checkout Manual to refer

Cable is not connected. Check cable connection. II. System
outline/Specifications 1-3-2
Software error Press CTRL + Alt + Delete on keyboard. In III. Getting started with the
OLS 3-9
accordance with message shown, quit OLS III. Getting started with the
software. Close Windows once and reboot up OLS 3-1-1
computer. III. Getting started with the
OLS 3-1-2

V. Trouble Q&A
V. 1 - 8 Page
Countermeasures for troubles

Enquiry Sheet
Product: Confocal Scanning Laser Microscope
Type:
Serial No.:
State of failure (in detail)

Type and Serial No. are written in warranty card and also indicated at backside of Laser Microscope.
Duplicate these numbers separately for immediate use.

Type

Serial No.

(Label attached at backside of Laser Microscope)

V. Trouble Q&A
Page V. 1 - 9
VI. Application

Note to this chapter

This chapter describes method of image acquisition and
other various processes executed on the image.

■ This chapter is only available in PDF. Read this chapter

with use of personal computer.

Please read this chapter to understand the system and use

the system correctly.
CONTENTS

1 Microscope 1-1

1-1 Observation......................................................................................1-1
1-1-1 Observation start ........................................................................................... 1-2
1-1-2 Objective lens switchover.............................................................................. 1-5
1-1-3 Setting image size ......................................................................................... 1-5
1-1-4 Adjusting zoom power ................................................................................... 1-5
1-1-5 Adjusting focus .............................................................................................. 1-6
1-1-6 Adjustment of brightness............................................................................... 1-7
1-1-7 Live Simplified Distance Measurement ....................................................... 1-10
1-1-8 Real-time Line Width Measurement ............................................................ 1-12
1-2 Acquisition .....................................................................................1-14
1-2-1 Acquisition of 2D image............................................................................... 1-14
1-2-2 Acquisition of 3D image (Extended image) ................................................. 1-14
1-2-3 Acquisition in XZ Scanning Mode................................................................ 1-23
1-3 Save ................................................................................................1-27
1-3-1 Save of image acquired............................................................................... 1-27
1-3-2 Save of profile ............................................................................................. 1-28
1-3-3 Save of acquisition condition....................................................................... 1-32
1-4 Open................................................................................................1-33
1-4-1 Saved image call ......................................................................................... 1-33
1-4-2 Loading Acquisition Condition from Image Information ............................... 1-35
1-5 Detail setting ..................................................................................1-37
1-5-1 Detail setting of laser microscopy observation ............................................ 1-37
1-5-2 Detail setting of Z position (Focus).............................................................. 1-38
1-5-3 Detail adjustment of brightness (Laser)....................................................... 1-39
1-5-4 Auto save of image acquired (Auto save) ................................................... 1-40
1-5-5 Detail setting of image acquisition (Acquire) ............................................... 1-42
1-5-6 Detail setting of observation method (Live) ................................................. 1-47
1-5-7 Detail setting of TV observation .................................................................. 1-48
1-5-8 Parfocality adjustment ................................................................................. 1-51
1-5-9 Setting Height Image Offset ........................................................................ 1-54
1-6 Use Auto Stage ..............................................................................1-58
1-6-1 Register the Destination .............................................................................. 1-61
CONTENTS

1-6-2 Load Registered Points ...............................................................................1-65

1-6-3 Save the Registered Points .........................................................................1-67
1-6-4 Alignment (Adjusting the Coordinate Axis Inclination) .................................1-69
1-6-5 Move to a Registered Point .........................................................................1-80
1-6-6 Automatic Acquisition ..................................................................................1-82
1-6-7 Acquire Images in Tiling Mode ....................................................................1-84
1-6-8 Supplement 1 − Change of sample replacement position ...........................1-96
1-6-9 Supplement 2 − Image tiling with analySIS LEXT .......................................1-98

2 Image display 2-1

2-1 2D display......................................................................................... 2-2

2-2 3D display......................................................................................... 2-3
2-3 Contour display ............................................................................... 2-9
2-4 LUT Setting..................................................................................... 2-11
2-4-1 Selection of Color Table ..............................................................................2-12
2-4-2 Color Table Adjustment and Registration ....................................................2-13
2-4-3 Color Table Assignment Range Setting (Contrast Adjustment)...................2-15
2-5 Image information display setting ............................................... 2-17
2-6 Display contrast setting................................................................ 2-21
2-7 Cross Section Profile Display suited to Full Scale Profile ........ 2-23
2-8 Save of image display condition.................................................. 2-25
2-9 Call of image display condition.................................................... 2-26
2-10 Display of a plural number of images ....................................... 2-26
2-11 Selection of display image ......................................................... 2-28
2-12 Selection of display image type ................................................. 2-29
2-13 Selection of display image size.................................................. 2-29
2-14 Delete of display image............................................................... 2-30
2-15 Display of acquisition information for display image.............. 2-30

3 Image processing 3-1

3-1 About Process Target ..................................................................... 3-3

3-1-1 Selection of Image Type ................................................................................3-3
3-1-2 Specify Region for Image Processing............................................................3-4
CONTENTS

3-2 Spike (peak noise) Removal ...........................................................3-9

3-3 Smoothing (Removal of random noise) ......................................3-13
3-4 Profile Shape Correction...............................................................3-17
3-5 Surface/Tilt Correction ..................................................................3-21
3-5-1 Surface Correction ...................................................................................... 3-22
3-5-2 Tilt Correction .............................................................................................. 3-26
3-6 Height Noise Removal...................................................................3-35
3-7 Edge Enhancement .......................................................................3-39
3-8 Contrast Enhancement .................................................................3-43
3-9 FFT (Separation of surface profile)..............................................3-46
3-10 Digital Zoom .................................................................................3-50
3-11 Image Rotation.............................................................................3-53
3-12 One-Shot Noise Removal Filter..................................................3-56

4 Image analysis 4-1

4-1 Measurement of distance/area .......................................................4-3

4-1-1 Measurement of distance .............................................................................. 4-4
4-1-2 Measurement of area .................................................................................... 4-8
4-2 Measurement of line width ...........................................................4-11
4-3 Geometric analysis........................................................................4-21
4-3-1 Alignment .................................................................................................... 4-23
4-3-2 Measurement .............................................................................................. 4-29
4-4 Particle analysis.............................................................................4-38
4-5 Step measurement.........................................................................4-44
4-6 Volume measurement ...................................................................4-54
4-7 Roughness analysis ......................................................................4-58
4-7-1 Line roughness analysis.............................................................................. 4-59
4-7-2 Plane roughness analysis ........................................................................... 4-64
4-8 Step Refractive measurement ......................................................4-69
4-9 Edge measurement........................................................................4-79
4-10 Tolerance Judgment ...................................................................4-84
4-11 Specifying a measurement value not applicable to statistics 4-85
4-12 Registration of Measurement Offset (Calibration) ...................4-87
4-12-1 Registration of offset value to be used for measurement .......................... 4-87
CONTENTS

4-12-2 Registration of Offset Value to be used for Line Width Measurement / Edge
Measurement ........................................................................................................4-89
4-12-3 Registration of Offset Value to be used for Roughness analysis...............4-92
4-13 Specifying a measurement line on 3D display ......................... 4-95
4-14 Specifying a measurement area on 3D display ........................ 4-97

5 Convenient Features 5-1

5-1 Report output ................................................................................... 5-1

5-2 Registering the Procedure for Repeated Operations (Image
Recipe) .................................................................................................. 5-10
5-3 Simplified tiling .............................................................................. 5-19
5-4 Start of Operation Navigation Tool .............................................. 5-28
5-5 Relocation of Window ................................................................... 5-29
5-6 Profile Alignment........................................................................... 5-30

Appendix A Definition of Particle Analysis Items A-1

Appendix B Definition of Roughness Analysis Items B-1

Appendix B-1 Line Roughness Analysis............................................ B-1

Appendix B-2 Surface Roughness Analysis...................................... B-6
Microscope / Observation

1 Microscope
This chapter describes functions to observe specimen, to acquire live image and to save
acquired image. Regarding procedures from observation through save, see volume III
Chapter 2 – Summary of observation procedures.

1 Operating microscope
Click <Microscope> button of <Control Panel Change> button in [Main] window and
[Microscope] window will appear.

Fig. 1-1 <Control Panel Change> button

1-1 Observation

While induced-light Nomarski interference microscopy observation is

executed, do not operate laser microscope scanning. Analyzer may
be burnt with laser.

While TV dark field observation is executed, laser does not turn ON for
NOTE
safety reasons so that laser microscope image cannot be displayed.

VI . Application
Page VI. 1 - 1
Microscope / Observation

1-1-1 Observation start

1 Starting observation
Click desired live image button from Color (TV observation) (option), Non-confocal
microscope observation or Confocal microscope observation.
<Color (TV observation)>
button (Option)

<Non-confocal> button

<Confocal> button

Fig. 1-2 <Live Image> button

TIP TV observation is possible with an image size of 1024 x 768 or less.

However, when an image that is smaller than 1024 x 512 is observed and
acquired, the acquired image is saved in a size of 1024 x 768.

To pause scanning, click button once again and set laser scan to the state
TIP
of stop (the state of which button is not pressed).

TIP See III 3-3-2 TV Bright field / Dark field observation and III 3-3-3 Induced -
light Nomarski differential interference observation regarding setup method
and cautions.

2 Observing in 2 channels
When two <Live Image> buttons are pressed, two live images (2 channels) will appear in
Image Display Window simultaneously. Display method can be selected; when the

< Display 2 images (Tile image should be displayed laterally after a live image in 1st channel appeared, press
Horizontally) > button
<Display 2 Images (Lateral)> button. When it should be displayed perpendicularly, press
<Display 2 Images (Perpendicular)>. If <Live Image> button for 2nd channel is then
< Display 2 images (Tile
Vertically) > button
pressed continuously, the live image in 2nd channel will appear simultaneously. The
display order is such that the live image in the 1st channel appears top or left. While the
live image in the 2nd channel is displayed and, if <Live Image> button for one side
<Memorized Image>
button channel is pressed and the observation is stopped, the live image for another side
channel only is displayed.

VI . Application
VI . 1 - 2 Page
Microscope /Observation

When <Live Image> button and <Memory Image> button are pressed, the image that
was displayed at last time in Image Display Window and a live image will be displayed
simultaneously. This way enables to observe the live image while the image acquired is
also viewed.

TIP Live images displayed in 2 channels respectively can be scrolled in linked

motion.
Select [2CH Synchro] from [Window] menu. When the item is checked, the
scroll bars will move simultaneously.

TIP In case the observation including color (TV) observation is performed in 2

channels, the image size is limited to 1024 x 768 or less.

Fig. 1-3 Live images being observed in 2 channels

VI . Application
Page VI. 1 - 3
Microscope / Observation

NOTE Do not perform the following operations while the laser microscope is
scanning. Load of control computer may get heavy and imaging may
be stopped.
• Operation of other application.
• Move of window or change of window size.
• Double-click of Display 2 Images button.
When imaging is stopped, press <Live Image> button again so that the
laser imaging will be started again.

NOTE When a live image is displayed and, if an image is acquired from the
state where a memory image is displayed by double-clicking the name
of image in acquired image list, be sure to bring the live image to
appear one time and then, click <Acquire> button. If an image is
acquired without displaying the live image, the <Acquire> button
would remain as “pressed” state. In this case, press <Live Image>
button again so that the “pressed” state of <Acquire> button can be
cancelled.

NOTE When image acquisition is done by double clicking the image name
from the list that appears in the display section of the acquired images
while a live image is displayed, the live image must be displayed, one
time, and then, the <Acquire> button must be pressed. When image
acquisition is done without displaying the live image, the <Acquire>
button will remain in the “pressed” state. In such a case, turn the
display of live image, ON or OFF, one time so that the <Acquire>
button would be reset.

Verify updating of the live image display specified in the 1st channel
NOTE
and then, specify the live image for the 2nd channel.

VI . Application
VI . 1 - 4 Page
Microscope /Observation

In case of 2 channel observations including color (TV) observation, the

NOTE
color image would rarely catch laser emission lines. If it is a case,
press <Color (TV) observation> button to fix it up.

1-1-2 Objective lens switchover

1. Select desired objective lens power with <Objective lens> button.

<Objective lens> button

1-1-3 Setting image size

1. Select image size to be displayed with [Size] scroll button.

TIP TV observation is possible with an image size of 1024 x 768 or less.

[Size] scroll button
However, when an image that is smaller than 1024 x 512 is observed and
acquired, the acquired image is saved in a size of 1024 x 768.

1-1-4 Adjusting zoom power

1. Adjust zoom power with [Zoom] slider.

[Zoom] slider

TIP In TV observation, zoom function cannot be used.

VI . Application
Page VI. 1 - 5
Microscope / Observation

1-1-5 Adjusting focus

1 Manually adjusting focus point

Seeing image display section, adjust focus with <Z Pos. Move> button.

The <Z Pos. Move> buttons are available in 3 steps for both, up and
TIP
down. Moving stroke of each button is displayed in µm unit if mouse
pointer is placed over each button. Moving stroke of each button is
different depending upon objective lens being used for observation.

<Z Pos. Move> button

TIP It is also possible to move Z position by turning mouse wheel button.

Place mouse pointer over <Z Pos. Move> button or place the mouse
<HOME> button
pointer over an image and then, click on mouse right button. Since a
pop up menu appears, select any one of [Small Z], [Middle Z] or [Long
Z] and check the box selected.
• Forward turn of mouse wheel button ... Ascending
• Backward turn of mouse wheel button ... Descending

2 Moving focus point to the position registered

In case that Home position has already been registered and in case that revolving
nosepiece is moved to Home position, click <HOME> button.

NOTE Care must be taken that objective lens does not hit to specimen.

Regarding registration method of position, see 1-5-2 Detail setting of Z

TIP
position (Focus) in this chapter.

3 Automatically adjusting focus point (Auto focus)

Click <AF> button when adjusting focus in auto mode.

<AF> button

VI . Application
VI . 1 - 6 Page
Microscope /Observation

1-1-6 Adjustment of brightness

1 Automatically adjusting brightness (One push gain)

Click <1-Push Gain> button.

< 1-Push Gain> button

TIP Depending upon type of specimen used, the image may be dark or too bright
even if one push gain is executed. In case that the image is dark, raise
[Brightness] and, in reverse, in case that the image is too bright, lower the
[Brightness].

NOTE One push gain can only be used in laser microscope observation. It
cannot be used in TV observation.

2 Manually adjusting brightness

1. Adjust brightness with use of [Brightness] slider suitable for each observation.

[Brightness] slider

TIP It is also possible to adjust the brightness by turning mouse wheel

button. Place mouse pointer over an image and click on mouse right
button. Since a pop up menu appears, select [Brightness] and check
the box. (Leave the mouse pointer placed over the image "as is".)
• Forward turn of mouse wheel button ... getting brighter
• Backward turn of mouse wheel button ... getting darker

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Microscope / Observation

2. In case of TV observation and, if LG-PS2 light guide is used for light source unit,
its brightness must also be adjusted together, using the light intensity control of
the light source unit. (When a LED is used for light source unit, it should be
adjusted, using the slider only inside [Brightness].

Light intensity control

For further details, read instruction manual that comes with light source unit.

3 Switching gain amplifier for brightness

When observing specimen of intensity difference of laser microscope image is large,
“Contrast” display of <Gain click <Gain Amplifier Change> button to display the image in “Enhance” mode and dark
Amplifier Change> button
portion of live image can be highlighted and displayed brighter. When <Gain Amplifier
Change> button is clicked again, the image returns to “Contrast” mode.

“Enhance” display of <Gain

Amplifier Change> button

4 Adjusting Brightness while viewing Intensity Profile

When intensity profile of a live image through laser microscope is displayed, a guideline
for brightness will appear on the profile. Adjust brightness so as to bring this guideline
aligned with the profile so that the image would appear in proper brightness.
1. Check the [Disp] check box.
[Disp] checkbox The intensity profile will appear at a position specified with the line over an image in
[Profile Display] window. The line and the intensity profile will appear in green in
case of parfocality mode and, in case of non-parfocality mode, they appear in red.)
2. To change the line position to display the intensity profile, align mouse pointer with

the line on the image and, at a position where the mouse pointer changed to ,
[Profile] slider drag it. It is also possible to change the line position, using [Profile Line] slider.
3. Place cursor over the image and click on mouse right button. Since a popup menu
appears, select [Brightness] and check it. (Leave the mouse pointer placed over the
image "as is".)

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4. Turn the mouse wheel button to adjust the brightness. Adjust it to bring the intensity
profile aligned with the guideline.
• Forward turn of mouse wheel button ... getting brighter
• Backward turn of mouse wheel button ... getting darker
Brightness can also be adjusting, using [Brightness] slider.

Fig. 1-4 Image display section and [Live Profile] window

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1-1-7 Live Simplified Distance Measurement

Performing observation with laser microscope, it makes it possible to measure a
distance in either horizontal or vertical direction without acquiring an image.

NOTE The situation that Live Simplified Distance Measurement can be done
is a time only when a non-confocal live image or a confocal live image
is being displayed.

1. In laser microscope observation, bring 2D image that should be observed to appear

on image display window.

Regarding display method of 2D image, see III 3-3-1 Displaying 2D View

TIP
Image and VI 1-1-6 Adjustment of brightness.

2. Click on <Live Simplified Measurement> button.

<Live Simplified Measurement> [Live Measurement] window will appear.
button
<Data Transfer> button
<Show vertical line> button Results measured can be displayed
When turned to pressed-in state, it in Microsoft Office Excel.
indicates a measurement start or end
line in horizontal direction.
<Show horizontal line> button <Save Image> button
When turned to pressed-in state, it It saves data measured in JPEG or
indicates a measurement start or end BMP format.
line in vertical direction.

[Measure Position Y1/Y2] scroll bar [Measure Position X1/X2] scroll bar
[Y1] allows setting of measurement [X1] allows setting of measurement
start position and [Y2] allows setting start position and [X2] allows setting
of measurement end position for of measurement end position for
horizontal line. vertical line.

[Measure Color X/Y] box <Set> button

Color of measurement line in vertical It brings [Color Setting] dialog box to
or horizontal direction can be set appear. The color chosen on the
here. dialog box will be set in the left side
box.
[Export to Excel] option button
• [Export to Sheet]
When data measured is
transferred to Excel, it will be
added to the sheet.
• [Export to Book]
When data measured is
transferred to Excel, it will be
added to a new sheet.

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3. Set both <Show vertical line> and <Show horizontal line> buttons to pressed-in
state. Measurement lines will appear on the image display window.

4. Move the measurement line respectively to a position where the measurement

should take place.
As a move method of the measurement line, use a scroll bar of [Measure Position
X1 / X2] or [Measure Position Y1 / Y2] or; drag the measurement line on the image
display window.

5. Measurement result will appear at lower right part of the image display window.
The result will appear in the same color as the measurement line.

6. Select [Export to Sheet] option button on [Export to Excel].

7. Click on <Data Transfer> button.

In case data measured is transferred to Excel or it is saved as an

NOTE
image, the scan will be paused.
Press Live Image button again so that the imaging of a live image will
be re-started.

Fig. 1-5 Image Display Window in Live Simplified Distance Measurement

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1-1-8 Real-time Line Width Measurement

Viewing the image through laser microscope, the line width can be measured on [Live
Profile] window, “as is”, without acquiring the image. Measurement is made on the
distance between two arbitrarily selected points on the line that represents the profile.

1. In laser microscope observation, bring 2D image that should be observed to appear

on image display window. At this time, [Live Profile] window should also be
displayed.

Regarding display method of 2D image and [Live Profile] window, see

TIP
3-3-1 Displaying 2D View Image and VI 1-1-6 Adjustment of brightness.

2. Display a profile of the position that should be measured.

Profile of the position specified with green line on image will appear on [Live Profile]

window. Viewing the image display section, specify the position that should be

measured, using [Profile] scroll bar.

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3. With mouse click action over the profile, a vertical line that moves, left or right, will
appear. The point where this vertical line and the profile crossed is the
measurement point. Drag mouse to the measurement point and release the mouse
button. Specifying two measurement points, line width and intensity level between 2
points will appear at [Width] and [∆ I] located at upper right side of [Live Profile]
window.

Fig. 1-6 Intensity Profile and Image Display Section during Real-time Line Width Measurement

TIP Measurement value in real-time line width measurement appears

for reference purpose only. To obtain accurate measurement,
acquire the image and then, exercise measurement, using each
measurement function.

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1-2 Acquisition

1-2-1 Acquisition of 2D image

1. Click <2D> button and the panel to acquire 2D image will appear.
<2D> button 2. Click <2D Acquire> button. Wait until acquisition is completed. Acquired image
will appear in image display section.
To the image acquired, an image name added with the time acquired will be
assigned and the said image name will be displayed on title bar of image display
<2D Acquire> button
section.

1-2-2 Acquisition of 3D image (Extended image)

1 Setting acquisition range

1. Click <3D> button and the panel to acquire 3D image will appear.
<3D> button
2. Set Z scanning range with anyone of the following methods.
z Setting upper limit automatically (Auto mode)
... When wishing to acquire an image, ignoring the upper limit of a specimen
1) Select [Auto] tab. The display will change as shown below.

2) Using <Z Pos. Move> button or mouse wheel button, move Z position so
as to bring the surface of a specimen (bottom surface in case a bump
exists) to appear.

<Z Pos. Move> buttons

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NOTE Depending upon a profile of specimen, the upper limit may not
properly be detected at acquisition time. In such a case, use
Manual mode.
In case the acquisition should be halted, click on <3D Acquire>
button again.

TIP The maximum range that can be acquired in Auto mode

Standard objective lens 5x Approx 2mm
10x Approx 700µm
20x Approx 500µm
50x Approx 135µm
100x Approx 48µm

z Setting upper/lower limit (Manual mode)

... When wishing to set the limits by seeking lower and upper limit since the
height of a specimen is unknown.
1) Select [Manual] tab. The display will change as shown below.

<Top> button End position (uppermost

position) for 3D scanning
range

<Bottom> button Start position (lowermost

position) for 3D scanning
range

2) Using <Z Pos. Move> button or mouse wheel button, move Z position so
as to bring the bottom surface of a specimen to appear. When <Bottom>
button is clicked, current Z position will be registered as start point
(lowermost position) of 3D scanning range. Likewise, move Z position so
as to bring the top surface of a specimen to appear and click on <Top>
<Z Pos. Move> buttons button so that current Z position will be registered as end point (uppermost
position) of 3D scanning range.
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3) [Z Navigator] as shown below will appear. The relation of uppermost

position (top), lowermost position (bottom) and current Z position can be
verified.

End position (uppermost

position) for 3D scanning
range

Current Z position

Start position (lowermost

position) for 3D scanning
range

z Setting a range using current position as reference (Range mode)

... When the height of a specimen is known, more or less.
1) Select [Range] tab. The display will change as shown below.

[Range] scroll button

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2) Use [Range] scroll button to set a scanning range. The position lowered by
a certain amount of distance from current Z position is registered as start
position (the lowermost position) for every objective lens and, depending
upon a range set, the end position (the uppermost position) will be
determined.
When setting [Range], allow a slightly greater value than the expected
height of a specimen to be measured.
End position

Standard objective lens 5x 80µm

Range 10x 20µm
20x 6.4µm
Current Z 50x 1.8µm
position 100x 0.5µm
Start position

TIP To detect surface of specimen, it is necessary to set the start at the

position that is slightly lower than the position where the specimen
comes in focus in confocal system.

2 Selection of acquisition method for 3D image

Click <3D Acquire Change> button and select acquisition method for 3D image.

TIP Acquisition method for 3D image

Fine: Select “Fine” when highly sensitive measurement is required.

In CFO mode (Fine mode), height measurement can be executed.

Fast: Select “Fast” in case that measurement is required to finish

quickly. In CFO mode (Fast mode), height measurement can be executed.

Step: Select “Step” in case that measurement is required for

specimen having large level difference by setting step aribitrarily. Resolution
will be of the value specified in step.

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3 Pitch setting for 3D acquisition

Set distance that revolving nosepiece moves in Z direction at one time with [Pitch] scroll
button. [Pitch] setting can however be made when “Step” is selected with <3D Acquire
[Pitch] scroll button Change> button. (In case that “Fine” or “Fast” is selected with <3D Acquire Change>
button, [Pitch] will automatically be defined with acquisition method selected and
objective lens power.)
[Total number of steps]
Number of steps required by acquisition range and [Pitch] will be displayed in [Total
number of steps].

NOTE When [Range] or [Pitch] is set, number of steps will be required. In

case that number of steps exceeds limit value, value of [Range] or
[Pitch] will be displayed in yellow.

When it occurs, change the value of [Range] or [Pitch] and make

number of steps to appropriate value. (In case that [Fine] or [Fast] is
selected with <3D Acquire Change> button, the [Pitch] cannot be
changed as the [Pitch] was defined by acquisition method selected and
objective lens power.)

4 Acquisition of 3D image (extended image)

Click <3D Acquire> button. The acquisition will take place.
In case of Manual mode, the acquisition state in progress can be verified on [Z
<3D Acquire> button Navigator].

End position (uppermost

position) for 3D scanning
range

Current Image
Acquisition Position

Start position (lowermost

position) for 3D scanning
range

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When acquisition is done, the button will return to original state and image acquired
would appear in image display section. To the image acquired, an image name added
with the time acquired will be assigned and the said image name will be displayed on title
bar of image display section.

When AutoFineView feature is enabled, the contrast on intensity image is adjusted to a

proper value at image acquisition. Regarding setting method for AutoFineView feature,
see "1-5-5 Detail setting of image acquisition (Acquire) 3 Auto Adjustment of Contrast
at 3D Image Acquisition (AutoFineView)".

TIP In case the acquisition should be halted, click on <3D Acquire> button again.

5 Acquisition of color 3D image (color extended image)

While <Color> button is in the state of “pressed”, click <3D Acquire> button. Message
<Color> button
box as shown below will appear along with the motion of image acquisition. Wait as it is.
When acquisition is done, the button will return to original state and the image acquired
would appear in image display section.

In case of Auto mode, a color image will be acquired after a laser image is
TIP
acquired. (In case of Manual or Range mode, a laser image is acquired after
a color image is acquired.)

TIP The image size that can be acquired for a color 3D image is of 1024 x 768.

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TIP Range that can be acquired with color 3D image:

Standard objective lens 5x 7.2 mm
10x 1.8 mm
20x 660µm
50x 140µm
100x 107µm

TIP To the image acquired, a name will be assigned with a time to the said image
when it was acquired and it will be displayed on title bar of image display
section.
At this time, the image that appears in image display section is the intensity
image acquired with laser microscope. To display color 3D image, mouse-
right-click over the image display section and select [Image kind] – [Color]
from pop up menu. To display in 3D, see “2-2 3D display” of this chapter.

With use of the sharp filter or the contrast filter, it is possible to enhance the
TIP
quality of the color 3D image.
See “1-5-7Detail setting of TV observation”.

When <3D Acquire> button is clicked during acquisition, the acquisition can
TIP
be stopped halfway.
However, none will remain in the image list section.

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6 Acquisition of DIC color 3D image

It is possible to acquisre an image by mixing an incident-light Nomarski Differential
Interference Color (DIC) image and a color 3D image.

1. Preparation before acquisition of DIC/Color 3D image

Prior to starting the acquisition, perform the items described in (1) and (2).

(1) Setting 3D Acquisition Area of Laser Image

See User's Manual - "VI. Application, 1-2-2 Acquisition of 3D image (Extended
image)”, “1. Setting acquisition range” through “3. Pitch setting for 3D
acquisition".
(2) Adjustment of Color DIC Observation
See User's Manual - "III. Getting started with the OLS, 3-3-4 Induced-light
Nomarski differential interference observation.

2. Procedures for DIC color 3D Image Acquisition

1) Click the <3D Acquire> button while the <DIC-C> button is being set to the
"pressed" state.
The following message will appear.

2) Verify that DIC observation is ready as mentioned below and then, click the
<OK> button.
• The Analyzer and the Polarizer are entered light path.
• The Differential Interference Slider is entered the light path.
3) Acquisition for the DIC color Image will be started.

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4) When acquisition of the DIC color Image is completed, the following message
will follow to appear.

5) Verify that the sliders mentioned below for the DIC observation are pulled out
and then, click the <OK> button.
• the analyzer, the polarizer
• the differential interference slider

NOTE If a laser image acquisition were done without pulling out the analyzer,
the analyzer may be changed in quality with the laser.

6) Acquisition for the laser image will be started.

7) Since the following message box appears upon completion of the laser image
acquisition, wait as-is. When acquisition is completely done, the <3D Acquire>
button will return to the original state and the image acquired will be displayed
in the Image Display Window.

Range that can be acquired with color 3D image:

TIP Standard objective lens 5x 7.2 mm
10x 1.8 mm
UMPLFL 20x / UMPLFL 20x BD660µm
50x 140µm
100x 107µm

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1-2-3 Acquisition in XZ Scanning Mode

The following operations are available only with a system equipped with the XZ
measurement function (optional).

The XZ image can be acquired by scanning the intensity data of a line along the X-axis
on an XY (2-Dimensional) plane while varying the scanning height.
Z

Y X

1 Setting range of XZ image acquisition

1. When <XZ> button is clicked, the panel to acquire a XZ image will be opened.
<XZ> button 2. Set Z scanning range with anyone of the following methods.
z Upper and lower limit are specified (Manual mode).
... When wishing to set the limits by seeking upper and lower limit as the height
of a specimen is unknown.
1) Select [Manual] tab. The display will change as shown below.

<Top> button End position (uppermost

position) for XZ scanning
range

<Bottom> button
Start position (lowermost
position) for XZ scanning
range

2) Using <Z Pos. Move> button or mouse wheel button, move Z position so
as to bring the bottom surface of a specimen to appear. When <Bottom> is
clicked, current Z position will be registered as start position (lowermost

<Z Pos. Move> buttons position) of XZ scanning range. Likewise, move Z position so as to bring
the top surface of a specimen to appear and click on <Top> button so that
current Z position will be registered as end position (uppermost position) of
XZ scanning range.
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3) [Z Navigator] as shown below will appear. The relation of uppermost

position (top), lowermost position (bottom) and current Z position can be
verified.

End position (uppermost

position) for XZ scanning
range

Current Z position

Start position (lowermost

position) for XZ scanning
range

z Range is set with current position as reference (Range mode).

... When the height of a specimen is known, more or less.
1) Select [Range] tab. The display will change as shown below.

[Range] scroll button

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2) Use [Range] scroll button to set a scanning range. The position lowered by
a certain amount of distance from current Z position is registered as start
position (the lowermost position) for every objective lens and, depending
upon a range set, the end position (the uppermost position) will be
determined.
When setting [Range], allow a slightly greater value than the expected
height of a specimen to be measured.
End position

Standard objective lens 5x 80µm

Range 10x 20µm
20x 6.4µm
Current Z 50x 1.8µm
position 100x 0.5µm
Start position

TIP To detect the surface of a specimen, it is necessary to set the start

position at a position slightly lower than the position where the
image is focused with confocal scanning.

2 Setting pitch of XZ image acquisition

Set the distance that the revolving nosepiece moves in the Z direction per step with the

[Pitch] scroll button [Pitch] scroll button.

The number of steps required is calculated based on the acquisition range and [Pitch],
and displayed in [Total number of steps].
[Total number of steps]

NOTE The total number of steps is calculated after [Range] and [Pitch] is set. If
the calculated number exceeds the specified limit, the value in [Range] is
displayed in yellow.

In this case, modify [Range] and/or [Pitch] to accommodate the number

of steps within the limit.

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3 Acquiring the XZ image

Click on <XZ Acquire> button. The acquisition will take place.
During acquisition, the state in progress can be verified on [Z Navigator]. When
acquisition is done, the button will return to the original state and image acquired would
<XZ Acquire> button
appear in image display section.
End position (uppermost
position) for XZ scanning
range

Current Image
Acquisition Position

Start position (lowermost

position) for XZ scanning
range

To the image acquired, an image name added with the time acquired will be assigned
and the said image name will be displayed on title bar of image display section.

TIP The size of the XZ image is set according to the number of steps. The
acquired image takes the minimum size that can accommodate the XZ
image among the image sizes available using the [Size] scroll button. As a
result, the upper part of the image may contain an area without any data.

TIP When image acquisition is performed while [Profile Display] window is

displayed, the process may be paused with interrupted message when
process load is getting heavy. In this case, detach the [Profile Display]
window on the image or turn it to Non-display mode and then, perform the
acquisition again.

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Microscope /Save

1-3 Save

1-3-1 Save of image acquired

1 Save of image acquired

Click <Save> button on tool bar and select “Image” from drop down list. [Save As]
dialog box will appear. Click <Save> button in dialog box so that the file will be saved in
the folder programmed.
<Save> button

Folder to save

Name to save

Type of file

Fig. 1-7 [Save As] dialog box

2 Selection of extension
Select extension from [Save as type] drop down list.
• OLS Image (*.ols): It is the dedicated type to LEXT-OLS software.
It is used for image measurement or processing with
this software. When image acquisition is done,
scanning condition will also be saved in the same
file.
• Bitmap (*.bmp): Windows Standard luster type. Image in TV
observation is saved in bitmap format.
• TIFF file (*.tif): Tagged-Image-File Format (TIFF). It is used when
image is exchanged between application software
and or computer.
• JPEG file (*.jpg): Joint Photographic Expect Group (JPEG). It shrinks
data and saves data in a small data file.

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3 Designation of folder to save and file name

Select folder to save and enter file name to save.
(System software assigns file name to the image to be saved with extension (*.ols)
attached at the time when it was acquired. Change the file name to appropriate name
desired.)

NOTE When color 3D image is saved, two files, i.e., .ols file (laser
microscope image) and .bmp file (Color image) will be created
under the same file name. Do not make folder to save for these
files separate. In addition, do not change file name.

1-3-2 Save of profile

Profile of Image data can be saved in CSV format. However, the data to be saved in
this format are section data of image in horizontal or vertical direction only. Cross-
section data averaged and cross-section data for coarse analysis cannot be saved.
Cross-section data of oblique line /perpendicular line can only be saved from Profile
Display Window for line width measurement and multi-level measurement. (See TIP in
page of VI 1-31.)
A plural number of section data in one image can however be made in one file.

TIP When [Use Interpolation] check box was ticked off when a spline offset was
done for Step measurement, the data on the spline curve would be saved.

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Microscope /Save

1 Detail setting of save data

Click ▼located at right side of <Save> button on tool bar and select “Save Profile” from
drop down list. [Details…] window will appear. Set section data to save in [Details…]
<Save> button
window. When all settings are done, click <OK> button.

[File info.] option button

[Direction] option button
It sets whether section data is saved
It selects direction when data for one together with file information. When
section is saved. “Do” is selected, the following info will
be saved.
• System name (OLS)
• Image data name
[Data line] option button • Data kind (intensity/Height)
It sets whether data is output with • XY position change factor
scale info. • Scale unit
• Section direction
• Section position
[Data Information] option button
It selects information of image of
which section data is saved.
[Profile specification] option button
[Section direction] option button It specifies whether section data is
saved for one line or a plural number of
It selects direction of which section is lines.
saved.
• “Position”
Select when section data is to be
saved for one line. Set line with scroll
bar.
• “Multiple lines number”
Select when section data for Multiple
lines are saved in one file. Enter
lines in text box by pointing off with
comma.
• “Range”
[Interval in profile line] scroll bar Select when section data for
consecutive plural lines are saved in
It sets interval of section data to be
one file. Set start and end line and
saved in one line.
interval with scroll button.

<OK> button <Cancel> button

It updates details set. Details are not set.

Fig. 1-8 [Details…] window for section data

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Microscope / Save

When error occurs in each setting, message as shown below will

NOTE
appear. Click <OK> button in the message and verify the value of
the setting item. After correcting the value, click <OK> button in
[Details…] window.

2 Designation of folder to save and file name

As [Save As] dialog box is displayed, select folder to save and enter file name.
Extension (*.csv) will automatically be attached.

Folder to save

Name to save

Type of file

Fig. 1-9 [Save As] dialog box

NOTE When the number of pixels to output is large, it may take several
tens of seconds until the output process is completed.

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Microscope /Save

NOTE If an image is pasted with use of analySIS LEXT software available

at option and; when data exceeding 10M pixels is to output, it may
be unable to acquire sufficient memory for output. In such a case,
brake up the output area or reduce number of data by enlarging
sampling intervals.

TIP In case that line width or level difference is measured, display pop up
menu over [Profile display] window so that section data displayed in
[Profile display] window can be saved.
1. Mouse-right-click over [Profile display] window.
2. Select [Save Profile] command from the pop up menu displayed.

3. [Details…] window will appear.

Subsequently, section data can be saved in the same operation.
However, settings for [Data Information], [Direction] and [Profile
Specification] cannot be changed in [Details…] window. These are set
with profile displayed in measurement of line width or step.

TIP File of CSV format can be handled with spreadsheet software like
Microsoft Excel commercially available.

See instruction manual of spreadsheet software and find out whether it

can handle CSV format or not.

TIP Slice (cross-section) data is output in original value all the time.
When maximum value and minimum value are set with Display Contrast
Setting (see this chapter 2-7) for this time, the scale value would appear
on profile as if the minimum value becomes to zero.
For this reason, the range of value that is output to CSV file is different
from the range of scale value on profile to be displayed.
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1-3-3 Save of acquisition condition

1. Select <Image> - <Acquisition Parameters> - <Save> from menu. [Save Setting]
window will appear.

[Comments] text box

Key-in comment.

Fig. 1-10 [Save Setting] window

2. Check the check box indicating save condition.

3. Enter comment in [Comment] text box.
4. Click on <Save> button. [Save] dialog box will appear.
5. Specify a folder directed and a file name and then, click on <Save> button. The
condition checked on [Save Setting] window will be saved to a file. It will
automatically come with the extension (*.cnd).

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Microscope /Open

1-4 Open

1-4-1 Saved image call

Image file saved in disk can be called out.
System software can handle up to 10 images with image acquisition or file call out. In
case that file beyond allowable number is to be called out, delete unnecessary images.
(Regarding delete method, see “2-14 Delete of display image” in this manual.) In case
that delete of image is not done and 11th image is called out, the oldest image acquired
in the system would be deleted.

NOTE When image files pasted with use of the optional software analySIS
LEXT are opened, number of images that can be opened is lesser than
10.

1. Select <Open> button from tool bar. [Open] dialog box will appear. Specify folder of
the image to be called out and also specify name and type of file to open the file.
<Open> button

The image file selected

at left side appears as a
preview image.
It appears as an intensity
Folder to call image.

Image File

Type of file

Fig. 1-11 [Open] dialog box

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NOTE File of TIFF format can also be called out. It is normally used for
display and reference purpose, but it should be remembered those
files are intended to be simply displayed and viewed. Note that the
values displayed as image information do not reflect the conditions
during image capturing.
The results of image processing and measurements are also
incorrect. Use them only as reference values obtained by
calculation based on the number of pixels.
File of other type cannot be called out.

z Loading a plural number of image files simultaneously

In the file list on the [File] dialog box, drag the mouse over the name of files or select
name of files while SHIFT key or CTRL key is being pressed and a plural number of
image files can be specified and called out.

TIP The maximum number of image files that can be specified and called out at
one time is 10.

NOTE Do not exercise any other operation until the loading of the last image
file specified is completed.

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NOTE When a plural number of image files are loaded simultaneously, auto
execution of recipe cannot be done.

z To Open Image File from Windows Explorer

It is also possible to open an image file with the following methods.
• On Windows Explorer, drag a file of OLS image and drop it over the display section of
the Image List section or Image Display section.
• On Windows Explorer, double-click on a file of OLS image.

1-4-2 Loading Acquisition Condition from Image Information

In case that scanning condition when the saved image was acquired is required as
reference, display pop up menu over the image and image information of the image
saved can be viewded.

1. Mouse-right-click over image.

2. Select [Image Information] from pop up menu displayed. [Property] window will
appear.

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(Depending upon how it was specified when the acquisition condition was saved, the
acquisition condition that appears is different.)
3. Since a list of acquisition conditions appears, check the check box indicating the
condition to be loaded.
4. Click on <Apply> button so that the acquisition condition checked will be set to
[Microscope] window.

TIP Max. number of input comment characters that can be displayed as comment
in image display section are of 40 characters in case of alphanumerical figures.

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1-5 Detail setting

1-5-1 Detail setting of laser microscopy observation

To do detail setting of laser microscope, press <LSM> button and opining [Settings]
window. Each setting can be executed by changing tab.
<LSM> button

Fig. 1-12 [Settings] window

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1-5-2 Detail setting of Z position (Focus)

Detail setting of Z position is done on Focus tab.

1 Registration of Z position
Press <Set as Home> button, and current Z position would be registered as Home
position. When <Home> button of [Microscope] panel is clicked, Z moves to Home
position registered. In case that checkbox of [Go on start-up] is checked, Z moves to
Home position at start-up time.

<Home> button on [Microscope] panel

2 Registration of Z lower limit position

In case that <Set as Limit> button is pressed, current Z position would be registered as
lower limit position. In case that checkbox of [Use Limit] is check, the rule of lower limit
position registered will be turned enable.

3 Enabling Auto-Execute 1-Push Gain

When [Auto-execute 1-push Gain] check box is checked, 1-Push Gain feature will
consecutively works after Auto Focus was executed.

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1-5-3 Detail adjustment of brightness (Laser)

Detail adjustment of brightness is done on Laser tab.

1 Laser output adjustment

Adjust laser output with [Level] slider. In case that specimen receives damage by laser,
adjust laser output.

TIP In case that sample does not receive damage, it is recommended that the
laser is used at level of 100.0.

2 Offset adjustment of live image brightness

Brightness of confocal live image is compensated and adjusted with [CF] slider and, in
case of non-confocal live image, [NCF] slider is used for offset adjustment of the
brightness.

[Offset] slider (Non-confocal and Confocal)

NOTE When a 3D image is acquired in Auto mode, set the offset value to 0
or less.

3 Brightness Adjustment at 1-Push Gain

Set the level of which brightness is adjusted at 1 Push Gain mode.
It can be set in 10 levels and; the smaller value makes it darker and larger value makes it
brighter.

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1-5-4 Auto save of image acquired (Auto save)

Auto save of image acquired is done on Auto Save tab.

1 Specifying folder of auto save

Select folder to which image is auto saved with <..> button. Folder selected will be
displayed in text box. When checkbox of [Destination folder] is checked, the setting
details turn valid.

2 Setting name for the file to be saved automatically

Enter file name for the image to be saved automatically in text box. At the end of file
name entered, number will be attached and saved. Set first number with scroll button.
Subsequent number will be counted up automatically. When checkbox of [File name] is
checked, the setting details turn valid.

3 Entering comment to the image to be saved

Enter comment for the image file saved automatically in [Comment] box.

4 Setting additional output

When [Additional output] check box is checked, an image file of JPEG or BMP type can
be output simultaneously with OLS file. Select a file type to output from the drop down
list located at right side.

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5 Enabling auto save

Click <Apply> button. Acquired image will be saved automatically with settings
described in previous sections, 1 though 3.

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1-5-5 Detail setting of image acquisition (Acquire)

Detail setting of image acquisition is done on Acquire tab.

1 Adjustment on number of images to be integrated

It is to set number of images to be integrated for one image update with use of [Average]
scroll button. With this setting, number of images programmed would be integrated
and the smoothed image will be displayed as one-time update. The more the number of
images to be integrated, the more update takes longer time; however, image noise can
be made on average.

2 To remove height noise over 3D image

If the check box [High] is selected, the height data of saturated portion on the 3D image
is interpolated with peripheral data. If the check box [Low] is selected, height data of 0-
intensity portion on the 3D image is interpolated with peripheral data.

NOTE This method is valid to use Fine or Fast mode in 3D-image

acquisition.

3 Auto Adjustment of Contrast at 3D Image Acquisition (AutoFineView)

When [Enable] check box is checked, LUT of an intensity image at 3D image acquisition
is automatically adjusted and an image of good contrast can be acquired.

Regarding LUT, see "2-4 LUT setting" in this chapter.

TIP Auto Fine View can be performed manually after image acquisition. In this
case, click on <Auto Fine View> button on [Set LUT] window.
For further details, see "2-4 LUT setting" in this chapter.

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4 Adjustment of brightness at 3D image acquisition

Brightness at 3D image acquisition can be set in maximum 5 levels including start
position.

• Using the <Brightness> button, current setting value can be set to the
sensitivity after change.
• Using the <Position> button, current position can be set to the position after
change.
• Using the <Check> button, the setting can be verified.
• Using the <Clear> button, the setting can be deleted.

3D image is acquired by changing sensitivity in accordance with these settings.

Meanwhile, these settings can be turned valid when the check box [Enable] is checked.
When the check box [Enable] is checked, the marker appears at the lower right of
the <Acq-3D> button, which indicates the Multi level gain function is enabled.

NOTE The checking function is enabled in CF observation scanning with

LSM only.

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5 Detailed description

5.1 Brightness change

If the brightness change feature is used, it is possible to acquire the 3D image by
changing detecting sensitivity. Meanwhile, the number of changes is 5 times
maximum including the start position.

End It changes to “Sensitivity 1” at start up time.

Sensitivity 5 Upon completion of image at a step position
Change Position 5
Sensitivity 4
immediate before the position that is beyond
Change Position 4 the specified change position, the sensitivity
Sensitivity 3
changes to the sensitivity registered next.
Change Position 3
Sensitivity 2 Meanwhile, “Change Position 1” is the same
Change Position 2
as the start position of 3D scanning range that
Sensitivity 1
Start Change Position 1 is set in microscope control window.

Fig. 1-13 Brightness change of LEXT-OLS software

For example, if a sample having characteristics as shown below is measured, the
detecting sensitivity for 3D image acquisition may not be programmed properly
since the reflection rate of low and high and also the diffused reflection exist.
Z-axis
Surface of the sample

End
Sensitivity 3
Change Position 3
Sensitivity 2
Change Position 2
Sensitivity 1
Start Change Position 1
Reflection rate low Diffused Reflection rate high

In such a case, by using brightness change feature, it is possible to acquire the 3D

image in ways that the detecting sensitivity is changed according to the
characteristics.

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5.2 Setting conditions

1. Set the start position (lower limit) of 3D scanning range.
2. Moving Z position, adjust the detecting sensitivity.
3. Click <Sensitivity> button and register the detecting sensitivity of “after 3D
change”.
4. Move Z position to a point slightly before a point where the image quality
(brightness) changes significantly.
Seek a position where the sensitivity should be changed.
5. Click <Change Position> button and register the change position.
6. Set the 3D End Position.

TIP Repeat procedures 2 through 5 up to five times.

5.3 Changing conditions

1. Click the register number of condition that should be changed in the <Setting
conditions> list.
2. If the change position is changed, click the <Position> button.
3. If the detecting sensitivity after change is changed, click the <Sensitivity>
button.
4. The conditions specified are changed and the [Setting conditions] list will be
updated.

Since List No.1 is the start position of 3D scanning range, it cannot be

TIP
changed.

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5.4 Deleting conditions

1. Click the register number of condition that should be deleted in the <Setting
conditions> list.
2. Click the <Clear> button.
3. The condition specified is deleted and the [Setting conditions] list will be
updated.

TIP Since List No.1 is the start position of 3D scanning range, it cannot be
deleted.

5.5 Verifying conditions

1. Click the register number of condition that should be verified in the [Setting
conditions] list.
2. Click <Verify> button.
It moves to sensitivity change position registered in specified register number
and the sensitivity changes to the sensitivity registered.

NOTE
The verifying function is enabled in confocal observation only.

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1-5-6 Detail setting of observation method (Live)

1 Adjustment of update rate for live image

Update rate can be set by pressing [Standard] option button or [HighSpeed] option
button. In case that scanning is done in [HighSpeed] mode, update rate becomes faster
but quality of live image may get slightly deteriorated.

NOTE When [HighSpeed] option button is selected, display in 2 channels

cannot be done.

2 Fine adjustment of the center positions of the color and laser images.
Fine adjustment of the center positions of the color and laser images is required when
displaying the Wireframe of a color 3D image.
First display the LSM and color images in a 2Ch display. Display cross-lines in the two
live images using the [Display on laser image] and [Display on color image] checkboxes
respectively. Next, click on the <TV Adjust> button to display the detailed settings. Move
the position of the cross-lines on the color image using direction buttons (while fixing the
cross-lines on the laser image in place) to align the cross-lines on the two images, and
then click on the <SET> button.

Depending on adjustment, data like a belt may appear due to an interpolation process at
a place that is separated from the acquisition area.

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1-5-7 Detail setting of TV observation

Detail setting of TV observation is done by pressing <TV> button to open [TV Setting]
window.
<TV> button

Fig. 1-14 [TV Setting] window

1 Setting of auto gain and gamma offset

Settings can be changed with use of [Auto Gain Level] scroll button and [Gamma] drop
down list. Click <Auto Gain Control> button so that setting would be updated.

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2 Setting white balance

Select white balance value already registered from the drop down list. In white balance
value registered, the value registered to the system in advance as default value and the
value independently registered (user setting 1~3) exist.
As needed, it should be adjusted, using [Red gain] or [Blue gain] scroll bar. If the value
should be registered after adjustment, select any one from “User Setting 1” through
“User Setting 3” and then, click on <Register> button.

3 Adjustment of Image Quality

[Sharp] up down control

The level of the sharp filter is set.
The larger the number is, the edge of image will be
sharpened more.
When the sharp filter is applied, the speed of updating the
live image will get slightly slower.

[Contrast] up down control

The level of the contrast is set.
The larger the number is, the contrast will be enhanced more.
When the contrast filter is applied, the speed of updating the
live image will get slightly slower.

[Sharp] up down control is a feature to make the 2D color image or the Color 3D image
clearer by applying a sharp filter.
The level of the sharp filter can be changed from 0 through 10.
When the number is set to 0, this feature is turned OFF and; the larger the number is,
the level will get stronger.
The effect of the sharp filter can be verified, in real time, on the color live image window.
Be careful that, with this feature, the noise on the image will also be processed.

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[Contrast] up down control is a feature to enhance the contrast on the 2D color image or
the Color 3D image.
The level of the contrast can be changed from 0 through 10.
When the number is set to 0, this feature is turned OFF and; the larger the number is,
the contrast will get stronger.
The effect of the contrast enhancement can be verified, in real time, on the color live
image window.

TIP Setting values for the [Sharp] and the [Contrast] will be restored at next
software start up time.

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1-5-8 Parfocality adjustment

Parfocality between objective lenses is adjusted.

NOTE • If an adjustment value is newly set, it cannot be returned to original

adjust value.
• If an adjust value is mistakenly entered, there may be a potentiality that
an objective lens may hit with specimen when the objective lens is
switched over. Be careful when the adjust value should be changed.

Fig. 1-15 [Adjust Parfocality] Window

<Set> button: It specifies focused focal point to each objective lens.

[Offset]: It indicates parfocality adjustment values
[Position]: It indicates focused focal point set for each objective lens.
<Load> button: It indicates parfocality adjustment values registered in controller.
<Calculation> button: It calculates parfocality adjustment value.
<Save> button: It registers parfocality adjustment value to controller.

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1 Opening window for parfocality adjustment

Select <Adjust Parfocality> from <Tools> menu. [Adjust Parfocality] window appears.

2 Registering parfocality adjustment data

1. Initialize the microscope.
2. Perform confocal laser image observation with the objective lens of the highest
magnification mounted and bring the specimen under observation in focus.
3. Click <Set> button of number of objective lens used for observation. Current Z
position will enter [Position].
4. Change the objective lens with the one of one rank lower magnification and perform
confocal laser image observation and bring the specimen under observation in
focus and then, click <Set> button.
5. Repeat procedure 4 to all other objective lenses.
6. Click <Calculation> button. Adjustment value would be calculated between
objective lenses and it would be set to [Offset].
7. Click <Save> button.
8. To make registered parfocality adjustment values valid, turn power of the controller
to ON again.

Parfocality adjustment values can easily be set if auto focus is executed

TIP
against flat mirror with each magnification.

In case a number where no objective lens is attached exists, enter a Z

NOTE
position of adjacent number in [Position].
For example, in case of revolving nosepiece of 6 holes, if objective
lenses are attached to No.1 through No.5 and; if No.6 is blank, enter the
value of No.5 in [Position] of No.6.

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3 Verifying parfocality adjustment data

It is possible to see parfocality adjustment values registered in controller.
1. Click <Load> button. Parfocality adjustment values registered are displayed.

Fig. 1-16 [Adjust Parfocality] Window

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1-5-9 Setting Height Image Offset

The error included in an image at 3D image (extended image) acquisition is corrected.
Since data for height image offset is programmed in the system in advance, leave the
height image offset function set to "ON "as is. In addition, it is also possible to register
independent data for height image offset.

1. Select [Define Flatness Correction] from [Tools] menu. [Set Flatness] window will
appear.

[Correction] option button

• ON
When an image is acquired, the
<Register> button image is compensated, using
Image displayed in [Image Display] data for height image offset
window will be registered as data for owned by the system.
height image offset.
• OFF
Image is acquired without
performing height image offset.
<Delete> button • User
Data for height image offset selected When an image is acquired, the
from [Registered data] list will be image is compensated, using
deleted. data for height image offset
independently created.

[Registered data] list

It indicates the name of objective
lens and zoom magnification used to
acquire and register data for height
image offset.

Fig. 1-17 [Set Flatness] Window

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z Height Image Offset

1. With [Correction] option button, select "On” or "User”. In case ”User” is selected,
perform the following "● Registration of Data for Height Image Offset".
2. Acquire a 3D image. The height image is compensated and the said image will be
displayed in Image Display section. Regarding acquisition method, see "1-2-2
Acquisition of 3D image (Extended image) ".

z Registration of Data for Height Image Offset

To register data for height image offset, acquire images with the following setting
conditions.
• 1024x1024 Size
• Confocal mode
• Fine mode
• 3D (Extended) Image Acquisition

[Correction] option button

• ON
<Register> button When an image is acquired, the
image is compensated, using
Image displayed in Image Display
data for height image offset
section is registered as data for
owned by the system.
height image offset.
• OFF
Image is acquired without
performing height image offset.
• User
When an image is acquired, the
image is compensated, using
data for height image offset
independently created.

[Register Data] list

It indicates the name of objective
lens and zoom magnification used to
acquire and register data for height
image offset.

Fig. 1-18 [Set Flatness] Window

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1. With [Correction] option button, select "User".

2. Acquire a 3D image of flat mirror surface. At this time, the image should be
acquired by setting conditions in confocal observation, 1024x1024 size and Fine
mode (select "Fine" with <3D Acquire Change> button). Regarding the details of
acquisition method, see "1-2-2 Acquisition of 3D image (Extended image)".
Further, in case the image of flat mirror surface was acquired and saved in a file;
load the image from the file. Regarding details of operating method see "1-4-1
Saved image call".
3. Improve image quality of flat mirror surface acquired or loaded from the file.
Regarding details of operating method see "3 Image processing".
4. Click on <Register> button. The name of objective lens and zoom magnification of
the image when it was acquired will be displayed in [Registered data] list.

In case of image acquisition hereafter, the image compensated with height image using
data registered for height image offset will be acquired.

NOTE In case "User" is selected with [Correction] option button, no offset is

imposed on any image except for the images with conditions
registered by the said user (objective lens and zoom magnification).

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z Delete of Data for Height Image Offset

<Delete> button
Data for Height Image Offset
selected in [Registered data] list will
be deleted.

[Registered data] list

It indicates the name of objective
lens and zoom magnification used to
acquire and register data for height
image offset.

Fig. 1-19 [Set Flatness] Window

1. Select data that should be deleted from [Registered data] list. There are a few
methods.
• To select one data, click on data that should be deleted from [Registered data]
list.
• To select a plural number of data that exist consecutively, click on the data
that should be deleted first. While pressing Shift key, click on the last data that
should be deleted. Alternatively, drag from the first data to the last data that
should be deleted.

2. Click on <Delete> button. The data selected will be deleted from [Registered
data] list.

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1-6 Use Auto Stage

The following operations are available only with a system equipped with the auto
stage (optional)

Auto stage can be moved according to software. The stage movement destinations can
be registered, and the coordinate axis inclinations and origin coordinate points can be
modified according to specimens.

registered destination
When moving to a pre-
is registered
When no destination

Register destination. Load the registered point

(1-6-1) (destination) from a file.
(1-6-2)

Save the registered point.

(1-6-3)

Replace the specimen.

Adjust the coordinate axis

inclination. (1-6-4)

Modify the origin point coordinates.

(1-6-4)

Move the stage to the registered point.

(1-6-5)

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<Distance> button
<Alignment> button Shows the reference coordinates in
Displays a window to terms of the base position, which is
adjusting the coordinate the current position of the stage.
axis inclinations Base position is displayed as a
green cross in the sample viewer.
<Register> button When the stage is moved to another
Displays a window to register the point, the displacement amount from
stage movement destination the reference position are displayed
coordinates. on the top right of the sample viewer.

[Registered No.] scroll button

Displays the number of the <Move to registered point>
registered point selected. button
Moves the stage to the registered
<Move to previous point> point with the number selected at
button [Registered No.] scroll button.
Moves the stage to the registered
point with the previous number • The stage moves while one of
selected at [Registered No.] scroll the arrow buttons is keep
button. pressing.
<Move to next point> button The arrow indicates the
direction for observation.(not the
Moves the stage to the registered stage moves to.)
point with the next number
selected at [Registered No.] scroll • Click the diamond-shaped
button. button to vary the stage
1
movement speed* in 4 steps. A
<Origin> Button larger diamond indicates, a
Moves the stage to the alignment higher stage moves. When
origin. inside of the diamond is whited
( ), the stage moves in the
<Exch.> button steps set in [Set step
Moves the stage to enable movement].
replacement of sample.

[Set step movement]

[Sample viewer]
Set step to move the stage in
Shows the shape of the specimen the [X] / [Y] textbox. When
and registration position. The inside of the diamond is whited
orientation of the specimen is the ( ), click arrow button and
view looking from upward. The the stage moves according to
current position of the stage is the setting.
shown as red cross, and the
current coordinate is shown on the Uncheck [Set up automatically]
top left. checkbox, stage moves in the
When double-click an area in the step setting. Check [Set up
viewer, the stage moves to the automatically] checkbox, stage
coordinates of the position. (The moves in same amount as the
shape of specimen shown is
Fig. 1-23 [Stage Control] Window image size.
approximate. It may not perfectly
coincide with the actual shape of
the specimen.)
Current coordinates will be
updated when [Stage] window is
active.
The joystick can use in the following conditions.
TIP
• The stage is returned to origin but image acquisition is not executed.
• The stage is returned to origin and image search, except AF, is being
performed.
• The OLS software is not running.

*1 The stage movement speed is automatically defined according to objective magnifications.

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Do not touch the stage during moving.

Otherwise, your finger or hand may be caught by the stage or stage
holder.

NOTE The following message appears when the emergency stop switch is
pressed. In this case, click <OK> button and software will terminate.

The emergency stop switch is designed to stop only the auto stage. As a
result, the up/down movement of the revolving nosepiece does not stop
at the moment the switch is pressed.

TIP When the system is initialized, the coordinates is shown as below.

+

- +
(0,0)

-
The coordinates are changed by moving the origin or executing alignment.

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1-6-1 Register the Destination

The destinations of stage movement can be registered in advance.

<Register> button
Click <Register> button in [Stage Control] window so that the button is pushed in.
(Pressed-in status) [Stage coordinates registration] window will appear.

<Release> button [Registered point] list

Deletes the registered points specified in Shows the registered points (coordinates).
the [Registered point] list. Click column [Move] of each registered
point, it changes to “Off” status and the
<Register> button point can be excluded from the destination.
Adds the coordinates displayed in the Click the same column again, and it returns
[Registered coordinates] textbox to the to the previous status.
[Registered point] list.

[Method] dropdown list

Selects the method to register coordinate.

[Registered No.] scroll button

Select the number of the registered point.

[Registered coordinates] textbox,

<Current pos.> button
Input the coordinates of the point to be
registered from the keyboard. Click the
<Current pos.> button, it loads the
coordinates of the current stage position
in the textbox.

[Row number] scroll button,

[Row distance] scroll button
Set the number of rows and interval between
them.

[Column number] scroll button,

[Column distance] scroll button
Set the number of columns and interval
between them.

[Sample Type] dropdown list

Selects the shape and size of the sample.

<Select shape > button

When the sample is a wafer, select the
orientation of the marking and the type here.
Clicking the diagram changes the orientation
and type. Adjust the orientation of marking to
the overlook of the stage.

[Reference]
When grid type of registered point will
create, the current stage position is the base
position.

Fig. 1-24 [Stage coordinates registration] Window

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NOTE [Stage coordinates registration] window appears in case the

control panel is set to [Microscope] group. If it is changed to other
group, using <Control Panel Change> button, the [Stage
coordinates registration] window will not be displayed.

TIP To close [Stage coordinates registration] window, click <Register>

button again which is displayed in the pressed-in status in [Stage
Control] window.

The coordinates can be registered by using an actual specimen, entering the already-
known values of the coordinates, or from a grid by setting the column and row.

z Register coordinates using an actual specimen

1. To register accurate coordinates on the specimen, adjust the coordinate axis
inclination or change the origin coordinate points as required. For further details,
see 1-6-4 Alignment (Adjusting the Coordinate Axis Inclination).
2. In [Sample viewer] of [Stage Control] window, double-click the mouse on the
approximate position you want to observe.
3. While observing the image display section, use the
joystick or click the white arrow buttons in [Stage Control]
window to move the stage, so that the position you want to
observe comes within the image display section.
4. When the position you want to observe comes in the image display section,
double-click on the image position you want to register.
5. From [Method] dropdown list in [Stage coordinates registration] window, select
“Free”.
6. Click <Current pos.> button in [Stage coordinates registration] window. The
coordinates of the current stage position are loaded in [Registered coordinates]
text boxes.
7. Click <Register> button in [Stage coordinates registration] window. The Registered
<Register> button coordinates are added to [Registered point] list.

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z Register coordinates by entering their values

1. From [Method] dropdown list in [Stage coordinates registration] window, select
“Free”.
2. Enter the coordinates values in [Registered coordinates] text box in [Stage
coordinates registration] window.
3. Click <Register> button in [Stage coordinates registration] window. The registered
<Register> button coordinates are added to [Registered point] list.

z Register coordinates by setting a grid

1. Before registering continuous coordinates in the form of a grid, double-click the
mouse on the approximate position you desire as the base point in [Sample
viewer] in [Stage Control] window.
2. While observing the image display section, use the
joystick or click the white arrow buttons in [Stage Control]
window to move the stage, so that the position you want to
observe comes within the image display section.
3. When the position you desire as the base comes in the image display section,
double-click the position you want to register in the image display section.
4. From [Method] dropdown list in [Stage coordinates registration] window, select
“Matrix”.
5. Set the numbers and distances of the grid of coordinates in [Column number],
[Column distance], [Row number] and [Row distance] scroll buttons in [Stage
coordinates registration] window.
6. In [Reference] in [Stage coordinates registration] window, select the point you
desire as the position of the current stage position.
7. Click <Register> button in [Stage coordinates registration] window. The registered
<Register> button coordinates are added to [Registered point] list.

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z Delete Registered coordinates

1. In [Registered point] list in [Stage coordinates registration] window, select the
registered point number(s) to delete. There are some methods to select the
number.
• To delete single registered point, click its number.
• To delete more than one, continuous number of registered point, click the
number of the smallest registered point number. Then, while holding the Shift
key, click the number of the largest registered point. Multiple registered points
can also be selected by dragging the mouse from the smallest registered
point number to the largest registered point number.

2. Click <Release> button in [Stage coordinates registration] window.

<Release> button

z Change registered coordinates

1. From [Method] dropdown list in [Stage coordinates registration] window, select
“Free”.
2. Select the number of registered point to change with [Registered No.] scroll button
in [Stage coordinates registration] window.
3. Set the coordinates in [Registered coordinates] textbox by either clicking <Current
pos.> button to load the current stage position coordinates, or entering the actual
values from the keyboard.
4. Click <Register> button in [Stage coordinates registration] window. The registered
<Register> button coordinates in [Registered point] list are modified.

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1-6-2 Load Registered Points

Load the registered point from a file and displayed in [Registered point] list.

NOTE If registered points (Registered coordinates) are already displayed in

[Registered point] list, the displayed registered points will overwrite
to the loaded registered points when registered points are load from a
file. If the registered points displayed are necessary, save them before
loading new registered points from a file. To save procedure, see 1-6-
3 Save the Registered Points in this section.

1. Click <Register> button in [Stage Control] window so that the button is pushed in.
[Stage coordinates registration] window will appear.
<Register> button
(Pressed-in status)
<Load> button
Loads registered points from a
file.

[Registered point] list

Shows the registered points
(coordinates). Click column
[Move] of each registered point,
it changes to “Off” status and
the point can be excluded from
the destination. Click the same
column again, and it returns to
the previous status.

Fig. 1-25 [Stage coordinates registration] Window

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2. Click <Load> button in [Stage coordinates registration] window. [Open] dialog box
will appear.
<Load> button

Folder to load

File name to load

Fig 1-26 [Open] Dialog Box

3. Select the folder to call.

4. Select the file name to call.

5. Click <Open> button. The registered points are displayed in [Registered point] list
in [Stage coordinates registration] window.

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1-6-3 Save the Registered Points

The registered points listed in [Registered point] list can be saved in a file.

1. Click <Register> button in [Stage Control] window so that the button is pushed in.
[Stage coordinates registration] window will appear.
<Register> button Registered point] list
(Pressed-in status) Shows the registered points (coordinates). Click
column [Move] of each registered point, it
changes to “Off” status and the point can be
excluded from the destination. Click the same
<Save> button column again, and it returns to the previous
Saves the registered points status.
in a file.

Fig. 1-27 [Stage coordinates registration] Window

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2. Click <Save> button in [Stage coordinates registration] window. [Save] dialog box
will appear.
<Save> button

Folder to save

File name to save

Fig. 1-28 [Save] Dialog Box

3. Select the folder to save and enter the file name.

TIP
The file will save in the CSV format (with extension .csv).

4. Click <Save> button.

If the file with same name as entered here already exists, message
NOTE
box will appear and ask if to overwrite the existing file. If you do not
want to overwrite, click <No> button and enter another save file
name.

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1-6-4 Alignment (Adjusting the Coordinate Axis Inclination)

A line connecting two arbitrarily selected points on the specimen can be set as the X- or
Y-axis.

1. Click the <Alignment> button in the [Stage Control] window so that the button is

<Alignment> button
pushed in. The [Alignment] window will appear.

TIP If the alignment or the origin coordinates have already been modified, the
following message is displayed when the <Alignment> button is clicked.

<Close> button
Closes current window.

<Origin> button <Align 2> button

Click this button for setting Clicking this button, enter
the origin position. Input one point having the XY
items appear. coordinates already known
and also input them as the
coordinates after change.
<Slope> button
The software will move the
For use in setting the line origin for new coordinates.
connecting two arbitrarily
selected points as the X- or
Y-axis. It displays the input
parameters. <Align 3> button
Clicking this button, enter
two points having the XY
<Align 1> button coordinates already known.
Clicking this button, enter 3 In addition, enter the said
coordinates as the
points or more for updating
coordinates after change,
the origin and inclination. The i.e., new coordinates. The
coordinates for one point software will program new
entered for the Block 1 can origin and inclination.
be defined as the origin. The
origin and the points entered
in the Block 2 (2 through 20
points) will be used for
calculating a straight line of
the least square. Coordinates
related to the origin and
inclination of this line will be
updated so as to bring this
line in parallel with the X-axis. Fig. 1-29 [Alignment] Window

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z <Origin> button
Set the origin coordinates by the arbitrarily selected points on the specimen.

<Reset> button
Resets the current set of the
origin and the coordinate
axis.
<Origin> button
For use in setting the origin <Close> button
coordinates. It displays the Closes the current window.
input parameters.

<Add> button
Adds the current coordinates
in the [List of input points].

<Delete> button
Deletes the selected
coordinates from the [List of
input points].

<Move> button
Moves the stage to the
<Set> button alignment position selected
Sets the coordinate data in the list.
input in the [List of input
points].

1. Click the <Origin> button.

2. In the [Sample viewer] in the [Stage Control] window, double-click the mouse on
the arbitrary position of the point you desire.
3. In the image display section, double-click the point you desire and click the <Add>
button. The coordinates of the point are input in the [List of input points].
4. Click the <Set> button.

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5. Following confirmation message will appear. To confirm, click the <Yes> button.

TIP To check the coordinates of the current stage position, click the
<Current pos.> button in the [Stage coordinates registration] window.
The coordinates are loaded in the [Registered coordinates] textbox.

TIP Click the <Reset> button, and the origin coordinates of initial setting is
valid.
In case the alignment should be corrected after loading registered
points, click on <Reset> button, one time, and then, exercise the
alignment setting.

<Reset> button

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z <Slope> button
A line connecting two arbitrarily selected points on the specimen can be set as the X- or
Y-axis.

<Reset> button
Resets the current set of
the origin and the
coordinate axis.

<Close> button
Closes the current window.

<Slope> button
<Add> button
For use in setting the line
connecting two arbitrarily Adds the current
selected points as the X- coordinates in the [List of
or Y-axis. It displays the input points].
input parameters.
<Delete> button
Deletes the selected
coordinates from the [List
of input points].

<Axis> option button <Move> button

Selects whether the line
Moves the stage to the
connecting two points is
set as the X-axis or Y- alignment position selected
axis. in the list.

<Set> button <Direction> button

Sets the coordinate data Selects the positive or
input in the [List of input negative direction of the
points]. axis.

1. Click the <Slope> button.

2. In the [Sample viewer] in the [Stage Control] window, double-click the mouse on
the arbitrary position of the arbitrarily point you desire.
3. In the image display section, double-click the point you desire and click the <Add>
button. The coordinates of the point are input in the [List of input points].
4. Select a total of two points by repeating steps 2 and 3.
5. Select the [Axis] option button.
6. Select the [Direction].
7. Click the <Set> button.

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8. Following confirmation message will appear. To confirm, click the <Yes> button.

TIP To check the coordinates of the current stage position, click the
<Current pos.> button in the [Stage coordinates registration] window.
The coordinates are loaded in the [Registered coordinates] textbox.

TIP Click the <Reset> button, and the origin coordinates of initial setting is
valid.
In case the alignment should be corrected after loading registered
points, click on <Reset> button, one time, and then, exercise the
alignment setting.

<Reset> button

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z <Align 1> button

The coordinates for one point entered in the Block 1 can be defined as the origin. The
origin and the coordinates for 2 through 20 points entered in the Block 2 are used to
calculate a straight line of the least square. This line is turned to become as the X-axis
around the Z-axis as the center.
<Reset> button
Resets the current set
of the origin and the
coordinate axis.

<Close> button
Closes the current
window.

<Add> button
<Align 1> button Adds the current
coordinates in the [List
Clicking this button, enter 3 of input points].
points or more for updating the
origin and inclination. The <Delete> button
coordinates for one point Deletes the selected
entered for the Block 1 can be coordinates from the
defined as the origin. The origin [List of input points].
and the points entered in the
Block 2 (2 through 20 points) <Move> button
will be used for calculating a
Moves the stage to the
straight line of the least square.
alignment position
The coordinates related to the
selected in the list.
origin and inclination of this line
will be updated so as to bring
this line in parallel with the X-
axis.

<Set> button
Sets the coordinate data
input in the [List of input
points].

1. Click the <Align 1> button.

2. Click the <Block 1>.
3. Double-click a point arbitrarily selected on the Image Display Window and move it
to the center of the FOV – Field of View for observation where the origin should be
set.
4. Click the <Add> button so that the coordinates of the said point appear in the [List
of input points].

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5. Click the <Block 2>.

6. Double-click a point arbitrarily selected on the Image Display Window and move it
to the center of the FOV for observation as a point that should be registered on the
X-axis.
7. Click the <Add> button so that the coordinates of the said point appear in the [List
of input points].
8. Repeat step 6 and 7.
9. Click the <Set> button.
10. The confirmation message appears. If it is acceptable, click the <Yes> button.

TIP To check the coordinates of the current stage position, click the
<Current pos.> button in the [Stage coordinates registration] window.
The coordinates are loaded in the [Registered coordinates] textbox.

TIP Click the <Reset> button, and the origin coordinates of initial setting is
valid.
In case the alignment should be corrected after loading registered
points, click on <Reset> button, one time, and then, exercise the
alignment setting.

<Reset> button

TIP Two or more coordinates up to 20 can be entered in the Block 1. In

such a case, the center of mass of entered points is the origin.

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z <Align 2> button

Select one point having the XY coordinates already known and change the
coordiantes. In so doing, the software will set the coordinates changed as new
XY coordinates as if the coordinates already known are moved in parallel shift.
Therefore, after setting, the new XY coordinates will become the coordinates
already known.
<Reset> button
Resets the current set
of the origin and the
coordinate axis.

<Close> button
Closes the current
window.

<Align 2> button

Clicking this button, enter one
point having the XY coordinates
already known and also input <Add> button
them as the coordinates after Adds the current
change. The software will move coordinates in the [List
the origin for new coordinates. of input points].

<Delete> button
Deletes the selected
coordinates from the
[List of input points].

<Move> button
Moves the stage to the
alignment position
selected in the list.

<Set> button
Sets the coordinate data input in
the [List of input points].

1. Click the <Align 2> button.

2. Click the <Block 1>.
3. Double-click a point arbitrarily selected on the Image Display Window and move
the point that should be registered to the center of the FOV for observation.
4. Click the <Add> button so that the coordinates of the said point appear in the [List
of input points].
5. Enter the X and Y coordinate after change.
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6. Click the <Set> button.

7. The confirmation message appears. If it is acceptable, click the <Yes> button.

To check the coordinates of the current stage position, click the

TIP <Current pos.> button in the [Stage coordinates registration] window.
The coordinates are loaded in the [Registered coordinates] textbox.

Click the <Reset> button, and the origin coordinates of initial setting is
TIP valid.
In case the alignment should be corrected after loading registered
points, click on <Reset> button, one time, and then, exercise the
alignment setting.

<Reset> button

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z <Aling 3> button

Enter two points having the XY coordinates already known. In addition, enter
the said coordinates as the coordinates after change, i.e., new coordinates.
The software will program new origin and inclination.

<Close> button
Closes the current
window.

<Add> button
<Align 3> button Adds the current
Clicking this button, enter two coordinates in the [List
points having the XY coordinates of input points].
already known. In addition, enter
the said coordinates as the
coordinates after change, i.e., new <Delete> button
coordinates. The software will
program new origin and Deletes the selected
inclination. coordinates from the
[List of input points].

<Move> button
Moves the stage to the
alignment position
selected in the list.

<Set> button
Sets the coordinate data input in
the [List of input points].

1. Click the <Align 3> button.

2. Click the <Block 1>.
3. Click a point arbitrarily selected on the Image Display Window and move the point
that should be registered to the center of the FOV for observation.
4. Click the <Add> button so that the coordinates of the said point appear in the [List
of input points].
5. Click the <Block 2>.
6. Click a point arbitrarily selected on the Image Display Window and move the point
that should be registered to the center of the FOV for observation.
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7. Click the <Add> button so that the coordinates of the said point appear in the [List
of input points].
8. Enter the X1 and Y1 coordinates after change in the Pos. 1 on the <Block 1>
menu.
9. Enter the X2 and Y2 coordinates after change in the Pos. 2 on the <Block 2>
menu.
10. Click the <Set> button.
11. The confirmation message appears. If it is acceptable, click the <Yes> button.

TIP To check the coordinates of the current stage position, click the
<Current pos.> button in the [Stage coordinates registration] window.
The coordinates are loaded in the [Registered coordinates] textbox.

Click the <Reset> button, and the origin coordinates of initial setting is
TIP
valid.
In case the alignment should be corrected after loading registered
points, click on <Reset> button, one time, and then, exercise the
alignment setting.

<Reset> button

This function enables to set the origin and inclination from the new
TIP
coordinates but it does not extend or shrink the scale in accordance
with the new coordinates.

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1-6-5 Move to a Registered Point

The stage can be moved to a registered point (coordinates). The registered points are
displayed as white cross in [Sample viewer] in [Stage Control] window.

[Registered No.] scroll button <Move to registered point>

Select the number of the button
registered point. Moves the stage to the
registered point with the
number selected at [Registered
No.] scroll button.

<Move to next point> button

<Move to previous point> Moves the stage to the
button registered point with the next
Moves the stage to the number selected at [Registered
registered point with the No.] scroll button.
previous number selected at
[Registered No.] scroll button.

[Sample viewer]
Shows the shape of the specimen
and registration position. The
orientation of the specimen is the
view looking from upward. The
current position of the stage is
shown as red cross, and the
current coordinate is shown on the
top left.
When double-click an area in the
viewer, the stage moves to the
coordinates of the position. (The
shape of specimen shown is
approximate. It may not perfectly
coincide with the actual shape of
the specimen.)
Fig. 1-30 [Stage Control] Window

z Move to registered points following their numbers

1. Set the number of the starting registered point for successive movement in
[Registered No.] scroll button of [Stage Control] window.

2. Click <Move to the next point> or <Move to the previous point> button in [Stage
Control] window. Click the same button repeatedly to move to the registered points
following their numbers.

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z Move directly to the specified registered point

1. In [Registered No.] scroll button in [Stage Control] window, set the number of the
registered point you desire.

2. Click <Move to the registered point> button in [Stage Control] window.

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1-6-6 Automatic Acquisition

The images of more than one registered point in [Registered point] list can be acquired
automatically.

Auto acquisition acquires images on the scan condition set in [Microscope] window.
However, in case of 3D acquisition, "Auto mode" cannot be used.

1. Click <Register> button in [Stage Control] window so that the button is pushed in.
<Registe> button [Stage coordinates registration] window appears.
(Pressed-in status)

[Registered point] list

Shows the registered points
(coordinates). Click column [Move]
of each registered point, it changes
to “Off” status and the point can be
excluded from the destination. Click
the same column again, and it
returns to the previous status.

<Start> button
Starts acquisition of the images
automatically more than one
registered point in the [Registered
point] list.

[Auto acquisition method]

dropdown list
Selects the scanning mode for auto
acquisition of the images of more
than one registered point, also
selects the use of auto focus and
one-push gain operations.

Fig. 1-31 [Stage coordinates registration] Window

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2. Display the desired registered points in [Registered point] list by registering or

loading them.
3. If [Registered point] list includes registered points that you desire to remove from
the auto acquisition, click their [Move] column in [Registered point] list to “Off”.
4. Select the image acquisition method in [Auto acquisition method] dropdown list.

TIP One of the following combinations of scanning, auto focus (AF) and
one-push gain modes (1PG) can be selected.

5. Click <Start> button.

NOTE In the case of a specimen that has several reflectance ratio for each
field of vision, the Automatic Acquisition may stop if there is the field
that would be saturated with the start time Brightness value.
And when you select the Automatic Acquisition method including the
One Push Gain mode, the Auto Focus for the next field of vision is
executed depending on the Brightness value adjusted to the previous
field. In such a case, the Brightness may be saturated at the Auto
Focus time and the Automatic Acquisition may stop because the
reflectance ratio of the specimen are different between these different
field of vision.

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1-6-7 Acquire Images in Tiling Mode

A wide field can be observed by acquiring images in the adjacent scanning ranges and
tiling them.

For image acquisition, the stage alignment should be initialized. After acquiring image,
the stage alignment returns to the previous setting.

Image acquisition in tiling mode saves each image by naming rule every time of
acquiring. To make this possible, it is required to set up auto image saving before
executing image acquisition. For further details, see 1-5-4, “Auto save of image
acquired (Auto save)” in this section.

TIP When analysis of a kind or the other is done on tiled image created in
Tiling mode, consider that the result of measurement appears as
reference purpose only.

TIP In image tiling mode, auto fine view does not function.

TIP In image appending mode, the mode is not applicable to 3D acquisition

in "Auto" mode.
When [Auto] is selected on control panel, <Start> button is disabled.

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1 Acquiring image
1. Click <Register> button in [Stage Control] window so that the button is pushed in.
[Stage coordinates registration] window will appear.
<Register> button
(Pressed-in status)

<Register> button <Release> button

Adds the coordinates displayed in Deletes the registered points
the [Registered coordinates] textbox specified in the [Registered
to the [Registered point] list. point] list.

[Registered point] list

Shows the registered points
(coordinates). Click column [Move]
of each registered point, it changes
to “Off” status and the point can be
excluded from the destination. Click
the same column again, and it
returns to the previous status.

[Method] dropdown list

Selects the method to register
coordinate.

<Start> button
Starts acquisition of the images
automatically more than one
registered point in the [Registered
point] list.

[Auto acquisition method]

dropdown list
Selects the scanning mode for
auto acquisition of the images of
more than one registered point,
also selects the use of auto focus
and one-push gain operations.

[Column number] scroll button,

[Column distance] scroll button
Set the number of columns and
interval between them.
[Row number] scroll button,
[Row distance] scroll button
Set the number of rows and
interval between them.

[Reference]
When grid type of registered
point will create, the current
stage position is the base
position.

[Margin]
[X] scroll button / [Y] scroll button
Set a margin (the extra part outside
main body) for image tiling. Fig. 1-32 [Stage coordinates registration] Window

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2. Select “Tiling” in [Method] dropdown list.

TIP When “Tiling” is selected, the message as shown below appears. If

registered points (coordinates) are already shown in [Registered point]
list at the moment “Tiling” is selected, the registered points change for
tiling. If you want to save the registered points, click <No> button in the
following message to save the registered points, then select “Tiling”
again. Method to save, see 1-6-3 Save the Registered Points” in this
section.

When <Yes> button is clicked in the message above, the message

appears shown as below. Click <Yes> button to answer it. Stage
alignment returns to the previous setting when an item is selected other
than “Tiling” in [Method] dropdown list.

3. Set the number of images to be tiled in [Column number] and [Row number] scroll
buttons in [Stage coordinates registration] window.

NOTE The number of images that can be tiled in column and row
directions is up to 25.

4. In [Reference], select the position of the image of the current stage position on the
image obtained by combining.

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5. Set a margin (the extra part outside main body) for the image to be tiled, using [X] /
[Y] scroll button.

TIP When [Margin] is set larger, the accuracy of tiling may be easier to get
but the size of image would get smaller.

6. Click <Register> button. [Registered point] list shows the registered points of the
images required for tiling.

TIP If the objective magnification or zoom ratio is changed in [Microscope]

window, the registered points are automatically re-calculated and
registered.

7. Select the acquisition method in [Auto acquisition method] dropdown list.

One of the following combinations of scanning, auto focus and one-push gain
modes can be selected.

8. Click <Start> button and wait until acquisition of the images required for tiling
completes. When acquisition completes <Sop> button turns to <Start> button, and
analySIS LEXT (software for tiled images) will start up. (If analySIS LEXT that is
available at option is not installed, the simplified tiling function in LEXT-OLS
software will start up.)

In case that the tiled matrix is changed, press <Register> button to

NOTE
<Register> button complete registration procedures and run by pressing <Start>
button for sure. When <Start> is pressed while value only is
changed for matrix and <Register> button is not pressed, it will not
obtain a correct tiled result.

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TIP In LEXT-OLS software, the image file can be loaded and simplified
tilling images can be created. For further details, see”5-3 Simplified
tiling”.

TIP When you interrupt and restart image acquisition, message box will
appear to ask whether overwrite the file saved before the interruption.
It is recommended that as you interrupt the image acquisition, change
the file name set in auto save setting procedure, or delete the file saved
before the interruption with the explorer of Windows, etc.

TIP Scale information may be lost in image that was tiled with color 3D
acquisition in image tiling mode. In such a case, remove color selected
and create the tiled image with use of <Image Tiling> button so that it
will appear as an image that can be measured.

TIP Image quality may be different between images if contrast or sharp filter
for color image is applied in color 3D acquisition with image tiling mode.
Turn off the filters in such a case.

z File saving name for the image acquired

Image is individually saved with a file name assigned as follows.
(File name set in auto save setting)_(Row No.)(Column No.).ols
Example) When the file name set in auto save setting is
“olympus” and images are acquired in the “3 01a 01b 01c
rows x 3 columns” tiling mode;
“olympus_01a.ols” is the file in column a of row No. 1; 02a 02b 02c

”olympus_01b.ols” is the file in column b of row No. 1; 03a 03b 03c

M
”olympus_03c.ols” is the file in column c of row No. 3.

In the file name, the (Row No.) starts with 01 and the (Column No.)
NOTE
does with a.
The value in [File name counter] set in auto save setting procedure
is not in need here.

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Fig. 1-33 analySIS LEXT software

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2 Tiling image
1. On [Arrange Multiple Images] window, use [Horizontal] scroll bar to set number of
rows and use [Vertical] scroll bar to set number of columns for the image to be
tiled.

Fig. 1-34 [Arrange Multiple Images] Window

(For further details, see 1-6-9 Supplement 2 − Image tiling with )

2. Click <OK> button. The display will change to a window that verifies the state of
the tiled image.

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Fig. 1-35 [Align Multiple Images] Window (for verification)

3. Verify the state of tiling and, if the tiling is satisfactory, click <OK> button. The
tiled image would appear on [Images] window.
It the result of tiling is not satisfactory, adjust tiled position in
TIP accordance with the following procedures.
1. Red frame on image indicates the individual image tiled. Move and
place mouse pointer ( ) over the image that should be adjusted.

2. With drag action, the profile of mouse pointer will change to .

Adjust position of the image and release mouse button.
3. When intensity level difference between images is disturbing, click
<Equalize> button to execute equalizing process.
4. Click <OK> button.

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Microscope / Use Auto Stage

Fig. 1-36 [Images] Window

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VI . 1 - 9 2 Page
Microscope / Use Auto Stage

z To change display image

In case of 3D image acquired, click <OLS3100 Height Frame> button on tool bar
so that it will be changed to the display of height image.
In case of color extended image acquired, click <OLS3100 Color Reference>
button so that it will be changed to the display of color image.

<OLS3100 Texture Frame> button

<OLS3100 Height Frame> button

<OLS3100 Color Reference> button

<3D Display> button

<Image Resolution> button

<Image Coupling> button

Fig.1-37 [Image] Window (changed to Height Image)

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Microscope / Use Auto Stage

3 Saving image
1. Select [Save As] from [File] menu. [Save Image As] dialog box appears.

Folder to save

Name to save

Type of file

Fig. 1-38 [Save Image As] Dialog Box

2. Select folder for saving and enter a name for saving.

3. Select “OLS3000 Image (*.ols)” in [Save as Type] drop down list.
4. Click <Save> button.

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Microscope / Use Auto Stage

4 Loading image with LEXT-OLS software

1. Turn LEXT-OLS software active on task bar.
2. Select <Open> from tool bar and load the image saved in aforementioned “3
Saving image”. For further details, see 1-3-4 Loading image saved in this
<Open> button
manual.

• In case of tiled image, image size exceeds 1024 pixels.

NOTE Therefore, the following image process and measurement
cannot be executed.
y FFT y Execution of recipe
y Measurement of line width y Report output
y Particle analysis y Zoom-in/Zoom-out display
y Optional measurement y Simplified tiling
• Number of images that can be loaded on LEXT-OLS software is
10 slices of 1024 x 1024 images or equivalent to. For example,
in case that image of 2000 x 2000 pixel size only should be called
out, the number of slices will be up to 5 slices, maximum.
• In surface roughness analysis, the size of image that can be
analyzed at one time is up to 2048 x 2048 pixels.
• In case that image exceeds 1024 pixels, click mouse right button
over the image so that the equivalent display (on menu, it
appears as x1) and whole display can be selected.
• For measurement of the image having 1024 pixesl or more, the
measurement should be done with the image wholly displayed.
Measurement with equivalent display cannot be done.
• Image created in tiling method would use a large amount of
memory if the size gets larger. Therefore, software performance
may be deteriorated and processing would take a huge amount
of time. Especially, when it exceeds 5000 x 5000 pixels, the
operation may get unstable and a load of such a large size
should not be done.
• When 3D view is performed by loading an image file of large size
after tiling, a memory for loading images consecutively may not
be secured. If image files of large size should be loaded
consecutively, do not perform 3D view.
• After you open tiling images, you cannot use Simplified tiling
function of the LEXT-OLS software. Also, after you execute
Simplified tiling function, you cannot open tiling images created
with analysis LEXT software.
• You may be asked to reboot the LEXT-OLS software when you
try to open a tiling image of large size.

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Microscope / Use Auto Stage

1-6-8 Supplement 1 − Change of sample replacement position

<SetExch.> button
Registers the coordinate points
entered in the [Registered
coordinates] textbox at the center
coordinates (in the initial state of
the system), as the position for
sample replacement.

[Registered coordinates] textbox

Enter the coordinate points of the
point to be registered from the
keyboard.

Fig. 1-39 [Stage Coordinates Registration] Window

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Microscope / Use Auto Stage

To change the position of specimen replacement

NOTE Change the sample replacement position only when the origin
position is not changed (i.e. in the initial state of system).

1. Use the joystick or click the white arrow buttons in [Stage

Control] window to move the stage to the position to set the
specimen.

2. Click <Current pos.> button in [Stage coordinates registration] window. The

coordinates of the stage position are loaded into [Registered coordinates] textbox.
3. Click <SetExch.> button in [Stage coordinates registration] window.
<SetExch.> button

To set the position of specimen replacement to the initial state of system

1. With the keyboard, enter “-75000” in [X] and “50000” in [Y] of [Registered
coordinates] textbox in [Stage coordinates registration] window.
2. Click <SetExch.> button in [Stage coordinates registration] window.

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Microscope / Use Auto Stage

1-6-9 Supplement 2 − Image tiling with analySIS LEXT

[Image Tiles]
Number of images to be laid in horizontal and vertical direction should be entered.
Maximum number is 10 respectively.
[Arrangement]
1 2 3 1 2 3
It specifies the method to set
out the images. (See right 4 5 6 6 5 4
diagram.)
7 8 9 7 8 9
In case that an image is
acquired with use of tiling Comb Meander
function of LEXT Auto Stage,
specify [Comb][Horizontal].

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Microscope / Use Auto Stage

With mouse drag action, click an image that should be moved and drag
TIP
it to destination so that positions of two images can be manually
changed.

[Correlation]
Correlation is set for image composition. Correlation is to represent conformity of
regions overlapped between adjacent images.
If [No Correlation] checkbox is checked to ON, the regions where iamges are
overlapped are ignored and each image will be laid “as is” and composed.

When images cannot be automatically aligned with image quality

TIP
desired, increase or decrease the coorelation value.

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Microscope / Use Auto Stage

[Overlap Area]
“Side by side”: Half part of the overlapped region is tiled with the 1st image and
the rest of half is tiled with 2nd image.
“Linear weighted”: Depending upon intensity at peripheral area of image to be
tiled, intensity is interpolated to the profile line.
“Gauss weighted”: Intensity is interpolated with use of Gauss distribution.

[Original Size]
Composed image is displayed in 1-fold size. If this checkbox is checked to ON, the
image will be displayed with the same high resolution as the part of original image.
See the image by scrolling with scroll bar.

[Cut Margins]
To make entire composed image in rectangle shape, extra edge part of each image
is cut after images are lined up.

<Background>
Intensity in background is adjusted to match with image. When this button is clicked,
red frame will appear. Move the red frame to the region where the intensity should
be used as background intensity and then, click mouse right button over the region.

<Equalize>
When this button is clicked, intensity of each image is adjusted each other. To adjust
intensity, histogram of overlapped region for each image is computed and the
histogram of 2nd image is adjusted to match with the histogram of the 1st image.
Averange intensity of composed image is determined with the 1st image in image
series.

Equalize process of intenisy should be exectuted after each image is lined up.
TIP

VI . Application
VI . 1 - 1 0 0 Page
Image display

2 Image display
This chapter describes the function to be used in case that the display method for the
image acquired is changed.

1 Select display method of image.

Each function of image display can be accessed by the following 3 modes.

z Select method from [Display] z Select from buttons on tool bar.

menu.

z Press <Disp> button of [Control panel change

button] and select from the drop down list
displayed.

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Image display / 2D display

2-1 2D display
The image displayed in image display section appears in 2D display.

1 Changing to 2D display
Click on ▼ located at right side of <2D> button on [Image Display Changeover] toolbar.

Select a type of image desired from the drop down list.

Fig. 2-1 Image display section with 2D display

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VI . 2 - 2 Page
Image display / 3D display

2-2 3D display
The image displayed in image display section appears in 3D display.

1 Changing to 3Ddisplay

Click on ▼ located at right side of <3D> button on [Image Display Changeover] toolbar.

Select a display method from the drop down list.

The image appears in 3D display and Control panel will change as follows.

NOTE In case of tiling image, it may not be displayed in 3D, depending upon
the size of image and memory load status.
Also, the following images cannot be displayed in 3D: a 3D image of
over 20 million pixels (extended image) and a color 3D image of over
16 million pixels (color extended image).

NOTE When an image like a pinholder having large amount of noises is

displayed in 3D, the software operation may get slow.

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Image display / 3D display

2 Detailed settings for 3D display

Adjust a display method on Control panel

[Display method] option button

Select a display method.
(See • Display example that follows
for each display method.)

(It is separately explained later) [Perspective/Parallel Changeover]

It toggles between Perspective and
Parallel.
When “Perspective” is selected,
[1:1:1] check box [Perspective] level is set. The larger
When checked, the scale of XY the value is the more perspective is
axis and Z axis appears by setting enhanced.
the ratio to 1:1.
[Z Factor] scroll button
[Default view] button It changes Z (height) factor for 3D
View position turns to default state. display.
The larger the value is the more the
height is enhanced.

[Light/View/Detail Changeover]
These buttons change the setting for
(It is separately explained later)
light source position, view position
and other details when clicked
respectively. Depending upon a
button selected, the setting items
under buttons will be changed.

(Above figure: In case "Surface" is being selected)

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Image display / 3D display

z In case "Surface" is selected at [Display method]

[Shade Effect] check box [Shade ratio for surface] scroll bar
When checked, the shade Blend ratio between grayscale and
effect is enabled. shade is set.
The closer the value is to "100", the
shade effect gets stronger and the
grayscale effect gets weaker.

z In case "Wire" is selected at [Display method].

[Mesh/X Line/Y Line

Changeover]
[B/W] check box Display method of wire is selected.
When checked, the wire is
drawn in opponent color to
background color. [Interval] drop down list
Interval for line/mesh for wire display
is set.

z In case "Light" is selected at [Light/View/Detail Changeover]

[Intensity] scroll bar

Intensity of light source is adjusted.

[Light source position] slider/ scroll

button
[Default light] button
Angle of light source coordinates is
Light source position is set to
adjusted.
default.

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Image display / 3D display

z In case "View" is selected at [Light/View/Detail Changeover]

[Position] scroll button
Angles of coordinates for view position
are set. (Unit: Degree (°))

[Rotation] option button

View position can be changed by
dragging mouse left button over the
image. In this case, the rotation method
for coordinates must be selected.

X
Z Coordinate
Z: Front/Back of Window
Y: Top/Bottom of Window
X: Left/Right of Window

z In case "Detail" is selected at [Light/View/Detail Changeover]

[Grid] check box

1
When checked, scale grid
appears.

[Zoom] scroll button

Display magnification is
[Reverse] check box changed.
When checked, Concave
and convex will be reversed
and displayed

1
Scale grid
Lines in grid pattern over 3D display as shown below. Guide to identify distance and profile roughly.

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Image display / 3D display

z Display example

(Above figure: In case the object is displayed in "Surface" method)

(Above figure: In case the object is displayed in "Texture" method)

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Image display / 3D display

(Above figure: In case the object isdisplayed in “Real Color” method)

(Above figure: In case the object is displayed in "Wire" method)

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Image display / Contour display

2-3 Contour display

Height image displayed in image display section is displayed in contour.
(If intensity image is displayed in contour, intensity distribution is known.)

1 Changing to Contour display

Click on ▼ located at right side of <3D> button on [Image Display Changeover] toolbar.
Select [Contour] from the drop down list.

Contour image is displayed in image display section and control panel changes to
[Contour] group.

2 Detailed setting of Contour display

Adjust display method of contour on control panel.

[Line spacing] drop down list

It is set gap of contour.

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Image display / Contour display

Fig. 2-2 Image display section with Contour display

NOTE Image to appear may be different from the actual image in profile,
depending on the structure of specimen under observation and the
condition of image acquisition range.

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Image display / LUT Setting

2-4 LUT Setting

LUT of the image displayed in image display section can be changed.
When LUT is changed, the data range to indicate display color will also be changed.
The image data (input) holds information of 12bit per one pixel in case of intensity image
and, in case of height image; it holds 16bit per one pixel. Contrary to it, information
(output) to display on monitor holds 8bit (0~255) in RGB (Red, Green and Blue)
respectively. Meanwhile, the one to define what color the output (0~255) should be
displayed is called "color table". Input/Output relationship including this color table is
defined as LUT (Look Up Table).

When <Set LUT> button is clicked, [Set LUT] window appears.

<Set LUT> button

Fig. 2-3 [Set LUT] window

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Image display / LUT Setting

2-4-1 Selection of Color Table

1. Select [Set LUT] tab.

<Apply> button
It determines whether LUT adjusted with
[Set Contrast] and [Set LUT] should be
applied to the display image or not.
When it is set to "pressed" state, the
LUT adjusted is applied to the display
image.
[Color name] list
[Image Type] option button
List of color table file names registered
in the system is displayed. Selecting a It specifies to select which color
file name causes to change the color table – Intensity Image or Height
table. Image – should be changed.

Fig. 2-4 [Set LUT] window - [Set LUT] tab

2. Specify the color table of the image that should be changed by selecting either
"Intensity" or "Height" at [Image Type].
3. Select the color table from [Color name] list.

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Image display / LUT Setting

2-4-2 Color Table Adjustment and Registration

1 Color Table Adjustment

1. Select [Set LUT] tab.

<Apply> button [Image Type] option button

It determines whether LUT adjusted with It specifies to select which
[Set Contrast] and [Set LUT] should be color table – Intensity Image
applied to the display image or not. or Height Image – should be
When it is set to "pressed" state, the changed.
LUT adjusted is applied to the display
image.
[Target] drop down list
Select a color to be used for adjustment
among "Red", "Green" and "Blue" that
comprise the color table. Alternatively,
select "RGB" and it causes to adjust
"Red", "Green" and "Blue" to the same
value.
<Mode> button
Graph profile is selected.
<Undo> button
Color table is returned to default state.

[Color name] list

List of color table file names registered in the
system is displayed. Selecting a file name
causes to change the color table.

Graph display area

Graph in color component for histogram
and color table appears. When clicked,
the graph profile will change, depending
on the link mode set.

[Histogram display] check box

When checked, histogram appears.

[Scaling] drop down list

Ratio of lateral axis display is set. 1/1
becomes 100%.

[Division] drop down list

Number of division for scale is set.

Fig. 2-5 [Set LUT] window - [Set LUT] tab

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Image display / LUT Setting

2. Select a color that should be changed from [Target] drop down list.
3. Select a graph profile out of <Mode> buttons. Select either straight or curve.
4. Drag the mouse over the graph. The graph of color component selected will be
changed.

2 Color Table Registration

<Save LUT> button

Color table is saved.

Click on <Save LUT> button and bring [Save As] dialog box to appear. Specify a folder
directed and a file name and then, save the file. Extension (*.lut) will come with the file
name.

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Image display / LUT Setting

2-4-3 Color Table Assignment Range Setting (Contrast Adjustment)

The range to assign color table to image data is set. Setting causes to adjust contrast of
the image displayed.
1. Select [Set Contrast] tab.

<Apply> button
It determines whether LUT adjusted with
[Set Contrast] and [Set LUT] should be
applied to the display image or not.
When it is set to "pressed" state, the <Full> button
LUT adjusted is applied to the display Range is set to indicate all data.
image.

<Auto Fine View> button

Range is set so as to
enhance contrast of
<Undo> button intensity image of 3D
Range assigned is returned to image.
default.

Graph display area

Histogram and LUT graph are
displayed. When a white dotted
line is dragged, range to assign
color table can be changed.

[Upper]/[Lower] scroll bar

Range to assign color table is set.
[Histogram display]
check box
[Scaling] drop down list When checked, histogram
appears.
Ratio of lateral axis display is
set. 1/1 becomes 100%.

[Division] drop down list

Number of division for scale is set.

Fig. 2-6 [Set LUT] window - [Set Contrast] tab

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Image display / LUT Setting

2. The range is set by any one of the following methods. Color table will be assigned
to the area enclosed with white dotted lines over the graph.
z Auto setting
…The range is set that contrast of intensity image of 3D image is enhanced.
Click on <Auto Fine View> button.
z Full area setting
…The range is set that all data are displayed.
Click on <Full> button.
z Manual setting
Check [Histogram display] check box to bring histogram to appear and set the
range, using [Upper]/[Lower] scroll bar.

TIP The range can also be set on graph. Bring the mouse pointer near a
vertical white dotted line and; at a position where the mouse pointer
changes to , drag the mouse.

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Image display / Image information display setting

2-5 Image information display setting

File name, objective lens power, scanning mode, kind of image and scale are displayed
on image that appears in image display section. In addition, background color of
window can be changed.

1. Click <Display Information> button. Window as shown below would appear. Set
<Display Information> button
scale, image information and background color on this window.

[Display Scale] checkbox

In case that image is displayed in
grayscale mode, it is to set Display / Non- <Display scale Color> button
display of Scale on image. When The scale is to be changed to appear in
checked, the scale is displayed. display color selected.

[Display Information] checkbox

Display/Non-display of file name, <Display Information Color> button
comment, objective lens power, zoom File name, comment, objective lens
power, scanning mode and kind of image power, zoom power, scanning mode
is set. When checked, information would and kind of image are to be changed to
be displayed. appear in display color selected.

[Set background color] checkbox <Background Color> button

It is to set whether or not background Background of window is to be changed
color is attached to image information to appear in display color selected.
(file name, comment, objective lens
power, zoom power, scanning mode
and kind of image). When checked, <Apply> button
background color is attached. [Color] dialog box appears. The color
selected on the dialog box will be set on
the button located at left side.

Fig. 2-7 [Display Information] window

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Image display / Image information display setting

z Display Scale
Scale is displayed at right lower part of image when the image is displayed in grayscale
mode.
1. Click < Display Scale Color> button of the color to display the scale.
2. Check checkbox of [Display Scale].

In case that image size is larger that the size of image display section
TIP
or the image is displayed in enlarged size, the scale may not be visible
even if checkbox of [Display Scale] is checked because whole image
cannot be displayed inside window. Scroll the image or make window in
larger size to verify the scale.

Scale

Fig. 2-8 Image display section with scale displayed

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Image display / Image information display setting

z Display of file name, comment, objective lens power, zoom power,

scanning mode and kind of image
File name and comment are displayed at right upper part of image and objective lens
power, zoom power and kind of image are displayed at right lower part of the image.
1. Click <Display Information Color> button of the color to display.

2. Click checkbox of [Display Information].

TIP In case that image size is larger that the size of image display section or
the image is displayed in enlarged size, the image information may not
be visible even if checkbox of [Display Information] is checked because
whole image cannot be displayed inside window. Scroll the image or
make window in larger size to verify the information.

• File name
• Comment

• Objective lens power

• Zoom power
• Scanning mode
• Kind of image

Fig. 2-9 Image display section with image information displayed

3. To attach background to image information, check checkbox of [Set background

color]. It appears as shown in right side.

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Image display / Image information display setting

Displayed meaning of “Zoom”, “Acq.” And “Info”

Zoom :(1.0x)
( ) : Zoomed up image cutout partly from acquired image
1.0x : Image acquired with zoom power displayed

Acq.:XYZ
* * : Image acquired in extended (3D) scan mode with brightness changed
XY : LSM image in XY (2D) scan mode
XY-C : Color image in XY (2D) scan mode
XYZ : Image in extended (3D) scan mode (3D acquisition mode: Step)
XYZ-S : Image in extended (3D) scan mode (3D acquisition mode: Fast)
XYZ-M : Image in extended (3D) scan mode (3D acquisition mode: Fine)
XYZ-C : Image in color extended (3D) scan mode (3D acquisition mode: Step)
XYZ-S-C : Image in color extended (3D) scan mode (3D acquisition mode: Fast)
XYZ-M-C : Image in color extended (3D) scan mode (3D acquisition mode: Fine)
Info.:CF-I-C
C : Gain Amplifier mode: Contrast
E : Gain Amplifier mode: Enhance
I : Intensity image
H : Height image

NCF : Non-confocal LSM image

CF : Confocal LSM image
BF : Bright field color image
DF : Dark field color image

TIP To change comment, mouse right-click over the image display section
and pop up menu appears. Select <Image Information> command and
[Property] window appears. Typewrite comment in [Comments] box
directly and click <Close> button so that the comment would
automatically be updated.

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Image display / Display contrast setting

2-6 Display contrast setting

Display scale of image displayed in image display section is changed.

1. Click <Scale Setting> button. Window as shown below appears.

Click “Intensity” or “Height” at [Image] option and set display contrast for the image
respectively. Click <Apply> button and the setting content reflected would change
<Scale Setting> button
contrast of image to be displayed.
<Auto> button
It is to set min. and max. value of
data to min. and max. value of
<Apply> button display scale.
Display scale of image being
displayed in image display section
is changed with the scale value <Full> button
set. In case that display scale of intensity
image was changed, min. value of
scale is set to 0 and the max. value
is set to 8191.
In case that display scale of height
[Scale Max.] scroll button
image was changed, min. value of
It is to set max. value of display
scale is set to 0 and the max. value
scale to be changed.
is set to the max. height of which
image can be acquired.
[Scale Min.] scroll button
It is to set min. value of display
scale to be changed. [Image] option
It selects kind of image that display
scale is to be changed.

Fig. 2-10 [Scale Setting] window

• Auto setting of display contrast

Click <Auto> button. Min. value and max. value of data are set to min. value and
max. value of display scale.

• Full display setting of display contrast

Click <Full> button. Display scale is set to full scale.

• Manual setting of display contrast

Min. value and max. value of display scale are set with [Scale Min.] scroll button
and [Scale Max.] scroll button.

TIP To return display scale to the value before change, click <Auto> button
and click <Apply> button again.

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Image display / Display contrast setting

Fig. 2-11 Image display section after scale changed

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Image display / Cross Section Profile Display suited to Full Scale Profile

2-7 Cross Section Profile Display suited to Full Scale Profile

This setting works for height image and cross section profile.

Typically, an image appears with a scale based on its contrast. For this reason, in case
of height image, the scale ratio in Z direction is indicated in a different condition against
the scale in X and Y direction. It is now possible to indicate the said image with full scale
ratio.

1. Click on <Scale Setting> button. The window as shown below appears.

<Scale Setting> button

<1:1> button
The calculation of scale ratio in Z
direction is done in such way that
<Apply> button the scale of X and Y direction
turns to 1:1 and the result is set as
Display scale of an image the max. value of display scale.
displayed in image display section
and the cross section profile is (The minimum value of display
changed. scale remains at current setting
value "as is".)

[Image] option
It selects kind of image that
display scale is to be changed.

Fig. 2-12 [Scale Setting] window

2. Select "Height" at [Image] option.

3. Click on <1:1> button.
4. When <Apply> button is clicked, the scale set to 1:1 is applied to the display of
height image and cross section profile.

TIP To return the setting of display scale to previous setting, click on <Auto>
button and then, click on <Apply> button again.

NOTE In case the height range of 3D image (extended image) is narrow

and; if 1:1 is applied, it may cause deterioration of image contrast
or, when it appears in 3D display, the difference of elevation in
image may not be known precisely.

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Image display / Cross Section Profile Display suited to Full Scale Profile

Fig. 2-13 [X Profile Display] window after Scale Change

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Image display / Save of image display condition

2-8 Save of image display condition

1 Save of image display condition

Click <Save Setting> button. Display condition of image currently displayed will appear
<Save Setting> button
in [Save Setting] window. Click <Save> button and [Save As] dialog box will appear.
Content of display condition will be saved.

Fig. 2-14 [Save Setting] window

2 Insert comment.
Comment can be written in comment column as needed.

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Image display / Call of image display condition

2-9 Call of image display condition

1. Click <Load Setting> button and open a file from which display condition is to be
called out. Image will be displayed with condition of file that was opened.
<Load Setting> button

2-10 Display of a plural number of images

A plural number of images can be displayed – laid in image display section.

1 Selection of display image

1. Select a plural number of images that should be displayed side-by-side from Image
List Section as follows.
z To select a plural number of files from list of acquired images, click a file name
first. Pressing Ctrl key, click file name, one by one.
z To select a plural number of files displayed consecutively in list of acquired
images, click a file name first. Pressing Shift key, click last file name.

TIP In case that a file not required be selected, keep pressing Ctrl key
and then, click the file name once again.

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Image display / Display of a plural number of images

2 Selection of display layout

1. Select layout to display from buttons in [Display Setting] of [Image Display

Changeover] tool bar. Images are laid and displayed in image display section.

Fig. 2-15 Image display section with images laid

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Image display / Selection of display image

2-11 Selection of display image

Image selected is displayed in image display section.

1. Double-click the image that is desired to display from [Image List].

Alternatively, mouse-right-click over image display section. Pop up menu will

appear. Select <Select Image> command and change the image to the image
that is desired.

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Image display / Selection of display image type

2-12 Selection of display image type

Image acquired in extended (3D) scan mode or the image called from a file can be
displayed in image display section by selecting either intensity (extended) image
mode or height image mode.

1. Mouse-right-click over the image display section. Pop up menu will appear. Select
<Image Type> command and change image mode.

2-13 Selection of display image size

Image being displayed in image display section can be scaled up (enlarge) or down
(shrink).

1. Selection of display image size

Press ▼located at right side of <Zoom> button in [Display Setting] of [age Display
<Zoom> button
Changeover] tool bar. Select zoom power desired from drop down list.

Alternatively, select <Display> - <Zoom> from menu and change the power to the
desired power.

Alternatively, mouse-right click over the image display section. Pop up menu
appears. Select <Zoom In/Out> command and select desired zoom power.

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Image display / Delete of display image

2-14 Delete of display image

Image being selected is deleted from display or other various processes. Images
saved in hard disk are not actually deleted with this function.

1. Select undesired image from [Image List Section]. Click <Remove> button and,
as message appears, click <Yes> button.

<Remove> button
<Remove> button

Alternatively, delete can be done from pop up menu. In this case, the image that is
being displayed in image display section will be deleted. Mouse-right-click so that
pop up menu will appear. Select <Delete> command.

2-15 Display of acquisition information for display image

1. Mouse-right-click over image display section. Pop up menu appears. Click <Image
Information> command.

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Image processing

3 Image processing
This chapter describes image processing. It removes noise from image acquired or
called out from a file and compensates a profile to look nicer. In addition, it extracts a
distinctive feature from image for enabling to look at easier.

1 Select processing method of image.

Each function of image processing can be accessed by the following 3 modes.

z Select method from [Filter] menu.

z Select from buttons on tool bar.

z Press <Filter> button of [Control panel

change button] and select from the drop
down list displayed.

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Image processing / About Process Target

2 About Toolbar

<Height Noise Removal> button <Edge Enhancement> button

It eliminates noise that occurred It highlights edge of image.
due to low intensity or saturated
intensity on height image.
<Contrast Enhancement>
button
It enhances contrast for enabling
<Surface/Tilt Correction> to observe image easier.
button
It compensates curved surface
<FFT> button
and slant of image.
It separates image of rough
surface from image of smooth
<Profile Shape Correction> surface.
button
It compensates shouldered
<Digital Zoom> button
portion of profile artificially.
Performs digital zooming.
<Smoothing> button
It removes noise by averaging
data.
<Image Rotation> button
<Spike Removal> button Image is rotated.
It eliminates isolated point (peak
noise).

Fig. 3-1 [Filter] tool bar

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Image processing / About Process Target

3-1 About Process Target

3-1-1 Selection of Image Type

Image processing is exercised to a type of image being displayed. One image file is
composed by combination of the following 3 types of images. Combination of images
may vary in accordance with acquisition method.
• Intensity image
• Height image
• Color image

In case of an image acquired in extended (3D) scanning mode, it may be

TIP
changed to a height image when image processing function is selected.
Particularly in the following image processing functions, it is so designed
that the image acquired is changed to a height image automatically
when the function is selected.
● Spike Removal
● Smoothing
● Profile Shape Correction
● Surface / Tilt Correction

1 Change of Image Type to be Displayed

1. Click on mouse right button over image display section. Since a popup menu
appears, select [Image Type] to change to an image that should be displayed.

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Image processing / About Process Target

3-1-2 Specify Region for Image Processing

Image processing is normally applied to a displayed image entirely but, by specifying a
ROI1, it is possible to apply the image processing to the specified region only.
Image processing methods that can specify ROI are as follows.
• Spike Removal
• Smoothing
• Profile Shape Correction
• Height Noise Removal
• Edge Enhancement
<Set ROI> button
This button is used when a region
applicable to image processing should be
specified. When the button is pressed,
[ROI] window appears.
Fig. 3-2 <Set ROI> button

<Free Polygon> button

It specifies a region with free hand.
<Polygon> button
It specifies a polygon region.
<Reverse> button
When this button is pressed, a region
<Ellipse> button to which image processing is applied
It specifies an ellipse region. is reversed.

<Rectangle> button <Delete ROI> button

It specifies a rectangle region. ROI being selected will be deleted.

<Delete ALL ROIs> button

<Select> button
All ROI's will be deleted.
It navigates to selection
mode.

Fig. 3-3 [ROI] window

1
ROI stands for "Region Of Interest" and it indicates a region of interest or a region under attention. It is read
"R – O – I" or "ROI".
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Image processing / About Process Target

TIP Click on mouse right button over image display section and a popup menu
will appear.
Using the popup menu, it is also possible to change Specify ROI mode or
selection of ROI that should be specified.

1 Specify a Processing Region

1. Click on <Set ROI> button on control panel and bring [ROI] window to appear.
2. On [ROI] window, click on ROI button to specify a region.
3. Click on mouse left button on a place over image display section where the ROI
should be placed.
4. While pressing the left button, move the mouse to create a ROI and, when creation
of ROI is completed, release the mouse left button.
5. ROI is drawn on image display section. The region painted in pink is a region that
is applicable to image processing.

Fig. 3-4 ROI Specified Portion and Image Processing (from left; original image,
ROI being specified and after image processing)

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Image processing / About Process Target

The portion where the ROI is overlapped is masked. When a region like a doughnut
should be specified, it can be specified by overlapping two (2) ROI's (see the figure
below – left). In addition, note that the portion where odd number of ROI's are
overlapped will be applicable to processing and the portion where even number of
ROI's are overlapped will not be applicable to processing (see the figure below -
right).

Fig. 3-5 Region of Doughnut Type (Left Figure) and Region that a plural
number of Regions are overlapped (Right Figure)

When a region to apply image processing should be reversed, click on <Reverse>

button.

Fig. 3-6 No Region Reversed (Left Figure) and

Region Reversed (Right figure)

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Image processing / About Process Target

In [X Profile] or [Y Profile] window, the region specified in image display section

only is displayed in pink in preview mode. It is therefore possible to adjust
parameters for image processing while viewing the profile.

Fig. 3-7 Preview of Specified Region

It is not possible to specify a parameter every ROI. In case a

NOTE
plural number of ROI's exist and, if a different parameter should
be specified to each ROI respectively, perform the image
processing every region.

Number of ROI's that can be created is up to 100. For example, if

NOTE
a doughnut profile is specified by creating two (2) circles,
number of region is one but number of ROI's is 2.

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Image processing / About Process Target

2 Size Change of Specified Region

When the size of ROI should be changed, perform the following operations.
1. Click on <Select> button on [ROI] window.
2. Click on ROI of which size should be changed. When it is set to selected state,
square handles will appear around the ROI.
3. Place mouse pointer over the handle of direction to which the size should be
changed. The mouse pointer will change its profile of icon in accordance with the
position where it is placed. Drag the handle as it appeared and change the size.

Fig. 3-8 ROI Size Change Operation

3 Move of Processing Region

When ROI should be moved, perform the following operations.

1. Click on <Select> button on [ROI] window.

2. Click on mouse left button over the ROI that should be moved and then, drag the
ROI to a location where it should be moved.

4 Delete of Processing Region

When all ROI's should be deleted, click on <Delete ALL ROIs> button on [ROI] window.

When the specified ROI only should be deleted, perform the following operations.
1. Set the ROI that should be deleted to selected state.
2. Click on <Delete ROI> button on [ROI] window.

It is also possible to delete the selected ROI, using <Delete> key.

TIP

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Image processing / Spike (peak noise) Removal

3-2 Spike (peak noise) Removal

It eliminates isolated point (peak noise) in image displayed in image display section.

<Spike Removal> button

1 Setting process to remove isolated point

Click <Spike Removal> button on tool bar. Control panel will change to [Spike
Removal] group as shown below.
<Save Settings> button
<Undo> button Setting condition of image processing is
saved with name assigned.
It returns image processing to one
previous state. One previous state
only is revived. <Load Settings> button
It calls setting of image processing from file.
<Run> button
It improves quality of image with <Y Profile> button
processing method selected. It displays data profile of vertical direction
(1 line) for image.

<X Profile> button <Histogram> button

It displays data profile of lateral It displays histogram of data pertaining to
direction (for 1 line) for image. lateral direction/vertical direction (for 1
line) and plane (for 1 image).

[X axis] / [Y axis] scroll bar [Noise level] scroll bar

It sets position of image (data) that It is a level to check noise. When noise
profile is to be displayed. cannot be removed, set this level lower.
When image other than noise is
deteriorated, set this level higher and
see how it goes.
(Unit: Intensity (in intensity image)
Step (in height image))

[Processing mode] option button [Direction] checkbox

• “Mode 1” It selects direction that process is
It is useful when image is noisy. It applied (X: Lateral / Y: Vertical / XY:
smoothes noise data. Lateral x Vertical)
• “Mode 2”
It is useful when image is not so [Pixel count] option button
noisy. It eliminates noise. It selects reference area to judge noise
and or to remove noise.
(Unit: Pixel)

Fig. 3-9 [Spike Removal] group

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Image processing / Spike (peak noise) Removal

1. Click <X Profile> button or <Y Profile> button. Profile of image (data) at the
position specified by yellow line would appear in image display section.

TIP To display scale on profile, click mouse right button over the profile. As
pop up menu appears; select [Display Scale]. Display or Non-display of
scale can be changed over on this pop up menu.
To change scale, select [Scale Setting]. [Scale Setting] window will
appear. Set [Scale: Max.] and [Scale: Min.] and then, click <Apply>
button. For further details, see 2-6 Display contrast setting in this
manual.

2. Viewing image display section, move [X-axis] / [Y-axis] scroll bar and change
display position in a way that noise data is displayed over the profile.

Position of image (data) to display profile can be changed directly by

TIP
clicking yellow line on image display section with mouse. Place mouse

pointer near yellow line and, when mouse pointer changes to or ,

drag the mouse.

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Image processing / Spike (peak noise) Removal

3. Define [Direction] from profile and check the checkbox.

4. In case that image is noisy, select “Mode 1” with [Processing mode] option button.
In case that it is not so noisy, select “Mode 2”.
5. Define mask size from profile and select [Pixel count] option button. Profile after
processing will be previewed in [X Profile] / [Y Profile] window in pink color.

Fig. 3-10 Image display section before spike removal

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Image processing / Spike (peak noise) Removal

2 Executing process to remove spike

Click <Run> button.

Fig. 3-11 Image display section after spike removal

3 Redoing process to remove spike

When process result is not satisfactory, click <Undo> button. Change parameters of
each item like noise level or some on [Spike Removal] group and click <Run> button
again.

TIP In case that noise cannot be removed, set noise level lower and; in case
that any image other than noise is deteriorated, set noise level higher
and try the process again.

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Image processing / Smoothing (Removal of random noise)

3-3 Smoothing (Removal of random noise)

It eliminates random noise of image displayed in image display section and makes the
image smooth.
<Smoothing> button
1 Setting smoothing process
Click <Smoothing> button on tool bar. Control panel will change to [Smoothing] group
as shown below.
<Save Settings> button
Setting condition of image processing is
saved with name assigned.
<Undo> button
It returns image processing to one <Load Settings> button
previous state. One previous state
only is revived. It calls setting of image processing from file.

<Run> button <Y Profile> button

It improves quality of image with It displays data profile of vertical direction
processing method selected. (1 line) for image.

<X Profile> button

<Histogram> button
It displays data profile of lateral
It displays histogram of data pertaining to
direction (for 1 line) for image.
lateral direction/vertical direction (for 1
line) and plane (for 1 image).

[X axis] / [Y axis] scroll bar

It sets position of image (data) that [Processing mode] option button
profile is to be displayed. • “Averaging”
It makes image smooth and noise
indistinctive.
• “Median”
[Direction] checkbox Holding edge of image, it makes image
It selects direction that process is smooth and noise indistinctive.
applied (X: Lateral / Y: Vertical / XY:
Lateral x Vertical). [Pixel count] option button
It selects reference area to judge noise
and or to remove noise.
(Unit: Pixel)

Fig. 3-12 [Smoothing] group

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Image processing / Smoothing (Removal of random noise)

1. Click <X Profile> button or <Y Profile> button. Profile of image (data) at the
position specified by yellow line would appear in image display section.

TIP To display scale on profile, click mouse right button over the profile.
As pop up menu appears, select [Display Scale]. Display or Non-
display of scale can be changed over on this pop up menu.
To change scale, select [Scale Setting]. [Scale Setting] window
will appear. Set [Scale: Max.] and [Scale: Min.] and then, click
<Apply> button. For further details, see 2-6 Display contrast
setting in this manual.

2. Viewing image display section, move [X-axis] / [Y-axis] scroll bar and change
display position in a way that noise data is displayed over the profile.

Position of image (data) to display profile can be changed directly by

TIP
clicking yellow line on image display section with mouse. Place
mouse pointer near yellow line and, when mouse pointer changes to
or , drag the mouse.

3. Select “Averaging” or “Median” with [Processing mode] option button.

4. Define mask size from profile and select [Pixel count] option button.

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Image processing / Smoothing (Removal of random noise)

5. Define process direction from profile and check checkbox of [Direction]. Profile after
processing will be previewed in [X Profile] / [Y Profile] window in pink color.

Fig. 3-13 Image display section before smoothing

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Image processing / Smoothing (Removal of random noise)

2 Executing smoothing process

Click <Run> button.

Fig. 3-14 Image display section after smoothing

3 Redoing of smoothing process

When process result is not satisfactory, click <Undo> button. Change parameters of
each item on [Smoothing] group and click <Run> button again.

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Image processing / Profile Shape Correction

3-4 Profile Shape Correction

It compensates shouldered profile of image displayed in image display section
artificially.

<Profile Shape Correction>

button

1 Setting profile shape correction

Click <Profile Shape Correction> button. Control panel will be changed to [Profile
Shape Correction] group as shown below.

<Save Settings> button

Setting condition of image processing is
<Undo> button saved with name assigned.
It returns image processing to one <Load Settings> button
previous state. One previous state
only is revived. It calls setting of image processing from file.

<Run> button <Y Profile> button

It improves quality of image with It displays data profile of vertical direction
processing method selected. (1 line) for image.

<X Profile> button <Histogram> button

It displays data profile of lateral It displays histogram of data pertaining to
direction (for 1 line) for image. lateral direction / vertical direction (for 1
line) and plane (for 1 image).

[X axis] / [Y axis] scroll bar

It sets position of image (data) that profile
[Noise level] scroll bar is to be displayed.
It is a level to check noise. When noise
cannot be removed, set this level lower. [Direction] checkbox
When image other than noise is
It selects direction that process is applied
deteriorated, set this level higher and
(X: Lateral / Y: Vertical / XY: Lateral x
see how it goes.
Vertical).
(Unit: Intensity (in intensity image)
Step (in height image))
[Pixel count] option button
It selects reference area to judge noise
and or to remove noise.
(Unit: Pixel)

Fig. 3-15 [Profile Shape Correction] group

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Image processing / Profile Shape Correction

1. Click <X Profile> button or <Y Profile> button. Profile of image (data) at the
position specified by yellow line would appear in image display section.

TIP To display scale on profile, click mouse right button over the profile.
As pop up menu appears, select [Display Scale]. Display or Non-
display of scale can be changed over.
To change scale, select [Scale Setting]. [Scale Setting] window
will appear. Set [Scale: Max.] and [Scale: Min.] and then, click
<Apply> button. For further details, see 2-6 Display contrast
setting in this manual.

2. Viewing image display section, move [X-axis] / [Y-axis] scroll bar and change
display position in a way that noise data is displayed over the profile.

Position of image (data) to display profile can be changed directly by

TIP
clicking yellow line on image display section with mouse. Place
mouse pointer near yellow line and, when mouse pointer changes to
or , drag the mouse.

3. Define mask size from profile and select [Pixel count] option button.

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Image processing / Profile Shape Correction

4. Define process direction from profile and check checkbox of [Direction]. Profile after
processing will be previewed in [X Profile] / [Y Profile] window in pink color.

Fig. 3-16 Image display section before Profile Shape Correction

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Image processing / Profile Shape Correction

2 Executing profile shape correction process

Click <Run> button.

Fig. 3-17 Image display section after profile shape correction

3 Redoing profile shape correction

When process result is not satisfactory, click <Undo> button. Change parameters of
each item like noise level or some on [Profile Shape Correction] group and click <Run>
button again.

In case that noise cannot be removed, set noise level lower and; in case
TIP
that any image other than noise is deteriorated, set noise level higher
and try the process again.

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Image processing / Surface/Tilt Correction

3-5 Surface/Tilt Correction

It compensates curve and slant of image profile displayed in image display section. In
case that the image is displayed in height image mode, curvature is compensated and;
<Surface/Tilt Correction> in case of intensity image mode, it compensates light when it is not sufficient in
button
peripheral are.

Click <Surface/Tilt Correction> button on tool bar. Control panel will change to
[Surface/Tilt Correction] group as shown below.

<Save Settings> button

<Undo> button Setting condition of image processing
is saved with name assigned.
It returns image processing to one
previous state. One previous state
only is revived. <Load Settings> button
It calls setting of image processing
<Run> button from file.
It improves quality of image with
processing method selected. <Y Profile> button
It displays data profile of vertical
<Surface> button direction (1 line) for image.
It sets curved surface offset.
<Tilt> button <Histogram> button
It sets slant offset. It displays histogram of data pertaining
to lateral direction/vertical direction (for
1 line) and plane (for 1 image).
<X Profile> button
It displays data profile of lateral
direction (for 1 line) for image. [X axis] / [Y axis] scroll bar
It sets position of image (data) that
profile is to be displayed.
Fig. 3-18 [Surface/Tilt Correction] group

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3-5-1 Surface Correction

It compensates curve of image profile.

<Surface/Tilt Correction >

button

1 Setting curved surface correction process

Click <Surface> button. Displace in [Surface/Tilt Correction] group will change for
setting curved surface offset as shown below.

<Save Settings> button

<Undo> button Setting condition of image processing
It returns image processing to one is saved with name assigned.
previous state. One previous state
only is revived.
<Load Settings> button
It calls setting of image processing
<Run> button from file.
It improves quality of image with
processing method selected. <Y Profile> button
It displays data profile of vertical
<Surface> button
direction (1 line) for image.
It sets curved surface offset.

<Histogram> button
It displays histogram of data pertaining
to lateral direction/vertical direction (for
<X Profile> button 1 line) and plane (for 1 image).

It displays data profile of lateral

direction (for 1 line) for image. [X axis] / [Y axis] scroll bar
It sets position of image (data) that
profile is to be displayed.

Fig. 3-19 [Surface/Tilt Correction] group (Surface Correction mode)

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Image processing / Surface/Tilt Correction

1. Click <X Profile> button or <Y Profile> button. Profile of image (data) at the
position specified by yellow line would appear in image display section.
2. When slider at [X Profile] / [Y Profile] window is not displayed, click mouse right
button over black area of window. As pop up menu appears, select [Display
Scale].

To change scale, select [Scale Setting] on pop up menu. As [Scale

TIP Setting] window appears, set [Scale: Max.] and [Scale: Min.] and click
<Apply> button. For further details, see 2-6 Display contrast setting in
this manual.

3. Using slider in [X Profile] / [Y Profile] window, set slant or slope of curved red line
displayed in [X Profile] / [Y Profile] window to align with profile.

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Image processing / Surface/Tilt Correction

4. Click at a position near profile on black background of [X Profile] / [Y Profile] in way

that curved red line takes a curving course near the profile with slant (slope).

Fig. 3-20 Image display section before surface correction

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Image processing / Surface/Tilt Correction

2 Executing surface correction process

Click <Run> button.

Fig. 3-21 Image display section after surface correction

3 Redoing surface correction process

When process result is not satisfactory, click <Undo> button. Adjust winding or slope of
red line displayed on profile and, once again, click <Run> button.

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3-5-2 Tilt Correction

It compensates slant of image in case that the image displayed in height image mode in
image display section and; in case of intensity image mode, it compensates brightness

<Surface/Tilt Correction> deviation.

button

1 Setting tilt correction process

Click <Tilt> on control panel. [Surface/Tilt Correction] group will change for setting tilt
correction as shown on the next page.

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Image processing / Surface/Tilt Correction

<Undo> button <Save Settings> button

It returns the image processing to Setting condition of the image processing is
one previous state. One previous saved with the name assigned.
state only is revived.
<Load Settings> button
<Run> button It calls the setting of the image processing
It improves the quality of the from the file.
image with processing method
selected. <Y Profile> button
<Tilt> button It displays the data profile of vertical
direction (1 line) for the image.
It sets the slant offset.

<Histogram> button
<X Profile> button
It displays the histogram of the data
It displays the data profile of lateral pertaining to lateral direction/vertical direction
direction (for 1 line) for the image. (for 1 line) and the plane (for 1 image).

[X axis] / [Y axis] scroll bar [Applicable process] drop down list

It sets the position of the image (data) When the "Auto" is selected with the
that the profile is to be displayed. [Processing mode] option button, the
subject applicable to offset can be selected
from the following 4 kinds.
[Processing mode] option button • "XY"
• “Manual” The offset is applied to the X (lateral)
It compensates a slant by specifying it axis and then, it is applied to the Y
over straight line on profile. (perpendicular) axis.
• “Auto” • "YX"
It computes and compensates a slant The offset is applied to the Y
automatically. (perpendicular) axis and then, it is
applied to the X (lateral) axis.
• Image
It computes and compensates a slant • "X"
so as to bring 3 points specified on The offset is applied to the X (lateral)
image flat. axis only.
• "Specify Point" • "Y"
It computes and compensates a slant to The offset is applied to the Y
pass the plane of image through 3 (perpendicular) axis only.

[Mask Size] option button [Specify Method] drop down list

When the "Image" is selected with the When the [Point] is selected with the
[Processing mode] option button, the size [Processing mode] option button, the
of one side that surrounds the peripheral method to be specified can be selected
pixels to be averaged with a center pixel from the following 3 kinds.
specified is selected. (Unit: Pixel) • "3 Points (XY)"
A total of 3 points are specified in the X
and the Y profile.
[Profile width] scroll bar
• "2 Points (X)
The line width is set with the line
2 points are specified in the X profile.
specified as reference. (Unit: Line)
The line width is the width to measure 1 • "2 Points (Y)
line averaged with the peripheral data. 2 points are specified in the Y profile.

[Average] scroll bar

The number of the data to be averaged in
Fig. 3-22 [Surface/Tilt Correction] group the peripheral area is set in specifying the
points on the profile window. (Unit: Data)
(Tilt Correction mode)

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1. Click the <X Profile> button or the <Y Profile> button. The profile of the image
(data) at the position specified by the yellow line would appear in the image display
section.
2. The offset method is selected with the [Processing mode] option button.

1.1 Offset in the " Manual" mode

1. When the [X Profile Display] / [Y Profile Display] window does not indicate a scale,
click the mouse right button over the black area of the window. Since a pop up
menu appears, select the [Display Scale].

To change the scale, select the [Scale Setting] on the pop up menu.
TIP
The [Scale Setting] window will appear. Set the [Scale: Max.] and the
[Scale: Min.] and then, click the <Apply> button. For further details, see
2-6 Display contrast setting in this manual.

TIP Providing width to the line specified, the profile of which data is averaged
inside the area can be used for setting inclination offset in case noises
exist.
In such a case, the width to be averaged (number of lines) should be set
with [Profile width] scroll bar.
Profile width will appear in blue line.

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Image processing / Surface/Tilt Correction

2. Using the scale appeared on the [X Profile] / [Y Profile] window, align the slant
(slope) of the curved red line displayed in the [X Profile] / [Y Profile] window with the
profile.

Fig. 3-23 X Profile Window in "Profile Manual" mode

1.2 Offset in the "Auto" mode

1. Select the subject that should be compensated in the [Target] drop down list.
• XY---Calculating the straight line approximation for every 1 horizontal line, the
offset is applied to all lines in vertical direction and then, calculating the straight
line approximation for every 1 vertical line, the offset is applied to all lines in
horizontal direction.
• YX---Calculating the straight line approximation for every 1 vertical line, the
offset is applied to all lines in horizontal direction and then, calculating the
straight line approximation for every 1 horizontal line, the offset is applied to all
lines in vertical direction.
• X---Calculating the straight-line approximation for every 1 horizontal line, the
offset is applied to all lines in vertical direction.
• Y---Calculating the straight-line approximation for every 1 vertical line, the offset
is applied to all lines in horizontal direction.

Fig. 3-24 [Target] drop down list for " Auto" inclination offset

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Image processing / Surface/Tilt Correction

1.3 Offset in "Image" mode

1. With the [Mask Size] option button, enter the size for one side of peripheral pixels
that should be averaged.
2. Click 3 points that should be turned horizontal after inclination offset in the Image
Display Window. When a point is clicked, an X mark in red will appear in the
Image Display Window.
3. When 3 points are set, a straight line in red will appear to indicate a flat plane to be
compensated in the [X Profile Display Window] / [Y Profile Display Window].
When the yellow line that indicates the position of the profile appeared in the Image
Display Window is moved with the mouse-drag-motion, the segment of the red
straight line displayed in the [X Profile Display Window] / [Y Profile Display Window]
will be changing. Move the position of the profile in the Image Display Window
and see if the straight line set is acceptable.

When the inclination offset should be re-programmed by deleting

TIP
the point clicked, click the mouse right button in the Image Display
Window and click the [Clear points] on a pop up menu displayed.

When a change such as the profile line move or the mask size
TIP
change is done before specifying 3 points, the points specified up to
the moment will be cleared.

In case the image is displayed in 3D view, the compensation in

TIP
image mode cannot be performed.

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Image processing / Surface/Tilt Correction

Fig. 3-25 Image Display Window in the [Image] mode

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Image processing / Surface/Tilt Correction

1.4 Offset in the "Point" mode

1. Select the subject that should be compensated in the [Target] drop down list.
• 3 Points (XY) ..... Inclination offset is executed on a flat surface that passes
through a total of 3 points specified in the [X Profile Window] /
[Y Profile Window].
• 2 Points (X) ....... Inclination offset is executed on a straight line that passes
through 2 points specified in the [X Profile Window].
• 2 Points (Y) ....... Inclination offset is executed on a straight line that passes
through 2 points specified in the [Y Profile Window].

Fig. 3-26 [Target] drop down list for the [Point] Inclination Offset
2. Set the average. When the peripheral data should be averaged, set the number of
the data and, if the average is not required, set 1.
3. Click the points of the plane that should be turned flat after inclination offset on the
[X Profile] Window / [Y Profile Window]. If the average is set to other than 1, the thin,
white perpendicular lines will appear on the area to be averaged, placing a white
perpendicular line as a center that appears over the position clicked. When the
mouse button is released, an X mark will appear on the clicked position.

Fig. 3-27 X Profile Window when the left button is pressed in the "Point" mode

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Image processing / Surface/Tilt Correction

4. When the number of the points necessary for setting inclination offset is clicked,
a red straight line that passes through the points clicked will appear in the
window.
When the yellow line that indicates the position of the profile appeared in the
Image Display Window is moved with the mouse-drag-motion, the segment of
the red straight line displayed in the [X Profile Display Window] / [Y Profile
Display Window] will be changing. Move the position of the profile in the
Image Display Window and see if the straight line set is acceptable.

Fig. 3-28 [X Profile] Window after being specified 2 points in the “Point” mode

TIP When the inclination offset should be re-programmed by deleting

the point clicked, click the mouse right button in the Image Display
Window and click the [Clear points] on a pop up menu displayed.

When a change such as the profile line move is done before

TIP
specifying the number of the points needed, the points specified up
to the moment will be cleared.

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Image processing / Surface/Tilt Correction

2 Execution of Inclination Offset

Click the <Start> button.

Fig. 3-29 Image Display Window ("Manual" mode) after Inclination Offset

3 Retry of Inclination Offset

If the result of the process is not satisfactory, click the <Undo> button. Adjust inclination
or curve of the red straight line displayed in the Profile window and click the <Start>
button again.

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Image processing / Height Noise Removal

3-6 Height Noise Removal

It eliminates noise that occurred because intensity level of height image was low or noise
occurred because of saturated intensity. Methods to eliminate noise are; when noise

<Height Noise Removal> occurred due to low intensity, 1): height with lower intensity than specified level is
button
replaced with height of minimum value that has more intensity than specified level (Fig.
3-30 Case of height noise removal (c)) and 2): the said portion is interpolated with
portion of higher intensity level that the specified level (Fig. 3-30 Case of height noise
removal (d)). When noise occurred because of saturated intensity, the methods are; 1):
the height with higher intensity than specified level is substituted with height of minimum
value that has more intensity level than specified level and, 2): the said level is
interpolated with portion that has lower intensity level than specified level.

Case of height noise removal (in case that noise appears due to low intensity)
When image appears in intensity and height mode as shown in Fig. 3-30 (a) and (b)
respectively and; when noise level is specified as shown in Fig. 3-30 (a), noise region is
defined at the portion nestled between dotted lines. The height data at the same level as
this region is eliminated as noise. Fig. 3-30 (c) indicates a case of minimum value
substitution method and Fig. 3-30 (d) indicates a case of interpolation method.
Noise Region
Intensity

(a)

Intensity Profile

X Noise Level

(b)
Height

Height Profile
(Original Image)

X
(c)
Height

Height Profile
(Min. Value
removed)
X

(d)
Height

Height Profile
(Interpolation)

Fig. 3-30 Case of height noise removal

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Image processing / Height Noise Removal

1 Setting process to remove height noise

Click <Height Noise Removal> button on tool bar. Control panel will change to [Height
Noise Removal] group as shown below.

<Save Settings> button

Setting condition of image processing
is saved with name assigned.
<Undo> button
It returns image processing to one <Load Settings> button
previous state. One previous state only
is revived. It calls setting of image processing
from file.
<Run> button <Y Profile> button
It improves quality of image with It displays data profile of vertical
processing method selected. direction (1 line) for image.

<X Profile> button <Histogram> button

It displays data profile of lateral It displays histogram of data pertaining
direction (for 1 line) for image. to lateral direction/vertical direction (for
1 line) and plane (for 1 image).

[X axis] / [Y axis] scroll bar [Low signal part] – [Processing

It sets position of image (data) that mode] option button
profile is to be displayed. • “Min.”
It substitutes portion of height
having lower image intensity level
than specified level with min. value
of height having higher intensity
[Low signal part] – [Threshold] level than specified level.
scroll bar • “Interp.”
It is a low intensity level to judge data It interpolates portion of height
as noise. When noise cannot be having lower image intensity level
removed, set this level high. When than specified level with use of
height image other than noise is portion having high value.
deteriorated, set this level low and try.
(Unit: Intensity (in intensity image)
[High signal part] – [Processing
Step (in height image))
mode] option button
[High signal part] – [Threshold] • “Min.”
scroll bar It substitutes portion of height
having higher image intensity level
It is a high intensity level to judge data than specified level with min. value
as noise. When noise cannot be of height having higher intensity
removed, set this level low. When level than specified level.
height image other than noise is
deteriorated, set this level high and try. • “Interp.”
(Unit: Intensity (in intensity image) It interpolates portion of height
Step (in height image)) having higher image intensity level
than specified level with use of
portion having low value.

Fig. 3-31 [Height Noise Removal] group

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Image processing / Height Noise Removal

1. Click <X Profile> and <Y Profile> button. Profile of image (data) which specified
with yellow line in image display section would appear.
2. When removing noise that occurred due to low intensity, select “Min.” or “Interp.” at
[Low signal part] – [Processing mode] option button.
3. Viewing [X Profile] / [Y Profile] window, move [Low signal part] – [Threshollding]
scrollbar and set noise level. Profile after height noise removal previews in pink.
4. When removing noise that occurred due to saturated intensity, select “Min.” or
“Interp.” at [High signal part] – [Processing mode] option button.
5. Viewing [X Profile] / [Y Profile] window, move [High signal part] – [Threshold]
scrollbar and set noise level. Profile after height noise removal previews in pink.

Fig. 3-32 Image display section before height noise removal

TIP Profile (colored pink) expected to done height noise removal appears
only as a guide line. Therefore, it may differ from the profile which
height noise removal process was actually applied.

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Image processing / Height Noise Removal

2 Executing process to remove height noise

Click <Run> button.

Fig. 3-33 Image display section after height noise removal

3 Redoing height noise removal process

When process result is not satisfactory, click <Undo> button.
Change noise level, etc., and, once again, click <Run> button.

TIP When noise that occurred due to low intensity cannot be removed, set intensity level
higher and; in case that height image other than noise is deteriorated, set intensity
level lower and see how it goes. When noise that occurred due to saturated intensity
cannot be removed, set intensity level lower and; in case that height image other than
noise is deteriorated, set intensity level higher and see how it goes. When noise that
occurred due to saturated intensity was removed with “Min.” option, portion where
height data fallen off may be increased, depending upon intensity level set.

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Image processing / Edge Enhancement

3-7 Edge Enhancement

Image edge displayed in image display section is enhanced with filter processing.

<Edge Enhancement>
button

1 Setting edge enhancement process

Click <Edge Enhancement> button on tool bar. Control panel will change to [Edge
Enhancement] group as shown below.

<Save settings> button

Setting condition of image processing
is saved with name assigned.
<Undo> button
It returns image processing to one
previous state. One previous state <Load Settings> button
only is revived. It calls setting of image processing from file.

<Run> button <Y Profile> button

It improves quality of image with It displays data profile of vertical
processing method selected. direction (1 line) for image.

<X Profile> button

It displays data profile of lateral <Histogram> button
direction (for 1 line) for image. It displays histogram of data pertaining
to lateral direction/vertical direction (for
1 line) and plane (for 1 image).
[Filter] option button
It selects filter processing to enhance
edge.
[X axis] / [Y axis] scroll bar
• “Sharpening”
It sets position of image (data) that
It enhances image edge.
profile is to be displayed.
• “Laplacian”
It makes image that intensity change
is highlighted.
• “Sobel”
It makes image that contour is
enhanced. Fig. 3-34 [Edge Enhancement] group

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Image processing / Edge Enhancement

1. Select filter out of “Sharpening”, “Laplacian” or “Sobel” with [Filter] option button.

Filter – “Sharpening” enhances all data in the image so that noises are
also enhanced. It is not suitable for noise rich image.

Fig. 3-35 Image display section before enhancement filter

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Image processing / Edge Enhancement

2 Executing process to enhance edge

Click <Run> button.

Fig. 3-36 Image display section after enhancement filter (Sharpening)

Fig. 3-37 Image display section after enhancement filter (Laplacian)

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Image processing / Edge Enhancement

Fig. 3-38 Image display section after enhancement filter (Sobel)

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Image processing / Contrast Enhancement

3-8 Contrast Enhancement

For image displayed in image display section, it equalizes portion where intensity
concentrates in histogram. With this function, contrast gets enhanced and the image

<Contrast Enhancement> easily viewable.

button

1 Setting process to equalize contrast

Click <Contrast Enhancement> button on tool bar. Control panel will change to [Contrast
Enhancement] group as shown below.

<Save Settings> button

Setting condition of image processing
<Undo> button is saved with name assigned.
It returns image processing to one
previous state. One previous state only <Load Settings> button
is revived. It calls setting of image processing
<Run> button from file.
It improves quality of image with
processing method selected. <Histogram> button
It displays histogram of data pertaining
<X Profile> button to lateral direction/vertical direction (for
It displays data profile of lateral 1 line) and plane (for 1 image).
direction (for 1 line) for image.
[X axis] / [Y axis] scroll bar
<Y Profile> button It sets position of image (data) that
It displays data profile of vertical profile is to be displayed.
direction (1 line) for image.
Fig. 3-39 [Contrast Enhancement] group

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Image processing / Contrast Enhancement

Fig. 3-40 Image display section before contrast enhancement

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Image processing / Contrast Enhancement

2 Executing process to enhance contrast

Click <Run> button.

Fig. 3-41 Image display section after contrast enhancement

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Image processing / FFT (Separation of surface profile)

3-9 FFT (Separation of surface profile)

It applies FFT processing for image displayed in image display section, and splits the
image into image of rough surface and image of smooth surface.
<FFT> button

1 Setting FFT process

Click <FFT> button. Control panel will change to [FFT] group as shown below.
Simultaneously, [1D FFT] window will appear.

<Undo> button
It returns image processing to one <Save settings> button
previous state. One previous state only
is revived. Setting condition of image processing
is saved with name assigned.

<Run> button
<Load Settings> button
It improves quality of image with
processing method selected. It calls setting of image processing
from file.

<X Profile> button

It displays data profile of lateral <Histogram> button
direction (for 1 line) for image. It displays histogram of data pertaining
to lateral direction/vertical direction (for
<Y Profile> button 1 line) and plane (for 1 image).
It displays data profile of vertical
direction (1 line) for image. [X axis] / [Y axis] scroll bar
It sets position of image (data) that
[Dimension] option button profile is to be displayed.
• “1D”
It is useful for image when cycle of X [Direction] option button
or Y direction only is clear. It selects direction (X: Lateral / Y:
• “2D” Vertical) that is applicable.
It is useful for image when cycle is
clear in 2D.
Fig. 3-42 [FFT] group

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Image processing / FFT (Separation of surface profile)

1. Click <X Profile> button or <Y Profile> button. Profile of image (data) at the
position specified by yellow line in image display section would appear.

TIP To display scale on profile, click mouse right button over the profile. As
pop up menu appears; select [Display Scale]. Display or Non-display of
scale can be changed over on this pop up menu.
To change scale, select [Scale Setting]. [Scale Setting] window will
appear. Set [Scale: Max.] and [Scale: Min.] and then, click <Apply>
button. For further details, see 2-6 Display contrast setting in this
manual.

2. Viewing image display section, move [X-axis] / [Y-axis] scroll bar and change
display position in a way that noise data is displayed over the profile.

Position of image (data) to display profile can be changed directly by

TIP
clicking yellow line on image display section with mouse. Place mouse
pointer near yellow line and, when mouse pointer changes to or ,

drag the mouse.

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Image processing / FFT (Separation of surface profile)

3. Select “1D” or “2D” with [Dimension] option button. When “1D” is selected, select
direction with [Direction] option button for which process is applied and, use
[Position] scroll bar on [1D FFT] window, align profile position to display. To set
cutoff frequency, use [High Frequency] scroll bar and [Low Frequency] scroll bar
located in [1D FFT] window or [2D FFT] window.

Fig. 3-43 Image display section before image separation

(Figure indicates when “1D” is selected with [Dimension] option button.)

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Image processing / FFT (Separation of surface profile)

2 Executing FFT process

Click <Run> button.

Fig. 3-44 Image display section after image separation

(Figure indicates when “1D” is selected with [Dimension] option button.)

3 Redoing FFT process

When process result is not satisfactory, click <Undo> button. Change each cutoff
frequency in [1D FFT] window or [2D FFT] window and, once again, click <Run> button.

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Image processing / Digital Zoom

3-10 Digital Zoom

Zooming magnifies a part of image in the [Image display] window. The magnified image
can be processed for quality improvement, measurement, changing display method and
<Digital Zoom> button
saving in the same way as ordinary images.

1 Setting digital zoom process

Click <Digital Zoom> button. Control panel will change to [Digital Zoom] group as shown
below.

<Save settings> button

<Undo> button Setting condition of image processing
It returns image processing to one is saved with name assigned.
previous state. One previous state only
is revived. <Load Settings> button

<Run> button It calls setting of image processing

from file.
It improves quality of image with
processing method selected.

<X Profile> button <Histogram> button

It displays data profile of lateral It displays histogram of data pertaining
direction (for 1 line) for image. to lateral direction/vertical direction (for
1 line) and plane (for 1 image).
<Y Profile> button
It displays data profile of vertical
[X axis] / [Y axis] scroll bar
direction (1 line) for image.
It sets position of image (data) that
profile is to be displayed.

[Zoom Rate] scroll bar

It sets the zoom ratio. The zoomed
area varies depending on the set zoom
ratio. The zoom ratio is variable [Zoom Center X] / [Zoom Center Y]
between 1.0X and 10.0X. scroll bar
It sets the coordinate values of the
center of the magnified area.

Fig. 3-45 [Digital Zoom] group

1. Set the zoom ratio by operating the [Zoom Rate] scroll bar. A green rectangle
appears in image display section to indicate the area to be magnified.

NOTE Increasing the zoom ratio results in deterioration of image quality.

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Image processing / Digital Zoom

2. While observing image display section, set the magnified area by operating the
[Zoom Center X] / [Zoom Center Y] scroll bars.

TIP Place mouse pointer inside the frame on image and, by dragging the
mouse, the region can be moved. .
The position where the button is released is set as a zoom-up position.

Fig. 3-46 Image display section before digital zoom

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Image processing / Digital Zoom

2 Executing digital zoom process

Click the <Run> button. The set area of the image will be magnified.

Fig. 3-47 Image display section after digital zoom

3 Redoing digital zoom process

When process result is not satisfactory, click <Undo> button. Change parameters of
each item in [digital zoom] group and, once again, click <Run> button.

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Image processing / Image Rotation

3-11 Image Rotation

Image can be rotated to perform edge measurement in diagonal direction and analysis

<Image Rotation> button of line roughness for the image being displayed on image display section.

NOTE In case roughness of an image rotated is analyzed, the region2

interpolated would also be included in the measurement. After
removing the interpolated region by a digital zoom process and the
like, the measurement should be performed.

1 Setting image rotation process

Click <Image Rotation> button. Control panel will change to [Image Rotation] group as
shown below. <Save settings> button
Setting condition of image processing is
<Undo> button
saved with name assigned.
It returns image processing to one
previous state. One previous state
only is revived. <Load Settings> button
It calls setting of image processing from file.
<Run> button
It improves quality of image with <Y Profile> button
processing method selected. It displays data profile of vertical direction (1
line) for image.

<X Profile> button <Histogram> button

It displays data profile of lateral It displays histogram of data pertaining to
direction (for 1 line) for image. lateral direction/vertical direction (for 1 line)
and plane (for 1 image).
[Rotation Angle] scroll bar
Rotation angle in clockwise direction
[X axis] / [Y axis] scroll bar
is set.
[Cross Line] check box It sets position of image (data) that profile is
When checked, a yellow straight line to be displayed.
to indicate rotation angle set with
[Rotation Angle] scroll bar will appear
[Auto] check box
on image display section.
When checked, the angle will automatically
[2 Points] check box be figured from edge information of a sample.
When checked, angle of a straight
line that passes through 2 points
specified on the image will be [Parallel Axis] option button
calculated.
When [2 Points] check box is ticked off, it
[Interpolation] option button chooses to which axis, X or Y, the straight
Interpolation option is set for a region of no data line that passes 2 points should be set to
after rotation. parallel.
• [Zero]: Pixel values for a region of no data will [Interpolation Region] check box
be filled with zero. When checked, a region of no data will
• [MAX]: Pixel values for a region of no data will appear in yellow.
be filled with the max. value of the image data
after rotation. [Magnification Enable] check box
• [Min]: Pixel values for a region of no data will When checked, after image rotation, a
be filled with the min. value of the image data rectangle region that does not include
after rotation. interpolation data will appear in magnified
size up to the original image size. As the
• [Average]: Pixel values for a region of no data rectangle region is the maximum area that
will be filled with average value of image data does not include interpolation data, it is not
after rotation. applicable to the measurement.
2
If an image is rotated, a region of no data will be created. The said region will be interpolated with the
intensity value selected. In case of a height image, it will be interpolated with the height value selected. In
case of a color image, the value interpolated will be zero.
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Image processing / Image Rotation

1. Tick off [2 Points] check box.

2. On the image display section, click on two (2) points that should be set to parallel in
X axis.
When clicked, red X marks and a yellow straight line that passes through the said 2
points will appear on the "Image display" window.

3. Select [X Axis] option button on [Parallel Axis].

4. Select [Zero] option button on [Interpolation].

5. Tick off [Magnification Enable] check box.

Fig. 3-48 Image display section before rotation

TIP Besides [2 Points], the rotation angle can be set, using scroll bar or auto
setting option.
z In case of setting with scroll bar:
Using [Rotation Angle] scroll bar, set it to arbitrary selected value.
z In case of setting in auto mode:
Tick off [Auto] check box.
(Rotation angle will automatically be calculated from edge information
of a sample such as zebra pattern and the like.)

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Image processing / Image Rotation

NOTE When a rotation angle is set in auto mode, the following conditions
would occur.
z In case a specimen has no contrasted line pattern, the image may
not turn to a proper angle.
z In case a specimen has a pattern of lateral stripes with lesser
edges, the image may not turn to a proper angle.

z The target that applies is an intensity image only (even if an image

is turned while a height image or color image is being displayed,
the angle would be set with intensity image as reference).

2 Executing image rotation process

Select <Run> button. The image will be rotated to the angle set.

Fig. 3-50 Image display section after rotation

3 Redoing image rotate process

When process result is not satisfactory, click <Undo> button. Change parameters of
each item in [Image Rotation] group and, once again, click <Run> button.
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Image processing / One-Shot Noise Removal Filter

3-12 One-Shot Noise Removal Filter

Click one of the following shortcut icon buttons to eliminate noise according to the
surface shape. This feature is used to improve the view of 3D images in the Merged 3D
display.
<Noise removal for flat surface> button

<Noise removal for semisphere>

<Noise removal for button
jagged surface> button
<Undo> button
<Noise removal for
convexity> button Resets the one-shot filter

Fig. 3-50 [One-Shot Noise Removal Filter] Toolbar

The one-shot filter is effective only for images acquired with 3D

NOTE
acquisition (images containing height images). It is not effective for
images acquired with 2D acquisition.

The image processing function of each button is as described below. Use the optimum
button according to the specimen surface shape.

z <Noise removal for convexity> button

Eliminates noise on the surface of a gold bump, IC/PCB pattern grooves, light
<Noise removal for
convexity> button guide plate, etc.

z <Noise removal for jagged surface> button

Eliminates noise on the surface of a material, film, etc.

<Noise removal for jagged
surface> button

z <Noise removal for flat surface> button

Eliminates noise on the surface of a glass plate, wafer, etc.

<Noise removal for flat
surface> button

z <Noise removal for semisphere> button

Eliminates noise on the surface of a solder bump, bearing, etc.

<Noise removal for
semisphere> button

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Image processing / One-Shot Noise Removal Filter

Fig. 3-51 Image display section before using <Noise removal for convexity> button

Fig. 3-52 Image display section after using <Noise removal for convexity> button

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Image Analysis

4 Image analysis
Image acquired or image called from a file can be analyzed; the structure is measured
and analyzed in length, area, volume, line width, level difference and roughness.

1 Select analysis method of image.

Each function of image analysis can be accessed by the following 3 modes.

z Select method from z Select from buttons on tool bar.

[Analysis] menu.

z Press <Anly> button of [Control panel change

button] and select from the drop down list
displayed.

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Image Analysis / Measurement of distance/area

2 About Toolbar
<Step Measurement> button <Volume Measurement>
It measures height of height button
image. Volume of profile to form
mountain or valley (crater) is
measured.
<Particle Analysis> button
Image is binarized and size of
grain is measured. <Roughness Analysis>
button
Roughness or wave on surface
<Geometry Analysis> button for one line is analyzed.
Geometric profile of circle or
square and angle is measured.
<Edge Measurement> button
Line width inside area divided is
<Line Width Measurement> measured. (Option)
button
Line width of structure inside
image is measured.
<Step Refractive> button
Thickness of layer such as
<Distance/Area transparent film and the like is
Measurement> button measured. (Option)
It specifies rectangle or free
area on image and measures
the area.
Fig. 4-1 [Analysis] tool bar

NOTE If kind of image or position to measure line width or level difference

were changed, the data measured would not be deleted even if
<Undo> button is clicked.

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Image Analysis / Measurement of distance/area

4-1 Measurement of distance/area

Specify two points over the image displayed in image display section. The length
specified as well as dx, dy and dz would be measured. In addition, in case that the

<Distance/Area
length is consecutively measured with starting point as center, the angle would also be
Measurement> button
measured. Draw rectangle or area of free style over the image displayed in image
display section so that area designated in the range and surface area would be
measured.

Click <Distance/Area Measurement> button on tool bar. Control panel will change to
[Distance/Area Measurement] group as shown below.

<Save Settings> button <Load Settings> button

Setting condition of image analysis is It calls analysis setting saved.
saved with name assigned.
<Data Transfer> button
<Delete All Data> button Results measured can be displayed in
It deletes all data measured. Microsoft Office Excel.

<Area> button
<Undo> button
It sets area measurement.
It deletes data measured right before.

<Distance> button [Measurement Mode] option button

It sets distance measurement. It selects specifying method of the
portion to be measured.
[Area Specification] option button • “2 points”
It selects setting method for area to Every time, start point and end point
acquire start and end point. are specified.

• “1 point” • “Multipoint”
Position clicked with mouse It specifies a plural number of end
becomes start or end point. points consecutively with one start
point set as center.
• “Rectangle”
With mouse drag action, rectangular
area is specified. Center of gravity of [Fixed Width X] / [Fixed Width Y]
the area created would be start or scroll bar
end point. It sets size of area when “Fixed” is
• “Polygon” selected to specify area with [Area
With mouse drag action, area of free Specification] option button.
style is specified. Center of gravity of
the area created would be start or [Show results] checkbox
end point.
It selects kind of data to be output to
• “Fixed” data sheet. Items checked only would
With mouse drag action, rectangle of be output to data sheet. When all boxes
finite form would appear and area are off, Distance only would be output
can be specified. Center of gravity of as default setting.
the area created would be start or
end point.
Fig. 4-2 [Distance/Area Measurement] group

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Image Analysis / Measurement of distance/area

4-1-1 Measurement of distance

Specify two points over the image displayed in image display section. The length
specified as well as dx, dy and dz would be measured. In addition, in case that the
<Distance/Area length is measured consecutively with one starting point as center, the angle would also
Measurement> button
be measured.

The method to measure a distance by specifying a certain area on 2D display is

described here. In case the area to measure is specified on 3D display, see "4-14
Specifying a measurement area on 3D display".

1 Measuring distance
1. Click <Distance> button on control panel. Control panel will change to [Distance]
mode as shown below and [Distance Measurement] data sheet window will be
displayed.
<Save Settings > button
Setting condition of image analysis is <Load Settings > button
saved with name assigned. It calls analysis setting saved.

<Delete All Data> button

It deletes all data measured. <Data Transfer> button
Results measured can be displayed in
<Undo> button Microsoft Office Excel.
It deletes data measured right before.
[Measurement mode] option button
<Distance> button
It selects specifying method of the
It sets distance measurement. portion to be measured.
• “2 points”
[Area Specification] option button Every time, start point and end point
It selects setting method for area to are specified.
acquire start and end point. • “Multipoint”
• “1 point” It specifies a plural number of end
Position clicked with mouse points consecutively with one start
becomes start or end point. point set as center.
• “Rectangle”
With mouse drag action, rectangular [Fixed Width X] / [Fixed Width Y]
area is specified. Center of gravity of scroll bar
the area created would be start or It sets size of area when “Fixed” is
end point. selected to specify area with [Area
• “Polygon” Specification] option button.
With mouse drag action, area of free
style is specified. Center of gravity of
the area created would be start or [Show results] checkbox
end point. It selects kind of data to be output to
data sheet. Items checked only would
• “Fixed”
be output to data sheet. When all
With mouse drag action, rectangle of
boxes are off, Distance only would be
finite form would appear and area
output as default setting.
can be specified. Center of gravity of
the area created would be start or
end point.
Fig. 4-3 [Distance/Area Measurement] group (Distance mode)

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Image Analysis / Measurement of distance/area

2. Select either “2 points” or “Multipoint” from [Measurement mode] option button.

3. Select any of “1 point”, “Rectangle”, “Polygon” or “Fixed” at [Area Specification]

option button.

4. Select kind of data to output at [Show Result] check box.

5. Specify portion to be measured on image display section. Specifying method is

different, depending upon [Area Specification] selected.
z “1 point”
Click start and end point of the portion to be measured.
z “Rectangle”
Place cursor over arbitrarily selected start point on area to be measured
and then, drag the mouse diagonally to other point arbitrarily select to
draw a rectangle. Likewise, draw a rectangle for end point. Center of
gravity on rectangles specified would be start and end point.
z “Polygon”
Place cursor over arbitrarily selected start point on area to be measured
and then, click a few times to draw a polygon and, finally, double-click to
link the enclosure. Likewise, draw another polygon for end point. Center
of gravity on polygons specified would be start and end point.
z “Fixed”
When mouse button is pressed, fixed area would appear. Drag it to the start
point area to be measured. Likewise, make another regular area for end point.
Center of gravity of the regular areas specified would be start and end point.
Size of “Regular” area can be changed with [Fixed Width X] / [Fixed Width Y]
scroll bar.

In case that “Multipoint” is selected with [Measurement mode] option button,

end point specified repeatedly after specifying start point.

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Image Analysis / Measurement of distance/area

Fig. 4-4 Image display section –

[Measurement mode] set to “Multipoint” and [Area Specification] set to “1 point”

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Image Analysis / Measurement of distance/area

2 Display of distance measurement result

Length, dx, dy, dz and angle (when “Multipoint” is specified) would be displayed in
[Distance Measurement] data sheet window in accordance with the selection in [Show
Result] checkbox.
When “Rectangle”, “Polygon” or “Fixed” is selected with [Area Specification] option
button, the value of dz will be acquired with average value of start area and average
value of end area.

Shows the lengths of the

specified sections, dx, dy, dz,
angle and, if the tolerance
judgment is switched ON, the
tolerance judgment result.

Shows the statistical values

obtained based on the
measurement data.

[Standard / Upper limit /

Lower limit]
Enter the standard value and
tolerance (upper and lower limit
values) for use in tolerance
judgment using the keyboard.

<Tolerance judgment> button

• “ON”
Tolerance judgment is applied based on
the upper and lower limit values.
The result (OK or NG) will be shown in Fig. 4-5 [Distance Measurement] data sheet window
the [Judge] column.
• “OFF”
Tolerance judgment is not applied.

3 Sorting measurement data

To sort data, click [#] column. Data clicked would be highlighted with hatching. Data
with gray hatching can be identified as the number would be attached with asterisk (*)
when the said data is printed out or saved.

TIP Use gray hatching to identify meansurement data. Alternatively, put gray
hatching to the data mistakenly measured for identification.

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Image Analysis / Measurement of distance/area

4-1-2 Measurement of area

Draw a rectangle or free style area to be measured on image displayed in image display
section and the area of range and surface area specified would be measured.
<Distance/Area
Measurement> button
1 Measuring area
1. Click <Area> button on control panel. Control panel will be changed to [Area]
mode as shown below and [Area Measurement] data sheet window will appear.

<Load Settings> button

<Save Settings> button It calls analysis setting saved.
Setting condition of image analysis
is saved with name assigned. <Data Transfer> button
Results measured can be displayed
<Delete All Data> button in Microsoft Office Excel.
It deletes all data measured.
<Area> button
<Undo> button It sets area measurement
It deletes data measured right before.
[Area specification] option button
[Show results] checkbox It selects specifying method of area to be
It selects kind of data to be output to measured.
data sheet. Items checked only • “Rectangle”
would be output to data sheet. It specifies area in rectangle.
When all boxes are off, area only
• “Polygon”
will be output as default setting.
It specifies area in free style area with
Surface area is only measured in
mouse click action.
3D (extended) image.

Fig. 4-6 [Distance/Area Measurement] group (Area Mode)

2. Select “Rectangle” or “Polygon” with [Area specification] option button.

3. Select kind of data to output with [Show results] checkbox.

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Image Analysis / Measurement of distance/area

4. Specify area to be measured on image display section in rectangle or free form.

Specifying method is different, depending upon [Area specification] selected.
z “Rectangle”
Drag area from start to end point.
z “Polygon”
Encircle the area to be measured by clicking. Double-click at the end of point
to link the enclosure.

Fig. 4-7 Image display section with “Polygon” specified

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2 Display of Area Measurement Result

Area and surface area of portion specified will be displayed in [Area Measurement] data
sheet window.

Shows the lengths of the

specified sections, dx, dy,
dz, angle and, if the
tolerance judgment is
switched ON, the tolerance
judgment result.

<Tolerance judgment> button

• “ON”
Tolerance judgment is applied
based on the upper and lower
limit values.
Shows the statistical The result (OK or NG) will be
values obtained based on shown in the [Judge] column.
the measurement data. • “OFF”
Tolerance judgment is not
applied.

[Standard, Upper limit,

Lower limit] 2
Enter the standard value Unit Area ........µm
2
and tolerance (upper and Surface ...µm
lower limit values) for use (In case of intensity image,
in tolerance judgment the above unit has no
using the keyboard. meaning).

Fig. 4-8 [Area Measurement] data sheet window

3 Sorting measurement data

To sort data, click [#] column. Data clicked would be highlighted with hatching. Data
with gray hatching can be identified as the number would be attached with asterisk (*)
when the said data is printed out or saved.

Use gray hatching to identify meansurement data. Alternatively, put gray

TIP
hatching to the data mistakenly measured for identification.

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Image Analysis / Measurement of line width

4-2 Measurement of line width

Line width of structure in image displayed in image display section is measured. Using
data profile, set max. value for upper limit and min. value for lower limit to define
<Line Width threshold. Width of arbitrarily selected Peak or Valley of the height designated with
Measurement> button
threshold would be measured.

The method to measure a line width by specifying a line on 2D display is described here.
In case the line to measure is specified on 3D display, see "4-13 Specifying a
measurement line on 3D display".

1 Measuring line width

1. Click <Line Width Measurement> button on tool bar. Control panel will be
changed to [Line Width Measurement] group as shown below and [Line Width
Measurement] data sheet window will appear.

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Image Analysis / Measurement of line width

< Save Settings > button <Load Settings> button

Setting condition of image analysis is It calls analysis setting saved.
saved with name assigned.

<Delete All Data> button <Data Transfer> button

It deletes all data measured. Results measured can be displayed in
Microsoft Office Excel.

<Undo> button
[Direction] option button
It deletes data measured right before.
It selects direction to measure line
width.
[Averaging Mode] option button
When “Oblique” is selected with [Profile Width] scroll bar
[Direction] option button, this setting is In case that “Horizontal” or “Vertical” is
valid. selected with [Direction] option button,
• “Line” this setting is valid.
It measures one line specified. Based on line specified as reference, it
is to set width of 1 line that is set on
• “Plane”
average with peripheral data. (Unit:
Line is specified to have width. Data
Line)
between widths is averaged for one
line and measurement is done.
<Plural Profile> button
In case that “Horizontal” or “Vertical” is
[Mode] option button
selected with [Direction] option button,
It selects setting method of max. and this setting is valid. Five profiles can
min. value to define threshold range. be displayed at one time and
• “Manual” measurement ca be done on each
Max. and min. value are arbitrarily profile.
set.
In case that checkbox of [Split] is <Profile Clear> button
checked, profiles can be split in 2, Profile lines displayed in plural number
left and right and max. and min. can be deleted, one by one.
value can be separately
programmed. [Profile Position] scroll bar
• “Auto” It sets position of image (data) to be
Specifying measurement position, it measured.
detects max. and min. value
automatically.
[Threshold] scroll bar
[Split] checkbox It sets threshold value (ratio) of height
that becomes reference value when
When [Mode] is set to “Manual”, acquiring line width.
profiles can be split in 2, left and right
and max. and min. value can be set
separatelty. [Average width] scroll bar
When defining max. and min. value,
number of data to take average with
[Max. / Min.] scroll bar peripheral data is entered. (Unit: pixel)
When [Mode] is set to “Auto”, this
setting is valid. <Max./Min. Clear > button
It repels points having extremely
unreasonable change above or below It returns max. or min. value to the
of this level when defining profile range value which system detects.
to measure.
(Unit: Intensity value (in intensity
image), Fig. 4-9 [Line Width Measurement] group
Step (in height image))

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Image Analysis / Measurement of line width

TIP To display scale on profile, click mouse right button over the profile. Pop
up menu will appear. Select [Display Scale]. Display or Non-display
of Scale can be switched over on this pop up menu.
To change display scale, select [Scale Setting] on pop up menu.
[Scale Setting] window will appear. Set [Scale Max. Value] and [Scale
Min. Value] and click [Set] button. For further details, see 2-7 Display
contrast setting in this manual.

Fig. 4-10 Profile of “Horizontal” direction and image display section

2. Select direction to measure line width with [Direction] option button.

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Image Analysis / Measurement of line width

3. Specify line to measure on image.

Specifying method is different, depending upon [Direction] setting.
z “Horizontal” / “Vertical”
Position of profile specified with yellow line on image display section will
appear on [Profile Display] window. Viewing image display section, specify
the line to measure with use of [Profile Position] scroll bar.

TIP Position of image (data) to be measured can be changed by

dragging line colored coincide with profile number with mouse over
the image display section directly. Place mouse pointer near yellow
line and, when mouse pointer changes to or , drag the

mouse.

TIP When noise exists, the line specified can be changed to have width
and; data averaged in width range can be acquired as profile and
measured. In this case, use [Profile Width] scroll bar to set width
(number of lines) to be averaged. Section width will appear in blue
lines.

z “Oblique”
Click 2 points arbitrarily selected over image display section. The oblique line
that passes between two points will appear in yellow and; profile at designated
position will be displayed in [Profile Display] window.

TIP When noise exists, the line specified can be changed to have width
and; data averaged in width range can be acquired as profile and
measured. In this case, select “Plan” with [Averaging Mode] option
button and, after specifying oblique line, drag the mouse to the 3rd
point. Width to be average would appear in blue lines. Release the
mouse at desired position.

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Image Analysis / Measurement of line width

z “Vertical”
Click 2 points arbitrarily selected over image display section. The straight line
that passes between two points will appear in yellow as reference line. Next,
click the 3rd point at arbitrary place. The line that passes vertically through
this point will appear in blue. Profile at the position designated by blue line will
be displayed in [Profile Display] window.

TIP When noise exists, the line specified can be changed to have width
and; data averaged in width range can be acquired as profile and
measured. In this case, select “Plane” with [Averaging Mode] option
button and, after specifying vertical line (line that is vertical against
reference line), drag the mouse to the 4th point. Width to be
average would appear in blue rectangle with the 3rd point as start
point. Release the mouse at desired position.

4. Threshold value would appear over white dot line in [Profile Display] window. Move
[Threshold] scroll bar and set reference height (threshold value).

5. Select “Manual” or “Auto” with [Mode] option button.

Setting can be done on pop up menu. Click mouse right button

TIP
over profile so that pop up menu will appear. Select [Manual] or
[Auto].

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Image Analysis / Measurement of line width

6. Set maximum and minimum value and measure the line width.
Specifying method is different, depending upon [Mode] selected.
z “Manual”

1) When profile is not uniform with peak or valley and, in case that max. value
and min. value are required to set separately, left and right, check
checkbox of [Split] of [Mode] option button. Vertical white line would
appear in [Profile Display] window. Place mouse pointer near this vertical
line and, when mouse pointer changes to , drag the mouse, left or
right, and release the mouse button at the position where line width is
desired to split, left and right.
2) Max. value and min. value would appear in lateral blue lines over [Profile
Display] window. To change the position of blue line, place mouse
pointer near the blue line and, when mouse pointer changes to , drag

the mouse. The 3rd vertical blue line would also appear. Align mouse
pointer at the position where vertical line is crossed with lateral blue line to
set max. or min. value and release mouse button.

When noise appears at portion of max. value or min. value, the

TIP
data can be averaged to set reasonable max. or min. value. In
this cae, set number of data to be averaged with [Averaging
widht] scroll bar.

TIP To return the value to max. or min. value that system software
detected, click <Max./Min. Clear > button. Meanwhile, note that
reeset can also be done from pop up menu. Click mouse right
button over profile. As the pop up menu appears, click [Reset].

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Image Analysis / Measurement of line width

7. Click “start” and “end” point of the section of which measurement is required over
[Profile Display] widow with use of mouse.
z “Auto”

1) Set data range of change that can be considered reasonable for max. and
min. value to define profile with use of [Max./Min. Level] scroll bar.

2) Click and define section to be measured. System software detects max.

and min. value and measure the line width.

The section measured would appear with the mark as shown below in image
display section.

Measurement No.
Section Width
1

Measurement Section

Specified section for measurement

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Image Analysis / Measurement of line width

Fig. 4-11 Image display section with “Horizontal” profile

TIP Short red vertical lines would appear, up and down, on [Profile Display]
window. The inside portion nestled with these short red vertical lines is
the range of which accuracy is guaranteed.

TIP Clicking [Save Profile Image] on pop up menu appeared when the mouse
right button was clicked inside [Profile Display] window, the profile being
displayed can be saved as an image. The save type would be any of
BITMAP, JPEG or PING.

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Image Analysis / Measurement of line width

In case that a plural number of profiles are required to display

TIP
simultaneously on [Profile Display] window, click <Plural Profile > button for
number of profiles to be displayed. Profile colored with the button clicked
would appear in one [Profile Display] window. Click <Plural Profile > button
of the profile color to be measured and execute measurement as in the
case of normal measurement.
In reverse, in case that the profile is required to delete, click <Plural Profile
> button of the profile to be deleted and then, click <Profile Clear> button.

Fig. 4-12 Line width measurement in plural profiles displayed

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Image Analysis / Measurement of line width

2 Display of Line width measurement result

Line width for the section specified and its max. and min. value would be indicated in
[Line Width Measurement] data sheet window.

<Tolerance judgment> button

Shows the lengths of the • “ON”
specified sections, dx, dy, Tolerance judgment is
dz, angle and, if the applied based on the upper
tolerance judgment is and lower limit values.
switched ON, the tolerance The result (OK or NG) will be
judgment result. shown in the [Judge] column.
• “OFF”
Tolerance judgment is not
applied.

Shows the statistical values

obtained based on the z In intensity image
measurement data. Unit: Width...... µm
Max.
Intensity
Min.
[Standard / Upper limit / Intensity
Lower limit]
Enter the standard value and z In height image
tolerance (upper and lower Unit: Width...... µm
limit values) for use in Max.. ...... µm
tolerance judgment using the Min. ........ µm
keyboard.
Fig. 4-13 [Line Width Measurement] data sheet window

3 Sorting data
To sort data, click [#] column. Data clicked would be highlighted with hatching. Data
with gray hatching can be identified as the number would be attached with asterisk (*)
when the said data is printed out or saved.

TIP Use gray hatching to identify meansurement data. Alternatively, put

gray hatching to the data mistakenly measured for identification.

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Image Analysis / Geometric analysis

4-3 Geometric analysis

Geometric analysis of circle, square or angle of the image displayed in image display
section can be done.
<Geometry Analysis>
button 1 Geometric analysis procedures
Click <Geometric> on tool bar. Control panel will be changed to [Geometric Analysis]
group as shown below. Geometric analysis procedures begin by selection “Align” with
[Mode] option button. Set alignment (coordinate setting) and then, measure with “Meas.”
of [Mode] option button.

<Save Settings> button <Load Settings> button

Setting condition of image analysis is It calls analysis setting saved.
saved with the name assigned.
<Data Transfer> button
<Delete All Data> button
The results measured can be
It deletes all data measured.
displayed in the Microsoft Office Excel.

<Undo> button
[Measurement Object] option button
It deletes the data measured right before.
In accordance with the item selected, a
window where measurement can be done
[Mode] option button will be changed.

Depending upon the option button • "X-Y Plane"

selected, the indication inside group will Measurement is done on the image.
be changed. • "X-Z Profile"
• “Meas.” Measurement is done on the X profile.
Geometric measurement is done. • "Y-Z Profile"
• “Align” Measurement is done on the Y profile.
It changes the coordinate system.
[No. of measurement points]
The number of points required to
<Measurement type> button measure one point and the number of
It selects the measurement method. the points entered are displayed.
Depending upon the method selected,
the input point and the item required for
measurement will change. [No. of input points]
The number of the input points
required for measurement and the
<Input type> button number of the input points entered are
It selects the input method. Depending displayed.
upon the method selected, the method
to acquire one input point will change.
[Profile width] scroll bar
It turns enabled when the "X-Z Profile"
or the "Y-Z Profile" is selected with the
[X-axis Display Position] / [Y-axis [Measurement Object] option button.
Display Position] Scroll bar
It is used to specify the width to
The position of the image (data) where measure one line averaged with the
a profile appears is set. peripheral data, using a line specified
as reference.
(Unit: Line)
Fig. 4-14 [Geometric Analysis] group

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Image Analysis / Geometric analysis

Input point....... It means point necessary to execute measurement and alignment.

Measurement point..... It means point necessary to acquire one input point in case that input method to input 2 to
5 points (Midpoint input , Circle center input , Cross point of 2 straight lines input

or Square hole center point input is selected at [Input Method] buttons.

For example ..... Measurement method: Midpoint measurement, Input method: Circle center input

selected. See below.

Measurement point Input point

Enter measurement points

and input points as shown will
be acquired.

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4-3-1 Alignment
Change Coordinate system. Select “Alignment” with [Mode] option button. The display in
[Geometric Analysis] group will be changed for alignment program.
Meanwhile, the alignment software can only be used when [Measurement Object] option
button is set to “X-Y Plane”.

<Load Settings> button

<Save Settings> button
It calls analysis setting saved.
Setting condition of image analysis is
saved with name assigned.
<Data Transfer> button
<Delete All Data> button Results measured can be displayed in
It deletes all data measured. Microsoft Office Excel.

<Undo> button [Measurement Object] option button

It deletes data measured right before. In accordance with the item selected, a
window where measurement can be done
will be changed.
[Mode] option button
• "X-Y Plane"
Depending upon the option button
Measurement is done on the image.
selected, the indication inside group will
be changed. • "X-Z Profile"
Measurement is done on the X profile.
• “Meas.”
Geometric measurement is done. • "Y-Z Profile"
Measurement is done on the Y profile.
• “Align”
It changes the coordinate system.

<Alignment Type> button [No. of input points]

It selects the alignment method. The number of the input points necessary
Depending upon the method selected, for alignment and the number of the input
the input point necessary will change. points entered will be displayed.
Change the method of the coordinate
system is also different.
[No. of Measurement points]
<Input type> button The number of the measurement points
It selects the input method. Depending necessary to acquire one input point
upon the method selected, the method to and the number of measurement points
acquire one input point will change. entered will be displayed.

Fig. 4-15 [Geometric Analysis] group (Alignment mode)

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Image Analysis / Geometric analysis

1 Function of each <Alignment type> button

z Parallel Move

X and Y-axis are moved to parallel to make input point*1 1 as home

position.

z Coordinate Set Alignment – Specify 2 Points (Middle Point)

Set X-axis at straight line that passes input point 1 and 2 and set Y-
axis at midpoint as home position between input point 1 and 2.

z Coordinate Set Alignment – Specify 2 Points (1st Point)

Set X-axis at straight line that passes input point 1 and 2 and set Y-
axis at input point 1 as home position.

z Coordinate Set Alignment – Specify 3 Points (Vertical Line)

Set X-axis at straight line that passes input point 1 and 2 and set Y-
axis that is vertical to X-axis and passes input point 3. Home
position is set at cross point of X-axis and Y-axis.

*1 It means point necessary to execute measurement or alignment.

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Image Analysis / Geometric analysis

z Coordinate Set Alignment – Specify 3 Points (Parallel Line)

Set X-axis at line that is parallel to the line that passes input point 1
and 2 and set Y-axis at input point 3 as home position.

z Coordinate Set Alignment – Specify 4 Points (Cross Point)

Set X-axis at straight line that passes input point 1 and 2 and set
home position at cross point where straight line that passes input
point 3 and 4 intersects with X-axis.

z Coordinate Set Alignment – Rotate Coordinate

Leaving home position “as is”, the coordinate system is turned so as

to make straight line that passes input point 1 to X-axis.

z Center home position

Center point displayed in image is set as home position.

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Image Analysis / Geometric analysis

z Left lower home position

Left lower point of image being displayed is defined as home position

and coordinate axe are set horizontal and vertical against image.

z Back

Coordinate system currently set is returned to the coordinate system

previously set.

2 Function of each <Input type> button

z Coordinate Direct Input

Select this function when coordinate of input point is required to input

directly. Measurement point*2 is used as input point “as is”.

z Midpoint Input

Select this function when input point is required to set between two
points. Midpoint between two points is defined as input point.

*2 It means point necessary to acquire input point.

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Image Analysis / Geometric analysis

z Circle Center Input

Select this function when input point is required to input at center of

circle. Center coordinate of circle that is formed with 3 measurement
points is defined as input point.

z Cross point of 2 straight lines Input

Select this function when input point is required to input at cross point
of 2 straight lines. Cross point where a straight line passing
measurement point 1 and 2 and another straight line passing
measurement point 3 and 4 intersects is defined as input point.

z Square Hole Center Input

Select this function when input point is required to input at center of

square. Center coordinate of square that is formed with a side that
goes through 2 measurement points (measurement point 1 and 2)
and 3 other measurement points (3, 4 and 5) is defined as input point.

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3 Alignment Method
1. Select method to change coordinate system from <Alignment type> buttons.
2. Select method to acquire one input point from <Input type> buttons.
3. Click measurement point on image in image display section with mouse. Number of
measurement points will be different, depending upon <Input type> selected.
Click measurement point over image so that red mark (x) would appear on image.
When clicking for number of times input point required is done, mark (x) at
measurement point will disappear and red mark (x) appears over the input point
acquired.
4. Repeat procedure 3 for number of times necessary for input point. When done, the
coordinate system will be changed and the coordinate axis appears with red line
over image display section.

Fig. 4-16 Image display section after alignment

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4-3-2 Measurement
Do Measurement. Select “Measurement” with [Mode] option button. Display inside
[Geometric Analysis] group will change for measurement.

<Load Settings> button

<Save Settings> button It calls the analysis setting saved.
Setting condition of image analysis is
saved with the name assigned.
<Data Transfer> button
<Delete All Data> button The results measured can be
It deletes all data measured. displayed in the Microsoft Office Excel.

<Undo> button [Measurement Object] option button

It deletes the data measured right before. In accordance with the item selected, a
window where measurement can be done
will be changed.
[Mode] option button • "X-Y Plane"
Depending upon the option button Measurement is done on the image.
selected, the indication inside group will • "X-Z Profile"
be changed. Measurement is done on the X profile.
• “Meas.” • "Y-Z Profile"
Geometric measurement is done. Measurement is done on the Y profile.
• “Align”
It changes the coordinate system.
[No. of input points]
The No. of the input points necessary
<Measurement type> button to acquire the input point and the No.
of points entered are indicated.
It selects the measurement method. The
input point and the item to measure will
change, depending upon the method [No. of Measurement points]
selected. The No. of the measurement points
required to acquire one input point and
the No. of points entered are indicated.
<Input type> button
It selects the input method. Method to
acquire 1 point will change, depending
upon the input method selected. [Profile width] scroll bar
It turns enabled when the "X-Z Profile " or
the "Y-Z Profile" is selected with the
[X-axis Display Position] / [Y-axis [Measurement Object] option button.
Display Position] Scroll bar
It is used to specify the width to measure
The position of the image (data) where a one line averaged with the peripheral
profile appears is set. data, using a line specified as reference.
(Unit: Line)

Fig. 4-17 [Geometric Analysis] group (Measurement mode)

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Image Analysis / Geometric analysis

1 Function of each <Measurement type> button

z Right angle Coordinate Measurement

It acquires coordinates (x, y) of one point entered (Input point*31).

z Midpoint Coordinate Measurement

It acquires coordinates of midpoint (x, y) between two points (Input

point 1 and 2).

z Circle Coordinate Measurement

It acquires diameter D, radius R, area S and center coordinates (x, y)

of circle that is formed with input point 1, 2 and 3.

*3 It means point necessary to execute measurement and alignment.

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Image Analysis / Geometric analysis

z Cross point measurement of 2 straight lines

It acquires cross point coordinates (x, y) with straight line that passes
input point 1 and 2 and other straight line that passes input point 3
and 4 and also cross angle A.

TIP The acute angle is regarded as the cross angle A and is

output.

z Square hole measurement

It acquires length of each side (long side L, short side L1), area S and
center coordinates (x, y) of square that is formed with a side that goes
through 2 input points (1 and 2) and other 3 input points (3, 4 and 5).

z Polar coordinates measurement

It acquires rotation angle A against distance L of straight line that

passes between input point 1 and 2, coordinates difference (dx, dy)
and X-axis.

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2 Function of each <Input type> button

z Coordinate Direct Input

Select this function when input point is required to input directly.

Measurement point*4 is defined as input point “as is”.

z Midpoint Input

Select this function when input point is required to input between 2

points. Midpoint between 2 measurement points is defined as input
point.

z Circle center point input

Select this function when input point is required to input at center of

circle. A center coordinate of circle that is formed with 3 points is
defined as input point.

*4 It means point necessary to acquire input point.

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Image Analysis / Geometric analysis

z Cross point of 2 straight lines input

Select this function when input point is required to input at cross point
of 2 straight lines. Cross point of a straight line that passes
measurement point 1 and 2 and other straight line that passes
measurement point 3 and 4 is defined as input point.

z Square hole center input

Select this function when input point is required to input at center of

square. Center point of square that is formed with a side that goes 2
measurement points (1 and 2) and other measurement points (3, 4
and 5) are defined as input point.

3 Measurement method
3.1. Measurement method on the Image display
1. Select measurement method with <Measurement type> button.
2. Select method to acquire one input point with <Input type> button.
3. Click measurement point on image in image display section with mouse.
Number of measurement points to acquire one input point is different,
depending upon <Input type> selected.
Click measurement point and red mark (x) will appear on image. Click for
number of times input points required. When done, mark (x) on measurement
point will disappear and red mark (x) will appear on input point acquired.

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Image Analysis / Geometric analysis

4. Repeat procedure 3. for number of times input points required. When done,
the section that is desired to measure would appear in yellow line on image.

Fig. 4-18 Image display section after measurement

(Figure indicates the case of “square hole measurement”.)

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Image Analysis / Geometric analysis

3.2. Measurement on the X Profile/Y Profile Window

1. Select the measurement method from the <Measurement Type> button list.
2. Select the method to acquire one input point from the <Input Type> button list.
3. Select a line to measure on the Profile Window.
Profile at a position specified with a line on the Image Display Window will
appear on the "X Profile/Y Profile Window". Viewing the Image Display
Window, specify the line to measure, using the [X-axis Profile Position] / [Y-
axis Profile Position] Scroll bar.

TIP The position of the image (data) to measure can directly be changed
if the yellow line on the Image Display Window is moved with the
mouse drag motion. Move the mouse pointer near the line and,

when the profile of the mouse pointer is changed to or , drag

the mouse.

When a noise or an irregularity appears, apply the width to the line

TIP
specified and use it to measure a profile averaged with the peripheral
data.
In such a case, set the width (number of lines) to be averaged, using
the [Profile width] scroll bar. The profile width will appear in blue
line.

4. When the mouse is dragged over the "X Profile/Y Profile Window", a white
perpendicular line that moves up and down will appear. Since the point where
this white line crosses over a profile is a measurement point, drag the mouse
to the measurement point and then, release the mouse button. The number of
the measurement points to acquire one input point is different, depending
upon the <Input Method> selected.
When a measurement point is clicked, a white mark (X) will appear on the "X
Profile/Y Profile Window". When the measurement points necessary for the
input point are all clicked, the mark (X) of the measurement point will
disappear and the white mark (X) will appear on the input point acquired.

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Image Analysis / Geometric analysis

5. Repeat step 4. for the number of input points necessary. When done, a
green line will appear on the measured area of the "X Profile/Y Profile
Window".

Fig. 4-19 Profile Window after Measurement

(The figure shows the window when the "Circle Coordinate Measurement" is done.)

Setting Z scale against the scale in X and Y direction to 1:1 causes to display a
TIP
profile in a perfect circle.
For further details, see "2-7 Cross Section Profile Display suited to Full Scale
Profile".

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Image Analysis / Geometric analysis

4 Display of geometric analysis result

Measurement result of geometric analysis will be displayed in [Geometric Analysis] data
sheet window. Items of measurement result are different, depending upon details
measured.

It shows the
measurement results.
When the tolerance
judgment is executed, it
also shows the
judgement.

Shows the statistical

values obtained based
on the measurement
data.

[Standard / Upper limit

/ Lower limit]
Enter the standard
value and tolerance
(upper and lower limit
values) for use in
tolerance judgment
using the keyboard.

<Tolerance judgment> button

Fig. 4-20 [Geometric Analysis] data sheet window
• “ON” (Figure indicates the case of “square hole measurement”.)
Tolerance judgment is applied based
on the upper and lower limit values.
The result (OK or NG) will be shown in Unit:
the [Judge] column.
Angle (x , y)....... µm
• “OFF” Midpoint (x , y)....... µm
Tolerance judgment is not applied. Circle (x , y)....... µm
Cross 2-lines (x , y)....... µm
Square L , L1....... µm
(x , y)....... µm

5 Sorting data
To sort data, click [#] column. Data clicked would be highlighted with hatching. Data
with gray hatching can be identified as the number would be attached with asterisk (*)
when the said data is printed out or saved.

Use gray hatching to identify meansurement data. Alternatively, put

TIP
gray hatching to the data mistakenly measured for identification.

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Image Analysis / Particle analysis

4-4 Particle analysis

Image displayed in image display section is binarized and size of grain, etc., are
measured.
<Particle Analysis>
button
1 Executing particle analysis
1. Click <Particle Analysis> button. Control panel will change to <Particle Analysis>
group as shown below.

<Save Settings> button <Load Settings> button

Setting condition of image analysis is It calls analysis setting saved.
saved with name assigned.
<Data Transfer> button
<Delete All Data> button Results measured can be displayed in
It deletes all data measured. Microsoft Office Excel.

<Undo> button <Run> button

It deletes data measured right before. It executes binarization.
Simultaneously, excluding particle or
<Histogram> button hole filling is done.
It indicates histogram for data of
horizontal/vertical/plane (for 1 image).
It is used to set threshold value to <Show Result> button
binarize the image. It outputs analysis result to [Particle
Analysis] window.
<Undo> button
It returns image to original grayscale [Mode] option button
image before binarization. Binary It selects specifying method to specify
image is laminated over grayscale range to be measured.
image. • “Valley”
It measures portion of valley that is
[Threshold] scroll bar below threshold value.
It sets threshold value to binarize.
Valley
[Exclude small] checkbox • “Peak”
It sets No. of pixels of particle to be It measures portion of mountain that
removed. It repels particle of which is above threshold value.
number of pixels is less than the
number set. Peak

[Exclude large] checkbox

It sets No. of pixels of particle to be [Pixel connectivity] option button
removed. It repels particle of which It sets link state of pixels that are
number of pixels is larger than the handled as one particle.
number set.

[Show results] checkbox

[Fill holes] checkbox
It selects kind of data to be output to
It sets number of pixels to be filled up
data sheet. Items checked only will
for a hole of particle.
be output to data sheet. When all items
Fig. 4-21 [Particle Analysis] group are set to OFF, area only will be output
as default setting.

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Image Analysis / Particle analysis

2. Click <Histogram> button. [Histogram] window will appear.

Fig. 4-22 [Histogram] window and image display section

3. Viewing image display section and [Histogram] window, move [Threshold]

scroll bar and set threshold value to separate particle and background (portion
that is not particle). Portion to be analyzed would appear on image display
section and [Histogram] window in pink.

TIP Threshold value can be changed directly by dragging mouse over

red line on [Histogram] window. Place mouse pointer near red line
and, when mouse pointer changes to , drag the mouse.

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Image Analysis / Particle analysis

4. Change “Peak” or “Valley” so as to bring pink portion in image display section to

particle to be analyzed.
5. If there is a portion of which analysis is not required in pink portion in image display
section, set number of pixels for the portion of which analysis is not applied with use
of [Exclude small] and [Exclude large] scroll button and check the checkbox.
6. If there is a hole in pink portion displayed in image display portion and, in case that
the hole is required to fill up to analyze as one grain, set number of pixels for the
hole with use of [Fill holes] scroll button and check the check box.
7. Select the state of link for the particle (portion displayed in green) to be analyzed.
Select option button of “4” or “8”.
8. Select kind of data to output with [Show results] check box.

TIP About [Pixel connectivity]

It is to check how pixels inside image are linked with peripheral area
after image data is binarized and; aggregation of pixels is handled as
one particle. Depending upon pixel connectivity, number of particles or
binary processing may be different.

mark is a pixel of image data 1.

4 link 8 link
The pixels that are linked with center pixel of 3×3 vicinity are located up,
down, left and right in case of 4-link and, in case of 8-link, pixels located
at oblique position are added to 4-link state.

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Image Analysis / Particle analysis

9. Click <Run> button. Particle will appear in green and the background (portion that
is not particle) will appear in black on image display section.

Fig. 4-23 Image display section after binarization

10. In case that particle (portion displayed in green) to be analyzed is not satisfactory,
change setting of [Exclude small], [Exclude large] or [Fill holes] and click <Run>
button again.

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Image Analysis / Particle analysis

11. When particle to be analyzed is defined, click <Show Result> button.

Number will be assigned to the particle being displayed in image display section
and analysis result will be displayed in [Particle Analysis] data sheet window.

Fig. 4-24 Image display section after Show Result

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Image Analysis / Particle analysis

2 Display of Particle analysis result

Result of particle analysis result will be indicated in [Particle Analysis] data sheet
window.

TIP For details on the items in the analysis results, see Appendix A – Definition of
Particle Analysis Items.

Shows analysis
result for individual
particle.

Shows the statistical

values obtained
based on the
measurement data.

Shows analysis
result for all particles.
Fig. 4-25 [Particle Analysis] data sheet window
<Tolerance judgment> button
• “ON”
Tolerance judgment is applied
based on the upper and lower
limit values.
The result (OK or NG) will be
shown in the [Judge] column.
• “OFF”
Tolerance judgment is not
applied.

3 Sorting data
To sort data, click [#] column. Data clicked is attached with gray hatching. Data gray
hatched will be attached with asterisk (*) for identification when data is printed out or
saved.

TIP Use gray hatching when measurement values are required to sort. In addition,
use it to identify data mistakenly measured.

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Image Analysis / Step measurement

4-5 Step measurement

Using height image being displayed in image display section, step (height) is measured.
Set measurement points on profile to be displayed so that measurement can be
<Step Measurement> executed. Simultaneously, length, angle, line width and cross section can also be
button
measured. Cross section is computed for the area surrounded with a line that connects
two (2) points specified and section profile. At this time, the area that exists above the
line that connects 2 points is measured as upper area and the area below the line is
measured as lower area.

The method to measure a line width by specifying a line on 2D display is described here.
In case the line to measure is specified on 3D display, see "4-13 Specifying a
measurement line on 3D display".

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Image Analysis / Step measurement

1 Measuring step (height)

1. Click <Step Measurement> button on tool bar. Control panel will change to [Step
Measurement] group as shown below and also, [Step Measurement] data sheet
window and [Profile Display] window will appears.

< Save Settings> button

Setting condition of image analysis is saved
with name assigned.
<Undo> button
It deletes data measured right before. <Load Settings> button
It calls analysis setting saved.
<Delete All Data> button
It deletes all data measured. <Data Transfer> button
Results measured can be displayed in
Microsoft Office Excel.
[Direction] option button
It selects direction to measure step.
[Averaging Mode] option button
This setting is enabled when “Oblique” is
[Profile Width] scroll bar selected with [Direction] option button.
In case that “Horizontal” or “Vertical” is • “Line”
selected with [Direction] option button, this It measures 1 line specified.
setting is enabled. • “Plane”
It is to set width (number of lines) to Line is specified to have width and 1 line
measure 1 line by averaging peripheral of which data in width are averaged is
data based on line specified as reference. measured.
(Unit: Line)

<Clear> button
Profile lines displayed in plural number are
<Plural Profile> button deleted, one by one.
In case that “Horizontal” or “Vertical” is
selected with [Direction] option button, this
setting is enabled. 5 profiles can be [Profile Position] scroll bar
displayed simultaneously and It sets position of image (data) to be
measurement can be done on each profile. measured.

[Measurement Point] option button [Side - 1] / [Side - 2] scroll bar

It selects specifying method of point to be It sets number of pixels on data to be
measured. averaged to acquire measurement point.
• “Cursor” ”Side - 1” defines 1st point and “Side - 2”
It defines a point clicked as defines 2nd point.
measurement point. (Unit: Pixel)

• “Profile” [Show results] checkbox

It defines a point on profile as It selects kind of data sheet to output. Items
measurement point. checked only will be output. When all items
are set OFF, height only will be output as
default setting.

<SplineCurve Start/End/Delete> button

It is used to specify or delete a spline curve
for step measurement. [Use Interpolation] checkbox
When checked, a position on a spline
curve is defined as a measurement
point.
Fig. 4-26 [Step Measurement] group

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Image Analysis / Step measurement

TIP To display scale on profile, click mouse right button over profile. Pop up
menu will appear. Select [Display Scale]. Display or Non-display of scale can
be switched over on this pop up menu.
To change scale, select [Scale Setting] on pop up menu. [Scale Setting]
window will appear. Set [Scale Max. Value] and [Scale Min. Value] and click
<Set> button. For further details, see 2-7 Display contrast setting in this
manual.

Fig. 4-27 Profile in “Horizontal” direction and image display section

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Image Analysis / Step measurement

2. Select direction to measure step with [Direction] option button.

3. Specify line to be measured on image.

Specifying method is different, depending upon [Direction] selected.
z In case of “Horizontal” or “Vertical”
Position of profile specified with line on image display section will be displayed
in [Profile Display] window. Viewing image display section, specify the line to
be measured, using [Profile Position] scroll bar.

TIP Position of image (data) to be measured can be changed directly by

dragging the line colored coincide with profile number with mouse.
Place mouse pointer near the line and, when mouse pointer
changes to or , drag the mouse.

TIP When noise appears, specify the line so as to have width and
measure the profile of which data in range are averaged.
In this case, set width (number of lines) to be averaged with use of
[Profile Width] scroll bar. Profile width will appear in blue lines.

z “Oblique”
Click 2 points arbitrarily selected in image display section. Oblique line that
passes these two points appears in yellow and profile position specified will
appear in [Profile Display] window.

TIP When noise appears, specify the line so as to have width and
measure the profile of which data in range are averaged.
In this case, select “Plane” with [Averaging Mode] option button and
specify “Oblique” and then, drag the 3rd point. Width to be
averaged will appear in blue. Release the mouse button at desired
position.

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Image Analysis / Step measurement

z “Vertical”
Click 2 points arbitrarily selected in image display section. Straight line that
passes these two points appears in yellow as reference line. Next, click the
3rd point arbitrarily selected. Vertical blue line that passes this 3rd point will
appear. Profile position specified by blue line will appear in [Profile Display]
window.

TIP When noise appears, specify the line so as to have width and
measure the profile of which data in range are averaged.
In this case, select “Plane” with [Averaging Mode] option button and
specify “Vertical” (line that is vertical to reference line) and then,
drag the 4th point. Width to be averaged will appear in blue
rectangle with the 3rd point as start point. Release the mouse
button at desired position.

4. Select “Cursor” or “Profile” with [Measurement Point] option button.

TIP Setting can be done on pop up menu. Click mouse right button over
profile. Pop up menu will appear. Select [Cursor] or [Profile].

5. Select kind of data to output with [Show Result] checkbox.

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Image Analysis / Step measurement

TIP It allows a step measurement using a spline curve to interpolate a place on

a profile where data is missing.
To specify a spline curve, the following procedures are required in addition
to the normal setting procedures of step measurement.
1. Select "Profile" on [Measurement Point] option button.
2. Click on <SplineCurve Start> button.
<SplineCurve Start> button
<SplineCurve Start> button will change the display to <SplineCurve
End> button.

<SplineCurve End> button

3. Click on four (4) points or more on a profile where the interpolation
should be processed.
The point will appear in white X mark.
<SplineCurve Delete> button

4. Click on <SplineCurve End> button.

<SplineCurve End> button will change the display to <SplineCurve
Delete> button.
The spline curve will appear in blue.
5. In case measurement should be done on the spline curve, tick off [Use
Interpolation] checkbox.
The spline curve (blue) appears in light blue and the original profile
appears thin.

6. In case measurement should be done on the original profile, uncheck

[Use Interpolation] checkbox.
The original profile appears thick and the spline curve appears thin.

7. In accordance with subsequent procedures, specify measurement

points on a spline curve or profile and exercise the measurement.

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Image Analysis / Step measurement

TIP From popup menu, it is also possible to set "Start", "End" and "Delete" of
the specified spline curve.
1. Click on mouse right button over [Profile Display] window.
2. On the popup menu displayed, select any one of the following options
- [Start Interpolation Setting], [End Interpolation Setting] or [Delete the
spline curve].

Before curve specified Curve being specified After curve specified

Since interpolation by a spline curve is a value given by estimation, the

TIP
accuracy by the result of a step measurement using a spline curve will not
be guaranteed.

TIP Spline curve does not respond to Recipe since it is necessary to set points
to specify the curve.
In addition, the Point settings cannot be saved or called out.

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Image Analysis / Step measurement

6. Measure step.
Specifying method is different, depending upon [Measurement Point] selected.
z “Cursor”
Click 2 points arbitrarily selected. Points clicked are defined as
measurement points. (Points can also be defined other place than profile.)

z “Profile”
Drag mouse over profile so that vertical white line that moves left and light
appears. Point where the profile is crossed with this white line is a
measurement point. Therefore, drag to the measurement point and release
mouse button. Specify 2 measurement points and measure the step.

TIP Height of which peripheral data is averaged can be defined as

measurement point. Set number of pixels for data to be averaged
with use of [Side - 1] / [Side - 2] scroll bar. When specifying
measurement point, 2 vertical white lines will appear and, data
nestled with these lines are averaged and defined as height.
Cross point where this height and strong white line out of two
vertical white lines is defined as measurement point. With this
method, good repeatability that is not user’s dependent can be
acquired.

Point measured will be displayed with mark as shown below in image display
section.

Measurement No.
Slice width

Measurement point

Specified section measured

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Image Analysis / Step measurement

Fig. 4-28 Profile in “Horizontal” direction and image display section

TIP Short vertical bars appear in [Profile Display] window, up and down.
Inside portion nestled between red bars is the range of which accuracy
is guaranteed.

TIP Click [Save Profile Image] on pop up menu appeared when the mouse
right button was clicked inside [Profile Display] window, the profile being
displayed can be saved as an image. Save type would be any of
BITMAP, JPEG or PING.

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Image Analysis / Step measurement

TIP To display and measure a plural number of profiles in one [Profile

Display] window, click <Plural Profile> button for number of times
profiles are required. Each color of profile selected with the button will
appear in on [Profile Display] window. Click <Plural Profile> button,
which colored same as profile to be measured, and measure in normal
method. In reverse, when profile is required to delete, click <Plural
Profile> button of profile to be deleted and click <Clear> button.

2 Display of step (height) measurement result

Step (height) will be indicated in [Step Measurement] data sheet window.
Simultaneously, length, angle, line width, upper area and lower area are also displayed.
In case that the measured value is displayed fully in the cell, the digits may not appear
entirely because of too many digits. Make the cell wider and verify the digits.

Shows the step (height), length,

angle, line width, upper area,
lower area and, if the tolerance
judgment is switched ON, the
tolerance judgment result.

Shows the statistical values

obtained based on the
measurement data.

[Standard / Upper limit /

Lower limit]
Enter the standard value and
tolerance (upper and lower limit
values) for use in tolerance
judgment using the keyboard.

<Tolerance judgement> button

• “ON” Fig. 4-29 [Step Measurement] data sheet window
Tolerance judgment is applied
based on the upper and lower limit
values. Unit: Width .. µm
The result (OK or NG) will be Height. µm
shown in the [Judge] column. Length µm
• “OFF” Angle .. Degree(°)
Tolerance judgment is not applied. Area.... µm2

3 Sorting data
To sort data, click [#] column. Data clicked is attached with gray hatching. Data gray
hatched will be attached with asterisk for identification when data is printed out or saved.

TIP Use gray hatching when measurement values are required to sort. In addition,
use it to identify data mistakenly measured.

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Image Analysis / Volume measurement

4-6 Volume measurement

Using height image of image displayed in image display section, volume of portion that
forms peak or valley is measured with use of a certain height as reference. Set
<Volume reference height (threshold value) with use of profile and draw a rectangle over the
Measurement> button
image and specify the range to measure the volume. Simultaneously, area and surface
area can be measured.

1 Measuring volume
1. Click <Volume Measurement> button on tool bar. Control panel will change to
[Volume Measurement] group as shown below and also, [Volume Measurement]
data sheet will be displayed.
< Save Settings> button
Setting condition of image analysis is
saved with name assigned.

<Load Settings> button

<Delete All Data> button It calls analysis setting saved.
It deletes all data measured.
<Data Transfer> button
<Undo> button Results measured can be displayed in
It deletes data measured right before. Microsoft Office Excel.

<Y Profile> button

<X Profile> button
It displays data profile in vertical
It displays data profile in lateral
direction (for 1 line) against image.
direction (for 1 line) against image.

<Histogram> button
[X-axis] / [Y-axis] scroll bar It displays data histogram for lateral /
It sets image (data) position of which vertical direction (1 line) against image.
profile is displayed.
[Threshold] scroll bar
It sets ratio (threshold) of height as
reference to acquire volume.
[Mode] option button
It selects specifying method to define
range to be measured. [Measurement area] option button
It selects specifying method to define
• “Valley”
It measures valley portion based on range to be measured.
height set. • “Rectangle”
Valley It specifies range in rectangle.
• “Polygon”
• “Peak” It specifies range in free form with
It measures mountain portion based
mouse clicking action.
on height set.
Peak
[Show results] checkbox
It selects kind of data to output to data
sheet. Items checked only will appear
on data sheet. When all items are set
OFF, volume only will appear as default
Fig. 4-30 [Volume Measurement] group setting.

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Image Analysis / Volume measurement

2. Click <X Profile> button or <Y Profile> button. Image (data) profile at the position
specified with yellow line in image display section will appear.

TIP To indicate scale on profile, click mouse right button over profile. Pop
up menu will appear. Select [Display Scale]. Display or Non-display
of scale can be switched over on this pop up menu.
To change scale, select [Scale Setting]. [Scale Setting] window will
appear. Set [Scale Max. Value] and [Scale Min. Value] and click <Set>
button. For further details, see 2-7 Display contrast setting in this
manual.

3. Viewing image display section, move [X-axis] / [Y-axis] scroll bar and align yellow
line displayed in image display section with position to be measured.

Position to measure can be changed directly by dragging yellow line on

TIP
image display section with mouse. Place mouse pointer near yellow

line and, when mouse pointer changes to or , drag the mouse.

4. Viewing profile in [X Profile] window or [Y Profile] window, move [Threshold] scroll

bar and set height (threshold value) to be used as reference. Portion to be
measured would appear in image display section, [X Profile] window and [Y Profile]
window in pink color.

Threshold value can be changed directly by dragging red line on [X

TIP
Profile] window or [Y Profile] window with mouse. Place mouse pointer

near red line and, when mouse pointer changes to or , drag the
mouse.

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Image Analysis / Volume measurement

5. Select “Valley” or “Peak” with [Mode] option button.

6. Select “Rectangle” or “Polygon” with [Measurement Area] option button.

7. Select kind of data to output with [Show results] checkbox.

8. Specify portion over image display section in rectangle or free form. Specifying
method is different, depending upon option selected.
z “Rectangle”
Drag portion of which measurement is required from start to end point.
z “Polygon”
Encircle portion of which measurement is required with click action. Double-
click last point to link the enclosure.

Fig. 4-31 Image display section with “Valley” specified

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Image Analysis / Volume measurement

2 Display of volume measurement result

Volume of portion of which range is specified will appear in [Volume Measurement] data
sheet window. At the same time, area and surface area are indicated.

Shows the volume, area, surface

area and, if the tolerance
judgment is switched ON, the
tolerance judgment result.

Shows the statistical values

obtained based on the
measurement data.

[Standard / Upper limit / Lower

limit]
Enter the standard value and
tolerance (upper and lower limit
values) for use in tolerance
judgment using the keyboard.

<Tolerance Judge> button

• ON”
Tolerance judgment is applied
Fig. 4-32 [Volume Measurement] data sheet window
based on the upper and lower limit 3
values. Unit: Volume ............. µm
2
The result (OK or NG) will be Area.................. µm
2
shown in the [Judge] column. Surface area..... µm

• “OFF”
Tolerance judgment is not applied.

3 Sorting data
To sort data, click [#] column. Data clicked is attached with gray hatching. Data gray
hatched will be attached with asterisk (*) for identification when data is printed out or
saved.

TIP Use gray hatching when measurement values are required to sort. In addition,
use it to identify data mistakenly measured.

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4-7 Roughness analysis

Using height image of image displayed in image display section, roughness or wave on
image is analyzed.
<Roughness
Analysis> button
In case roughness of an image rotated is analyzed, the region5
NOTE
interpolated would also be included in the measurement. After
removing the interpolated region by a digital zoom process and the
like, the measurement should be performed.

Click <Roughness Analysis> button on tool bar. Control panel will change to
[Roughness Analysis] group as shown below. <Save Settings> button
Setting condition of image analysis is
saved with name assigned.
<Delete All Data> button
It deletes all data measured. <Load Settings> button
<Undo> button It calls analysis setting saved.
It deletes data measured right before. <Data Transfer> button
Results measured can be displayed in
Microsoft Office Excel.

<Line> button <Plane> button

It sets line roughness analysis. It sets area roughness analysis.

<Show profile> button

[Direction] option button Display or Non-display of [Show Profile]
It selects direction roughness is window is switched over.
measured.
[Position] scroll bar
It sets position of roughness to be
[Parameter Set] drop down list analyzed.
Drop down list of parameters registered <Register/Edit> button
appears.
Window for parameter set new
registration and edit of existing
parameters appear.

<Show result> button

Analysis result will be output to [Line
Roughness Analysis] data sheet
according to “parameter set” selected.

[Cut Off λc] drop down list

It selects cut off value, λc from none, 1/3,
1/5, 1/10, 1/20 and 1/50.
<Details> button
Detail setting window appears.

Fig. 4-33 [Roughness Analysis] group

5
If an image is rotated, a region of no data will be created. The said region will be interpolated with the
intensity value selected. In case of a height image, it will be interpolated with the height value selected. In
case of a color image, the value interpolated will be zero.
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Image Analysis / Roughness analysis

4-7-1 Line roughness analysis

Roughness or wave is analyzed on 1 line specified.

1 Analyzing line roughness

1. Click <Line> button on control panel. Display inside [Roughness Analysis] group
will change to setting display as shown below and [Show Profile] window and
[Roughness Analysis] data sheet will be displayed.
< Save Settings> button
Setting condition of image analysis is
saved with name assigned. <Load Settings> button
It calls analysis setting saved.
<Undo> button
It deletes data measured right before.
<Data Transfer> button
Results measured can be displayed in
Microsoft Office Excel.
<Delete All Data> button
It deletes all data measured.

<Line > button

It sets line roughness analysis. <Plane > button
It sets area roughness analysis.
<Show profile> button
Display or Non-display of [Profile
Curve Display] window is switched
over.

[Direction] option button [Position] scroll bar

It selects direction roughness is It sets position of roughness to be
measured. analyzed.

[Parameter Set] drop down list

Drop down list of parameters
registered appears.

<Register/Edit> button <Show result> button

Window for parameter set new Window for parameter set new
registration and edit of existing registration and edit of existing
parameters appear. parameters appear.

[Cut Off λc] drop down list

It selects cut off value, λc from none,
1/3, 1/5, 1/10, 1/20 and 1/50.

<Details> button
Detail setting window appears.

Fig. 4-34 [Roughness Analysis] group (Line mode)

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TIP It is assumed that image data that has no great local profile change in
specified cross-section profile is used for roughness analysis. However, to
get better results, measure in a way that the place to
be measured comes at center of cross-section profile specified.

2. Select direction to measure roughness with [Direction] option button. Using

<Primary>, <Roughness> and <Waviness> button on [Show profile] window, bring
respective contour curve at the position specified by yellow line displayed in image
display section. Load curve and probability density curve of contour curve being
displayed will also appear.
When <Mix> button is clicked, each curve of slice (cross-section), roughness and
wave will appear simultaneously in green, blue and red respectively.

Position of image (data) to be measured can be changed directly by

TIP
dragging yellow line on image display section with mouse. Place mouse
pointer near yellow line and, when mouse pointer changes to or ,

drag the mouse.

Fig. 4-35 [Show profile] window (Showing – <Mix>)

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Image Analysis / Roughness analysis

Fig. 4-36 [Show profile] window and image display section

3. Select “X” or “Y” to measure with [Direction] option button.

4. Viewing image display section, specify line of which analysis is required, using
[Position] scroll bar.

5. Select analysis parameter from [Parameter Set] drop down list.

6. Select cut off wavelength from [Cut Off λc] drop down list as needed. Influence
from roughness of contour curve to structure can be removed and also influence
from surface roughness of contour curve wave may be eliminated.

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2 Display of roughness analysis result

Click <Show result> button.
Analysis result will be displayed in [Roughness Line Mode] window.

For details on the items in the analysis results, see Appendix B – Definition of
TIP
Roughness Analysis Items.

Shows the results of roughness

analysis for the line specified.

Shows the statistical values

based on data measured.

[Standard / Upper limit /

Lower limit]
Enter the standard value and
tolerance (upper and lower limit
values) for use in tolerance
judgment using the keyboard.

<Tolerance judgement> button

• “ON”
Tolerance judgment is applied
based on the upper and lower limit Fig. 4-37 [Roughness Line Mode] window
values.
The result (OK or NG) will be
shown in the [Judge] column.
• “OFF”
Tolerance judgment is not applied.
To investigate co-relative load length and probability density, set cut level for load
curve and probability density curve respectively, using slider right side of [Show
profile]. Cut level will be displayed over profile with white line. Co-relative load
length (load length ratio) of slice curve and roughness curve at cut level set for load
curve and probability density (probability density) of slice curve and roughness
curve at cut level set for probability density curve will appear right underneath
respectively.

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Image Analysis / Roughness analysis

3 Sorting data
To sort data, click [#] column. Data clicked is attached with gray hatching. Data gray
hatched will be attached with asterisk for identification when data is printed out or saved.

TIP Use gray hatching when measurement values are required to sort. In
addition, use it to identify data mistakenly measured.

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4-7-2 Plane roughness analysis

Roughness or wave on whole image or portion of image specified is analyzed.

1 Analyzing plane roughness

1. Click <Plane> button on control panel. Display in [Roughness Analysis] group will
be changed to setting display for area roughness.

<Save Settings> button

Setting condition of image analysis is <Load Settings> button
saved with name assigned. It calls analysis setting saved.

<Undo> button <Data Transfer> button

It deletes data measured right before. Results measured can be displayed in
Microsoft Office Excel.

<Delete All Data> button <Plane> button

It deletes all data measured. It sets area roughness analysis.

[ROI] checkbox
It specifies area to be analyzed. It is
selected when analysis is applied to <Show surface> button
whole image.
Display or Non-display of [Show
surface] window is switched.

<Register/Edit> button
Window for parameter set new
registration and edit of existing
[Parameter Set] drop down list parameters appear.
Drop down list of parameters
registered appears.

<Show result> button

Analysis results are output to
[Roughness Plane Mode] data sheet
according to “parameter set” selected.

[Cut Off λc] drop down list

It selects cut off value, λc from none,
1/3, 1/5, 1/10, 1/20 and 1/50.

<Details> button
Detail setting window appears.

Fig. 4-38 [Roughness Analysis] group (Plane mode)

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Image Analysis / Roughness analysis

Rough curved surface ................. means curved surface that can be acquired after wave portion that is longer
than specified wavelength is removed from sliced curve surface. Specified
wavelength means cut-off value selected at cut off option menu.
Slice curved surface .................... means image called out itself. It means that analysis result would the same as
rough curved surface without cut off value.
Cutout surface ............................. means Contour of sliced section at specified height from center plane against
slice curved surface.
Rough cutout surface .................. means Contour of sliced section at specified height from center plane against
rough curved surface.

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2. Click <Show surface> button. [Show Surface Profiles] window will appear.

Fig. 4-39 [Show Surface Profiles] window (“Primary” image)

3. Select parameter from [Parameter Set] drop down list.

4. Select cut off wavelength from [Cut Off λc] drop down list as needed. Influence to
structure from curved contour of roughness or influence from wave on curved
contour of roughness may be eliminated.
Select display method of [Show Surface Profiles] window, using <Outline> or
<Profile> button. Portion of peak that exceeds count level at up and down will be
filled with pale blue and appear. The portion of valley beyond the range will be filled
with strong blue and appear.
5. To make analysis on specified area, not on whole image, check [ROI] checkbox.
The area to be analyzed would appear with blue frame on image display section.
Drag the mouse inside frame and change position to be analyzed. Size of area can
be changed directly. Place mouse pointer near blue frame and, when pointer

changes to , or , drag the mouse.

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2 Display of area roughness analysis result

Click <Show result> button.
Analysis results would appear in [Roughness Plane Mode] window.

For details on the items in the analysis results, see Appendix B – Definition
TIP
of Roughness Analysis Items.

NOTE To indicate data subsequent to Sra at [Roughness Plane Mode]

window as shown below, select any of 1/3, 1/5, 1/10, 1/20 or 1/50 of [Cut
Off λc] and click <Show result> button.

Shows the results of

roughness analysis for the
line specified.

Shows the statistical values

based on data measured.

[Standard / Upper limit /

Lower limit]
Enter the standard value
and tolerance (upper and
lower limit values) for use
in tolerance judgment
using the keyboard.

<Tolerance judgement >

Fig. 4-40 [Roughness Plane Mode] window
button
• “ON”
Tolerance judgment is
applied based on the upper
and lower limit values. To check co-relative load length and amplified density, set cut level of load curve and cut
The result (OK or NG) will be
shown in the [Judge] column. level of amplified density curve by moving right side slider on [Show Surface Profiles]
• “OFF”
window. Cut level appears with white line on profile.
Tolerance judgment is not
applied. Co-relative load length (load length ratio) of slice curve and roughness curve at cut level
set for load curve and amplified density (probability density) of slice curve and
roughness curve at cut level set for amplified density curve will appear right underneath
respectively.

NOTE Region that can be analyzed at one time is up to 2048 pixels, both in
lateral and perpendicular direction. To the image that exceeds 2048
pixels, the region specifying mode of 2048 pixels at maximum is
automatically applied.

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3 Sorting data
To sort data, click [#] column. Data clicked is attached with gray hatching. Data gray
hatched will be attached with asterisk for identification when data is printed out or saved.

Use gray hatching when measurement values are required to sort. In

TIP
addition, use it to identify data mistakenly measured.

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Image Analysis / Step Refractive measurement

4-8 Step Refractive measurement

The following operations are available only with a system equipped with the XZ
measurement function (optional).
<Step Refractive> The image acquired in XZ scanning mode is to be used.
button
With the image displayed in the image display section, measure the steps
(thickness) of the transparent film or other similar substances. Set the point to be
measured on profile enables the measurement.

1 Measuring step refractive

1. Click <Step Refractive> button on tool bar. Control panel will change to [Step
Refractive] group as shown below. In same time, [Input Refractive Index] window
and the [Profile Display] window will be shown.

<Save Settings> button

Setting condition of image analysis is
saved with name assigned.
<Delete All Data> button
It deletes all data measured. <Load Settings> button
It calls analysis setting saved.

<Undo> button <Data Transfer> button

It deletes data measured right before. Results measured can be displayed in
Microsoft Office Excel.

[Profile Position] scroll bar

[Profile Width] scroll bar It sets position of image (data) to be
measured.
It is to set width (number of lines) to
measure 1 line by averaging peripheral [Measurement Point] option button
data based on line specified as
reference. (Unit: Line) It selects specifying method of point to be
measured.

[Enable Peak Search] check box • “Cursor”

When checked, it defines a peak of profile It defines a point clicked as
specified by points clicked as a measurement point.
measurement point. • “Profile”
It can be used when [Profile] is selected on It defines a point on profile as
[Measurement point] option button. measurement point.
[Reference] check box <Detail> button
When checked, it defines a peripheral area Dialog box to set details of Reference Search
of points clicked as a peak search region. will appear.
It can be used when [Enable Peak Search] It can be used when [Enable Peak Search]
checkbox is ticked off. checkbox is ticked off.

[Image Frame Fitting] check box [Peak Search Region] scroll bar
When checked, a XZ image will appear in Peak search region is set.
magnified display of 1024x768 pixels. It can be used when [Enable Peak Search]
When unchecked, the image will appear in checkbox is ticked off.
1-fold. Fig. 4-41 [Step Refractive] Group

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TIP To display scale on profile, click mouse right button over the profile.
Pop up menu will appear. Select [Display Scale]. Display or Non-
display of Scale can be switched over on this pop up menu.
To change display scale, select [Scale Setting] on pop up menu.
[Scale Setting] window will appear. Set [Scale Max. Value] and
[Scale Min. Value] and click [Set] button. For further details, see 2-7
Display contrast setting in this manual.

2. Set the number of the layer with the [Layer Count] scroll button in the [Input
Refractive Index] window and enter their respective refractive index directly from
the keyboard.(The maximum value of the refractive index is 3.0)

[Layer Count] scroll button

List

Fig. 4-42 [Input Refractive Index] Window

TIP Registration Name of Refractive Index can also be changed.

Enter each name in [Registration Name] through keyboard directly.
(Up to 20 characters).
In case software earlier than Ver. 5.0.9 is updated, the default value
is set to [Registration Name]. As required, change the value.

3. Decide the line to be measured on the image.

The profile of the red line shown in image display section will display in the [Profile
Display] window. With the [Profile position] scroll bar, decide the line to be
measured referring to image display section.

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TIP Position of image (data) to be measured can be changed directly by

dragging the red line that indicates the position of profile with mouse.
Place mouse pointer near the red line and, when mouse pointer

changes to or , drag the mouse.

TIP When noise exists, the line specified can be changed to have width
and; data averaged in width range can be acquired as profile and
measured. In this case, use [Profile Width] scroll bar to set width
(number of lines) to be averaged. Section width will appear in blue
lines.

Fig. 4-43 [Profile Display] window and Image display section

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4. On [Input Refractive Name Index] window, select the refractive index to be used for
measurement. The refractive index to use will be hatched in blue.
5. Select [Cursor] or [Profile] of the [Measurement point] option buttons.

TIP Setting can be done on pop up menu. Click mouse right button over
profile. Pop up menu will appear. Select [Cursor] or [Profile].

TIP In case Peach Search function is used, select [Profile]. Regarding

Peak Search function setting, see “4 Peak Search and Reference
Search Function”.

6. Measure the steps (thickness).

Specifying method is different, depending upon [Measurement Point] selected.
z “Cursor”
Click 2 points arbitrarily selected. Points clicked are defined as
measurement points. (Points can also be defined other place than profile.)
z “Profile”
Drag mouse over profile so that vertical white line that moves left and light
appears. Point where the profile is crossed with this white line is a
measurement point. Therefore, drag to the measurement point and release
mouse button. Specify 2 measurement points and measure the step.

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Image Analysis / Step Refractive measurement

Point measured will be displayed with mark as shown below in image display
section.

Section Width Measurement

Specified Section Section
for Measurement
1 Measurement No.

Fig. 4-44 [Profile Display] window and Image display section

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2 Display of step refractive measurement result

Step (thickness) and refractive index will be indicated in [Step Refractive] data sheet
window.

Shows the step (thickness), refractive

index and, if the tolerance judgment is
switched ON, the tolerance judgment
result.

Shows the statistical values obtained

based on the measurement data.

[Standard / Upper limit / Lower

limit]
Enter the standard value and
tolerance (upper and lower limit
values) for use in tolerance
judgment using the keyboard.

<Tolerance judgement> button

• “ON”
Tolerance judgment is applied
based on the upper and lower limit
values. Unit: Step.... µm
The result (OK or NG) will be Refractive index -
shown in the [Judge] column.
Fig. 4-45 [Step Refractive] Data sheet window
• “OFF”
Tolerance judgment is not applied.

3 Sorting data
To sort data, click [#] column. Data clicked is attached with gray hatching. Data gray
hatched will be attached with asterisk for identification when data is printed out or saved.

TIP Use gray hatching when measurement values are required to sort. In
addition, use it to identify data mistakenly measured.

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4 Peak Search and Reference Search Function

Define a peak of the profile of points specified as a measurement point. Use a correct
peak so that the step refractive measurement can be performed.

z Restrictions
To acquire correct result using Peak Search or Reference Search Function, there
are the following conditions.

z To use an image of high brightness

z To use an image of 3 pixels or more
z To use an image of step refractive
z As reference data is not registered, the image acquired with use of software
earlier than Ver.5.0.7 cannot perform the reference search function.
z In case of using offline software, the reference search cannot be performed.
z In case an image was acquired with other system, the result of reference
search may appear out of alignment.

z Peak Search Setting Procedures

Instead of procedures subsequent to step 5. of “1 Measuring step refractive”,
exercise the procedures described here.

1. Select [Profile] on [Measurement Point] option buttons.

[Enable Peak Search] check box
When checked, it defines a peak of profile
specified by points clicked as a
measurement point. <Detail> button
It can be used when [Profile] is selected on Dialog box to set details of Reference Search
[Measurement point] option button. will appear.
[Reference] check box It can be used when [Enable Peak Search]
checkbox is ticked off.
When checked, it defines a peripheral area
of points clicked as a peak search region.
It can be used when [Enable Peak Search]
checkbox is ticked off.

[Image Frame Fitting] check box [Peak Search Region] scroll bar
When checked, a XZ image will appear in Peak search region is set.
magnified display of 1024x768 pixels. It can be used when [Enable Peak Search]
When unchecked, the image will appear in checkbox is ticked off.
1-fold.

2. Tick off [Enable Peak Search] checkbox.

3. Using [Peak Search Region] scroll bar, set a peak search region.

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4. Drag a position that should be defined as peak over the profile.

Mouse Pointer position

Peak Search Region (White dotted line)
(White solid line)

5. When a mouse button is released, a peak of its mountain will be detected and;
it becomes as a measurement point (start point).

Peak (measurement point)

(Green dotted line)

6. Likewise, as step 4 and 5, specify a measurement point (end point).

When measurement points are specified, step (thickness) and refractive index
will be indicated on [Step Refractive] data sheet window.

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z What Reference Search stands for

It means a typical intensity data every objective lens.

z Setting Procedures of Reference Search

Instead of procedures subsequent to step 5. of "1 Measuring step refractive”,
exercise the procedures described here.

1. Select [Profile] on [Measurement Point] option buttons.

[Enable Peak Search] check box

When checked, it defines a peak of profile
specified by points clicked as a
measurement point. <Detail> button
It can be used when [Profile] is selected on Dialog box to set details of Reference Search
[Measurement point] option button. will appear.
[Reference] check box It can be used when [Enable Peak Search]
checkbox is ticked off.
When checked, it defines a peripheral area
of points clicked as a peak search region.
It can be used when [Enable Peak Search]
checkbox is ticked off.

[Image Frame Fitting] check box [Peak Search Region] scroll bar
When checked, a XZ image will appear in Peak search region is set.
magnified display of 1024x768 pixels. It can be used when [Enable Peak Search]
When unchecked, the image will appear in checkbox is ticked off.
1-fold.

2. Tick off [Enable Peak Search] checkbox.

[Reference] checkbox turns to usable state.

3. Tick off [Reference] checkbox.

Peak detected will appear in blue solid line over the profile.

Peak
(Blue solid line)

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4. In case Reference Search setting should be changed, click on <Detail> button.

(When the change is not required, go to next procedure).
[Reference Search] dialog box will appear.

[Smoothing] scroll bar

Set number of data that should be
smoothed here.
[Correlation] scroll bar
Set the minimum value of
Correlation factor with reference
data here.
[Intensity Threshold] scroll bar
Set the minimum value of intensity
peak here.
5. If the mouse cursor is neared to a peak (blue solid line), the correlation factor
and intensity at detection time will appear in popup mode.

6. Click on a peak that is to be used for measurement and a peak search region
with a peak placed to center will appear.
Likewise, set as procedure 4. and subsequent described in "● Peak Search
Setting Procedures”.

Peak Search Region Peak Position

(White solid line) (White dotted line)

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Image Analysis / Edge measurement

4-9 Edge measurement

The following operations are available only with a system equipped with the Edge
measurement function (optional).
<Edge Measurement> button
Drawing a rectangle region over an image structure being displayed in image display
section, the line width inside the said region can be measured with no division mode
or 5 or 10-division mode. Image split in the region would be averaged. In addition, the
line width of the lowermost one line in specified area can also be measured.
1. Click <Edge Measurement> button. Control panel would change to [Edge

<Delete All Data> button Measurement] group as shown below. Caliper6 (green) would also appear.
It deletes all data measured.
<Save Settings> button
<Undo> button Setting condition of image analysis is
It deletes data measured right before. saved with name assigned.

<Profile Display> button

<Load Settings> button
It indicates a data profile.
It calls analysis setting saved.
[Measured section] option button
With a combination of option button and <Data Transfer> button
checkbox, the following measurement Results measured can be displayed in
area can be set. Microsoft Office Excel.

<Show result> button

Measured value being displayed at upper left
side of image display section can be output to
Peak Valley [Edge Measurement] data sheet window.

<Run> button
Line width is measured and; measured value
is indicated at upper left side of image display
Peak pitch section.

[Threshold] scroll bar

It specifies the height ratio (threshold) that is
defined as reference when line width is
acquired.
Valley pitch

[Search Direction] option button

It specifies the direction that region edge
specified with caliper should be detected.

[Set Up Details] checkbox

When checked, [Edge Detection Details
Peak center pitch Setting] group would appear and Start and
Valley center pitch End can be set.

Fig. 4-46 [Edge Measurement] Group

6
It means a region in which line width is measured.
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Coordinates are;
Search length
• Upper left corner of screen is Caliper
origin
• Right is X positive direction
• Lower is Y positive direction
0° or 90°

[Number of Division]
option button
It specifies with what
number the regions inside
caliper should be divided. [Averaging] checkbox
6
When checked, regions inside sub-caliper*
are averaged. When unchecked, one line at
[Output Mode] option the bottom inside each sub-caliper is
button measured.
In case that a plural
number of line images
exist inside caliper, it
specifies whether
measurement is applied to
one only or all.

Fig. 4-47 [Edge Detection Details Setting] Group

(The diagram is the state when [Set Up Details] checkbox is checked.)
Maximum value detection direction
when [Auto] is selected from the
Cross-section [Max.] option buttons Histogram image
4095 Maximum value when [Auto] is selected from
the [Max.] option buttons (first peak)

Maximum value when [Max.] is selected from

the [Max.] option buttons (max. histogram
value)

Minimum value when [Auto] is selected from

the [Min.] option buttons (first peak)
0
Minimum value detection direction
when [Auto] is selected from the Minimum value when [Min.] is selected from
[Min.] option buttons the [Min.] option buttons (minimum data
value)

*7 It means one individual region when caliper is divided.

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2. Using [Threshold] scroll bar, set height ratio that is defined as a reference when line
width is measured.
3. With [Measured section] option button, select ”Peak” or ”Valley”. When pitch
measurement is required, check [Pitch] checkbox. In addition, when center
between pitches should be measured, check [Core Pitch] checkbox.
4. With [Search Direction] option button, select the direction that the edge should be
detected.

5. When settings for measurement position, region to detect edge, region for
integration and number of caliper divisions, etc., are required, check [Set Up
Details] checkbox.
6. Key-in [Center] and change the position to be measured. In addition, when angle
should be changed, set it by selecting [Rotation] option button. The angle that can
be set is either 0° or 90°.

7. Key-in [Search Length] and [Integral range] to set a region where edge should be
detected and a range for integration. When done, the size of caliper to be displayed
in image display section would be changed.

8. With [Number of Division] option button, set with what number the regions inside
caliper should be divided.
9. With [Output Mode] option button, select whether one only should be measured or
all should be measured when a plural number of line images exist inside caliper.

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Image Analysis / Edge measurement

10. Click <Run> button. Line width inside caliper is measured and; average line width
value (Width), maximum value (Max), minimum value (Min) and 3 sigma would be
displayed at upper left part of the image display section. If number of divisions is set,
average line width value (Width) will be indicated with the value to be further
averaged from each sub-caliper. Maximum value (Max) and Minimum value (Min)
will be indicated with the maximum value and minimum value to be further
averaged from each sub-caliper.

Fig. 4-48 Image display section – measurement value displayed

NOTE If search is set to “From Inside”, mountain or valley at right side in

1 pitch is measured. If it is not possible, position the caliper so as
to include 1 or more mountain or valley at left from caliper center.

NOTE If <Full> button on tool bar is pressed, the caliper does not appear
in [FULL Image] window.

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Image Analysis / Edge measurement

11. Click <Show result> button. Measured values indicated at upper left part of the
image display section would be output to [Edge Measurement] data sheet window.

Judge result will

be displayed when
average line width,
max. min. and
tolerance are
measured in each
section specified.

Statistical values
based on data
measured are
indicated.

<Tolerance Judge>
button
• “ON”
Upper limit and
[Reference/Upper
lower limit, both
limit/Lower limit]
are measured.
Reference value Result (OK/NG)
and tolerance will be indicated at
(Upper/Lower limit) “Judge” column.
for tolerance
• “OFF”
judgment are
No judge is done.
entered through
keyboard.
Fig. 4-49 [Edge Measurement] Data sheet window

Unit: Average line width µm

Max. value µm
Min. value µm

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Image Analysis / Tolerance Judgment

4-10 Tolerance Judgment

Judgment is executed against the result measured by setting reference value and
tolerance for design value and the like.

1. Execute measurement. A window, as shown below, will appear for measurement

results.

In case judgment is executed

for measurement value,
judge result will be indicated.

Statistics is displayed in
accordance with data <Tolerance Judgment>
measured. button
• "On"
Judgment is done using
upper and lower limit value.
Result (OK/NG) will be
[Standard/ indicated in "Judge" column.
Upper limit/Lower limit]
• "Off"
Standard value and No judgment is done.
Tolerance (Upper/Lower
limit) are entered through
keyboard.

Fig. 4-50 Window to indicate measurement results

(Display is a window when areas are measured.)

2. Enter value defined as reference for design value and the like in [Standard].
3. Enter upper and lower limit value of tolerance in [Upper limit] and [Lower limit].
4. Click on <Tolerance Judgment> button to set it "On".
Tolerance judgment is executed and the measurement value that was turned to NG
is hatched in gray and the result (OK/NG) is indicated in "Judge" column.

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Image Analysis / Specifying a measurement value not applicable to statistics

4-11 Specifying a measurement value not applicable to statistics

The measurement value that was turned to NG as the result of tolerance judgment and
the measurement value specified can be excluded from statistics calculation.

1. Select [Exclude NG from Statistics] from [Tool] menu and make it to the state with
check mark.

Fig. 4-51 [Tool] menu

2. On the window that indicates measurement results, exercise settings for tolerance
judgment. The measurement value that was turned to NG as the result of judgment
is hatched in gray and it is indicated in "Judge" (OK/NG) column.
(For details, see "4-10 Tolerance Judgment".
3. Out of measurement values that were turned to OK as the result of tolerance
judgment, click on the number of the measurement value in "#" column that should
be excluded from statistics. The "number" will be hatched in gray.

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Image Analysis / Specifying a measurement value not applicable to statistics

4. All measurement values having "number" judged NG as the result of tolerance

judgment and all measurement values selected to exclude from statistics
calculation will be excluded from statistics calculation and the statistics will be
updated.

Exempted from statistics calculation.

Statistics is displayed in accordance

with data measured.

Fig. 4-52 Window to indicated measurement results

(Display is a window when areas are measured.)

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Image Analysis / Registration of Measurement Offset (Calibration)

4-12 Registration of Measurement Offset (Calibration)

4-12-1 Registration of offset value to be used for measurement

The measurement value is compensated by applying percentage (calibration) in order
that the measurement result by this system can correlate with the design dimension of a
specimen or a measurement result by other measuring instrument. The method to
register the percentage is described here.

1. Select [Define Calibration] from [Analysis] menu. [Calibration] window will appear.

(Objective Magnification) drop down

list
Select magnification for objective lens
to which the offset is applied.
[X axis]/[Y axis]/[Z axis] text box
Defining the measurement value that
[X axis]/[Y axis]/[Z axis] check box
is not compensated to 100, the
When checked, the measurement percentage to acquire the
value is compensated. measurement value after offset is
set. (Unit: %)

Fig. 4-53 [Calibration] window

2. Check the check box - [X axis]/[Y axis]/[Z axis] for a direction that the offset should
be applied.
3. Select magnification for the objective lens that acquired the image from [Objective
Magnification] drop down list.

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Image Analysis / Registration of Measurement Offset (Calibration)

4. Enter percentage to be compensated in [X axis]/[Y axis]/[Z axis] text box.

Calculate the percentage to compensate by defining the measurement value that is
not compensated to 100, using the measurement value that is not compensated
and design dimension of a specimen or a measurement result by other measuring
instrument.

TIP Design dimension or measurement result by other instrument: A

Measurement result by this system: B
In the above case:
A
Percentage to compensate = × 100
B
5. Repeat step 3 and 4 for objective lenses to be used and set percentage in [X
axis]/[Y axis] text box. (The value for [Z axis] is not set every magnification but it is
set to common value.)

With subsequent measurements, the measurement data for a direction checked for [X
axis]/[Y axis]/[Z axis] check box will automatically be compensated.

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Image Analysis / Registration of Measurement Offset (Calibration)

4-12-2 Registration of Offset Value to be used for Line Width Measurement / Edge
Measurement
The measurement value is compensated by applying percentage (calibration) in order
that the measurement result by this system can correlate with a measurement result by
other measuring instrument against the line width measurement value or simple line
width measurement value. The method to register the percentage is described here.
The measurement value is compensated when "Horizontal" is selected at [Direction]
option button in case of line width measurement and, in case of simple line width
measurement; it is compensated when [Rotation] is set to 0 degree. The measurement
value is compensated with the formula, ax + b .
a : Inclination of line width measurement user calibration value
x : Measurement value that is not compensated
b : Intercept of line width measurement user calibration value

1. Select [Define Calibration] from [Analysis] menu. [Calibration] window will appear.

[Line Width] check box <Display setting dialog> button

When checked, the measurement Dialog box to set offset value for
value is compensated in line width measurement value in line width
measurement and simple line measurement and simple line width
width measurement. measurement is displayed.

Fig. 4-54 [Calibration] window

2. Check [Line Width] check box.

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Image Analysis / Registration of Measurement Offset (Calibration)

3. Click on <Display setting dialog> button. [Define Line Width Calibration] dialog box
will appear.

[a (Inclination) Setting] text box

[Objective] drop down list
Enter calibration value "a"
Select magnification for objective
(inclination) for line width or simple
lens to which the offset is applied.
line width measurement. (Enter
percentage to acquire a value by
defining the measurement value that
was not compensated to 100.)

[b (Intercept) Setting] text box

Enter calibration value "b" (intercept)
for line width or simple line width
measurement.

Fig. 4-55 [Define Line Width Calibration] dialog box

4. With [Objective] drop down list, select the magnification for the objective lens to
which the offset value is set.

5. Enter a (Inclination) in [a (Inclination) Setting] text box and b (Intercept) in [b

(Intercept) Setting] text box.
a (Inclination) and b (Intercept) of ax + b are calculated as follows.

Design dimension or measurement result by other instrument: A0 , A1 ( A0 and

A1 are defined to represent an individual type of line width respectively.)
Measurement result by this system: B0 , B1 ( B0 and B1 are defined to represent

an individual type of line width respectively.)

A0 B0
A1 B1

(Design dimension or measurement (Measurement result by this System)

result by other instrument)

⎧ A0 = a ′ × B0 + b ′
⎨ a ′ and b ′ are acquired with this simulteneous equation.
⎩ A1 = a ′ × B1 + b ′
Using a ′ and b ′ acquired, the setting value is acquired as follows.
a (Inclination) = a ′ × 100 , b (Intercept) = b ′

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Image Analysis / Registration of Measurement Offset (Calibration)

6. Set the value for all objective lenses to be used by repeating step 4 and 5 and then,
click on <OK> button.

With subsequent measurements, the measurement value for line width measurement or
simple line width measurement will automatically be compensated when [Line Width]
check box is checked.

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Image Analysis / Registration of Measurement Offset (Calibration)

4-12-3 Registration of Offset Value to be used for Roughness analysis

The analysis value is compensated by applying percentage (calibration) in order that the
result of analysis by this system can correlate with the result of analysis by other
measuring instrument against the analysis value done in Line roughness analysis or
Plane roughness analysis. The method to register the percentage (calibration) is
described here.

1. Select [Define Calibration] from [Analysis] menu. [Calibration] window will appear.

[Line roughness] check box

When checked, the analysis value is
compensated at line roughness <Display setting dialog> button
analysis. Dialog box for setting the value to
compensate analysis value for each
analysis item for line roughness
[Plane roughness] check box analysis and plane roughness
When checked, the analysis value is analysis is displayed.
compensated at plane roughness
analysis.

Fig. 4-56 [Calibration] window

2. When the analysis value for line roughness analysis is compensated, check [Line
roughness] check box.
3. When the analysis value for plane roughness analysis is compensated, check
[Plane roughness] check box.
4. Click on <Display setting dialog> button. [Define Roughness Calibration] dialog box
will appear.

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Image Analysis / Registration of Measurement Offset (Calibration)

<List View> button

All analysis items are indicated.
[Objective] drop down list
Select magnification for objective
lens to which the offset is applied.

[Calibration setting for line

roughness analysis] text box
When the desired analysis item is not
Percentage to acquire analysis value indicated, click on this button and the
after compensation for every page is changed.
analysis item in line roughness
analysis by defining the value that is
not compensated to 100 is entered.
(Unit: %)

<Calibration for line roughness

analysis reset> button
All contents in [Calibration setting for
line roughness analysis] text box
(offset values set at magnification of
objective lenses currently selected)
are returned to default value
(100.0000).

[Calibration setting for plane

roughness analysis] text box
Percentage to acquire analysis value
after compensation for every
analysis item in plane roughness
analysis by defining the value that is
not compensated to 100 is entered.
(Unit: %)

<Calibration for plane roughness

analysis reset> button
All contents in [Calibration setting for
plane roughness analysis] text box
(offset values set at magnification of
objective lenses currently selected)
are returned to default value Fig. 4-57 [Define Roughness Calibration] dialog box
(100.0000).

5. With [Objective] drop down list, select the magnification for the objective lens to
which the offset value is set.

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Image Analysis / Registration of Measurement Offset (Calibration)

6. Enter percentage to compensate in [Calibration setting for line roughness analysis]

text box and [Calibration setting for plane roughness analysis] text box.
Calculate the percentage to compensate by defining the measurement value that is
not compensated to 100, using the measurement value that is not compensated
and design dimension or a measurement result by other measuring instrument.

TIP Design dimension or measurement result by other instrument: A

Measurement result by this system: B
In the above case:
A
Percentage to compensate = × 100
B

7. Repeat step 5 and 6 for all objective lenses to be used and then, click on <OK>
button.

With subsequent analyses, the analysis value for line roughness analysis will
automatically be compensated in case [Line roughness] check box is checked and; in
case [Plane roughness] check box is checked, the analysis value for plane roughness
analysis will automatically be compensated.

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Image Analysis / Specifying a measurement line on 3D display

4-13 Specifying a measurement line on 3D display

A measurement line on an image in 3D display can be specified for line width or step
measurement. In this case, the display must be changed to 3D display and then, the
measurement must be selected respectively.
The method to specify the measurement line only is described here. For other settings
and measurement methods, see ””4-2 Measurement of line width”, ”4-5 Step
measurement”.

1 Changing to 3D display
Click on ▼ located at right side of <3D> button on [Image Display Changeover] toolbar.

Select a display method from the drop down list.

For detailed settings for 3D display, see "2-2 3D display".

2 Selection of Measurement Method

Click on <Line Width Measurement> button or <Step Measurement> button on toolbar.
The measurement line, as shown below, will appear in cutter profile or line profile.
<Line Width
Measurement> button

<Step Measurement>
button

(The above figure indicates the state that the line is specified with "Oblique line")
With [Profile Line] option button, the measurement line can be selectyed.

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Image Analysis / Specifying a measurement line on 3D display

3 Specifying a measurement line

Specifying method may be different, depending upon [Direction] selected.
z In case of “Horizontal" or "Vertical”
Place mouse pointer near the measurement line on 3D display and, when the

mouse pointer changes to , drag the mouse. The profile at a position

specified will appear on [Profile Display] window.

z In case of “Oblique”
Place mouse pointer near the measurement line on 3D display and, when the

mouse pointer changes to , drag the mouse. For angle, align mouse
pointer at both ends of oblique line respectively and, when the mouse

changes to , drag the mouse. The profile at a position specified will

appear on [Profile Display] window.

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Image Analysis / Specifying a measurement area on 3D display

4-14 Specifying a measurement area on 3D display

In case of distance measurement, a measurement area on an image in 3D display can
be specified. In this case, the display must be changed to 3D display and then, the
measurement must be selected.
The method to specify a measurement area only is described here. For other settings
and measurement methods, see “4-1-1 Measurement of distance”.

1 Changing to 3D display
Click on ▼ located at right side of <3D> button on [Image Display Changeover] toolbar.
Select a display method from the drop down list.

For detailed settings for 3D display, see "2-2 3D display".

2 Selection of Measurement Method

Click on <Distance/Area Measurement> button on toolbar. Profile appears as follows.

<Distance/Area
Measurement> button

(The above figure indicates the state that the line is specified with ”1 point”.)

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Image Analysis / Specifying a measurement area on 3D display

3 Specifying a measurement area

Specifying method may be different, depending upon [Area specification] selected.
z In case of “1 point”
Click on start point and end point on the desired area on 3D display.

z In case of “Rectangle”
Drag a region that can be the start point of the desired area for measurement
in 3D display. Likewise, specify a region that can be the end point. The center
of gravity of the regions specified will be start and end point.

z In case of “Fixed”
When a region that can be the start point on a measurement area in 3D
display is clicked, a region of the fixed profile will appear. Likewise, specify a
region that can be the end point. The center of gravity of the regions specified
will be start and end point.

In case "Multipoint" is selected at [Measurement mode] option button,

specify end point only repetitively after the start point was specified.

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Convenient Features / Report output

5 Convenient Features
5-1 Report output
An image as well as its scanning condition when the said image was acquired or profile
and measurement data are collected and output in a piece of report.

1 Performing analysis
1. Prepare an image to output to report by acquiring an image or loading an image
from a file. For detailed operation methods, refer to "1-2 Acquisition" and "1-4-1
Saved image call" in this manual.
2. Perform image measurement. For detailed operation methods, refer to "4 Image
analysis" in this manual.

2 Displaying report
1. Bring [Report] window to appear with either of the following methods.
z Select [Report output] from [File] menu.

Fig. 5-1 [File] menu

z Select <Report> button on toolbar.

Fig. 5-2 <Report> button

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Convenient Features / Report output

Toolbar Preview area

(Regarding function of each Image as well as its scanning condition
button, see "● About Toolbar at acquisition time, Profile,
and Status bar".) Measurement data and Added
information will appear in output image.

Status bar
(Regarding function of each Fig. 5-3 [Report] Window
button, see "● About Toolbar
and Status bar".)

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Convenient Features / Report output

2. On the report, title, author, comment and date can be appended. Enter items
required or check the check box and then, click on <Set> button.

Enter title, author, comment

and data, if necessary, on the
report.

Check if date should be

appended on the report.

<Set> button
Information for items set will
appear on Preview window.

[Preview Format]
option button
Format to output a report is
selected here.

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Convenient Features / Report output

3 Saving report

<Save> button
Report is saved.

Click on <Save> button to bring [Save As] dialog box to appear. Specify a folder
directed, a file name and type of save and then, save. The type that can be used for
save is RTF (Rich Text Format) or PDF.

In case a file should be saved in PDF, a window for password input will appear. When a
password is not set, click on <OK> button "as is".
User password: Password when opening PDF file.
Owner password: Password to allow edition on software which enables PDF file
edition.

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Convenient Features / Report output

4 Printing report
<Print> button
Report is printed.

Click on <Print> button. The image displayed will be output to the printer.

z About Toolbar and Status bar

Toolbar
<Save> button
Report displayed will be saved in a file.
The type that can be used for save is RTF or PDF.

<Print> button
Report displayed will be output to the printer.

<Page> button
Window to set print page is displayed.

<Navigator> button
Window indicating thumbnail of each page in list appears in case the report
comes in more than 2 pages.

<Hand tool> button

When the mouse is dragged, a preview display (report) can be moved, up
and down or left and right.

<Zoom tool> button

Area dragged by mouse appears in zoom display.

<First page> button

First page appears for a report of 2 pages or more.

<Previous page> button

Previous page of the page being displayed appears for a report of 2 pages
or more.

<Next page> button

Next page of the page being displayed appears for a report of 2 pages or
more.

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Convenient Features / Report output

<Last page> button

Last page appears for a report of 2 pages or more.

<Actual size view> button

Report appears on preview area in actual size.

<Entire view> button

Page of report appears fully on preview area.

<1 page view> button

Report of one page appears on preview area.

<2 page view> button

Report of two pages appears on preview area.

Status bar
[Zoom] box
Zoom magnification is indicated. Typing value directly or
selecting value from drop down list causes to change
magnification.

[Page] box
"Page/total number of pages" appears. Typing value directly or
selecting value from drop down list causes to change the display
page.

[Status display]
Status – "Processing…" or "Ready" will appear.

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Convenient Features / Report output

z One example of format

(Above figure: Example when a report is output after line width measurement is done)

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Convenient Features / Report output

(Above firegure: Example when a report is output after distance measurement is done)

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Convenient Features / Report output

(Above figure: Example when a report is output after line roughness analysis is done)

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Convenient Features / Registering the Procedure for Repeated Operations (Image Recipe)

5-2 Registering the Procedure for Repeated Operations (Image Recipe)

Procedures of operations for some image processing and analysis functions (line width
measurement, step measurement, roughness analysis, particle analysis, step refractive
measurement) and report output can be registered as a recipe*1. The registered series of
operations can be performed by simply executing the recipe. While recipe is running, the
data analyzed can also be output to CSV file.

1 Opening the recipe setting window

Display [Image Recipe] window in accordance with anyone of the following methods.
z Select [Tools] - [Recipe] from menu.

Fig. 5-4 [Tools] Menu

z Select <Recipe Creation> button from toolbar.

Fig. 5-5 <Recipe Creation> Button

<Save> button <Delete item> button
Saves the recipe composed of Deletes the selected items in the
items shown in the [Recipe Items] [Recipe Items] list.
list in a file.
<Undo> button
Returns the image to that before
<Load> button recipe execution.
Loads a recipe from a file and
displays its item contents in the
[Recipe Items] list. <Run> button
Executes the items in the [Recipe
Items] list from the top to the
[Recipe Items] list bottom.
Lists the items of a recipe created
by teaching*2 or loaded from a
<Teaching> button
file. *2
Switches teaching on or off.
[Automatic execution] check Teaching is performed when this
box button is pushed in.
After image acquisition or at
image loading from file, executes
automatically the recipe <Add Output CSV> button
containing the items shown in the Output of CSV file is added to
[Recipe Items] list. [Recipe Items] list.

[Title] textbox <Add to toolbar> button

Enter the recipe name of the Add the recipe button in the
button that should be registered Fig. 5-6 [Image Recipe] Window toolbar.
to the toolbar.
<Delete> button
1
Delete the recipe button from the
* Registration of operating procedure is referred to as “recipe”. toolbar.

*2 Action of registering an operation procedure for creating a recipe is referred to as “teaching”.

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Convenient Features / Registering the Procedure for Repeated Operations (Image Recipe)

NOTE When [Recipe] window is open, it cannot be changed to 3D display.

2 Registering image process and image analysis to recipe

1. Click the <Teaching> button so that it is displayed in the pushed-in status.

<Teaching> button 2. Perform the operations to be registered in a recipe (image processing, image
analysis) actually. In sequence of operation done, image process or image analysis
is appended to [Recipe Items] list.
For details on the image processing and image analysis operations, see Chapters 3,
“Image processing” and 4, “Image analyses” in this volume.

NOTE In case "Height Noise Removal" should be registered, register

image type changeover for enabling to display a height image
before performing "Height Noise Removal" feature.

TIP Operations described below cannot be registered to recipe.

Image Process
z Digital zoom
z One-shot noise removal filter

Image Analysis
When measurement of line width is done with the following settings
z When [Direction] option button is set to "Oblique" or "Perp."
z When [Split] check box is ticked off
When step measurement is done with the following settings
z When [Measurement Point] option button is set to "Cursor"
z When [Direction] option button is seto to "Oblique" or "Perp."
z When measurement points are set on a splice curve
When step refractive measurement is done with the following setting
z When [Measurement Point] option button is set to "Cursor"

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Convenient Features / Registering the Procedure for Repeated Operations (Image Recipe)

3 Registering recipe to Auto CSV File Output

In case that the data should be output to CSV file automatically while the recipe is
running, perform the following procedures.

1. Click <Add Output CSV> button. Items - ”Save data as CSV” and [Recipe Items]
will be added to the list.

File will be saved with name of the following format to the folder designated by auto save
setting.
<Analysis name>_<Date>_<Time>.CSV
Analysis name: The following text strings defined with each analysis will be attached.
ROUGHPROFILE_ANALYSIS...... Line roughness analysis
ROUGHPLANE_ANALYSIS ......... Plane roughness analysis
STEP_ANALYSIS ......................... Step measurement
LINEWIDTH_ANALYSIS............... Measurement of line width
PARTICLE_ANALYSIS................. Particle analysis
Date: Saving Year/Month/Day will be attached with the following format.
YYYY-MM-DD
Time: Saving time will be attached with the following format.
HHMMSS

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Convenient Features / Registering the Procedure for Repeated Operations (Image Recipe)

4 Registering Display/Save Report to Recipe

In case data analyzed while running a recipe is displayed as a report and it should be
saved in a file, perform the following operations.

1. Select [Report output] from [File] menu. [Report] window will appear.
Simultaneously, an item called "Preview Report" will be added to [Recipe Items]
list.
Report will be output as displayed at this time when a recipe is running.
Format or append information for report must be set in advance prior to teaching.
For setting method, see "5-1 Report output".

2. Click on <Save> button on [Report] window. [Save As] dialog box will appear.
Simultaneously, an item called "Save Report" will be added to [Recipe Items] list.

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Convenient Features / Registering the Procedure for Repeated Operations (Image Recipe)

TIP z To terminate the recipe with the state that the report is being
displayed, delete the item – "Closed Report Dialog" from [Recipe
Items] list.
z To save a report in a different format, make it sure that "Closed
Report Dialog" is put after "Save Report" respectively and, again,
add "Preview Report", "Save Report" and "Closed Report Dialog".

3. On [Save As] dialog box, specify a folder to save the report and set a prefix (fixed
part) of file name.
The type of file that can be used for save is RTF (Rich Text Format) or PDF. It is
necessary to set in advance which type should be used for save prior teaching. For
setting method, see "5-1 Report output".
<Prefix>_<Date>_<Time>.PDF ..... PDF
<Prefix>_<Date>_<Time>.RTF ...... RTF(Rich Text Format)

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Convenient Features / Registering the Procedure for Repeated Operations (Image Recipe)

5 Ending registration to recipe

1. Click the <Teaching> button again so that it is displayed in the popped-out status.
This finishes registration of the procedure.
<Teaching> button
(Pressed-in status)
TIP Items can be deleted from the recipe. Select the item(s) you want to
delete in the [Recipe Items] list and click the <Delete item> button.
<Delete item > button The item(s) to be deleted can be selected in any of the following
methods.
• To select only one item, click it.
• To select more than one item, click one of the items.
Then, while holding down the Ctrl key, click each of the other items.
• To select consecutive items, click the first item.
Then, while holding down the Shift key, click the last item to be deleted.
• If you select an item that is not to be deleted, press and hold down the
Ctrl key and click it again.

NOTE In case of measurement for Step Refractive, Line Width and Step,
items for start and end point will be registered in pair. If number of
items turns to odd number due to deletion, the operation thereafter
may not be performed correctly. Be careful.

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Convenient Features / Registering the Procedure for Repeated Operations (Image Recipe)

2. Click the <Save> button. The [Save As] dialog box appears.

<Save> button

Folder to Save

Name to Save

Type of file

Fig. 5-7 [Save As] Dialog Box

3. Select the save destination folder and enter the file name.

TIP When the file extension is omitted, extension (.rcp) is given

automatically.

4. Click the <Save> button.

NOTE If the recipe file having the same name as entered here already
exists, a message box appears to ask you to overwrite the existing
file. If you do not want to do so, click the <No> button and enter
another recipe file name.

VI . Application

VI . 5 - 1 6 Page
Convenient Features / Registering the Procedure for Repeated Operations (Image Recipe)

6 Registering to tool bar

Each recipe can be added as a button in the toolbar.
1. Click the <Load> button and select the file of the recipe to be added in the toolbar.

NOTE If the registered items already exist in the [Recipe Items] list, the
items in the list will be replaced with the items of the loaded recipe.
If it is required to save the current recipe, save it before loading a
new one. For the saving procedure, see” 5 Ending registration to
recipe” in this section.

2. Enter the name to be displayed with the tool bar button in the [Title] textbox, and
click the <Add to toolbar> button. The button for the recipe is added in the toolbar.

TIP The added buttons are numbered in order of the recipe numbers.

: Button for recipe No. “1”

: Button for recipe No. “2”

7 Execute a recipe
Click the button of the desired recipe in the toolbar to execute it for the image being
displayed.

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Page VI. 5 - 1 7
Convenient Features / Registering the Procedure for Repeated Operations (Image Recipe)

z Delete a recipe from the toolbar

The button of each recipe can be deleted from the toolbar.
1. Click the <Delete> button on [Image Process Recipe] window.
2. Select the recipe number to be deleted and click the <OK> button. The button of
the recipe number selected will be deleted from the toolbar.

VI . Application

VI . 5 - 1 8 Page
Convenient Features / Simplified tiling

5-3 Simplified tiling

Images acquired consecutively in adjacent scanning range can be tiled together.
In this function, the images are put togther, based on alignment accuracy between
images at each image acquisition time. No alignment with image processing is executed.
In case that accurate tiling is required, use analySIS LEXT (software for image tiling
available at option).

1 Opening image tiling window

Click <Tiling> button in the toolbar. [Tiling] window will appear.

<Tiling> button

<Open> button
Image is loaded by specifying the
leading file of image group
acquired and saved (according
to naming rule) in image tiling
mode.

<Open with multiple selection>

[Channel] check box
button Select the type of the
Image is loaded by specifying a images to tile.
plural number of files.

<Start> button
Starts image tiling. [Margin]
[X] / [Y] scroll button
Set a margin (extra part) for
<Execute tiling application> tiling.
button
analySIS LEXT (software for
image tiling) starts.
Image displayed in [Preview] [Preview]
window is transmitted. Displays the loaded
images in the tiled form.

Fig. 5-8 [Tiling] Window

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Page VI. 5 - 1 9
Convenient Features / Simplified tiling

2 Loading image
Loading method is different, depending upon how name is assigned to the file.

z In case of file name assigned in accordance with naming rule

Image acquired and saved in image tiling mode is saved with the name in
accordance with naming rule. The naming rule is as follows.

(File name set in auto save setting)_(Row No.)(Column No.).ols

Example) When the file name set in auto save setting is
“olympus” and images are acquired in the “3 01a 01b 01c
rows x 3 columns” tiling mode;
“olympus_01a.ols” is the file in column a of row No. 1; 02a 02b 02c

”olympus_01b.ols” is the file in column b of row No. 1; 03a 03b 03c

M
”olympus_03c.ols” is the file in column c of row No. 3..

1. Click <Open> button. [Open] dialog box will appear.

Folder to load

File name to load

Fig. 5-9 [Open] Dialog Box

2. Select folder to load.

VI . Application

VI . 5 - 2 0 Page
Convenient Features / Simplified tiling

3. Select first file (*01a.ols) in image group.

4. Click <Open> button. All files in the group including the selected file will be loaded
and their images are displayed in [Preview] in [Tiling] window.

z In case that file is saved with arbitrarily assigned name

1. Click <Open with multiple selection> button. [Open] dialog box will appear.

<Open with multiple

selection> button

Folder to load

File name to load

Fig. 5-10 [Open] Dialog Box

2. Select source folder for loading.

3. Select all files necessary for tiling.

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Page VI. 5 - 2 1
Convenient Features / Simplified tiling

4. Click <Open> button. Dialog box as shown below will appear.

Fig. 5-11 [Define Tiling Condition] Dialog Box

5. Set [Array Size] with scroll button and select option of [Order] and
[Arrangement] and then, click <OK> button.
6. Files selected will appear in [Preview] widow of [Tiling] window in selected
sequence.

VI . Application

VI . 5 - 2 2 Page
Convenient Features / Simplified tiling

3 Tiling images
1. Set a margin (extra part outside Margin: 20%
image) with use of [X]/[Y] scroll button
of [Margin]. 01a 01b 01c

Example) Right sketch shows the case

02a 02b 02c
where the margin of an image of 3
rows x 3 columns is set to “20” for 03a 03b 03c
both [X] and [Y].

NOTE Set [Margin] with the same value as set in image acquisition.

2. Among the images displayed in [Preview], specify the images to tile by dragging the
mouse. The specified images are enclosed in green frames.

3. Click <Start> button. The tiled image will appear in the image display section.

<Start> button

Fig. 5-12 Image display section showing tiled image

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Page VI. 5 - 2 3
Convenient Features / Simplified tiling

z Tiling images with analySIS LEXT software

This operation can be done when the system is installed with anlySIS LEXT
(software for image tiling also available at option).

1. Display image to be tiled on [Preview] window and click <Execute tiling application>

<Execute tiling application> button. Software – analySIS LEXT will boot up.
button

NOTE When image is loaded with <Open with multiple selection> button
on [Tiling] window, Z shift compensation function is operating
between images. When the image is directly loaded with analySIS
LEXT software, Z shift compensation function is not operating so
that level difference is susceptible to appear at connecting portion
of the images.

Fig. 5-13 analySIS LEXT Software

VI . Application

VI . 5 - 2 4 Page
Convenient Features / Simplified tiling

2. Set number of rows with [Horizontal] scroll bar and set number of columns with
[Vertical] scroll bar on [Arrange Multiple Images] window respectively.

Fig. 5-14 [Arrange Multiple Images] Window

(Regarding details of analySIS LEXT, see Online Help.)

3. Click <OK> button. Display will change to a window to verify the state of tiling.

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Page VI. 5 - 2 5
Convenient Features / Simplified tiling

Fig. 5-15 [Align Multiple Images] Window (for verification)

4. Verify the state of tiling and, if it is satisfactory, click <OK> button. The tiled
images will appear on [Images] window.
If tiling result is not satisfactory, adjust tiling in according with the
TIP following procedures.
1. Red frame on images indicates individual image tiled. Move and place
mouse pointer ( ) over the image that should be adjusted.
2. When drag action is started, the profile of mouse pointer will change
to . Adjust position and then, release the button.
3. When adjustment is completed, click <Equalize> button.
4. Click <OK> button.

VI . Application

VI . 5 - 2 6 Page
Convenient Features / Simplified tiling

Fig. 5-16 [Images] Window

VI . Application

Page VI. 5 - 2 7
Convenient Features / Start of Operation Navigation Tool

5-4 Start of Operation Navigation Tool

Operation Navigation Tool uses an animation to describe basic operations of this system.
Navigating the operations by viewing Operation Navigation Tool makes it possible to
understand operation procedures easily.

1. Select [Operation Navigation] from [Help] menu. Operation Navigation Tool will
boot up and it appears as follows.

Fig. 5-17 [Help] menu

TIP If the item [Startup Operation Navigation] is checked on [Help] menu, the
operation navigation will automatically start at Microscope initialization.

Operation guide <Return> button <Forward> button

Fig. 5-18 Operation Navigation Tool

2. Operation guide is indicated at lower left side of the window. Operating along with
the guide, use <Forward> button to proceed for explanation.

VI . Application

VI . 5 - 2 8 Page
Convenient Features / Relocation of Window

5-5 Relocation of Window

Display position of window is returned to default setting. In case a hidden window exists,
it can be displayed again.

1. Select [Layout Window] from [Window] menu. Window will be relocated.

Fig. 5-19 [Window] menu

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Page VI. 5 - 2 9
Convenient Features / Profile Alignment

5-6 Profile Alignment

A profile position is aligned with an image position. [X Profile] window position is
adjusted in X direction (lateral direction of the screen) and [Y Profile] window position is
adjusted in Y direction (perpendicular direction of the screen).

1. Select [Fit Profile] from [Window] menu. As shown below, [X Profile]/[Y Profile]
window position is adjusted.

Fig. 5-20 [Window] menu

(Position is adjusted as shown by arrow.)

VI . Application

VI . 5 - 3 0 Page
Definition of Particle Analysis Items

Appendix A Definition of Particle

Analysis Items
z Area (µm2)
Area of a grain.

z Volume (µm3)
Volume of a section which forms a peak or valley with respect to a certain height
(threshold).

Valley
Peak

z Center of gravity (µm)

Center of gravity of the grain (assuming that the top left point is the origin).

z Maximum diameter (µm)

Maximum distance between peripheries of the grain.

VI. Application

Page VI . Appendix A - 1
Definition of Particle Analysis Items

z Surface area (µm2)

Surface area of a section which forms a peak or valley with respect to a certain
height (threshold).

Valley
Peak

z Feret diameter X (µm)

Distance between two vertical lines in contact with the image.

z Feret diameter Y (µm)

Distance between two horizontal lines in contact with the image.

z Peripheral length (µm)

Length of the periphery of the grain (without including the peripheral length of holes).

Peripheral length refers to the length of the line connecting the midpoints of boondary
pixels. Whose regions are adjacent to each other.

VI. Application

VI. Appendix A - 2 Page

Definition of Particle Analysis Items

z Equivalent circle diameter (µm)

Diameter of a circle having the same area as the grain.

z Area rate (%)

The percentage of the area of a grain with respect to the entire image.

z Total number (pieces)

Number of grains.

z Total area (µm2)

Total of the areas of all grains.

VI. Application

Page VI . Appendix A - 3
Definition of Particle Analysis Items

z Area ratio (%)

Percentage of the areas of all grains with respect to the entire image.

Area of all grains

Area ratio =
Area of the entire image

VI. Application

VI. Appendix A - 4 Page

Definition of Roughness Analysis Items / Line Roughness Analysis

Appendix B Definition of Roughness

Analysis Items
TIP In roughness analysis of microscopic region with use of laser microscope image, the
requirements defined in ISO are hard to apply in strict terms. Therefore, the parameter
calculation is performed with the conditions as shown below.

Cut-off wavelength: Selected as 1/3 through 1/50 of Width of Field of View for Image
Evaluation length: Width of Filed of View (FOV) for Image
Reference length: 1/3 region of cross-section center specified (but equivalent to evaluation
length in case of profile curve)

Appendix B-1 Line Roughness Analysis

1. Maximum Peak Height
Rp: Max. peak height of roughness curve
Pp: Max. peak height of profile curve
Wp: Max. peak height of warp curve
Max. peak height Zp of contour curve at reference length.
Rp, Pp,Wp = max(Z ( x))

2. Maximum Valley Depth

Rv: Max. valley depth of roughness curve
Pv: Max. valley depth of profile curve
Wv: Max. valley depth of warp curve
Max. valley depth Zv of contour curve at reference length.
Rv, Pv,Wv = min(Z ( x))

3. Maximum height
Rz: Max. height of roughness (This corresponds to “Ry” in
JIS ’94 and the definition differs from “Rx” in previous
JIS.)
Pz: Max. height of profile curve
Wz: Max. height of warp
Sum of max. peak height Zp and max. valley depth Zv of
contour curve at reference length.
Rz = Rp + Rv

VI. Application
Page VI. Appendix B - 1
Definition of Roughness Analysis Items / Line Roughness Analysis

4. Mean height:
Rc: Mean height of roughness curve elements
Pc: Mean height of profile curve elements
Wc: Mean height of warp curve elements
Mean height Zt of contour curve elements at
reference length.
1 m
Rc, Pc,Wc = ∑ Zti
m i =1

5. Maximum profile height:

Rt: Max. profile height of roughness curve
Pt: Max. profile height of profile curve (“Rmax” in
JIS ’82)
Wt: Max. profile height of warp curve
Sum of max. peak height Zp and max. valley depth
Zv of contour curve at reference length.
Rt , Pt ,Wt = max(Zpi ) + max(Zvi )

6. Arithmetic mean height

Ra: Arithmetic mean roughness
Pa: Arithmetic mean height of profile curve
Wa: Arithmetic mean warp
Mean value of the absolute value of Z(x) at
reference length.
1 lr
lr ∫0
Ra, Pa,Wa = Z ( x) dx

VI. Application
VI. Appendix B - 2 Page
Definition of Roughness Analysis Items / Line Roughness Analysis

7. Root-mean-square height
Rq: Rms roughness
Pq: Rms height of profile curve
Wq: Rms warp
Rms value of Z(x) at reference length.
1 lr 2
lr ∫0
Rq, Pq,Wq = Z ( x)dx

8. Skewness
Rsk: Skewness of roughness curve
Psk: Skewness of profile curve
Wsk: Skewness of warp curve
Cubic mean value of Z(x) at reference length, made
dimensionless by the cube of the rms height.
1 ⎛ 1 lr 3 ⎞
Rsk = 3 ⎜ ∫
Rq ⎝ lr 0
Z ( x)dx ⎟
⎠

9. Kurtosis
Rku: Kurtosis of roughness curve
Pku: Kurtosis of profile curve
Wku: Kurtosis of warp curve
Biquadratic mean value of Z(x) at reference length,
made dimensionless by the biquadratic of the rms
value.
1 ⎛ 1 lr 4 ⎞
Rku = 4 ⎜ ∫
Rq ⎝ lr 0
Z ( x)dx ⎟
⎠

VI. Application
Page VI. Appendix B - 3
Definition of Roughness Analysis Items / Line Roughness Analysis

10. Ten-point mean roughness

Rzjis: 10-point mean roughness (“Rz” in JIS ’94)
Sum of the mean height of the highest 5 peaks of
roughness curve and the mean depth of the
deepest 5 valleys.
1 5
Rzjis = ∑( Zpj + Zvj )
5 j＝1

11. Mean length

RSm: Mean length of coarse curve elements (“Sm”
in JIS ’94)
PSm: Mean length of profile curve elements
WSm: Mean length of warp curve elements
Mean length Xs of contour curve elements at
reference length.
1 m
RSm, PSm,WSm = ∑Xsi
m i=1

12. Root-mean square inclination

R∆q (or Rdq): Rms inclination of roughness curve
P∆q (or Pdq): Rms inclination of profile curve
W∆q (or Wdq): Rms inclination of warp curve
Rms value of local inclination dz/dx at reference
length.
2
1 lr d
lr ∫
R∆∆q,P∆q,Wq = Z(x) dx
0 dx

VI. Application
VI. Appendix B - 4 Page
Definition of Roughness Analysis Items / Line Roughness Analysis

13. Load length ratio

Rmr(c): Load length ratio of roughness curve
Pmr(c): Load length ratio of profile curve
Wmr(c): Load length ratio of warp curve
Ratio of the load length MI(c) of contour curve
elements at cut level c at the evaluation length.

Pmr (c), Rmr (c),Wmr (c) = Ml(c)

ln

14. Cut level difference

Rδc (or Rdc): Cut level difference of roughness
curve
Pδc (or Pdc): Cut level difference of profile curve
Wδc (orWdc): Cut level difference of warp curve
Difference in the levels of cutting in the height
direction that coincide with the two given load length
ratios.
Rδc = c( Rmr1) − c( Rmr 2) : Rmr1 < Rmr 2
The above formula expresses the definition of Rδc.
Pδc and Wδc can also be defined in similar ways.

15. Relative load length ratio

Rmr: Relative load length ratio of roughness curve
Pmr: Relative load length ratio of profile curve
Wmr: Relative load length ratio of warp curve
Load length ratio determined by reference cut level
c 0 and cut level difference of roughness curve Rδc.

Rmr = Rmr (c1 )

where c1 = c 0 − Rδc, c 0 = c( Rmr 0)

The above formula expresses the definition of Rmr.

Pmr and Wmr can also be defined in similar ways.

VI. Application
Page VI. Appendix B - 5
Definition of Roughness Analysis Items / Surface Roughness Analysis

Appendix B-2 Surface Roughness Analysis

1. Maximum peak height
SRp: Max. peak height of roughness curved surface
SPp: Max. peak height of profile curved surface
Max. peak height Zp in contour curved surface.

2. Maximum valley depth (Deepest valley)

SRv: Max. valley depth of roughness curved surface
SPv: Max. valley depth of profile curved surface
Max. valley height Zy in contour curved surface.

3. Maximum height
SRz: Max. height roughness
SPz: Max. height of profile curved surface
Sum of max. peak height Zp and max. valley depth Zy in contour curved surface.

4. Mean height
SRc: Mean peak height of roughness curved surface
SPc: Mean peak height of profile curved surface
Mean height Zt in contour curved surface.

5. Arithmetic mean height

SRa: Arithmetic mean roughness
SPa: Arithmetic mean height of profile curved surface
Mean absolute value of f(x, y) in contour curved surface.
1 M L
SRa, SPa =
LM ∫ ∫
0 0
f ( x, y ) dxdy

where L = length in X-direction of contour curved surface, M = that in Y-direction of contour curved
surface, and profile curved surface y = f(x, y).

VI. Application
VI. Appendix B - 6 Page
Definition of Roughness Analysis Items / Surface Roughness Analysis

6. Root mean square height

SRq: Rms roughness
SPq: Rms height of profile curved surface
Rms valuje of f(x, y) in contour curved surface.
1 M L
SRq, SPq =
LM ∫ ∫
0 0
f ( x, y ) 2 dxdy

where L = length in X-direction of contour curved surface, M = that in Y-direction of contour curved
surface, and profile curved surface y = f(x, y).

VI. Application
Page VI. Appendix B - 7
OLYMPUS CORPORATION
Shinjuku Monolith, 3-1, Nishi Shinjuku 2-chome,Shinjuku-ku, Tokyo, Japan
OLYMPUS LIFE SCIENCE EUROPA GMBH
Postfach 10 49 08, 20034, Hamburg, Germany
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One Corporate Drive, Orangeburg, NY 10962, U.S.A.
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