Introduction to Bayard-Alpert

HELIX TECHNOLOGY CORPORATION Ionization Gauges

STABIL-ION® Gauge Glass B-A Gauge Nude B-A Gauge UHV Nude B-A Gauge

Introduction to Bayard-Alpert Style Ionization Gauges: This bulletin discusses the

different types of B-A gauges, basics of operation, components of a B-A gauge, and
degassing techniques.

Introduction to Bayard-Alpert Style Operating Principles of Bayard-Alpert

Ionization Gauges Ionization Gauges
A Bayard-Alpert vacuum gauge ionizes the A Bayard-Alpert (B-A) gauge is a hot-filament
gas molecules within the gauge volume, collects style ionization gauge. It is called such because
those ions on a thin ion collector wire, and a heated filament (cathode) is used to emit
measures the resulting current to the ion electrons toward a grid (anode).
collector to determine the number of molecules The pressure
present and indicates a pressure based on that indication of a B-A
measurement. vacuum gauge is
The Bayard-Alpert gauge was invented by based on the
R.T. Bayard & D. Alpert in 1950 to overcome a ionization of the gas
limitation in vacuum pressure measurement by molecules by a
the triode gauge. The triode gauge cannot constant flow of
indicate pressure lower than 10-8 Torr because electrons. The
electrons striking the grid create low-energy negative electrons
x rays, which emit photoelectrons when they are emitted at a
strike the ion collector. The current that results well-controlled,
from the photoelectrons leaving the collector is selectable rate from
what causes the lower pressure limit of the a heated filament
triode gauge. The solution proposed by Bayard (cathode) and are
and Alpert was to reconfigure the collector and accelerated toward
grid of the triode gauge to lower the current a positively-charged
from the x ray effect. wire grid (anode).
Electrons are created by a hot
filament and accelerated to the
Electrons pass into
grid. The current is actively con- the space enclosed
trolled by the electronics.
Introduction to Bayard-Alpert Ionization Gauges

by the grid. In this space the electrons collide X Ray Limit of Bayard-Alpert Gauges
with the gas molecules that are in the vacuum
system, and produce positive ions. The positive The low end of the operating range of a B-A
ions are then collected by the ion collector that gauge is determined by the x ray limit of this
is located along the axis of the cylindrical grid. type of gauge. The x ray limit varies with
The ion collector is at nearly ground potential, different gauge designs. x rays are produced
which is negative with respect to the grid. At a when the electrons emitted by the cathode
constant filament-to-grid voltage and electron impact the grid (anode). Because of the
emission current, the rate that positive ions are geometry of the B-A gauge, only a small fraction
formed is directly proportional to the density of of the x rays emitted from the grid are
molecules (pressure) in the gauge for pressures intercepted by the ion collector. When the x rays
below approximately 1 x 10-3 Torr. The strength strike the collector they cause electrons to be
of the ion current is then indicated on an photoelectrically ejected from the collector. This
electrometer that is calibrated in units of photoelectron current from the ion collector is
pressure. detected the same as positive ions arriving at the
Because the pressure indication is linear, the ion collector and consequently adds to the ion
hot cathode B-A gauge is generally considered current. This x ray current limits the pressures
to be the most accurate continuous indicator for that can be measured, and is equivalent to a
pressures below 1 x 10-3 Torr. pressure reading in the 10-10 to 10-11 Torr
ranges. Earlier design triode gauges which have
a cylindrical collector outside the grid
experience an x ray limit of about 10-8 Torr. The
x ray limit refers to the lowest pressure
Ion collector indication that may be obtained in a gauge
Precision-wound,
when all the output current is due to x ray
Stress-relieved induced photoemission and there is an absence
of gas.
Grid support, The x ray limit of standard glass or nude B-A
3 places
gauges is approximately 3x10-10 Torr. To
Tensioned measure below this limit, an ultrahigh vacuum
Filaments (UHV) nude B-A gauge can be used. The UHV
nude gauge has an x ray limit of approximately
2x10-11 Torr. This lower x ray limit is achieved
by modifying two elements of the standard B-A
gauge design. First, the diameter of the collector
STABIL-ION ® Gauge from Granville-Phillips
is reduced. The smaller cross-sectional area
(Shown with the stainless steel
enclosure removed for clarity.) reduces the probability that the x rays created at
the grid will strike the collector. Second, the
With the recent development of the helical grid structure is replaced with a fine-
STABIL-ION Gauge, Granville-Phillips brought wire mesh grid structure, and there is also a
the accuracy of B-A technology to the 3% to 6% fine-wire structure across both ends of the grid.
range. Although prior B-A style vacuum gauges The fine grid wires provide a more transparent
were usually inaccurate as much as 20% to grid for longer electron path lengths, and the
50%, they were still the best, commonly grid ends confine the positive ions for better ion
available vacuum gauge in the 1 x 10-3 to collection. Together, these two modifications
2 x 10-11 Torr range. cause a higher gauge sensitivity for ions from
the gas phase which causes the x ray current to
Introduction to Bayard-Alpert Ionization Gauges

be converted into a smaller pressure indication tungsten, therefore less reactive. Coated iridium
(i.e., a lower x ray limit). filaments are also more burnout resistant when
The x ray limit may be increased as the result exposed to atmospheric pressure while power is
of hydrocarbon contamination of the electrodes, on. Tungsten filaments will burn out
since contaminated surfaces can release more immediately if exposed to pressures of 1 x 10-2
electrons under x ray bombardment. Such Torr or higher while they’re on. However,
contamination can generally be removed by tungsten filaments are the best type to use when
degassing the electrodes. the chemistry (such as halogen compounds) of
the vacuum process causes premature failure of
coated iridium filaments.
Filaments (Cathodes) used in Bayard-
The amount of emission current that a B-A
Alpert Gauges gauge requires for proper operation depends on
There are two types of materials commonly many factors such as: the type of filament, the
used for filaments: tungsten and iridium. And, size or style of the gauge, the process in which
there are two types of coatings used on the the gauge is used, the pressure range of
filaments: thoria and yttria. operation, and the desired sensitivity of the
Generally, filaments are yttira-coated iridium, indicated pressure. Emission currents are
thoria-coated iridium, or uncoated tungsten. The typically in the range of 25 µA to 10 mA.
most common style is coated iridium because
they operate at a lower temperature than

Filament (cathode) Filament (cathode)

Filament support Filament support
Collector Wire Collector Wire
(ion collector) (ion collector)
Mesh grid Helical coil
(anode) grid (anode)
Grid Support Grid Support

UHV Nude Bayard-Alpert Gauge Nude Bayard-Alpert Gauge

with dual tungsten filaments with thoria-coated iridium filament
Degassing Bayard-Alpert Gauges Cleaning a gauge with solvents is not
recommended. However, if a gauge is
Because of the heated filaments, B-A gauges contaminated with silicone-based pump oil,
operate at higher temperatures than other styles solvent may be needed to remove the oil. Be
of vacuum gauges. Thus, volatile contaminants sure the gauge is thoroughly dried before
(molecules of gases or elements) are less likely installing it back on the system and operating or
to accumulate on the surfaces than is the case degassing it.
with other types of vacuum gauges. However, There are two types of degassing techniques:
collected contaminants can be removed by Electron Bombardment (EB), and Resistive. EB
“degassing” the gauge, which drives the degas must be used for UHV nude gauges with
molecules that have collected on the inner walls fine-wire mesh grids and can also be used for
and surfaces of the gauge back into the vacuum glass or nude gauges with helical coil grids.
chamber where they can be pumped out of the Resistive degas can only be used for gauges
system. Degassing can be done as required or with helical grids.
as part of a regular pumpdown sequence. The two degas techniques have similar effects
Regular degassing helps prevent contaminants but are quite different in the mechanisms of
from collecting and allows the gauge to provide causing the contaminants to be removed. EB
lower and more repeatable pressure indications degassing is accomplished by increasing anode
by bringing the pressure in the gauge closer to voltage and the emission current enough to
equilibrium with the chamber. provide electrons of sufficient quantity and
Water vapor is a type of contaminant that can energy to displace the contaminating
collect inside the gauge while the vacuum molecules. Resistive degassing is accomplished
chamber is exposed to atmosphere – especially by passing current through the grid (anode)
in humid climates. Vapors from sputtering or sufficient to raise the grid temperature to
coating operations can also contaminate the displace the molecules.
surfaces of a gauge.

The information, recommendations, descriptions and safety notations in this Applications Bulletin are based on Granville-Phillips'
experience and judgement with respect to the subject application. If additional information is required, please consult our Application
Engineer for this product line. THIS APPLICATION BULLETIN SHOULD NOT BE CONSIDERED TO BE ALL-INCLUSIVE, OR TO
COVER ALL CONTINGENCIES. NO WARRANTIES, EXPRESSED OR IMPLIED, INCLUDING WARRANTIES OF MERCHANTABILITY
OF FITNESS, ARE MADE REGARDING THE SAME. In no event will Granville-Phillips be responsible for any incidental or consequen-
tial damages or loss resulting from use of the information, recommendations, descriptions and safety notations herein.

5675 Arapahoe Avenue • Boulder, Colorado 80303-1332, USA

HELIX TECHNOLOGY CORPORATION Phone: (+1) 303-443-7660, toll-free in USA: 1-800-776-6543
Fax: (+1) 303-443-2546 • email: [email protected]
Advanced Vacuum Measurement Solutions World Wide Web: www.granville.com

© Granville-Phillips 1999 Printed in USA 3m 3/99