Software Control LEO 15XX

Manual
(LEO 32 V 02.03)
Table of Contents:

1 Introduction............................................................................................................. 7

2 The Administrator ................................................................................................. 10

2.1 Setting the User Directories 10
2.2 Deleting User Directories 12
2.3 Installing and Editing Software Licenses 12
2.4 System Configuration 12

3 The Pop-Up Menu ................................................................................................. 14

3.1 Menu: FILE 14
3.1.1 Restore- Save For Restore- Standard ........................................................................................................14
3.1.2 Load Image- Save Image...........................................................................................................................14
3.1.3 Print Image- Print Setup ............................................................................................................................14
3.1.4 Load Annotation- Save Annotation...........................................................................................................15
3.1.5 Log Off- Exit.............................................................................................................................................15
3.2 Menu: EDIT 16
3.2.1 Input LUT: (Requires the Licence: GAMMALUT)..................................................................................16
3.2.2 Display LUT..............................................................................................................................................17
3.2.3 Toolbar ......................................................................................................................................................17
3.2.4 Annotation- Insert Annotation Text- Insert Point to Point Marker ...........................................................18
3.2.5 Clipboard (Requires the Licence: CLIP)...................................................................................................18
3.3 Menu: VIEW 20
3.3.1 Toolbars- DataZone...................................................................................................................................20
3.3.2 Toggle Visible Dialogs- Toggle Full Screen Image ..................................................................................21
3.3.3 Crosshairs- Graticule (Requires the Licence: GRATICULE) ...................................................................21
3.3.4 SEM Status- Hide/ Unhide Annotation .....................................................................................................22
3.4 Menu: BEAM 23
3.4.1 Gun Setup..................................................................................................................................................23
3.5 Menu: DETECTION 24
3.6 Menu: IMAGE 24
3.6.1 Signal Adjust- Noise Reduction- Freeze ...................................................................................................24
3.6.2 Image Processing (Requires the Licence: IMMATH)- Second Image Window .......................................25
3.6.3 Find Image- Image Gallery .......................................................................................................................25
3.7 Menu: SCANNING 26
3.8 Menu: Stage 26
3.9 Menu VACUUM 26
3.10 Menu: TOOLS 27
3.10.1 Run a Macro - Macro Editor ....................................................................................................................27
3.10.2 Image Capture Mode.................................................................................................................................28
3.11 Menu Help 29

4 The LEO 32 User Interface ................................................................................... 30

4.1 Starting the Microscope in Stand-by Mode 30
4.1.1 Setting Parameters Using the Mouse.........................................................................................................30
4.1.2 Optimization of Images.............................................................................................................................31
4.1.3 Closing the User Interface.........................................................................................................................32
4.1.4 Saving and Loading Special Instrument Parameters .................................................................................32
4.2 The Standard Toolbar 34
4.3 The SEM Control Window 37
4.3.1 Detectors ...................................................................................................................................................37
4.3.2 Noise Reduction ........................................................................................................................................40
4.3.3 Vacuum .....................................................................................................................................................42
4.3.4 Cathode .....................................................................................................................................................42
4.3.5 Apertures ...................................................................................................................................................44
4.3.6 Stage..........................................................................................................................................................46

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4.3.7 EDX Mapping (Requires the Licence: XRAY) ........................................................................................ 46
4.4 The SEM Status Window 48
4.5 Saving and Loading Images 49
4.5.1 Special Configurations of Images to be Saved ......................................................................................... 50
4.5.2 Saving Additional Information with the Image ........................................................................................ 51
4.5.3 Loading of Images.................................................................................................................................... 51
4.5.4 Image Gallery Function ............................................................................................................................ 52
4.5.5 Extracting Stored Parameters ................................................................................................................... 53
4.6 Finishing Images by Means of Display LUT 55
4.7 Image Annotation and Measuring 58
4.7.1 Expanded Measuring Capabilities: (Requires the Licence: MEASA)...................................................... 62
4.7.2 Basic Settings for Measurements, Annotations and Overlays .................................................................. 62
4.7.3 Editing, Storing and Loading Measurements and Annotations ................................................................ 64
4.7.4 Setting and Editing the Data Zone............................................................................................................ 67
4.8 Editing Images on the Default Printer 71

5 Stage Functions ................................................................................................... 72

5.1 Initializing the Stage (STAGE INITIALISE) 72
5.2 Storing of Stage Coordinates (STORE/ REOPEN) 73
5.3 Centering a Point (CENTER POINT) 75
5.4 Centering a Feature (CENTER FEATURE) 75
5.5 Scanning a Field (STAGE SCAN) (Requires the License: STAGESCAN) 76
5.6 Stage Map (Requires the License: CENTER) 79
5.7 Survey Mode (Requires the License: SURVEY) 80
5.8 Stage Registration (Requires the License: STAGEREG) 82
5.9 Compucentric Software (Requires the License: COMPU) 84
5.9.1 Calibrate Stage Center .............................................................................................................................. 85
5.9.2 Compucentric Set Up ............................................................................................................................... 87
5.9.3 Stage Horizontal Alignment ..................................................................................................................... 90
5.10 Stage Control 91
5.10.1 Stage Status tab ........................................................................................................................................ 91
5.10.2 Stage Navigation Tab ............................................................................................................................... 92
5.10.3 Stage Properties tab .................................................................................................................................. 92
5.10.4 Stage Points List tab ................................................................................................................................. 93
5.10.5 Stage Scanning tab ................................................................................................................................... 94

6 Special Applications and Settings...................................................................... 96

6.1 User Preferences 96
6.2 Bake out of the Ion Getter Pump (IGP) 99
6.3 Special Scan Modes 100

6.3.1 Reduced Scan (Reduced) ............................................................................................................ 100

6.3.2 Split Screen (Requires the Licence: SPLIT) ............................................................................... 100

6.3.3 Magnification of a Feature (Dual Mag ) (Requires the Licence: DUALMAG).......................... 100
6.3.4 Dynamic Focus (Dynamic Focus) (Requires the Licence: DYNFOCUS).............................................. 101
6.3.5 Tilt Correction (Requires the Licence: TILTCOMP) ............................................................................. 101
6.3.6 Scan Ratotion (Requires the Licence: SCANROT)................................................................................ 102
6.4 Image Processing (Requires the License: IMMATH) 102
6.4.1 Manipulation of Images (Image Maths) ................................................................................................. 102
6.4.2 Gray Scale Detection (Threshold) .......................................................................................................... 103
6.4.3 Histogram Equalization .......................................................................................................................... 103
6.4.4 2D Filters................................................................................................................................................ 104
6.5 Editing the Toolbar 106
6.5.1 Setting a New Symbol (Example) .......................................................................................................... 107
6.5.2 Use of Bitmaps as Icon Symbols ........................................................................................................... 108
6.6 Macro- Editor 110

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6.6.1 The Macro “START” ..............................................................................................................................117
6.6.2 Assignment of Macros to Function Keys ................................................................................................118
6.7 Saving Images in BMP and JPEG Format 119
6.8 Magnification Calibration for Different Output Media 120
6.8.1 Calibrate Output Device Magnification ..................................................................................................120
6.8.2 Calibrate User Magnification ..................................................................................................................120

7 The Help System ................................................................................................. 122

8 Important Keys and Key Combinations ............................................................ 126

9 Optional Applications......................................................................................... 128

9.1 Working with the Hard Panel/Joystick 128
9.2 Airlock 130
9.3 Gun Monitor Utility 133
9.4 RemCon32 (requires the license REMCON) 135
9.5 Important Software Licenses 136
9.6 Water Flow/ Temperature 138
9.7 Working with the Specimen Current Monitor 139
9.8 Accounting (Requires the License: ACCOUNT) 140
9.8.1 Review.....................................................................................................................................................141
9.8.2 Owners ....................................................................................................................................................142

10 Index .................................................................................................................... 143

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LEO Electron Microscopy Ltd
1 Introduction

The scanning electron microscope LEO 15XX is a fully computer controlled instrument. All operations,
settings and functions necessary for the handling of the microscope are controlled by use of a keyboard and a
mouse. Using fiber-optic cables, entered commands are transmitted to the electronic system.
Control of the stage is by a dual joystick providing control of all motorized axes of the stage. Optionally, a
hard panel provides control of the stage. (see 9.1). Additionally the hard panel provides the advantage that
setting and adjustment of important parameters such as magnification and focus, stigmator or beam
alignment is possible using two potentiometers (encoders).
The LEO 32 Software is a special communication and control program running under the Windows® 98 or
Windows® NT (2000) operating systems and following the normal rules for Windows® applications.
The different functions, parameters or windows can be opened or activated using a Pop-Up Menu (see 3) or
using a toolbar (see 4.2).
Starting the software is by a double-click with the left mouse button on the icon in the

Windows® user interface or by clicking, STARTÆ PROGRAMSÆ LEO- 32 Æ SEM USER INTERFACE.

After starting the LEO software, the LEO server,

realizing the internal communication between
software and hardware, will load the different drivers.
Each specific user logs on with his user name and the
password established by the administrator. If the user
name and the password are entered correctly, the LEO
32 user interface will start with the corresponding user
specific configurations.
The server will remain active even after closing the
user interface. The communication between hardware
and software will only end after finishing Windows®
or after closing manually.

If you want to install new user software on the computer you should inform your service engineer.
Make sure that the LEO server of the LEO-32 software is closed before installing further software
components (e.g. Word, Excel, Power Point etc.). Before starting a new installation routine, it is

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recommended to restart Windows® .
Do not forget that the LEO 15XX has been developed as a scanning electron microscope. The
integrated personal computer should mainly be used for the installation of control software and for
the storage of images. The installation of other software components may cause problems in
individual cases.

Apart from the LEO user interface, other programs can be started using the Windows® paths STARTÆ
PROGRAMSÆ LEO-32 or STARTÆ PROGRAMSÆ LEO-32 Service. Some of these programs are only
available to LEO Service, e.g. calibration of the instruments or to set or control special parameters. Other
programs are available to the specific user and can be considered as help programs for special applications of
the scanning electron microscope. The different programs are explained as follows:

LEO- 32Æ FTP Remote Archiving (optional

software)
Program to send saved SEM images to another
computer or printer using a network.

LEO- 32Æ LEO Administrator

Starts the LEO Administrator. By means of this
administrator, it is possible to install or edit new user
directories (for further information see 2).

LEO- 32Æ Read Me

Shows the Read Me file which contains important
details on the current LEO software.

LEO- 32Æ Release Notes

Gives an overview on all LEO software versions with
their new developments and special details.

LEO- 32Æ RemCon32

Special program to support communication using the serial interface (for more information see 9.4).

LEO- 32Æ SEM User Interface

Starts the LEO user interface.

LEO- 32 ServiceÆ Calibration Wizard

Program for the calibration of the scanning electron microscope. This program is only available to LEO
service personnel.

LEO- 32 ServiceÆ Convert DATA.VAC

Conversion of the file “data.vac” to a more recent version, necessary for the upgrade from the 16-Bit version
to the 32-Bit software version.

LEO- 32 ServiceÆ Gun Monitor Utility

This program monitors parameters of the scanning electron microscope Gun in the form of a diagram (for
more detailed information see 9.3).

LEO- 32 ServiceÆ Gun Service

Program for setting and adjusting of the filament, only available to LEO Service personnel.

LEO- 32 ServiceÆ Stage Admin

Program for setting and adjusting the motorized stage, only available to LEO Service personnel.

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LEO- 32 ServiceÆ Upgrade User Database
Program to adjust an old user data file to a new LEO-32 software version.

LEO- 32 ServiceÆ View DATA.VAC

Shows the contents of the file “data.vac”. All calibration and configuration data of the SEM are stored in this
file.

You will find the complete LEO software in two main folders on the hard
disk. These folders are C:\LEO and C:\Program Files\LEO (LEO Electron
Microscopy Ltd). The folder C:\LEO contains mainly calibration and
initialization files for the LEO software. One of the most important files in
this directory is the file data.vac as it contains all calibration data of the
scanning electron microscope. It is recommended to back up the contents
of this file to the hard drive or to a disk to protect the stored data. The
directory C:\Program Files\LEO (LEO Electron Microscopy Ltd) contains
the complete program. The subdirectories \user contain the different user
directories that the administrator can help to set up and edit (see 2.1.).
These directories contain all user specific data and configurations.. The
directory \images contain image files for the specific users to store the
images.

To ensure safe running of the control software, no modifications should be made to directories and
files of the LEO software with the exception of the files and subdirectories in C:\Program
Files\Leo\Leo32\images and C:\Program Files\Leo\Leo32\user where user specific and temporary
modifications may occur. Always make a back up to protect the stored data before deleting files or
directories.

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2 The Administrator

The Administrator provides for establishing different user directories, editing existing folders and user
configurations. A user directory contains frequently modified configuration parameters of the LEO-32 user
interface and system software files for specific users. Each specific user has his own directory for
configuration parameters, toolbar, menus, data zones, operation modes, etc. Each user interface will thus
load with the user specific configuration settings.

2.1 Setting the User Directories

After the installation, the user directories should be set up by the person responsible for the system or the
service engineer. The Administrator is opened using the Windows® Overlay as follows:
STARTÆ PROGRAMÆ LEO 32Æ LEO ADMINISTRATOR.
Once the program begins loading, you will be prompted to enter a name and a password. Log on is possible
with the user name SERVICE and the current service password or with the user name SYSTEM. Click on
OK to confirm.

After the first set-up, a password only known to the Administrator should be established for
SYSTEM. This password can be reestablished in case it is forgotten.

The Administrator panel is now visible, and the user lists are displayed.

Creating a New User:

⇒ Pop-Up Menu USERSÆ NEW: displays a window that allows the creation of new user directories and
modification of existing user directories.
⇒ Enter a user name in User Name (it is recommended to use short forms)
⇒ To create a user directory, click on the gray box behind User Directory. Now select a specific directory,
or create a new directory. All user specific configurations, e.g. toolbar, data zone, stage coordinates etc.
will be saved and loaded into this directory. To create a directory “ User1”, replace “default” by “User1”.
Click on “Create Directory” to install this directory on the hard drive.
⇒ Create an image directory by clicking on the gray box behind Image Directory. Now select a specific
directory or create a new directory (see User Directory). All stored images will be filed in this directory.
⇒ Setting user levels: The level of access can be set to Novice, Expert, Full and Any Level. These privilege
and permission levels refer to the number of enabled SEM parameters (see 4.4). “Any level” will allow
access to all available parameters. The other levels only enable access to a certain number of privileges
and permissions
⇒ Enabling different permissions, i.e. permission to switch off or adjust the filament, to initialize the stage,
to act as a supervisor or to edit the toolbar.

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It is recommended SUPERVISOR only be assigned to a restricted number of authorized users.
SUPERVISOR is allowed to start the administrator and establish or edit new user directories.
Furthermore, the user can adjust or activate the following SEM parameters:
* USER MAX EHT (setting of user specific peak values for the acceleration voltage
* Filament Current (modification of the filament current)
* Bake out (setting and start of the bake out for the IGP)
* Activation of LEAVE GUN ON AT SHUTDOWN, PARTIAL VENT ON STANDBY, Z MOVE
ON VENT, PROTECT Z and EHT OF @ LOG OFF.

⇒ OTHER SETTINGS: Use Common Toolbar, if this control window is activated, a standard toolbar
(COMMON.UTB) from the directory “C:\Program Files\Leo\Leo32\User” will load when loading the
user interface. If not, the specific toolbar from the corresponding user interface will load.

After setting the different configurations, the window can be closed by clicking on OK. Now the new user
interface will be displayed in the user access window. The password for the user will be his user name. To
change this password, the specific directory must be opened again using FILEÆ EDIT.

Editing a user password:

⇒ Select the corresponding user directory in the user access window

⇒ Pop-Up menu USERÆ EDIT
⇒ Activate Change Password
⇒ Enter and verify the desired password (at least three letters!)

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2.2 Deleting User Directories

To delete a user name from the Administrator, the user name to be deleted has to be activated in the user
access window (click on user name with the left mouse button). Then select Delete in the USER menu.
After confirmation of the command, the user name will be deleted from the Administrator. Access will no
longer be possible with this user name and the corresponding password. However, the established user
directories and the corresponding files will not be deleted automatically from the hard drive. If necessary,
these files and directories must be deleted afterwards using Windows® Explorer.

2.3 Installing and Editing Software Licenses

The software licences can be opened with the menu LICENCES. A window with all installed software
licences will be displayed. This window allows the administrator to disable certain software options or to
enable disabled options. New licences can be installed. Click on “Install from disk” to select the path
containing the licence file. The licence files will have the name “Mwk????.LIC”. After selection of the file
and clicking on “Install” the licences will be implemented to the system. .

2.4 System Configuration

The menu CONFIGURATION displays or edits the current system configuration. This includes available
detectors, monitor size, kind and motorization of the stage, kind of the photo unit and other relevant system
configurations. Adjustments are only necessary after reinstalling or deleting hardware components.

This menu contains important system settings, only authorized persons (service engineer) should
make modifications.

The menu CONFIGURATION is subdivided into four index cards. The file card Column / Stage controls
parameters of the stage control and of the sample airlock, if available. The installation of a sample airlock
must be communicated to the system by activating Airlock Monitor. If the airlock can be controlled using
the LEO software, Airlock Control must also be activated. This allows control the airlock using the menu
Airlock in the LEO user interface (see 9.2.).
Stage Options selects the installed motorized stage. If there is a rotation limit switch on the stage, this option
can be selected by clicking on Rotate Limit.. The control boxes X,Y,Z,T,R and M-Enabled indicate the
motorized axes of the stage and allow switching off the axes Z,T and R (M.). Select the control module by
clicking on Joystick or Hard Panel=Mark1, depending on whether a joystick or/and hard panel is adapted.
The output media can be selected on the index Tab Output. The first step is to adjust the adapted monitor.
Depending on its size, selection is possible between 14/15 inches, 17 inches and 19/21 inches. This value
influences the calculation of the magnification that refers to the monitor. If a high-resolution record unit has
been installed, it can be selected by clicking on HRRU=Mark1.

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The index Tab Other allows the level of DDE support (Dynamic Data Exchange) to be set. Standard is DDE
Access = None. The setting of this level depends on the other programs installed on the computer (e.g.
special image storage programs) interactively reading data from the LEO software using the DDE support.
Upon request, a list of all DDE commands applicable to the LEO software is available.
All detector parameters can be set using the index Tab Detectors. The different detectors are selected by
clicking on DetectorÆ and can be activated or deactivated by clicking on Present. When a new detector is
installed, Connected to channel shows a list of the channels to which the detector may be assigned. You will
then have to select the corresponding channel. If a camera is installed on the instrument, it can be selected
using the selection TV and be assigned to the corresponding channel. Set the corresponding camera mode
using TV Mode. Possible selections are CCD, PAL and NTSC. Modifications to the detector or to the
camera settings can be stored by clicking the key Save Settings.

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3 The Pop-Up Menu

As is the practice in other Windows® programs, the different menu windows necessary to work with the
software can be opened using a Pop-Up menu. To allow an efficient handling, related commands are
combined in separate menu topics. Below you will find the description of these items. Wherever a more
detailed explanation is necessary, we refer to the corresponding information in the manual.

3.1 Menu: FILE

The menu item “File” contains mainly options for storing and editing images,
closing the software and setting special instrument configurations

3.1.1 Restore- Save For Restore- Standard

Restore:
Loading and Processing the Macro “Restore4.mlc” from the corresponding
user interface (see 4.1.3).
Save For Restore:
The selection of this command allows the storage of the respective instrument
configuration (acceleration voltage, magnification, focus etc.) in the
“Restore4.mlc” macro in the current user directory. Any already existing
macro will be replaced. If no “Restore4.mlc” macro exists in the current user
directory, it will be set up and the current parameters will be stored in it.

Standard:

A standard configuration is set on the instrument (acceleration voltage = 5kV, working distance = 12mm,
aperture = 30µm, smallest magnification). If the filament or EHT are switched off, this routine loads the
acceleration voltage or the filament startup parameters. At the same time you will be asked if the stage is to
be initialized if it has not been up to now.

Load State- Save State:

Load State...: Loading special instrument configurations (see 4.1.4.)
Save State...: Saving special instrument configurations (see 4.1.4).

3.1.2 Load Image- Save Image

Load Image...: Loading TIFF images into the LEO user interface (see 4.5.3)
Save Image...: Saving images in TIFF format (see 4.5.1).

3.1.3 Print Image- Print Setup

Print Image: Printing the current image on the default printer as defined in Windows®
Print Setup...: Loading the Print Setup. Settings such as page size and printer are possible (see 4.8).

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3.1.4 Load Annotation- Save Annotation
Load Annotation: Loading measurements and annotations saved using “Save Annotation” as a file in
the respective user directory (see 4.7).
Save Annotation: Saving highlighted measurements and annotations as a separate file in the current
user directory (see 4.7).

3.1.5 Log Off- Exit

Log Off: Exiting the LEO user interface and all other LEO applications such as the program
“RemCon32”. The LEO server remains active.
Exit: Exiting the LEO user interface. The LEO server remains active. You will be asked
whether other LEO applications are to be closed. If you answer “Yes”, the result will
be the same as with “Log Off”. If you answer “No”, only the LEO user interface will
be exited, all other LEO applications remain logged on.

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3.2 Menu: EDIT

The menu “Edit” provides processing of current and stored images as

well as custom tool bar design. Processing includes editing
brightness and contrast, insertion of measurements and texts and
copying images using the clipboard. By clicking on Toolbar the
current toolbar can be individually designed and modified.

3.2.1 Input LUT: (Requires the Licence: GAMMALUT)

Modifications of the Input LUT affects the current live image. Independent to the signal setting for
brightness and contrast (see 4.3.1), an individual adjustment of the transfer characteristic is defined. This
option is useful if a perfect, linear illumination of the image is difficult or impossible. In these special cases
you may try to optimize the illumination by adding or displacing discrete points of the LUT or by adding a
step function.
After loading the Input LUT a toolbar and a graph are displayed showing the signal transfer characteristic.
This characteristic represents the coordinates of the input gray level. In the simplest case it is a straight line
connecting the points (0,0) and (255,255). Processing this straight line is by adding or displacing different
points.
The different functions can be selected in the toolbar or by clicking the right mouse button within the graph
window. The displayed selection menu will show the different functions. This menu also allows to switch the
toolbar on or off (SHOW TOOLBAR - (HIDE TOOLBAR).

Below you will find the different functions of the Input LUT.

Displacing and deleting points in the signal transfer characteristic.

(Displacing: Position the mouse cursor on to the point and displace with the pressed left mouse button.
Deleting: Position the cursor close to the point and press the middle mouse button.

Adding and deleting points in the signal transfer characteristic (Adding: Position the mouse cursor within
the graph field and click the left mouse button / Deleting: Position the cursor close to the point and click

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on the middle mouse button)

Cancel the last modification of the Input LUT

Loading special Input LUT settings and applying these settings to the current image

Saving special settings of the Input LUT

Returning the Input LUT to the basic status (linear characteristic)

Inverting the current signal transfer characteristic

Adding a step function as signal transfer characteristic. By doing so, the signal transfer characteristic will
be transformed to a regular sequence of gray values. The amplitude of each step, the position of the first
step (Offset) and the number of steps (period) can be set separately. It is possible to continue to modify
the curve by adding or displacing different points.

Loading the window LUT Step Settings to set offset, amplitude and period for the step function.

3.2.2 Display LUT

By means of Display LUT modifications of the current live image and of stored images are possible. You
will find more detailed information on the different functions in 4.6.

3.2.3 Toolbar
Loading the toolbar editor provides; custom design to the current toolbar, save or load a user custom or
standard toolbar. (see 6.5).

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3.2.4 Annotation- Insert Annotation Text- Insert Point to Point Marker
Annotation: Opening the toolbar for annotation , measurements, etc. to the image (see 4.7).
Insert Annotation Text: Loading the text editor for adding annotations to the image (see 4.7).
Insert Point-to-Point Marker: Loading the toolbar for the annotation and immediate addition of a point-to-
point measurement to the current image (see 4.7).

3.2.5 Clipboard (Requires the Licence: CLIP)

Similar to other Windows® applications, the menu “Clipboard” allows copying images to the Windows®-
specific Buffer store or adding images from the buffer store to the LEO user interface. The image will not be
stored in a storage medium such as a hard drive or disk, but the contents of the memory will be stored in the
main memory of the computer. The contents will therefore be available to any other Windows® application
which has access to the buffer store. This allows copying SEM images or clippings without storage from
intermediary memory to other programs. Furthermore, SEM images contained in the Clipboard can be added
to a stored image.

By means of the index Tab “Copy” SEM images or clippings can be copied to the intermediary memory.
The control box “Store Resolution” displays the store resolution of the image and allows modifications..
Clicking the key Copy will start the copying procedure.

Control Surface IMAGE:

Processing images is possible by means of the Display LUT (see 4.6). If AS SEEN is activated, the edited
monitor content will be copied to the intermediary memory. If not, the gross data will be used. By selecting
REDUCTION, the image can be sent to the image store in a reduced size. Selection is possible between 1
(original size) and 8.

Control Surface MERGE:

ANNOTATION:
Data zone and annotations and measurements etc. will be copied to the intermediary memory together with
the image.

OVERLAY:
Copies only the data zone together with the image to the intermediary memory.

COLOR MERGE:
Must be activated to copy colored annotations or measurements together with the color to the intermediary
memory. This will reduce the number of grays (256) of the image by 20 gray scales as this storage area is
necessary for the storage of the ANNOTATION information. If Color Merge is not activated, the colors will
be converted in gray scales.

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Control Box DIMENSIONS:

This list indicates the upper left (X, Y) as well as width (W) and height (H) of the area to be copied. If
WHOLE is selected in AREA, upper left will always be 0,0 and the size will be identical to the set STORE
RESOLUTION. It is also possible to copy only a clipping of the image after entering the respective
parameters in DIMENSIONS. Click on SET to display the grid on the image in size and position
corresponding to the clipping to be copied. Size and position of the grid can also be set by using the mouse.
By clicking on ANNOTATION (see 4.7) it is possible to select an image area to be saved to the intermediary

memory. To do so, click on the symbol . Then the corresponding area can be selected by clicking on
the left mouse button. The selected area will be centered on the screen by clicking Center.
By switching to the index Tab “Paste”, insertion of images and clippings from the intermediary memory is
possible. The box FILE INFORMATION displays size and type of the image stored in the intermediary
memory. Clip on IMAGE REDUCTION to select a reduction factor if a reduced image is to be loaded into
the image memory. This enables an image-in-image presentation or a composition of 4, 9, 16 etc. images to
one entire image. Depending on the reduction factor, the size of the grid will be displayed on the screen. This
grid shows position and format of the image to be loaded. The position of the grid on the screen can be
determined by clicking on CENTER, ORIGIN (upper left) or X ,Y (free positioning). Selecting X, Y results
in free positioning of the grid with the mouse. Click Paste to insert the selected image into the
corresponding position. It is recommended to activate STEP FRAME to display i.e. 4 images in one entire
image, the images being thus automatically positioned correctly (see 4.5.3). Click on ORIGIN before
selecting STEP FRAME.

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3.3 Menu: VIEW

The functions in VIEW refer mainly to the design of the LEO user interface. By clicking on VIEW it is
possible to switch on or off the toolbar and the status bar, to load markers like grid or cross hairs or to
display different data zones. It is also possible to switch on or off a certain group of measurements and
annotations. The SEM status window can be opened, listing user specific parameters which can be modified
interactively.

3.3.1 Toolbars- DataZone

The key combination CTRL + B or the selection of Toolbars... opens the
window Toolbar Views. Select User Toolbar, Status Bar or HFP Status (hard
panel) to activate or deactivate the toolbar, status bar or HFP Status. The
status bar for the hard panel shows the current active selection for the encoders
(potentiometers). Clicking Tool Tips switches on (Show) or off (Hide), the
short explanation of the different toolbar icons. This short explanation will be
displayed if the mouse cursor is situated on one of the toolbar icons.

A showing or hiding of the current data zone is possible by using the key combination CTRL + D or by
clicking on Toggle Data Zone. The file CURRENT.ADZ in the current user directory will load, displaying
design, size, position and parameters of the data zone. Selecting the function Display Default Data Zone
will load the standard data zone (DATAZONE.ADZ) from the directory C:\Program
Files\Leo\Leo32\distrib. You will be asked whether you want to replace the current data zone.

Answering “YES” will replace the current data zone with the standard data zone.If “NO”, the current data
zone will remain. The functions Hide and Unhide Datazone(s) will also show or hide the data zone.

20 LEO Electron Microscopy Ltd

Loading a user specific data zone can be done using
Load User Datazone... The different data zones in
the current user directory will thus be displayed.
You will find detailed information on the set-up of
user specific data zones in 4.7.4. By selecting one of
the listed files and clicking on Open, the respective
data zone can be loaded into the LEO user interface.
You will be asked again whether you want to
replace the current data zone with the selected one.
Answering “YES” will replace the current data zone.
Answering “NO” will save the current data zone as
an annotation. The loaded data zone will be
converted to the file CURRENT.ADZ and can be switched on or off by pressing on CTRL + D.

3.3.2 Toggle Visible Dialogs- Toggle Full Screen Image

Pressing the key F3 or clicking on Toggle Visible Dialogs switches off the opened windows and toolbars
(Input LUT, Annotation etc.) of the LEO user interface . A second clicking or pressing the key F3 will result
in a reactivation of the deactivated windows.
To switch off the Windows® interface, i.e. the Pop-Up menu, the toolbar, the statusbar and the HFP status
bar, use the function Toggle Full Screen Image or the key combination Shift + F3. Repeating this function
opens the Windows® interface again.

3.3.3 Crosshairs- Graticule (Requires the Licence: GRATICULE)

The selection View → Crosshairs will display an overlay on the screen that can be switched off by selecting
View → Crosshairs again. It is also possible to display a grid on the monitor that will be activated by the
command View -> Graticule. The line distance can be entered using the function Graticule Spacing....
Values between 50 and 512 (half of the screen resolution across will be displayed on the screen) are possible.

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3.3.4 SEM Status- Hide/ Unhide Annotation
The SEM Status window provides the ability to list a certain number of important parameters and
commands. For more detailed information see 4.4.

The commands Hide and Unhide allow the user to

activate and deactivate specific annotation and
measurement objects. Standard set-up for all objects
is Unhide (visible). The image on the left shows a
number of the different annotation and measurement
objects. The images below show which type of
objects are hidden, when selecting the specific Hide
function.
.

All selections are set to Unhide

Hide Text/ Bitmap/ Line Annotation Hide Measurement Annotation

Hide Measurement Results Panel Hide Annotation Selection Handles

22 LEO Electron Microscopy Ltd

3.4 Menu: BEAM
The menu “Beam” contains commands and settings important for the
adjustment of the electronic beam.
The commands EHT On and EHT Off will switch on or off the acceleration
voltage. Emission switches over to the emission mode necessary for aligning
the filament (see 4.3.5). The menu Accelerating Voltage... provides for
adjusting the current acceleration voltage. Selecting the menu Apertures... will
result in the activation of the SEM Control window; the tab Apertures opened
(see 4.3.5).
The functions Stigmation... and Beam Shift... open separate menus to adjust the
stigmator or the beam shift. Both parameters can also be set and adjusted in the
SEM Control window (see 4.3.5). In both menus it is possible to activate
automatic correction of the astigmatism.

3.4.1 Gun Setup

The menu Gun Setup is available, without limitats, to LEO service staff, all settings for the field emission
cathode are set in this menu. Other users can open the menu but have only limited access to modify
parameters.
On the left side of the window Gun Service three parameters can be set: The parameter acceleration voltage (
EHT Target), available to every user, can be modified continuously. Users (Supervisor level) have the
ability to modifiy the filament heating current (Fil I Target) within certain limits. Using the slider control,
the extractor voltage (Extractor V Target) can be varied within certain limits. This parameter is also
available to all users.
The right side of the window shows the current values of the filament. . Clicking Gun Parameters indicates
nominal, maximum and minimum values of the cathode. Modification of these values is only possible for
LEO service staff.

As modifications of these parameters will effect the life and the emission of the cathode, changes
should only be carried out by the person responsible for the instrument after discussion with the
respective service engineer.

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3.5 Menu: DETECTION
The menu “Detection” provides selection of the different signal sources to be displayed on the monitor.
Detectors: lists the different detectors available for imaging. The currently active detector has a check. On
activation of the command Mixing two detector signals can be mixed. For further information on mixing of
detector signals see 4.3.1. This function requires the software license SIGMIX.
If one or several TV cameras (chamber scopes) are adapted to the microscope, these cameras can be
activated using the menu TV Inputs.
Clicking X-Ray... will load the SEM Control window and display the index Tab X-Ray (see 4.3.7) which
enables the presentation of analog EDX distribution images on the screen.

3.6 Menu: IMAGE

The menu “Image” contains routines and

commands to be used for adjustment,
optimization and processing of live or saved
images. It also contains the functions Second
Image Window and Image Gallery for the
display and edition of stored images. The
function Image Processing... can be used for
image analysis.

3.6.1 Signal Adjust- Noise Reduction- Freeze

The menu Signal Adjust provides the capability to adjust brightness and
contrast of the current detector.
The command Noise Reduction will load the SEM Control window, index
tab Scanning which displays routines to save noise reduced live images to
the image store (see 4.3.2).
The command Freeze will freeze the current live image in the image store,
the sample will not be scanned any more. A frozen image can be unfrozen
by clicking on Unfreeze.

24 LEO Electron Microscopy Ltd

3.6.2 Image Processing (Requires the Licence: IMMATH)- Second Image Window
The menu Image Processing contains basic routines for image processing such as filters for saved images or
detection of special gray values in the image. For further explanations of the different functions see 6.4.
The function Second Image Window opens a second virtual window to load saved images. It is possible
either to load the current image from the screen using the command Load from Display... (or CTRL+2), or to
load an image from a storage medium Load from file. The image can be moved by clicking the left mouse
button and moving the mouse within the window. Clicking the right mouse button in the virtual window will
open another options menu e.g. the command Zoom Area. This command will load the reduced image to the
window Zoom Area. Dragging the left mouse button selects a clipping area which will be displayed
enlarged in the window Second Image. Once again, dragging the left mouse button will move the image to
display the selected area. Images stored in the intermediary memory (see 3.2.5) can be inserted by using the
command Paste. The command Copy Selection will copy the clipping in the window Second Image to the
intermediary memory. Copy Entire Image copies not only the clipping but the entire image to the
intermediary memory. Clicking Print... will print the image on the default printer.

3.6.3 Find Image- Image Gallery

The function Find Image produces an automatic focus research in connection with changes of the
magnification. If a passably focused image is displayed on the screen, clicking Abort can interrupt the
function. This function is designed to help inexperienced users get an acceptable image on the screen as fast
as possible. Fine adjustment will follow manually.
To get a rapid overview on all images contained in the respective image directory use the command Image
Gallery which will display all images of the respective directory in stamp size in a separate window. You
will find more detailed information on the image gallery in 4.5.4.

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3.7 Menu: SCANNING

The menu “Scanning” contains all necessary options for scanning

the sample. Clicking Speeds will open a menu for the selection of
the different scanning rates. If the license SCANEXP is installed,
15 different scan rates can be selected.
The command Normal switches over to normal scan rate, which
means that the scanned sample area is displayed on the total screen.
However, adjustments can be done using the function Reduced.
Explanations on the different special scan modes such as Reduced,
Split, Dual Mag, Rotate/ Tilt... and Dynamic Focus... are
contained in 6.3
There are several other special scan rates such as Spot, Line Scan
and X-Ray Line Scan: The Spot mode will freeze the image; the
electronic beam can be positioned with a cross to a special sample
area. This function provides point analysis, which is of importance
for EDX/ WDX applications.
When using Line Scan, the sample surface will only be scanned
along a line and the corresponding signal displayed in a line profile
(see 4.3.2). X-Ray Line Scan has the same function with the
difference that it displays the EDX signals (see 4.3.2).
Store Resolution sets the respective store resolution of the image. As a standard, processing is done with a
1024 x 768 resolution. A higher store resolution can be selected for special applications such as re-
magnification of SEM images for a poster or zooming into images.

3.8 Menu: Stage

The menu “Stage” contains all submenus necessary for

control of the motorized stage. Depending on the kind
of stage and the number of installed licences, control of
the stage is possible in different ways to solve user
specific problems or to simplify the work.
It enables simple controls such as center point, center
feature or stage mapping, but also complex activities
such as use of the compucentric software, scanning of
areas or use of the survey mode. You will find a
detailed chapter (see 5) to explain these different
applications.

3.9 Menu VACUUM

The commands Vacuum Status... and Specimen Change... will open the SEM
Control- window, index tab Vacuum which contains the most important
parameters of the vacuum system. This menu also enables the venting of the
sample chamber and the start of the pumping procedure. More detailed
information (see 4.3.3.)

26 LEO Electron Microscopy Ltd

3.10 Menu: TOOLS

The menu “Tools” contains separate submenus to load and store

macros, load special menu windows and grab images automatically in
a defined frequency. It also allows opening the User Preferences (see
6.1) to establish special user specific settings for the LEO user
interface.
Clicking on TOOLSÆ ADMINISTRATOR in the LEO user interface,
will start the program ADMINISTRATOR (verses STARTÆ
PROGRAMÆ LEO-32Æ LEO ADMINISTRATOR, on the
Windows® interface). Login to this program is only permitted to
authorized persons (Supervisor- Privilege).

3.10.1 Run a Macro - Macro Editor

The LEO user interface contains a standard Macro Editor, which processes certain commands one after the
other or in a loop. It is also possible to store special settings of the SEM in macros and to load them later on.
For more detailed information on the editor see 0.

Clicking TOOLSÆ GO TO CONTROL PANEL will open the SEM

Control panel.
Clicking TOOLSÆ GO TO PANEL will open the selection menu
SEM Control Dialogs where different menus are listed. After
highlighting a menu and confirming with “OK” the corresponding
menu will be opened. In the table below you will find an overview of
the different menus.

Available Menus Explanation

4QBSD Control Control of the various operating modes of the four quadrant BSD (see 4.3.1).

Airlock Control of different airlock functions for sample exchange (see 9.2).

Bake out Control of the IGP bake out, selection of the heating and cooling times (see
6.2).

Beam Shift Control of the electronic beam shift, and auto stigmatism (see 3.4).

Calibrate Stage Center Calibration of the stage center, essential for the use of Stage Horizontal
Alignment and Compucentric Set Up (see 5.9.1).

Calibrate Stigmation Calibration of the stigmators; (only available to LEO service staff).

Compucentric Set Up Calibration of the tilt correction for the compucentric software (see 5.9.2).

LEO Electron Microscopy Ltd 27

Ext Scan Control Switching to external scan control.

Input LUT Loads the Input LUT panel (see 3.2.1). This menu enables special
adjustments of the input signal of a detector.

Magnification Calibration Calibration of magnification to different output media (see 6.8).

Rotate/ Tilt Displays the control panel for Tilt compensation, Dynamic focus and Scan
rotation (see 6.3.5).

Signal Adjust Adjustment of brightness and contrast for a selected detector (see 3.6.1).

Specimen Current Monitor Displays the control panel for the specimen current monitor. Requires SCM
option (see 9.7).

Stage Horizontal Alignment This function allows the definition of a line on the stage by means of two
marks. The motorized stage will rotate to place this line horizontally in the
image plane. (see 5.9.3).

Stage Limits Setting of limits for the motorized stage axes (see 5).

Stage Points List Storing or loading saved stage positions (see 5.2)

Stage Registered Movement Control of the stage in a user specific, defined system of coordinates (see
5.8).

Stage Registration Definition of a user specific system of coordinates for the motorized stage
by means of two or three registration marks (see 5).

Stage Scan Imaging a sample area as a series of exactly defined, image areas (see 5.5)

Stigmation Stigmator adjustment (see 3.4).

Water Flow/ Temperature Window to control the cooling water circuit (see 9.6).

3.10.2 Image Capture Mode

The image displayed on the screen, (1.) Windows® Overlay (status bar, toolbar etc.) and (2.) SEM image
(live image or stored image), is in fact a double image. The scan area of the Windows® Overlay is
transparent. The SEM image behind the Window® interface is thus visible and can be displayed on the
screen.
For example, pressing “Print” on the keyboard will write a bitmap of the screen content to the intermediary
memory. This bitmap can be inserted into different Windows® programs. However, this image will only
show the Window® Overlay. The area containing the SEM image will be displayed as a green or orange
field. The reason is that the SEM image does not exist in the image store read by the Windows® System.
To avoid this effect, select Image Capture Mode which freezes the current live image and stores it together
with the Windows® Overlay. This image can be inserted into other Windows®
programs. The symbol for this stored image is a red triangle (π) in the lower
right.
Clicking the Pop-Up menu TOOLSÆ IMAGE CAPTURE MODE will
activate the menus Capture Now... and Image Capture Frequency.... The
selection of Capture Now... will initialize the single execution of Image
Capture Mode. The selection of Image Capture Frequency... will result in a
continuous execution of this mode. This requires selection of TOOLS
28 LEO Electron Microscopy Ltd
→IMAGE CAPTURE FREQUENCY. Enter an interval of 0.5 to 32 seconds in the field Interval.
Confirming with “OK” will close the window and execute the routine Image Capture Mode continuously in
the selected intervals(e.g. every 2,5 seconds). To close the routine, select again the TOOLSÆ IMAGE
CAPTURE MODE..

3.11 Menu Help

The LEO 32 interface is equipped with an extensive help. The different Help texts can be viewed using the
Pop-Up menu HELP. It is also possible to select a context sensitive help. More detailed information on the
different Help texts and on working with the Online Help see chapter 7.

LEO Electron Microscopy Ltd 29

4 The LEO 32 User Interface

All parameters of the electron microscope can be set using the LEO 32 user interface. This user interface
consists of a Pop-Up menu, a status bar and a toolbar for the selection and adjustment of all functions and
parameters. Selection is by clicking the left mouse button on a special menu item or by activating a symbol
in the toolbar. Most of the symbols have a double assignment, which provides the ability to activate different
functions or parameters by clicking the left or middle mouse button (see 4.2).

4.1 Starting the Microscope in Stand-by Mode

To start the microscope from stand-by mode, press the START button on the plinth panel (or computer). This
boots the integrated computer and the operating system. Load the user interface by selecting STARTÆ
PROGRAMSÆ LEO 32Æ SEM USER INTERFACE, or double-clicking the LEO ICON.
The first step is to switch on the EHT (and eventually the filament). Click EHT in the status bar with the left
mouse button and select EHT ON, the GUN and then EHT will switch on and run up. After run up, the red
(X) will switch to a green (√√), an accelerating voltage between 5 and 10kV should be set by clicking the EHT
symbol or double clicking EHT in the DATA ZONE.

After selection of the corresponding high voltage open the SEM control window (CTRL+G) or TOOLSÆ
GO TO CONTROL PANEL). The index tab Detectors (see 4.3.1) enables the selection of a detector. For
working distances beyond 10mm select the SE2 detector for the signal source. It is recommended that
inexperienced persons have the signal set automatically at the beginning of their work by setting Signal
Adjust to Auto BC= BC (see 4.3.1).

4.1.1 Setting Parameters Using the Mouse

Adjustment of the focus. Activate mouse control by clicking the magnification/focus ICON with the left
mouse button. The status bar indicates the function of the mouse button. The left mouse button is for
magnification and the middle mouse button for the focus (see green and yellow fields).

30 LEO Electron Microscopy Ltd

The alignment is done by pressing the specific
mouse button and moving the moving the mouse
left or right. Similar to operating a potentiometer
the level increases or decreases depending on the
direction of the movement. The cursor of the mouse
has to be within the image area.
This concept is the same for all mouse-operated
functions. Clicking on the ICON for
brightness/contrast (see 4.2) will reprogram the
assignment of the mouse buttons. The left mouse
button will be set to control the brightness and the middle mouse button will be set to control the contrast,
the status bar displays these changes. It is also possible to enter absolute values for a specific parameter. To
do so, click the corresponding parameter in the status bar with the left mouse button and enter the value.
Two settings are possible for the sensitivity of the mouse control: Coarse and Fine. Switching between these
settings is done by clicking Coarse/ Fine in the status bar or by using the tab key on the keyboard. The
inexperienced user may want to use, at high magnifications, the fine setting of the mouse control, as the
coarse setting will result in large changes with even small mouse movement.

4.1.2 Optimization of Images

After adjustment of the focus the area of interest on the sample can be selected. Depending on the kind of
sample, high voltage and aperture (see 4.3.5) should be set. Adjustment of the working distance (focus)
should be done depending on detector selection and high voltage.

- Imaging by means of SE2 detector: >5mm WD

- Imaging by means of In lens detector: <= 10mm WD (depending on high voltage setting)
- Imaging by means of BSE detector: 8-10 mm (Optimum of the BS electron detection)
- EDX analysis (depending on imaging angle): 9 mm WD

After optimum setting of the high voltage and the working distance for the respective sample, it will be
necessary to adjust the other parameters influencing the quality of the image, such as focus, correct aperture
setting and correction of the astigmatism. Brightness and contrast can be adjusted manually depending on the
image. Use of a reduced scan is optional for the adjustment of focus, aperture alignment (if necessary) and
stigmation.
After having reached an optimum brightness and contrast adjustment, the image will be saved into the image
store by means of noise reduction (see 4.3.2) and frozen there. Freezing of the image means that the content
of the image will not be updated. The electron beam will be blanked off the beam path by means of the
electromagnetic aperture switch and the sample will not be scanned any more. Setting of the blanking of the
electron beam is done in the User Preferences (see 6.1). The frozen image state is indicated by a blue dot
(z) in the lower right corner. Frozen images can be stored in a storage medium or printed using a printer.

LEO Electron Microscopy Ltd 31

4.1.3 Closing the User Interface

After the end of the session, the user interface can be closed by clicking FILEÆ EXIT or FILEÆ LOG
OFF using the Pop-Up menu. The user will be asked whether the set parameters are to be saved. Confirming
with “Yes” will store these parameters (signal source, high voltage, focus etc.) in a macro (Restore4.mlc) in
the corresponding user directory. This macro can be activated later on to reset the microscope to the saved
conditions. A confirmation with “Yes” should be used only if proper start up conditions are set on the
microscope, i.e. high voltage, selection of a detector and appropriate adjustment of the other parameters.
Activation of this macro will thus result in an immediate usability of the microscope. Clicking “No” means
that no macro will be created and no existing macro will be rewritten.

It is not necessary to close the software for short interruptions of the work on the microscope. Switching off
the high voltage will be sufficient.
For longer periods, such as for the night or for the week-end, the electron microscope should be run down to
the stand-by mode by first closing the user interface. After that, close the operating system Windows® and
switch off the integrated computer by using the Standby button (middle yellow button) on the plinth.

The voltage can be switched off for maintenance or repair works by using the red key. This will
switch off all electric or electronic components. Before switching off completely, run down the
cathode manually using the user interface.

4.1.4 Saving and Loading Special Instrument Parameters

As indicated in 4.1.3, the conditions of the microscope can be saved in a macro at the end of a session.
Clicking FILEÆ RESTORE in the Pop-Up menu will activate this macro to reset the data saved in the
macro. By doing so, the instrument will be reset to the operating conditions just used. Manual adjustment of
high voltage, detector and focus will not be necessary.

It is also possible to save different special conditions while working with the microscope by opening FILEÆ
SAVE STATE.... A window will open to determine the parameters to be stored. After confirming with “OK”
the macro can be given a separate name. This macro will be saved in the corresponding user directory,
allowing the storage of most instrument settings.

32 LEO Electron Microscopy Ltd

To load specific operating conditions, click FILEÆ LOAD STATE... to open a list containing the different
(macros) operating conditions saved in the user directory. Selecting a macro and pressing “OK” will start the
macro and reset the stored parameters on the microscope.

Stage coordinates will not be saved in these conditions. Please use the window for the storage of
stage coordinates as explained in 5.2.

LEO Electron Microscopy Ltd 33

4.2 The Standard Toolbar

The toolbar gives access to all frequently used functions and parameters. Activation of the ICONS in the
toolbar is by use of the left and the middle mouse button. Dragging the mouse cursor over a ICON will
display a short explanation (Tool Tip) on the function of the corresponding ICON at the lower side of the
mouse cursor (see 6.5.1).

Clicking on the symbols will activate either settings or control windows. The status bar will indicate the
assignment of the left and middle mouse button, such as magnification (left mouse button) and focus (middle
mouse button) in the example below. The status bar also allows the activation of commands for the vacuum
(VENT/ PUMP), the filament (GUN ON/ OFF) or the acceleration voltage (EHT ON/ OFF) by clicking
VAC, GUN or EHT. The sensitivity of the mouse control can be set using FINE/ COARSE. Certain macros
of the software can be activated by clicking the window MACRO: IDLE.

Name Symbol Left mouse button Middle mouse button

Restore Loading the last condition as saved Opens the window to load a saved
when ending the program condition (Load State).

Accelerating Setting of the desired acceleration Open of the index Tab Gun in the
Voltage voltage SEM Control window

Specimen Change Activation of this symbol will start Open of the index Tab Gun in the
the pumps if the chamber is vented. SEM Control window
Activation in operating conditions
will run down the high voltage and
start the venting of the chamber. A
window will open allow to restart
the evacuation of the chamber after
exchange of the sample
Pix Avg.1/ Pixel averaging at scan rate 2 Continuous image averaging at
Cont Avg. 2 scan rate 2
Pix Avg. 3/Cont Pixel averaging at scan rate 3 Continuous image averaging at
Avg. 4 scan rate 4
Pix Avg. 6/ Cont Pixel averaging at scan rate 6 Continuous image averaging at
Avg. 6 scan rate 6
Pix Avg. 9/ Pixel averaging at scan rate 9 Image averaging at scan rate 5
Frame Int. 5 (freezing of the image after
execution)

34 LEO Electron Microscopy Ltd

Frame Int. 7/ Image averaging at scan rate 7 Image averaging at scan rate 8
Frame Int. 8 (freezing of the image after (freezing of the image after
execution) execution)
Faster/ Selects one faster scan rate per left Selects one slower scan rate per
Slower mouse button click middle mouse button click
Freeze/ Freezes/unfreezes an image
Unfreeze

Normal Mode Normal screen mode, switch-off of

the wobbler. Assignment of the
mouse button: Left Mouse =
Magnification/ Middle Mouse =
focus
Reduced Raster Switches between reduced scan and
normal screen mode
Split Screen Switches between split screen and
normal screen mode
Dual Switches between dual
Magnification magnification and normal screen
mode

Chamber scope Activation of the CCD camera, Open of the index tab Detector in
mouse button assignment: the SEM Control window
Brightness /contrast

Stigmation Activation of a reduced scan, Activation of the wobbler and of

Alignment assignment of the mouse buttons: reduced scan if (ToolsÆ User
Left Mouse = Stig. -X, Stig. - Preferences.Æ SEM ConditionsÆ
Y/Middle Mouse = Focus Focus WobbleÆ Reduced Raster
is switched to ON), mouse button
assignment: Left Mouse = Aperture
Align XY/ Middle Mouse = Focus

Point-point Inserts a point-to-point Opens the text editor

text annotation measurement

Toggle INLENS/ Toggles between In lens and SE2 Opens the index tab Detector in the
SE2 detector SEM Control window
Brightness/ If Auto BC is deactivated in the Switches:
Contrast Detector window, mouse Auto BC=ON (mouse button
assignment will be switched to assignment GAIN/OFFSET)
brightness/contrast.
If Auto BC is activated, mouse Auto BC=OFF (mouse button
assignment will switch to assignment Brightness/Contrast)
GAIN/OFFSET

Magnification Mouse button assignment: Opens the Auto Focus & Auto
Auto Focus/stig. magnification/focus Stigmator algorithms
LEO Electron Microscopy Ltd 35
Export TIFF file Saves the image as a TIFF file with Opens the Export TIFF window
the assigned settings

Print Image Prints the image on the default Opens the Print Setup window
printer

36 LEO Electron Microscopy Ltd

4.3 The SEM Control Window

The SEM Control window contains all parameters necessary for the control of the microscope. This window
provides the ability to read and set all parameters necessary for the operation of the microscope. Open this
window by using the key combination (CTRL + G) or TOOLSÆ GO TO CONTROL PANEL. This window
is subdivided into seven index tabs containing the following components:
* Detectors: selection of the detectors, signal adjustment, mixing of signals (requires the License:
SIGMIX), Gamma correction, inversion
* Scanning: noise reduction, scan rates, spot, live and X-ray line profile
* Vacuum: Start of pumping and venting, displays values on vacuum system
* Gun: switching on and off the acceleration voltage and the filament, important settings of the
filament
* Apertures: selection of the aperture, alignment of the apertures and of the filament, emission mode,
image optimization
* Stage: stage coordinates, entering relative and absolute coordinate values, special stage settings
* X- Ray: Setting and starting analogous EDX mappings.

Below is a more detailed explanation of these components.

4.3.1 Detectors

Standard equipment on the LEO 15xx (except LEO 1525) is two secondary electron detectors(in-lens and
chamber (SE)). Reading and setting of all relevant detector parameters is via the index tab Detectors. The
chamber SE detector, Everhart-Thornley, is suitable for the detection of SE electrons at longer working
distances (> 5mm). By using the inlens detector, very good images are obtainable at low acceleration
voltages. However, this detector should only be used at short working distances (<10mm). Another
advantage of the Inlens detector is its high efficiency with regard to the detection of SE1 electrons. These
electrons develop in the immediate spot center. The position of the InLens detector within the beam path
excludes the detection of back-scattered electrons and secondary electrons of the categories SE2 and SE3 .
Thus, imaging with the Inlens detector will give pure information on the surface of the sample. BSE
detectors of different types can be adapted optionally.

LEO Electron Microscopy Ltd 37

Signal A= or Signal B= provides the ability to select the different detectors to be used as a signal source.
Signal A will always be the active signal displayed on the screen. Activation of the control box Mixing
allows mixing of two detector signals by means of the slide bar Signal in a range of 0.000 to 1.000 (0 -
100%). The example shows a 62% signal from the In-lens detector and a 48% signal from the SE2 detector.
Collector Bias will vary the collecting potential of the chamber SE2 detector between -250V -> +400V.
Signal Adjust selects the different adjustment modes for the detector signal (Auto BC=OFF: brightness and
contrast must be done manually, Auto BC= ON: brightness and contrast will be set automatically by the
system).
It is recommended that when beginning a work session use Auto BC and adjust brightness and contrast
manually after alignment and optimization of the image.
By selecting Gamma in the control box Input LUT Mode the transfer function of the input signal can be set
to non linear using the slide bar Gamma. This function is used to improve images containing a lot of
information within a small number of gray scales.
Selecting Inverse in the control box Input LUT Mode will invert the input signal. By selecting User, user
specific settings, which can be set and saved using EDITÆ INPUT LUT, can be applied to the input signal.

There is a separate configuration window for the four-quadrant BSE detector. This window can be opened
using TOOLSÆ GO TO PANELÆ 4QBSD CONTROL. Each quadrant of the detector can be set to one of
the three conditions Off, Normal or Inverted. Two predefined quadrant configurations are available. The
optimum material contrast (COMPO) will be obtained by pressing the key BSD: COMPO whereas the
optimum topographic contrast (TOPO) will be obtained by pressing BSD: TOPO. The selection of these
predefined conditions will switch the quadrants of the detector according to the illustration below. Some
applications may require a change to the quadrant configuration, set the individual segment settings as
required and press BSD: Set TOPO. These settings will be remembered and used whenever the TOPO
command is given.
The control window BSD Gain shows the current Gain setting of the amplifier. If the BSD Auto Range is
checked the signal contrast level automatically sets the Gain. For more precise setting of BSD contrast,
deselect BSD Auto Range and select a Gain setting suitable for the sample. The contrast adjustment range
now covers the selected gain range. The control box BSD Fast sets the bandwidth of the amplifier, it is
switched on for normal visual scan rates and switched off for slower scan rates.

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Illustrations with different signal sources:

Illustration with the SE2 detector at a positive collector voltage (+ 400V). The
image shows a regular illumination of the sample and bright contours (edge
effect). The topography can be distinguished very well whereas the material
contrast is weak.

Illustration with the Inlens detector. Although the image shows a very flat
illumination of the sample, structures can be recognized which could not be
seen on the SE2 image. Material contrast and topography are weak..

The mixed image between Chamber SE Detector and Inlens SE Detector

shows topography and fine structures. The effect can be continuously adjusted.

Imaging with the SE2 detector at negative collector voltage (-250V). Only high
energetic back-scattering electrons are detected The image shows an extremely
strong topography with shadows. The material constrast is almost completely
absent

Imaging with a BSE detector. The image shows only small surface contrast,
but differences in material can be distinguished very clearly. The topography is
imaged weakly.

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4.3.2 Noise Reduction

The index tab Scanning provides all settings for optimum scanning of the electron beam and for noise
reduction as well as the selection of the different scan modes.
Operating Mode: Selection of the different screen displays (reduced scan, normal imaging, split screen,
emission image)

Store Resolution:
Setting of the store resolution of the image. The following four resolutions
are possible:
512 x 384 (required storage capacity of the image: 0,2 MB)
1024 x 768 (Required storage capacity of the image: 0,8 MB)
2048 x 1536 (Required storage capacity of the image: 3 MB)
3072 x 2304 (Required storage capacity of the image: 7 MB)
The selection of Store Resolution will produce effects on the Cycle Time
and on the required storage capacity of the images to be saved.
The normal resolution,1024 x 768, provides sufficient image quality even
when printing in 8½ X 11 format.

Scan Speed:
Selection of the different scanning speeds.

Cycle Time:
Indicates the time necessary to enter the complete image into the image store. This parameter depends on the
selected Store Resolution, Scan Rate, Dwell Time and Line integration or averaging (N value). The Dwell
Time indicates the time the electron beam will remain on a pixel field (nano-second) during a scanning pass.

Line Scan:
Scanning activation of the electron beam along a defined line. The image will be frozen. A horizontal line
and a histogram will be displayed on the screen indicating the course of the signal along this line.

Clicking the left mouse button on the line will allow the line to be moved to the desired sample spot. This
function is useful for the measurement of certain structures by means of the signal histogram. Two vertical
lines are shown within the histogram panel which can be dragged with the left mouse button. The upper left

40 LEO Electron Microscopy Ltd

corner of the diagram indicates the distance of these lines from each other. Clicking the right mouse button
within the diagram displays a menu allowing special settings of the color of the graph and offering the ability
to freeze the line profile.This profile can be saved together with the image by activating the item Annotation
in the menu Export TIFF (see 4.5.1).

X-ray Linescan:
The selection of this function results in an image identical to line scan as explained above. However, this
diagram displays the intensities of EDX signals along the determined line. The different EDX signals
(corresponding to the energy of the selected emission line and thus to the atomic number) are defined in the
respective software of the EDX system. Special types of imaging can be selected within the diagram by
clicking the right mouse button.

Spot:
Selecting the Spot mode will freeze the image and display a cross on the screen. This cross can be dragged
arbitrarily in the image by pressing the left mouse button. This will position the electron beam onto the
selected spot. This function is intended for point analysis by means of an EDX system. .

Dual Mag:
Selection of this function will activate the clip magnification. The size of the respective clipping can be
modified from 1 to 10 by means of the slide switch Zoom factor = .

Noise Reduction:

Freeze on =: Determines the method of freezing the image. Selecting COMMAND, the user will decide
by pressing the key “Freeze” or “Scroll Lock” when the image is to be frozen. Selecting END FRAME,
will result in an automatic freezing of the image after scanning one complete frame.

Noise Reduction=: selects the type of noise reduction. Selecting Pixel Avg. will use the selected SCAN
RATE for the noise reduction. The higher the selected Scan Rate, the slower the scanning of the
corresponding sample area, thus reducing the noise level in the image. Selecting Frame Avg. will provide
noise reduction by taking several image frames and integrating them into the image store. When selecting
this function, SCAN RATE is a pseudonym for the number of images to be integrated (see table).

SCAN RATE Number of SCAN RATE Number of

images images
1 2 5 32
2 4 6 64
3 8 7 128
4 16 8 256

As already explained, Dwell Time determines how long the electron beam is to remain at a pixel position.
The selections 100, 200, 400 and 800 nanoseconds are available. The image will be frozen automatically
when the selected number of images has been taken and integrated. The function Continuous Avg. is similar
to Frame Avg., the difference being that the image is not frozen automatically. This selection will update the
image store continuously. The selected number of images will be scanned continuously, the keys “Scan+”
and “Scan-” allow switching to faster or slower scan speeds. Pressing the key “Freeze” or “Scroll Lock”
will freeze the image in the image store and assign “Unfreeze” to the key.

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4.3.3 Vacuum

The index tab “Vacuum” displays the vacuum in the chamber and filament area and controls certain
functions and valve settings. The pressure measuring unit can be set to Mbar, Torr or Pa within the LEO 32
software (see 6.1).
The key “Vent” allows venting of the chamber (with High Tension (EHT) off). After exchange of the
sample, pressing the key “Pump” will restart the pumping procedure. If you do not want the pumps to
continue working in standby mode, activate the function Partial Vent on Standby. This will result in a partial
venting of the chamber when the microscope is switched off using the Standby button. Partial venting will
assure that oil vapours from the roughing pump do not enter the chamber in standy mode. Starting the system
by pressing the “Start” button will automatically activate the pumping procedure.

When starting the bakeout of the IGP in stand-by mode, Partial Vent on Standby MUST BE
deactivated before closing the software!

System Vacuum: Vacuum in the chamber.

Gun Vacuum: Vacuum in the gun and in the liner tube. Deterioration of
this vaccum to the upper 10-9- level (8 γ 9 X 10-9 mbar), indicates a
bakeout of the IGP should be performed soon (see 6.2).

Vent inh.: Status indication for the venting of the chamber.

Vac Status: Status indication for the release of the vacuum (chamber).

Column Chamber valve: Indication of the position (open/closed) of the V3

valve between liner tube and chamber.

EHT Vac ready: Status indication of the high voltage release..

Column pumping: Status of the vakcuum release (gun and liner tube)

4.3.4 Cathode

A thermonic field emission cathode, Schottky emitter (ZrO/ W

cathode), is used to produce the beam. This Schottky FE cathode
consists of a finely etched, <100> oriented Tungsten Mono
Crystal with a sintered reservoir of zirconium oxide at the shaft.
The heating current (Fil. I) will diffuse the ZrO to the filament
tip reducing the work potential for emission of the electrons from
4,6 eV to 2,8 eV. Depending on the filament temperature and the
field strength generated at the filament tip by the tension of the
extractor electrode, equilibrium will develop allowing a stable
emission of the FE source.
The most important filament and high tension data as well as special presettings can be found and set in the
index Tab, Gun in the SEM Control window .

42 LEO Electron Microscopy Ltd

EHT:
Indicates the current acceleration voltage in kV.

Extractor V:
Indicates the value of the extractor voltage.

Extractor I:
Indicates the current value of the extractor current

Fil. I:
Indicates the current value of the filament heating current

Beam State:
This menu switches on or off the EHT (EHT ON/EHT OFF). Selecting
“Shutdown” will slowly shut down the filament

Activation of the control box Leave Gun On at Shutdown will exclude shutdown of the filament when
closing the software and in standby mode of the system

In Leave Gun On at Shutdown, Shutdown refers to exiting the LEO-32 software and setting the
microscope to standby mode. In the menu Beam State, Shutdown means the manual shutdown of the
filament.

EHT OFF @ Log Off:

Activation of this control box will automatically switch off the EHT when closing the software, using Log
Off or Exit.

Fil. I Target:
The filament heating current can be modified within certain limits by means of this slide switch. When
exiting the LEO-32 software, the modified value will be reset automatically to the initial value.

EHT Target:
This slide switch provides the ability to set the acceleration voltage continuously.

Extractor V Target:
Changing the extractor voltage as for Fil. I Target.

Clicking the right mouse button in the lower right side of this window will display the menu User Max
EHT... and allows the maximum value of the acceleration voltage to be set or changed. This setting requires
the privilege Supervisor (See 2.1).

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4.3.5 Apertures

This index Tab provides the ability to select the different apertures and to perform adjustments of the
apertures, filament and the electron beam..

Aperture Size:
Selection of the different apertures
(1) 30 µm aperture: standard aperture to solve most microscopic and
analytic problems
(2) 7.5 µm/ (3) 10 µm/ (4) 20µm apertures: apertures for highest resolution
and beam sensitive samples
(5) 60 µm/ (7) 120 µm apertures: apertures for analytic problems requiring
very high probe currents (e.g. EDS, EBSP).

Focus Wobble:
Activation of this control box will switch on or off the focus wobbler
necessary for the exact alignment of the selected aperture in the beam path.
A lateral drift of the image when adjusting the focus indicates that the beam
is not passing through the aperture center. Activation of the Focus Wobbler
will result in a movement of the image in vertical and horizontal direction.
Perfect alignment is shown as an image which will defocus without image
shift.

Aperture adjustment:
1.) Activate the control box Focus Wobble, adjust the Wobble Amplitude by means of the slide bar and
adjust the Wobble frequency by activating or deactivating Wobble Fast.
2.) Clicking the key Aperture Align, assigns that function to the navigation box.
3.) Adjustment of the aperture in X and Y direction is by means of the slide bar in the navigation window
(or by dragging the mouse, in X and Y directions with the left mouse button pressed) or (by dragging the
red dot in the box with the left mouse button).
4.) Adjust both the X and Y directions until there is only pulsation of the image (no swinging to one side)
5.) Deactivate the control box Focus Wobble and refocus the image.

The optimum adjustment of the aperture in the beam path has a decisive influence on the resolution and
focus of the image. The aperture should therefore be realigned when image shift is present during focusing
(after an aperture change or large change in the EHT setting)

Beam Blanked:
The electron beam will be blanked off the beam path by means of the electromagnetic aperture switch (no
scan of the sample).

Emission:
This key activates the emission mode necessary to center the filament (SERVICE FUNCTION). The
emission image and a graticule will be displayed on the screen (after activation in User Preferences see 6.1).
Clicking the key Gun Align will adjust the beam profile image to the proper position by using the slide bar
in the navigation window (or by dragging the red dot with the left mouse button). To do so, the aperture must
be centered. Re-clicking the key “Emission” will switch back to normal scan mode.

The emission mode is to be used mainly by service staff. If not careful the user may miss-align the
column and cause a decrease of image quality and resolution. The position of the optimum signal
output does not absolutely mean that the emission image is positioned exactly in the center of the
graticule.

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Key Mag/ Focus:
Switching the mouse button assignment (left mouse button magnification, middle mouse button focus)

Key Stigmation:
Switching of the mouse button assignment (left mouse button Sigmation X / Stigmation Y, middle mouse
button focus) and selection of the stigmator for the navigation window.
Local magnetic fields due to local electric charging on inhomogenious samples will produce an elliptic
electron beam and an inexact focussing of the sample surface as the elliptic electron beam will distort the
sample structure when focussing. To restore a rotation symmetry of the electron beam, an electromagnetic
correction field created by the stigmator will be necessary.

In order to obtain a correction of the astigmatism, an intermediary position between a under and over focused
image will be set by means of the focus control. The structures will be unsharp in the X and Y direction.
Clicking the left mouse button and dragging the mouse to the right or left or by means of the navigation
system, the stigmator will be adjusted in X direction. This will be done visually to obtain an optimum
imaging quality. After correct adjustment of the X direction the same will be done in Y direction (by
dragging the mouse up and down).It is also possible to adjust both directions at the same time. After the
correction, the image should be displayed in optimum sharpness

Key Beam Shift:

Switching of the mouse button assignment (left mouse button, Beam Shift X / Beam Shift Y), middle mouse
button keeps the previous assignment) and selection of Beam Shift for the navigation window.
By means of Beam Shift, The electron beam can be moved in the X and Y direction by 20µm each. This
function is suitable for higher magnifications when an exact positioning of the area of interest by stage
movement may be difficult. However care should be taken that the stigmator may need to be readjusted if
the image is moved to the limits of the shift range. (large displacement in X and Y direction).

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4.3.6 Stage

This index Tab Stage displays the current position of the stage, allows a
user to enter absolute and relative coordinates or to activate or deactivate
special pre-settings for the stage. The column Stage At indicates the current
coordinates of the different axes. To enter absolute coordinates for the
stage, double-click the value of the corresponding stage axes in Go To with
the left mouse button. This opens a window allowing the user to enter a new
value, the stage will then move to the new position. Relative coordinates for
the different axes may be entered in the column Delta by clicking the
corresponding key. It is also possible to enter negative values.
The selection field Compuc. Mode activates or deactivates the
compucentric operation of the stage. However, this requires the license and
the calibration of this software option (see 5.9).
The window Stage Is = indicates whether the stage is idle or busy.
Clicking on “Stage Stop” will stop the stage immediately.

Z move on Vent:
Activation of this function will result in an automatic stage move to the lowest Z position whenever venting
of the chamber is initiated.

Track Z:
Selection of this function will provide automatic readjustment of the focus as the stage Z movement is
changed.

Protected Z:
Activation of this function will produce automatic comparison of the current Z coordinate to the new
coordinate when opening saved stage positions.. If the new Z position is higher than the current position, the
X/Y/T/R coordinates will be located before moving to the new Z position. If the new Z position is lower, Z
will be changed before the other coordinates.

Joystick Disable:
Switches on and off the hard panel joystick.

4.3.7 EDX Mapping (Requires the Licence: XRAY)

This Tab allows settings for binary EDX mapping and starting the record of mappings. By means of this
option, scanning and imaging of binary output signals of an EDX system are possible, provided that the
signal lines of the EDX system have been installed and configured correctly on the EDX interface of the
SEM. Each of the regions of interest sends pulses from the EDS system for a selected energy range (the
setup of the regions of interest is done through the EDS system). These pulses will be accumulated on the
base of the image pixels and give information on the element mapping.
A maximum of 7 channels may be scanned and displayed on the screen simultaneously. Clicking Energy
Window Setup will determine the channels to contribute to the mapping by activating the figures 1 to 8.
The windows WIN2 to WIN8 (WIN1 being reserved for simple mapping) allow asigning short names to the
different channels in order to create a reference to the numbers of the energy windows used in the EDX
system.
A different color may be contributed to each element to be imaged in the mapping. Clicking the keys “...”
enables selection of the colors in a range of colors.

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The window Element Priority displays the activated channels with their
respective short names. This list determines the element priority if two or
more elements appear in the same pixel. This priority will decrease towards
the bottom and can be modified by selecting and short name and pressing
the keys “Move Down” or “Move Up”.
After assigning the channels, placing and starting the energy windows in the
EDX software, pressing the key “Start” will start the scan of the mapping. .
The mappings may be saved after ending the scan process by means of the
noise reduction (Freeze).

Key Load: Loading user specific settings.

Key Save: Saving user specific settings: The selected channels, the
Window names, the selected colors, the element priority and
the
value for X-Ray Threshold will be saved
Key Clear: Erasing the screen and starting another scan.
Key Default: Setting of the basic condition (see above).
Key Start: Starting the imaging.
Key Stop: Ending the imaging
X-Ray Threshold: Entering a threshold between 1 and 254. This value will determine the number of
impulses to be sent from the EDX system before a corresponding colored image will
be displayed on the screen.

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4.4 The SEM Status Window

The SEM Status window provides another ability to view and set frequently used parameters. It can be
opened using the Pop-Up menu VIEWÆ SEM STATUS or by entering the key combination CTRL + I. The
status window lists combinations of operation parameters selected by the respective user. These values will
be updated continuously and may be controlled interactively. Every parameter can be activated or
deactivated by using the index Tab Select. Furthermore, the selected composition may be saved using File in
the corresponding user directory where the composition can be reloaded. This enables the user to create
specific parameter lists for the most different tasks.
The parameters and functions listed in Display can be controlled interactively, i.e. that the parameter Ext
Scan Control indicated in the example below can be switched from Off to On by clicking. It is also possible
to enter numeric values. Double-clicking WD, for instance, enables entering a fixed working distance that
may be adjusted exactly by means of the left mouse button. Several parameters are purely informative and
cannot be switched or varied (e.g. Filament Age, Output Dev etc.):

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4.5 Saving and Loading Images

After entering and freezing the image in the image store by means of the noise reduction, it can be stored on
the hard drive or on another storage medium as a TIFF file. The window Export TIFF may be opened using
the Pop-Up menu FILEÆ SAVE IMAGE, a right mouse click on the image Æ Export Tiff or by using the
key combination CTRL + E.
Key: Change Directory:
Selection of the directory in which the images are to be
filed. The list below indicates the images already saved.

Control Box Merge:

Annotation:
Data zone, annotations and measurements etc. will be
saved together with the image.

Overlay:
Only the data zone will be saved together with the image.

Color Merge:
Must be activated to store colored annotations or measurements together with their color in a gray image.
However, this will reduce the number of grays of the image (256) by 20 gray scales, as this storage area is
required for the information of the Annotation.

Data zones, annotations or measurements saved together with the image will be “burnt” into the
image. The image information behind the respective overlay will thus be lost.

Control Box Area:

Clicking on “WHOLE” will save the complete image.

Control Box Dimensions:

The upper left corner (X, Y), width (W) and height (H) of the image to be saved are listed. Selection of
Whole in AREA will always set the upper left to 0,0; the size will correspond to the entered Store
Resolution. However, it is also possible to save only a clipping of the image as a file by entering the
respective parameters in Dimensions. Clicking “Set” will then display size and position of the grid on the
image corresponding to the clip to be saved. Size and position of this grid may be varied by using the mouse

(Left mouse button). By clicking the symbol in Annotation (see 4.7), a desired area in the image may
be selected by using the mouse.

Selection Store Resolution: Clicking Store Resolution provides the ability to select the store resolution of
the image.

A special name for the image to be saved can be entered in the field File Name. It is also possible to add user
text to the image. This text may be entered in the field User Text and will be indicated later on in the window
Load Image (see 4.5.3) together with the image without the necessity to load this image in the image store.
By pressing the key “Save(file name).tif” the image will be filed in the storage medium together with the set
parameters.

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4.5.1 Special Configurations of Images to be Saved

The index Tab Settings allows special configurations concerning the format of the image and the type of file
name.
Control Box Image:

The image can be saved as a gray image (256 gray scales)

or as a colored image (16 millions of colors) depending on
the selected format (Gray / 24 Bit Color). Normally this
configuration should be set to Gray and only be modified
for special applications.

As Seen:
Reprocessing the images is possible by means of the
Display LUT (see 4.6). Activation of AS SEEN will store
the edited content of the screen.

Palette: Activation of this box will save the image together with the color palette. This palette will be
applied automatically when reloading the image. This provides the ability to color images by means of the
Display LUT although storing them as gray image. The complete color information will be saved in the
palette and will therefore be available for further editing or for printing colored images.

If images are saved as colored images (24 Bit Color) they cannot be reloaded back to the LEO user
interface. However, it is possible to copy them to most of the Windows® user programs. If SEM
images are to be colored and to be processed with the LEO user interface, it is therefore
recommended to save the images as gray images with the respective color palette.

Control Box Filename:

Four different formats may be selected for the file name. The selection Max 8 Chars will allow the
contribution of up to 8 letters or numerals for the file name. Selecting Max 30 Chars will offer the ability to
enter up to 30 letters or numerals. Both settings enable the addition of a successive number to the file name.
In the example above you will find a format of 30 letters. 1 has been selected for No. , 3 has been selected in
the field next. That means that 29 letters are available for the file name. The 30th letter, a numeral, will be
added automatically by the software, in the example above “xx...xx3.tif”. On the next save this numeral will
increase by one and be xx...xx4.tif. This enables continuous saving without modification of the file name.
Numbers between 0 and 7 are possible for No. The numeral 0 indicates that no successive number will be
added. The parameter Next can be edited freely, allowing selection of the starting number as well as the
rewriting of existing files.
It is also possible to choose a file name consisting only of numerals by selecting the configurations Photo
Nr. and File Nr. When selecting Photo Nr. the file name will be composed of 4 numerals (XXXX.tif). The
start of the successive count is set using NEXT. After saving and printing an image, an addition to the
selected number will take place. 7 numbers are available for the selection File Nr. where an addition will
only take place if an image has been saved in a storage medium. These settings are global variables, i.e.
modifications made by a user in his user directory will also influence the configurations of another user
working in another directory. Filenames are always created with the entire number of digits (i.e. 0023.tif).

50 LEO Electron Microscopy Ltd

4.5.2 Saving Additional Information with the Image

The index Tab Data can establish a user specific list of parameters, which will be saved together with every
image. Similar to the SEM Status window, where parameters are updated online.
The specific parameters can be selected from a list by pressing the key “Add”. With every image store, these
parameters will be extracted from the microscope and saved together with the image. This enables the
reconstruction of important data concerning the image.
Creation of this list of parameters will only be necessary once; afterwards it will be saved automatically for
every image. Components can be removed from this list by pressing the key “Remove”.

4.5.3 Loading of Images

Using the window Import TIFF, TIFF images can be loaded back
from any storage medium to the user interface by using the key
combination CTRL + O, right mouse click on the SEM image ->
Import Tiff or the Pop-Up menu FILEÆ LOAD IMAGE. The left
field lists the TIFF files contained in the respective directory.
Changing of the directory is possible by clicking “Change
Directory” if this option has been released in the Administrator (see
2.1). The field File Information indicates type and size of the
selected image. If user text has been added to the image, this text will
be displayed in the lower field User Text.
If the image is to be saved in the image store in reduced format, the
desired reduction factor can be selected in Image Reduction. This
provides an image-in-image display or of a composition of 4, 9, 16
etc. images in an entire image. Depending on the reduction factor, a
grid will be displayed on the screen indicating the position and the
format of the image to be loaded. Clicking “Center” “Origin” (upper left corner) or “X, Y” (free positioning)
will select the position of the grid on the screen. If X, Y has been selected, the grid can be positioned freely
by using the mouse. Pressing the key “Load” will insert the selected image at the corresponding position
(see below).
The activation of Step Frame is recommended to represent e.g. four images as an entire image. This will
automatically position the images correctly. Before loading the first image, click “Origin” to position the
positioning frame in the upper left. Now the first of the four images can be selected and loaded using Load in
reduced format. The positioning frame will then automatically go the next area. Now the second image may
be selected and loaded
Activation of the control box Wide File List allows the presentation of the file names in full length (30
characters).
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Store Resolution provides the ability to select the store resolution. If images with different resolution are to
be loaded together, an automatic adaptation can be realized by clicking Fit to Image.

4.5.4 Image Gallery Function

The images contained in a directory can also be displayed as an album, i.e. in form of a gallery by pressing
the key “Image Gallery” . The software will then control whether a gallery file (*.gal) has already been
created in the corresponding image file. This file contains all information on the gallery. If such a gallery has
already been created, it will be opened and eventually updated. If the software cannot find a *.gal file, the
question will be displayed whether a gallery file from the user directory is to be loaded. Answering “No” to
this question will result in the creation of a file GALLERY.GAL in the current image directory.
The image gallery, displaying the images in thumb-nail format with the corresponding file name, gives a
rapid overview on the imges contained in the respective directory. A specific image from the gallery can be
loaded by double-clicking the corresponding image. The image will thus be loaded to the image store and be
displayed on the screen. Activating an image and clicking the right mouse button will open the menu
Properties which displays information on the image such as store resolution, date of storage or user text. The
command Print will result in printing the respective image on the default printer. By means of the command
Load as 2nd Image the image may be loaded to a virtual second window (see 3.6.2). Delete will remove the
corresponding image from the gallery without deleting it from any storage medium. The only effect is that
the image will not be represented in the gallery any more.
It is also possible to print several images from the gallery together on one sheet. Images (not more than 6)
can be selected by pressing CTRL and clicking the image with the left mouse button. These images can be
printed on the default printer using the Pop-Up menu FILEÆ PRINT.

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4.5.5 Extracting Stored Parameters

Special parameters, as set on the SEM at the moment of image

storage, will be filed together with the image. These are the
standard parameters saved automatically by the system as well
as user-specific parameters which can be selected using the
window Export TIFF (see 4.5.2). These parameters may be
loaded by means of the index Tabs Standard Data and User
Data without loading the image to the image store.

Standard parameters are the acceleration voltage (EHT),

filament heating current (Fil. I), magnification (Mag), output
device (Output dev), pixel size (Pixel Size) and working
distance (WD). This data is stored for the corresponding zone
of the image. In a Split Screen image, Zone 0 is for settings on
the left half of the screen, Zone 1 for settings on the right side.
In full image (normal) mode data will always be displayed in
the Zone 0 field.

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The user-specific data (User Data) depend on the parameters
selected in the window Export TIFF (see 4.5.2).

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4.6 Finishing Images by Means of Display LUT

Opening the LUT Editor by using the Pop-Up menu EDITÆ DISPLAY-LUT. The Display LUT allows
reprocessing of SEM images, e.g. by subsequent coloration, modification of brightness and contrast,
inversion or insertion of Gamma function. These settings will effect stored as well as live images.
After opening Display-LUT, a toolbar will be displayed together with a graph representing the LUT. The
transfer characteristic symbolizes the allocation of an input signal to a defined gray value. In the simplest
case it will be a straight line connecting the points (0,0) and (255,255). This straight line may be processed
by adding or displacing different points. It is also possible to refer certain operations to defined parts of the
curve or to bend the complete curve by using the Gamma function.
The different functions can be selected using the toolbar or by clicking the right mouse button within the
graph window. By doing so, a menu will be displayed which allows selection of the different functions.
Using this menu, it is also possible to switch on (Show Toolbar) or off (Hide Toolbar) the toolbar.

As modifications of the LUT will affect the stored as well as the live image, the Editor should be
reset to the basic settings using Reset LUT before working again on a live image.

Below, you will find an explanation of the different functions of the Display LUT.

Moving and deleting points in the transfer characteristic

(Moving: Position the mouse cursor to the point and displace by pressing the left mouse button.
Deleting: Position the mouse cursor close to the point and delete by pressing the middle mouse
button.)
Adding or deleting points in the transfer characteristic (Adding: Position the mouse cursor within the
graph field and press the left mouse button. Deleting: Position the cursor close to the point and press
the middle mouse button).

Undoing last modification of the Display LUT

Loading special Display LUT settings and applying these settings to the actual image

Saving special settings of the Display LUT

Resetting the Display LUT to the basic settings (use of the original data)

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Inverting the actual transfer characteristic

Inserting a step function as transfer characteristic. This will change the transfer characteristic into a
regular sequence of gray scales. The height of each step (Amplitude), the position of the first step
(Offset) and the number of steps (Period) can be adjusted separately. It is also possible to continue to
modify the curve by adding or moving different points.

Opening the window LUT Step Settings to adjust Offset, Amplitude and Period for the step function.

Editing brightness and contrast.

The Gamma option enables the definition of the transfer characteristic as a curve to enlarge lower or
higher gray scales. This function may be used to improve images containing a lot of detailed
information within a few gray scales.

Inserting a gray wedge (continuous distribution of the gray scales from white to black) as an actual
image to adjust special output devices.

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Switching from RGB- to gray scale LUT.
The LUT Editor includes three transfer characteristics, one for every video color (red, green and
blue). If these three graphs are identical, the image will be displayed as a single color (gray) on the
screen. Switching to RGB LUT enables a separate modification of every graph of the different three
colors so that the complete image can be displayed in color.

False color display

By means of this function different colors can be assigned to different gray scales. Before opening
this function, a step function should be set. After adjustment of amplitude, offset and period
switching to the false color display is possible. The colors of the different zones can now be edited
freely. To select a special color, double-click the corresponding zone to open a pallet of colors where
the desired color may be selected. By pressing the key “From Image”, it is also possible to select a
gray scale or color in the image which can be inserted to the corresponding zone.

Setting the level of a point in the transfer characteristic, to do so, it is necessary to select a point in
advance.

Switching from gray scale LUT to RGB LUT and selection of the transfer characteristic for the color red.
All subsequent modifications of this transfer characteristic will only refer to the color red.

Switching from gray scale LUT to RGB LUT and selection of the transfer characteristic for the color
green. All subsequent modifications of this transfer characteristic will only refer to the color green.

Switching from gray scale LUT to RGB LUT and selection of the transfer characteristic for the color
blue. All subsequent modifications of this transfer characteristic will only refer to the color blue.

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4.7 Image Annotation and Measuring

The window for annotation and measuring can be opened using the Pop-Up menu EDITÆ ANNOTATION
or by means of the key combination CTRL / A. This window and its functions provide various image
measurement functions and the insertion of text and SEM parameters. Measuring may be done on the saved
image as well as on the live image. Inserted SEM parameters will be updated and can be stored as a file
applicable to another image later on. Below you will find the explanation of the different functions.

Selection of measuring and annotation options using a mouse-click

Switching to adjustment of SEM parameters using a mouse-click

Undoing the last action

Loading saved measurements, texts, parameters etc. and applying these

functions to the actual image content

Saving measurements, annotations etc.

Deleting all overlays (measurements, annotations etc.) on the screen

Selection of a determined zone of the image, which is to be saved as a file

when opening TIFF Export.

Open of the text editor to insert texts and numbers to the image. It is also possible to insert date, time
and respective user name into the image. Texts which have been written in other word processing
programs and which have been copied to the intermediary store using “Copy”, can be inserted into
the text by clicking the right mouse-button within the text field and selecting “Insert”. Frequently
used special characters are listed and can be copied to the text by pressing the corresponding key.
Selecting Word Wrap will allow a defined overrun by displacing the upper slider.

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Opening the SEM parameter list. Most parameters of the SEM can be selected from a list and
inserted into the SEM image. It is possible to update these parameters continuously or to modify
them interactively. These parameters are particularly important for the individual design of the data
zone.

Inserting bitmaps and metafiles into the image. Select the symbol with the left mouse buttonÆ
Position the mouse cursor within the image where the graph is to be inserted and press the left mouse
button. (e.g. to add company logos to the data zone).

Inserting a line into the SEM image. Activate the symbol with the left mouse buttonÆ Drag the line
with pressed left mouse button. These lines may be appropriate to assign annotations to certain zones
within the SEM image. Form and color of the different lines may be chosen individually by selecting
the respective line with the left mouse button and pressing the right mouse button to open the
corresponding menu.

Inserting a quadrangle. Activate the symbol with the left mouse buttonÆ drag the quadrangle by
pressing the left mouse button. Color design, thickness and form of the line can be selected using a
menu to be opened by means of the right mouse button.

Inserting a circle or an ellipse. Activate the symbol with the left mouse buttonÆ Drag the
circle/ellipse by means of the pressed left mouse button. Color design, thickness and form of the line
can be selected using a menu to be opened by means of the right mouse button.

Inserting an annotation panel, which may contain several SEM parameters or texts. After selecting
size and shape of this annotation panel, the different texts and parameters can be copied to this field.
After doing so, the annotation field must be activated with the left mouse button. By pressing the
right mouse button, a menu will open to select the different settings. If the field is locked by Lock
this Panel, the elements contained in the field will form one unit which can only be moved
completely. It is also possible to define such an annotation panel as data zone by selecting Make
Panel a Data Zone.

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Inserting a zone magnification. This is especially useful for a split screen presentation, as the
magnification value will be calculated depending upon which half the panel is placed.

Inserting of a variable µ-marker (automatic setting, adjusting for magnification)

Inserting a fixed µ-marker (size to be selected by the respective user)

Insertion of a point-to-point-measurement into the SEM image. The settings for the result window
and for the measuring line can be selected using a menu which can be opened by marking the
corresponding object with the left mouse button and pressing the right mouse button. The selection
menu for the measuring line allows defining the presentation of the results.

Select Point to Point Results. If all parameters are listed in the window Current, the results will be displayed
in an annotation panel (see below). Depending on the parameters copied, using Remove, to the lower
window Available Parameters, the number of parameters listed in the annotation panel will be reduced. If all
parameters are removed from the window Current Selections, the result will be displayed close to the
measuring line. The parameter to be presented as a result can be selected using the window Reduced Display
Mode Parameter.

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Insertion of an angle measurement. The settings for the lines and the result window are fixed in the
same way as for the point-to-point measurement.

Inserting a quadrangle measurement. The settings for the lines and the result window are fixed in the
same way as for the point-to-point measurement.

Inserting a circle measurement. The settings for the lines and the result window are fixed in the same
way as for the point-to-point measurement.

Insertion of vertical measuring lines. The settings for the lines and the result window are fixed in the
same way as for the point-to-point measurement.

Inserting horizontal measuring lines. The settings for the lines and the result window are fixed in the
same way as for the point-to-point measurement.

Inserting vertical adjustable measuring lines. The settings for the lines and the result window are
fixed in the same way as for the point-to-point measurement.

Inserting horizontal adjustable measuring lines. The settings for the lines and the result window are
fixed in the same way as for the point-to-point measurement.

Inserting a gray scale line profile. Measuring by means of the profile is possible.

Inserting a gray value histogram.

Inserting user data. This function is only active if user data have been saved together with the image
(see TIFF-EXPORT Æ DATA) see 4.5.2

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4.7.1 Expanded Measuring Capabilities: (Requires the Licence: MEASA)
The horizontal and vertical adjustable measuring lines and the quadrangle measuring are part of the advanced
measuring option. The quadrangle measuring enables displaying and measuring both side lengths as well as
the angle to the horizontal line and the surface.
Furthermore, with the option “MEASA” four circle measurements are available instead of the default two
measuring possibilities. The point-to-point measurement can be opened up to 10 times. The default version
allows only two open. The adjustable measuring lines can also be opened up to 10 times (default: 2 open).

4.7.2 Basic Settings for Measurements, Annotations and Overlays

The user may fix pre-settings for the different measurements, annotations and for the Windows® overlays
(Spot, Reduced Raster, etc.). These settings will define format and color of the different objects.
The window, Annotation Options, can be opened by pressing the right mouse button within the image panel.
Before doing so, it is important to activate the Annotation Toolbar. The window Annotation Options is

subdivided into three index cards. The index Tab Standard allows pre-settings for the text editor, , the

SEM parameters , the USER data and the different graph functions. .
Using Font, font type, size and color of characters can be selected. In Text Background you may chose
whether the respective text is to be displayed with a
transparent or a solid background. When selecting Solid
the corresponding background color may be chosen
using Colors... Using the key “Line” thickness, color
and kind of line for the graph objects may be selected.
In the same way as for the texts, Object Background
allows to define whether the objects are to be filled with
a color (solid) or not (transparent).
By clicking “Reset” all settings will be undone to return
to the basic settings.
The index Tab Measurement & Results enables the
settings for the measured objects. Each measuring
function includes the measuring object with annotation
(e.g. a circle with the denomination Da1) and the
window displaying the results of the measurement. For
both objects, Measurement Objects and Results Panels
make available the corresponding settings. Using Font,
font type, color, style and size of the characters may be
selected. Depending on the background selected for the

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annotation (transparent or with a background color), this setting will be done using Text Background.
Pressing the key “Line...” allows the selection of kind of line, thickness and color of line, of the measured
object. The key “Reset” will undo all settings in Measurement Objects and return to the basic settings.
Using Results Panels identical settings can be fixed for the results. The key “Font” will also refer to font
type, size, style and color of the character of the results. Again, a transparent or solid background for this
annotation may be selected using Text Background. The complete background of the results will be selected
using Transparent Background and Solid Background. The respective background color may be chosen by
means of the key “Colors...”. By clicking “Reset”, the settings of Results Panels will be undone to return to
the basic settings.

The index Tab General allows setting of the Windows® overlay, positioning and editing the objects and the
kind of numeric result presented. It also provides the ability to save the different pre-settings in a file in the
corresponding user directory.

Automatic Object Settings allows the activation of three basic settings.

* Enter Select Mode on New Object: After opening a function in the toolbar, the mode will automatically

switch to edit. . If several measurements are to be inserted one after the other, this setting should be
deactivated. Thus, the respective function will remain active and switching to edit or another function
will have to be done manually.
* Select Objects on Creation
After opening a function in the toolbar, the corresponding object will immediately be marked. This
enables an immediate opening of the settings for this object by clicking the right mouse button.
* Apply Object Settings to All Objects
The settings selected in the index cards Annotation Options will immediately be applied to the objects
(even to those already selected). If this box is deactivated, the new settings will only be active after
opening a function of the toolbar.

The box Snap to Grid allows the alignment of the respective objects by means of
a grid. Settings for this grid will be made by pressing the key “Settings”. For the
width, values between 2 and 1024 are possible, for the height, values between 2
and 768 may be selected.

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Raster Lines allows the setting of the kind of line, thickness of line and color of line for the functions Spot,
Reduced Raster, Split Screen, Dual Mag, Crosshairs and Graticule. The respective setting will be valid for
all these functions.
The setting in Results (Sig. Figs) will define the maximum number of figures for the display of the result of
the distance measurement. Selection is possible between 3, 4 and 5. For the µm range, not more than 3
figures after the decimal point are possible. That means that a distance measurement of 3,452µm will only
be displayed with 4 figures in spite of a setting of 5 in the box Results (Sig. Figs. In the nm range, no figures
at all will be displayed after the decimal point.

All settings in the menu Annotation Options will automatically be saved in the file “CURRENT.ANP” in the
respective user directory. It is also possible to save the different settings in a separate file by using the key
“Save”. After assigning a file name, the file will be saved in the actual user directory. This file and the
corresponding settings can be reloaded to the LEO user interface using the key “Load”. However, by doing
so, the actual file “CURRENT.ANP” will be updated with the new settings.

4.7.3 Editing, Storing and Loading Measurements and Annotations

Form, size, position and color of the different measuring, graphic or annotation objects may be varied
individually. The procedure is always the same: First, mark the corresponding object with the left mouse
button, then open the respective menu by pressing the right mouse button. It is also possible to mark a group
of objects by keeping the key CTRL or SHIFT pressed and marking the different objects by pressing the left
mouse button. Another option is to insert a quadrangle by dragging the left mouse button after selecting

. All objects within this selected zone will be marked.

Below you will find the explanation of the most important commands to edit the mesuring, annotation,
graphic objects and µ marker.

• Measuring objects

Select Line Width Results...:

Provides selection of the parameters to be
displayed in the annotation panel.
Font...:
Provides selection of letter font, color and
size of characters for the line annotations
La1 and Lb1.
Set Panel Font...:
Provides selection of letter font, color and
size of characters for the annotation panel
of the results.

Solid Text Background:

Provides selection of the background color for the line annotations La1 and Lb1
Transparent Text Background:
Provides selection of a transparent background for the line annotations La1 and Lb1.

Select Text Background Color...:

Provides selection of the background color for the line annotations La1 and Lb1.

Solid Background Mode:

Provides selection of the background color for the annotation panel of the measuring results.

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Transparent Background Mode:
Provides selection of a transparent background for the annotation panel of the measuring results.
Background Color...:
Provides selection of the background color for the annotation panel of the measuring results.
Line Settings...:
Provides selection of kind, color and thickness of line for the mesuring quadrangle.
Brush Settings...:
Provides selection of a pattern for the background color.
Lock this Panel:
Locking the annotation panel for the measuring results. That means the four results La1, Lb1, Lc1 and Ld1
will be defined as one unit and will be processed identically when editing and positioning.
Unlock this Panel:
Unlocking the annotation panel. This enables the extraction of single results (e.g. Lb1) from the annotation
panel for separate editing and positioning.
Reset Properties:
Resetting all settings to the basic properties.
Snap to Grid:
Provides alignment of an object by means of a grid. The size can be determined using Annotation Options
(see 4.7.2).
Delete Del:
Deleting the measured object.

• Annotation Objects

SEM Parameters...:
Selection of the parameters to be displayed (e.g. detector)
Font...:
Provides selection of letter font, color and size of characters for
the displayed parameter.

Solid Text Background: Provides activation of the

background color for the annotation panel.
Transparent Text Background:
Provides activation of a transparent background for the annotation panel.
Select Text Background Color...:
Provides selection of the background color for the annotation panel.
Reset Properties:
Resetting all settings to the basic properties.
Snap to Grid:
Provides alignment of an object by means of a grid. The size may be determined using ANNOTATION
OPTIONS (see 4.7.2).
Send to Back:
If several objects are superimposed or overlapped, the corresponding objects can be moved to the
background or to the foreground using Send to Back or Bring Forward.
Delete:
Deleting the object.

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• Graph objects

Solid Background Mode:

Activating the solid filling color for the graph object.
Transparent Background Mode:
Provides activation of a transparent background for the graph object
Background Color...:
Provides selection of the filling color for the graph object.

Line Settings...:
Selection of the kind, color and thickness of line for the graph object.
Brush Settings...:
Provides selection of a pattern for the filling color.
Reset Properties:
Resetting all settings to the basic properties.
Snap to Grid:
Provides alignment of an object by means of a grid. The size may be determined using ANNOTATION
OPTIONS (see 4.7.2).
Send to Back:
If several objects are superimposed or overlapped, the corresponding object can be moved to the background
or to the foreground using Send to Back or Bring Forward .

Delete:
Deleting the object.

• µ- Marker

Font...:
Selection of letter font, color and size of characters for the
annotation of the µ marker..
Solid Text Background:
Activating the background color for the annotation of the µ
marker.
Transparent Text Background:
Provides activation of a transparent background of the µ marker.

Select Text Background Color...:

Provides selection of the background color for the annotation panel of the µ marker.
Solid Background Mode:
Provides activation of the background color for the µ marker.
Transparent Background Mode:
Provides activation of the transparent background for the µ marker.
Background Color...:
Provides selection of the background color for the µ marker.

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Line Settings...:
Selection of kind, color and thickness of line for the µ marker.
Reset Properties:
Resetting of all settings to the basic properties.
Snap to Grid:
Provides alignment of an object by means of a grid. The size may be determined using ANNOTATION
OPTIONS (see 4.7.2).

If several objects are superimposed or overlapped, the selection of

Send Back and Send to Back as well as Bring Forward and Bring to
Front determines which object is going to be moved to the
background or the foreground.
The different measurement, graphic and annotation objects can also be

stored in a file . When loading this file later on to a live or saved

image, , the measuring values will automatically be updated. By

doing so, the different objects need not be reopened and reformatted.
This results in a considerable simplification of the work with the
Annotations, if certain objects must be opened frequently.
If the control box Save Selected Annotation Only is activated, only the marked objects will be saved in a
file. If not, all opened objects will be saved. Saving will be in the actual user directory.

4.7.4 Setting and Editing the Data Zone

The datazone is a useful tool for the presentation of important image data and the output of this data together
with the image. The software provides a standard datazone which can always be used, assuring that even
newly installed users will have a datazone although no user datazone has been created. In this case, the
default datazone will load. After closing the LEO user interface, a file “CURRENT.ADZ” will be created in
which the datazone will be stored and which can be used when starting the software again. Basically, there
are two ways to create a datazone: The first is to load the default datazone, to change it according to the
user’s specifictions and to save it again as “CURRENT.ADZ” in the actual user directory. The secons is to
create a completely new datazone and to save it with a new name.

The key combination CTRL + D or the Pop-Up Menu VIEWÆ DATA ZONEÆ TOGGLE DATA
ZONE will always load the file “CURRENT.ADZ” in the current user directory. If this file does not
exist in the actual user directory, the standard data zone will load.

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• Editing the Standard Data zone or an Already Existing Data zone

1.) Open the data zone using CTRL + D or using the Pop-Up menu VIEWÆ DATA ZONEÆ DISPLAY
DEFAULT DATA ZONE

2.) Open the Annotation Toolbar by means of the key combination CTRL + A or using the Pop-Up menu
EDITÆ ANNOTATION...
3.) Mark the data zone (light blue squares) with the left mouse button; activate the menu by means of the
right mouse button and select the command Unlock this Panel
4.) Now different elements can be extracted from the datazone or newly created elements added.

5.) Mark the complete datazone (no single elements), (light blue squares) with the left mouse button and
open the menu by means of the right mouse button.
6.) If you want to change the color of the datazone, the respective color can be selected using the command
Background Color... . If you need a uniform letter font for all elements in the datazone, setting is
possible using Set Panel Font... .
7.) Select the command LOCK THIS PANEL. Now the datazone is locked and can be activated or
deactivated by means of the key combination or using the Pop-Up menu. When closing the LEO user
interface, the settings of the datazone will be saved in the file “CURRENT.ADZ” in the current user
directory.

• Creating a New Datazone

1.) Open the Annotation Toolbar using the key combination CTRL + A or using the Pop-Up menu EDITÆ
ANNOTATION...

2.) Select Sticky Panels in the toolbar and drag the desired annotation panel by means of the pressed
left mouse button.

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3.) Insert the corresponding parameters to the datazone, e.g. magnification by selecting in the menu

SEM parameters, a µ marker using or a logotype by means of the function

4.) Formatt the different parameters in color, font and size (see 4.7) and drag into the annotation panel.

5.) Mark the complete annotation panel (no single elements) and open the menu by pressing the right mouse
button.
6.) Click PROPERTIESÆ LOCK THIS PANEL and then PROPERTIESÆ MAKE PANEL A DATA
ZONE.

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7.) There are two methods to convert the annotiation panel into a data zone. The commaand Make Current
Data Zone replaces the contents of the file “CURRENT.ADZ” with the actual settings. A window
opens, asking if one wishes to replace the data zone. Selecting Yes removes the old data zone from the
monitor. Selecting No keeps the old data zone on the screen, however only as a normal annotation field.
The new data zone may be switched on and off via the Pop-Up menu or CTRL + D.

8.) The second way is to save the datazone using the command Save as Data Zone with an own file name. It
may be reloaded later on using the Pop-Up Menu VIEWÆ DATA ZONEÆ LOAD USER DATA
ZONE... (see 3.3.1).

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4.8 Editing Images on the Default Printer

Frozen or stored images which are reloaded to the image store using FILEÆ LOAD IMAGE... can be edited
to the standard printer using the command FILEÆ PRINT SETUP.... It is also possible to reach the
following window by pressing the right mouse button within the image area and selecting SEND TOÆ
PRINTER.
In this panel, the settings in size, position and design of the image to be printed can be entered.

Control Box Print Setup:

ANNOTATION AND MEASUREMENT:

Printing the data zone as well as measurements, annotations etc. together with the image

SEM Overlay:
Printing the data zone together with the image.

Color Merge:
Must be activated if colored annotations or measurements are to
be printed. The number of gray scales (256) will be reduced by
20 when printing the image.

Control Box Size:

Fit to Page:
Adjusting the image to the maximum width of the page.

Zoom:
Entering a reducing factor for the printout of the respective image. The respective magnification under
consideration of the reduction will be displayed using Print Mag Ref.

Control Box Position:

TOP: Printout of the image on the top of the page.

MIDDLE: Printout of the image in the middle of the page.
BOTTOM: Printout of the image on the bottom of the page.

In Print No., A number may be entered for the printout. This number increases automatically by one at every
printout. This parameter is a global variable and valid for all users. It may also be selected using SEM
Parameter (see 4.7.4) and, e.g., be added to the data zone.

Using the key “Printer” the printer used as output media will be selected. Pressing the key “Print” will start
the output.

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5 Stage Functions

The different stage functions can be opened using

the Pop-Up menu STAGE. Many of the different
routines are not implemented by default in the user
interface and therefore require a license.
Entering absolute and relative coordinates and
setting of certain presettings is done by using
SEM Control -Tab Stage (see 4.3.6). In this
window it is also possible to open special
functions by pressing the right mouse button in the
lower right part of the window. Using Backlash,
the backlash correction for the motorized stage
may be activated or deactivated. A selection of the
axes where a backlash correction is to be done can
be preset in User Preferences (see 6.1). Using the
command Do Backlash a single backlash
correction can be performed.

It is possible to limit the travel of the different motorized axes of the

stage. This is especially useful when working with very big samples
or if options have been adapted to the SEM, which may affect the
travel of the stage. By assigning defined minimum (Low User Limit)
and/or maximum values (High User Limit), the travel may be limited
and collisions prevented. After opening the function Limits... a
window will open indicating the lower and upper limits of the
different axes. By double-clicking the left mouse button on one of
these values, a new value may be entered. These limits are user-specific values and will be saved separately
for every user.

5.1 Initializing the Stage (STAGE INITIALISE)

If the instrument has been switched off completely (red key) or if the stage loses its initialization for another
reason, the stage must be re-initialized using the Pop-Up menu STAGEÆ STAGE INITIALISE or by
opening SEM Control - Tab Stage. The stage can also be initialized by pressing the right mouse button
within the lower right part of the window and selecting the command Auto Initialize Stage. The stage will
be driven to the limit switch to define the point of origin. Afterwards, the stage will automatically drive back
to the central position.

Even if the initialization has not been lost, it may be useful to re-initialize the stage in order to ensure
exact driving of the stage.

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5.2 Storing of Stage Coordinates (STORE/ REOPEN)

This software enables storing stage positions together with magnification and working distance, so that the
user can drive to these positions later on. The window is opened using the Pop-Up menu STAGEÆ STORE/
RECALL
Each position can be given a symbolic annotation. If the current magnification and working distance are to
be stored together with the position, activate the parameters Set Magnification and Set Working Distance in
the field On Go To. Activating the parameter Move XY Only will result in displacing only the X and Y
coordinates of the stage.

When storing the actual stage position, the coordinates of the current position
may be assigned a separate name which will be displayed in the stage points list
by pressing “Add”. It is also possible to edit the different storage parameters
subsequently by selecting the corresponding name in the list and pressing the
key “Edit”. Deleting positions in this list is done in the same way, by pressing
the key “Delete”.
Moving to special storage positions is done by using the key in the control
panel Go To or by double-clicking the specific position with the left mouse
button.
First:
Moves to the coordinates of the first assigned position in the list
Next:
Moves to the coordinates of the next position in the list.
Previous:
Moves to the coordinates of the previous position in the list.
Selected:
Select a special position in the list by means of the left mouse button. After
pressing the key “Selected”, the stage will drive to the coordinates of this
position. The respective magnification and the working distance will be set on
the microscope.
Undo Stage Go To:
Undoing the last stage movement..
The positions grouped in the list can be stored as a file using the Pop-Up menu
FILEÆ SAVE and be reloaded using Load.

If you experience problems when driving the stage to the co-ordinates, you should check whether the
parameter Move XY Only has been deactivated in On Go To .

Another way to save stage coordinates is to open the SEM Control window and to open the sub-menu
Record by pressing the middle mouse button (see above).

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List Clear:
Deleting various positions from the
list.

List Load:
Loading coordinates from a separate
file.

List Save As:

The annotations contained in the
stage point’s list may be saved as a
separate file in the respective user
directory.

Mark Position:
The coordinates as well as
magnification and working distance
(if activated) of the corresponding
position will be added to the list with
the annotation “M_X” without
assigning a special name. The letter
“X” stands for a consecutive number,
which will be increased by one at
every open.

Label Position:
Assigning an individual annotation for the actual position.

Position List:
Opening the window Stage Points List (see above).

Go To First Point:
Drives the stage to the first position in the list.

Go To Next Point:
Drives the stage to the next position in the list.

Go To Previous Point:
Drives the stage to the previous position in the list.

On Go To Point:
Setting additional information, which is to be saved together with the coordinates for the actual position.

The stage point’s list is user-specific and will be saved separately for every individual user. It is also
possible to introduce global positions, which will be available for all users. This can be useful for
working with a sample air-lock to save the respective stage position for the transfer of the sample.
These positions will always be created with the annotation “$ + Name” (e.g. $exchange). Creating
global positions requires the privilege “Supervisor” (see 2.1) .

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5.3 Centering a Point (CENTER POINT)

This function enables the user to mark an object within the image panel which will be driven automatically
to the center of the image. After selecting this function using the Pop-Up menu STAGEÆ CENTER POINT
or the key combination CTRL + Tab, a cross will be displayed on the screen which can be positioned by
means of the mouse. After selection of a point center by pressing the left mouse button.

5.4 Centering a Feature (CENTER FEATURE)

This function enables the user to select a feature in the image area which will be centerd and magnified
automatically so that the corresponding feature will fill the complete image panel. Selecting this function
using using the Pop-Up menu STAGEÆ CENTER FEATURE or by means of the key combination CTRL
+ Shift +Tab. A cross will be displayed on the screen which can be positioned by means of the mouse. By
pressing the left mouse button, a frame may be created. When releasing the mouse button, the content of this
frame will be centered and magnified.

There are three different setup selections for the functions Center Point and Center Feature. The Beam
Shift or the Stage may be used for centering. It is also possible, depending on the magnification ,to
use both. The selection will be done using the SEM Control- Tab Stage. Press the right mouse button
in the lower right part of the window. This will open a menu where the different possibilities can be
selected in Center Point/ Feature .

Stage And Beam: Use of stage and Beam Shift for centering.
Stage Only: Use of the stage for centering.
Beam Only: Use of Beam Shift for centering.

For special applications (see 5.9.2) it may be advisable to use only one axis (X orY) for centering.
This may be performd by selecting Stage X Only or Stage Y Only.

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5.5 Scanning a Field (STAGE SCAN) (Requires the License: STAGESCAN)

This software option allows the examination of a sample area as a series of exactly defined, regularly
dispersed image fields. This function is particularly suitable to tracking particles or other objects in a large
sample area, as it will ensure that no part of the interesting zone will be omitted. The function may be opened
using the Pop-Up menu STAGEÆ STAGE SCAN. This will open the window represented below to select
the different settings for the fields and to start the function.
Four scanning patterns and several methods to determine the scanned area are available. After selecting the
scanning pattern, position and size of the fields, the fields can be scanned by using different commands. The
scanning pattern will determine the sequence of the scanned fields.

FIELD OVERLAP:

Start Co-ord:
Indicates the XYZ position where the scanning of the fields will start. If the command Stage Start Scan has
been selected, the stage will drive to this position. The values may be entered manually (by clicking the
corresponding field with the left mouse button), by using Select Area (selection by means of Center Feature)
or by using Stage Scan Start Here.

Field Size:
The parameters X and Y will define the size of a single field. These values can be entered manually (by
clicking the corresponding field with the left mouse button) or by selecting the command Stage calc Scan.

Fields:
The parameters X and Y will define the number of fields which the stage will scan in the respective direction
for the whole pattern. These values may be entered manually (by clicking the corresponding field with the
left mouse button) or by selecting the command Stage calc Scan.

End Co-ord:
Indicates the XYZ position where the scanning of the fields will end. The values can be entered manually (by
clicking the corresponding field with the left mouse button), by using Select Area or by using Stage Scan
ends here.

At Field:
The parameters X and Y will indicate the field in the pattern where the stage is positioned at present. These
parameters may be used in annotations (see 4.7) or can be saved as user-specific parameters together with the
image. To do so, the SEM parameters Stage at Field X and Stage at Field Y must be selected in the
parameter list (see 4.5.2).

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.Field Overlap =:
This parameter can be set manually. It is used in the function Stage calc Scan to fix the scale ov overlapping
between the fields.

Stage Scan =:
Clicking this control field will select the respective scan pattern.

Scan Pattern
X Boustrophedon X- Scan Y Boustrophedon Y- Scan
1 2 3 1 2 3 1 6 7 1 4 7
6 5 4 4 5 6 2 5 8 2 5 8
7 8 9 7 8 9 3 4 9 3 6 9

Stage XY+Z:
Is necessary for the use of the Tilt Compensation. If the control box is deactivated, the stage will not move
in Z direction. If the control box is activated, the stage will move in Z direction in relation to the Z start
coordinate if a movement in tilt direction is performed.

Stage Backlash:
Activating this control box will result in a stage backlash correction with any stage movement

Stage Scan Start Here:

By pressing this key, the actual stage coordinates will be taken as start coordinates.

Stage Scan ends here:

By pressing this key, the actual stage coordinates will be taken as end coordinates.

Select Area:
This function is used to set the start and end coordinates if the complete scanned area is visible at a suitable
small magnification. To select the area, press this key and continue as explained in 5.4.

Stage calc Scan:

This function makes the following calculations:
∗ The fields will be calculated by means of the actual magnification in relation to start and end coordinates
(in consideration of the field overlapping).
∗ The number of fields will be calculated by means of the start and end coordinates and the field size.

Stage star scan:

Pressing this key will start the scan mode. The stage moves to the start position (Field 1/1).

Stage Prev Field:

Pressing this key will drive the stage back to the previous field in the scan pattern.

Stage Next Field:

Pressing this key will drive the stage forward to the next field in the scan pattern.

There are different methods to determine the scan area:

1.) Start and end coordinates are entered manually. Using Stage calc Scan a calculation will be made using
the actual magnification.

2.) Start coordinates, field size and number of fields are entered manually. Using Stage calc Scan the end
coordinates will be calculated.

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3.) Drive the stage manually to the position where the scan is to be started. By selecting Stage Scan Start
Here the actual coordinates will be taken as start coordinates. The end coordinates may be selected in the
same way. After doing so, it is possible to select a magnification as suitable for the individual problem.
Selecting Stage calc Scan will result in calculation of field size and number of fields.

4.) If the complete scanned area is visible at a suitable lower magnification, the interesting area can be
selected using Select Area (use of Center Feature). Then a magnification may be selected which is
necessary for the individual problem. By selecting Stage calc Scan the field size and number of fields
will be calculated.

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5.6 Stage Map (Requires the License: CENTER)

This function provides the use of a frozen image in Zone 0 as an overview mapping for the selection of stage
positions. Before opening this function, the interesting sample area should be moved to and be displayed in a
suitable low magnification.. This setting will be the overview map. After setting and adjusting the desired
area, select the Split Screen- mode using the Pop-Up menu SCANNINGÆ SPLIT or using the
corresponding symbol in the toolbar. Then, the function Stage Map can be activated using the Pop-Up menu
STAGEÆ STAGE MAP. This will freeze the left part of the screen. The mouse cursor on the left half will
be displayed as a cross. Moving the mouse cursor to the right screen will allow the adjustment of
magnification, focus etc. Then returning to the left screen, the cursor will again form a cross. Now the
interesting points on the sample feature can be selected by pressing the left mouse button. The selected
position will be displayed in the right part at the selected magnification.
End this mode by selecting Normal in the Pop-Up menu SCANNING or by activating the corresponding
symbol in the toolbar.

Zone 0: Zone 1:
Frozen image with Active image with
map magnification. individually selected
magnification.
Select interesting
positions by means of Mouse cursor:
mouse cursor:

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5.7 Survey Mode (Requires the License: SURVEY)

The Survey Mode provides the capability to save two microscope settings regarding magnification and
working distance and to switch between these two settings. Example: For low mag. scanning of samples it
may be necessary to select a longer working distance. By doing so, a lower magnification can be set which
allows the imaging of large areas of the sample surface and to select certain interesting zones within this
area. After selection of such a zone, it will have to be examined at higher magnification to distinguish
detailed information. For higher magnification, it may be useful to select a smaller working distance in order
to improve the signal / noise ratio and the total imaging quality. This means that you need two working
conditions, which differ in magnification and the working distance settings (in relation with the Z movement
of the stage). The Survey Mode can be used to automate these two
settings.
Before switching between the two modes, the settings for the
working modes Survey Mode (high working distance, small
magnification) and Resolution Image (small working distance, high
magnification) will have to be set.

The window Stage Survey tab can be opened using the Pop-Up
menu STAGEÆ SURVEYÆ SETTINGS... or using STAGEÆ
STAGE CONTROL... and selection of the index Tab Stage Survey
tab

The following procedure is recommended for defining both settings:

1.) Set a low magnification and a large working distance on the microscope
and open of the window Stage Survey tab.
2.) In the upper part of the window, the settings for Survey Mode may be
defined now. Clicking the keys “Get Current” will enter current values for
magnification and working distance. It is also possible to enter the desired
values manually. When selecting. Lowest Mag, the system will
automatically set the smallest possible magnification.
3.) Now a higher magnification should be set at small working distance
(modification of the Z drive of the stage). These values can be entered by
pressing the key “Get Current”.
4.) The selection of additional functions is possible for both modes.
Selecting Auto Focus will result in an automatic focus adjustment after
activation of the respective operation mode (Survey Mode or Resolution
Image). It is also possible to select certain macros, which will have to be
processed after setting the corresponding operation mode. In the upper example, a reduced scan (see macro:
TB Reduced) will automatically be displayed in the operation mode Resolution Image. When switching
back to Survey Mode, the normal mode (screen displays the complete scanned area) will be re-set
automatically. If a macro has been activated in Exit Survey Mode, it will be processed automatically when
finishing the Survey Mode (remove of the check in the box Survey Mode).

Working with the window Stage Survey tab:

After setting both operation modes, the Survey mode can be activated using the Pop-Up menu STAGEÆ
SurveyÆ Survey Mode or by activating Survey Mode (put a check) in the above window. This will set the
corresponding magnification, the working distance and drive the stage to the respective Z coordinate. In this
survey mode, interesting sample zones can be examined. When opening Center Point (see 5.3) or Center
Feature (see 5.4), the stage will be moved to the Z coordinate of the operation mode Resolution Image after
execution of the corresponding function. At the same time, the corresponding magnification and the working
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distance will be set automatically. If additional functions have been defined for this mode, these functions
will be processed automatically after selection of the settings for Resolution Image. In the example above,
the macro “TB Reduced” would be activated to display a reduced scan.
To switch back to the operation conditions of the Survey Mode, press the function key F4. Now it will be
possible to research an interesting area and to switch to the operation mode Resolution Image by using
Center Point or Center Feature.
End the Survey Mode by using the Pop-Up menu STAGEÆ SurveyÆ Survey Mode or by deactivating
Survey Mode (remove check) in the above window. If a macro has been selected and activated in the
window Stage Survey tab in Exit Survey Mode, this macro will be processed now. In the above example no
macro would be executed as the macro “TB Reduced” has been selected no check has been entered in the
control box “ Macro”.

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5.8 Stage Registration (Requires the License: STAGEREG)

For special samples or tasks, the software option Stage Registration provides the user the ability to create a
unique coordinate system in the horizontal axis using two reference points. Within this coordinate system, it
is possible to drive to separate sample zones or to save certain stage positions.
The new coordinate system is defined in the window Stage Registration. The stage can be moved in the
user-specific system using the window Stage Registered Movement. Both windows will be opened using the
Pop-Up menu TOOLSÆ GO TO PANEL or using Dialogs in the window Stage Points List (see 5.2).
Creating and working with user-specific coordinate systems will be explained in the following example.
The sample is a square with a side length of 10mm. This
square will be turned 45° in the scan direction and will
be used as the limit for the new coordinate system.
After opening the window Stage Registration, the
annotation Reg1 will be selected in the list Stage List=.
This label identifies the user-specific coordinate system.
The software allows the definition of up to 9 different
systems (Reg1- Reg9).
Individual names for the sample and the coordinate
system may be entered in the fields Registration Name:
and Registration Units:
First, drive the first point of the sample (P1), by means of
the joystick, to the center of the screen. Pressing the key
“First Point” in Record Stage Position will define the
first reference point.
The corresponding absolute coordinates of this point
will be indicated in Absolute Stage Position: First
Registration Point ( example: X= 50, Y= 50). If the
actual rotation and tilt values differ from those listed in the field
Constant Axis you will be asked whether the new values shall
be taken. Answer this question with “Yes”.
Now center the second reference point (P3´) by means of the
joystick. Press the key “Second Point” in the field Record
Stage Position to load these values.
The actual values will be displayed in Absolute Stage Position:/
Second Registration Point (in the example: X= 50, Y= 64,14).
By doing so, both reference points of the new coordinate system
are defined.
Now the software needs the relative start and end coordinates of
the new system as a calculation base. In the above example the
new coordinate system is to begin at X´= 0/ Y´= 0 and to end at
X´= 10/ Y´= 10 (see P3´). These values must be entered in the
fields Mapped Position. First Registration Point will thus be
the origin coordinates (0,0) and Second Registration Point the
maximum values for X and Y (10,10). When pressing the key “Register” the software will try to perform a
coordinate transformation with the entered values. If a correct calculation is possible, this will be indicated in
the upper part of the window with Registration= Yes.

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Now stage control is possible using the window Stage Registered Movement. If the stage is to move to the
center of the new coordinate system, click Sample Go To X with the left mouse button to enter 5 for the X
and Y coordinates. This will drive the stage to the absolute position X= 50 Y= 57,07, that means to the
center of the square. If you want to go to P3´ , enter Sample Go To X= 10 and Sample Go To Y= 10.
Entering Sample Go To X= 1 and Sample Go To Y= 1 will drive the stage 1mm in X‘ and 1mm in Y‘
direction. If smaller steps are necessary you may enter the values X=100 and Y=100 (instead of X=10 Y=10)
in the field Second Registration Point as append Position. Re-clicking the key “Register” and entering
Sample Go To X= 1 and Sample Go To Y= 1 would move the stage by 100µm in X´ and Y‘ direction in the
new coordinate system.
Control of the stage is also possible by using the arrow keys in the window Stage Registered Movement.
Clicking the big arrow key will result in a 10 steps‘ movement in the corresponding direction. The small
arrow keys will displace the stage by one step each.
Selecting Stage List=Reg1 in the window Stage Points List will save stage positions so that the stage may
drive to these positions later on.

The settings of the new coordinate system may be saved in the window Stage Registration by selecting
“Save To File”. By doing so, a file name can be assigned to save the settings in this file. When reloading
settings to the application by clicking “Load From File” it is possible to drive to the positions for the
constant axes T and R by pressing the keys “Tilt” and “Rotate” in the field Move Axis.

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5.9 Compucentric Software (Requires the License: COMPU)

The compucentric software provides rotation-eucentric or tilt-eucentric

control if the stage is not eucentric. This control refers to driving the stage to
absolute and relative coordinates using the SEM Control window Stage (see
4.3.6) and to the use of the function Stage Horizontal Alignment (see 5.9.3).
When examining a sample area, which is not placed in the rotation center of
the sample stage, the interesting sample area will shift on rotation of the
stage. The Compucentric software will try to compensate this shift by
adjusting the X and Y coordinates. A similar condition will appear when
tilting the sample. If the interesting zone of the sample is placed exactly in
the center of the screen, a tilt upwards or downwards from the horizontal
line can be watched. This tilt can also be compensated within certain limits
when using the compucentric software.
Before starting to work with this software a calibration of the rotation center
of the stage (Calibrate Stage Center) and of the sample height is necessary
(Compucentric Set Up). Both calibrations are done using two separate
menus. The rotation center must be setup at every stage initialization (see
5.1). The calibration of the sample height from the tilt axis is sample-specific and must therefore be adjusted
for each sample. After performance of the calibrations, it is possible to select the corresponding operation
mode using Compuc. Mode= in the SEM Control- window Stage (see above).

Off: Switching off the compucentric software

Tilt: tilt-eucentric control of the stage by the software
Rotate: rotation-eucentric control of the stage by the software
Tilt & Rot: tilt- and rotation-eucentric control of the stage by the software

If calibration is only done for the rotation center (Calibrate Stage Center), rotation-eucentric control
of the stage is only possible in the horizontal line (tilt = 0). This is also valid for stages without
motorized tilt axis (e.g. LEO 1530). In these cases, adjustment of Calibrate Stage Center will be
done at a 0° tilt. Rotation-eucentric control will be possible in these operation modes.

Below you will find the explanation of both calibration routines.

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5.9.1 Calibrate Stage Center
Open Calibrate Stage Center by using the Pop-Up menu TOOLSÆ GO TO PANEL... or using the SEM
Control window Stage and clicking the right mouse button within the lower right part (see 5.4). When
calibrating, a distinguishable point positioned within the image field will be driven to the center of the scan
area. After a 180° rotation of the stage the same dot will be re-centered. The software will then calculate the
rotation center of the stage using the difference of both positions to the scan center. The calibration may be
repeated for different magnifications (30X, 200X, 500X, 1500X and 2000X).

For the calibration a single sample holder should

be used. It is recommended to use a calibration
grid or a TEM grid sample.
After opening the calibration routine a window
will open where the last measured values for the
center can be entered in the upper part. The stage
will be initialized when pressing the key “Next”.
The stage will then drive to the X and Y values
as entered above.

After initialization, the magnification will

automatically be set to 30X and a graticule will
be displayed on the screen. Now a
distinguishable point positioned outside the
center should be selected within the imaging
area.

Move the distinguishable point to the center by

means of the joystick or using Center Point.
Clicking “Next” will drive the stage to the start
position.

Click “Next” to rotate the stage by 180°.

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Observe the mark carefully during the rotation of
the stage to identify it easily after the rotation.

Re-center the distinguishable point by using the

joystick or the function Center Point. After
centering, confirm with “Next”.

The software has now calculated the new

rotation center and will indicate the values for X
and Y in the upper part of the window.
Clicking “Next” will return the stage to the start
position and the next calibration can be
performed at the next higher magnification
(200X). This procedure may be repeated for the
magnifications 200X, 500X, 1500X and 2000X.
When clicking “OK” the calculated values will
be used for the stage control. The calibration
routine is finished.

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5.9.2 Compucentric Set Up

Open Compucentric Set Up by using the Pop-Up menu TOOLSÆ GO TO Panel... or using the SEM
Control- window Stage and clicking the right mouse button in the lower right part (see 5.4). When
calibrating, a distinguishable point positioned within the imaging area will be driven to the center of the scan
area by means of the X-axis and the rotation (move to the horizontal line). After a 2° stage tilt the same point
will be re-centered using only the Y-axis. The software will calculate the tilt center of the stage in regard to
the sample height by using the difference of both positions to the scan center. As the tilt center depends on
the respective sample height, the calibration Compucentric Set Up will have to be performed for each
sample.
The calibration can be repeated for different tilt angles (2°, 8°, 15°, 30° and 45°).

When centering a distinguishable point, only the X-axis must be used for the
horizontal shift. Adjustment of this setting is possible with the joystick or by
means of the function Center Point. The software will automatically switch to
Stage X Only (see 5.4).
Vertical shifts are only allowed by use of the rotation. To ensure a correct
calibration, changes of the Y coordinate are prohibited.

Due to mechanical tolerances, a centered point may drift when tilting from the
vertical line. As with the second cycle (8° tilt) this drift can be compensated by
means of the function Compu. Tilt Error.
To ensure a correct calibration, this drift must not be corrected by means of the
X coordinate.

The calibration of Compucentric Set Up can only be done after calibration of Calibrate Stage Center (see
5.9.1)!

After opening the routine Compucentric Set Up a window will be displayed

indicating in the upper part in Sample Height (mm) the distance of the sample
surface to the center of the tilt axis (calculated value of the last calibration).
This value will be calculated by the software using the calibration. It is specific
for the respective sample. If the value is known and if no modifications have
been performed on the microscope (installation of a spacer), the value may be
entered manually. The calibration can be finished by clicking “OK”. To start a
new calibration, click “Next”.

The sample stage will now drive to the Y coordinate of the rotation center. The
tilt will be 0°. A small magnification (30X) will automatically be set on the
microscope and a graticule will be displayed on the screen.

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Now the calibration sample must be moved to the scan area by means of the X
and R coordinates. . Position a distinguishable point in the center of the scan
field. After positioning clicking “Next” will continue the calibration.
Be extremely careful not to move the Y-axis of the stage but only the X
and R axes.

A higher magnification (500X) will automatically be set on the microscope to

ensure that the point has been centered accurately. Fine adjustment by means
of X and R axis is possible.
After positioning, continue the calibration by clicking “Next”.

The magnification will automatically be reduced on the microscope. Clicking

the key “Next” will result in a 2° tilt.

Tilt will be 2°. The centered point will drift upwards on the screen.

The distinguishable point must be positioned back to the center by using only
the Y coordinate of the stage. Use of the joystick and of the function Center
Point (Stage Y Only will be set automatically by the software) is possible.
After centering, clicking the key “Next” will continue the calibration.

A higher magnification (500X) will automatically be set on the microscope to

ensure that the point has been centered accurately. An eventual fine adjustment
by means of the Y-axis is possible.
After positioning clicking “Next” will continue the calibration.

The software has calculated Sample Height and indicates the new value in the
upper part of the window. If the calibration is to be ended after the first
iteration (2°) the window may be closed by clicking. To continue the
calibration, click the key “Next”.

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If you want to use the compucentric software also for higher tilt angles, it is
recommended to perform the calibration for the next higher tilt angles, too The
stage is to be tilted to 8° now. An eventual drift from the vertical line can be
corrected by means of the scroll bar Compu. Tilt Error. Clicking the key
“Next” will continue the calibration for the following tilt angles in the same
way as explained above.

Further iterations are possible (8°, 15°, 30° and 45° tilt).

When all iterations of the calibration routine have been done, this window will
open at the end of the procedure. The calibration has been completed and can
be finished by clicking “OK”.
The stage moves back to the initial position.

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5.9.3 Stage Horizontal Alignment

The function Stage Horizontal Alignment, aligns an object imaged in the scan area automatically to the
horizontal line. For this, two points of the respective object must be defined. Open this function by using the
Pop-Up menu TOOLSÆ GO TO PANEL... or using the SEM Control- window Stage and clicking the right
mouse button in the lower right part (see 5.4).
Precondition for the use of this function is the calibration of the rotation center (see 5.9.1).

After opening this function, a graticule will

automatically be displayed on the screen. One
of the two points must be centered now.

To do so, you may use the joystick or the

function Center Point. After centering click
the key “Next”.

Now the second reference point must be

centered by using the joystick or the function
Center Point. After centering click “Next”.

The respective object will be positioned

horizontally on the screen by aligning the
corresponding stage axes. The second
reference point will be in the center. Finish
the function by “Finish”.

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5.10 Stage Control
The window Stage Control is opened using the Pop-Up menu STAGEÆ STAGE CONTROL. It contains
important stage functions. The window is subdivided into six index cards.

Stage Survey tab (see 5.7):

Definition of the Survey parameters as well as starting and ending the
Survey Mode.
Stage Status tab (see 5.10.1):
Indication of the actual stage positions, scanning of fields, absolute and
relative coordinates.
Stage Navigation Tab (see 5.10.2):
Navigation help for the position of the sample holder in the sample chamber.
Stage Properties tab see 5.10.3):
Pre-settings for the motorized stage and definition of limits for the different
stage axis.
Stage Points List tab (see 5.10.4):
Saving and scanning stage coordinates.
Stage Scanning tab (see 5.10.5):
Definition and scanning of special image fields.

5.10.1 Stage Status tab

The index Tab Stage Status tab contains, as does the SEM Control window Stage, the values of the actual
stage positions in the fields in Stage At. Using Go To or Delta, absolute and relative coordinates, for the
stage may be entered and scanned.
The field Field Movement allows scanning the predefined image fields of
the function Stage Scan (see 5.5) by means of the arrow keys if the control
box Move using Stage Scanning fields has been activated. If not, the arrow
keys will refer to the respective image feature displayed on the screen.
Clicking the corresponding key will displace the stage in horizontal or
vertical line, dependant on the respective feature.

Clicking the pause key will immediately stop the stage movement.
In Compuc. Mode= it is possible to select the corresponding operation mode
of the compucentric software.

The field Stage Is = defines the status of the motorized sample stage (Idle:
stage at stand still, Busy: stage moving).

The movement of the stage can be stopped immediately by clicking “Stage

stop” whereas “Undo Stage Go To” will undo the movement to the last
position.

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5.10.2 Stage Navigation Tab
The index Tab Stage Navigation Tab provides the ability to get a visual impression of the position of the
sample holder in the sample chamber and to control it in direction of the X, Y and R coordinate. The upper
field Side-on shows the side view of the sample holder. The blue quadrangle symbolizes the limits of the
stage for the Y and Z-axes. The tilted horizontal line indicates the sample height (settings on sample height
and sample holder see 5.10.3).

The lower field Perpendicular shows the top view of the sample holder. If
the stage is not tilted, the horizontal line will also be indicated. The
intersection between horizontal and vertical line symbolizes the position of
the electron beam on the sample holder (not displayed in the example!).
Double-clicking the left mouse button on a position of the sample holder
will drive this point to the intersection by means of X and Y axes. Double-
clicking the middle mouse-button will drive the point to the corresponding
position by means of rotation.
If limits have been set for the X and Y-axes, these will be indicated as a blue
quadrangle within the field. The thick blue line shows the position of the
chamber door.
If imaging fields have been defined (see 5.5), they may be indicated in the
field Perpendicular by activating Show Fields. The red grid will symbolize
position and size of the fields in reference to the stage center.

5.10.3 Stage Properties tab

The index Tab Stage Properties tab allows different settings for the sample stage and for the sample holders.
In the upper field General basic settings for the sample stage may be selected, in analogy to the SEM
Control window St
age (see 4.3.6).
Z move on Vent:
Activating this function will drive the table automatically to the lowest Z
position at any venting of the chamber.
Track Z:
Activation of this function will result in the attempt to readjust the focus
automatically at any change of the Z coordinate.
Stage Backlash:
Activating this control box will perform a backlash correction at any stage
movement.
Stage XY+Z:
This setting will affect the routine Stage Scan (see 5.5). If the control box is
not activated, the stage will not drive in the Z direction when scanning the
different fields. If the control box is activated, a Z movement (dependant on
the value Tilt Compensation) will be performed in relation to the Z start
coordinate if movement is in the tilt direction.

Protected Z:
If this function is activated, the actual Z coordinate will be compared to the new coordinate when loading
saved stage positions. If the new Z position is higher then the actual position, the stage will first move to the

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X/Y/T/R coordinates and then to the new Z position. If the new Z position is lower, the stage will first move
to Z and then drive to the other axes.
Joystick Disable:
Switching on and off the joystick on the hard panel

Using Sample Holder= the adapted sample holder may be selected. This affects the kind of display in the
window Stage Navigation Tab. It is possible to select between Single (single sample holder), Multi (eight-
fold sample holder) and Generic. By means of the function “Settings” different settings for sample holder
and respective sample may be entered.
Spacer Thickness:
The entered value of the thickness of a used spacer.
Sample Holder Offset:
The entered value of the offset angle for the sample holder.
Specimen Height:
The entered value of the sample height.

The operation mode to be used for the functions Center Point and Center Feature (see 5.4) can be selected
using Center Point Function.
Setting limits (see 5), for the different motorized axes of the stage is possible using Set Limits.

5.10.4 Stage Points List tab

The index Tab Stage Points List tab provides the ability to drive to saved
stage positions or to save new positions. New stage positions may be added
to the list by clicking “Add”, to delete or to edit a selected position from the
list click “Delete” or “Edit”. Moving to a saved position is possible by
double-clicking the left mouse button on the corresponding annotation in the
list or by using the arrow keys and the key “Go to Selected point” in the
lower part of the window. Pressing the key “Undo Stage Go To” will undo
the movement to the last position.

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5.10.5 Stage Scanning tab
The index Tab Stage Scanning tab summarizes the different functions of the
software option Stage Scan (see 5.5). The upper part will show the defined
fields, horizontal and vertical lines will indicate the respective overlapping.
Driving to a special field is by double-clicking the left mouse button within
the respective field in the graph or by using the arrow keys in Field
Navigation. Clicking the key with the double arrow will drive to the first or
last field. The other two keys allow a one by one movement from field to
field. It is also possible to double-click the left mouse button on at field in
order to drive to a separate field by entering the X and Y position. Using
Stage Scan Pattern selection of the different scan patterns is possible.
Two possibilities are available for the definition of a defined sample area
and for the calculation of the fields. Clicking the key “Advanced” will open
the window Stage Scan (see 5.5). When activating the key “Setup Wizard”,
the user will be helped to go through the definition of the fields.

Opening the function Setup Wizard will first open a window

to perform two pre-settings. Activating Set minimum Mag...
and confirming with “Continue” will automatically set the
smallest possible magnification. By means of the function
Center Feature a corresponding sample feature may be
selected. Selecting Enter co-ordi... and confirming with
“Continue” will automatically switch to the second window.
In this window the start and end coordinates of the respective
sample feature will be entered manually by double-clicking
the left mouse button on the corresponding figure. Clicking
the key “Continue” will close the window and set
automatically the function Center Feature on the microscope.
After selection of a corresponding sample feature, the second
window will be opened.

This window indicates the start and end coordinates of the

sample feature. Editing the coordinates is possible by double-
clicking the corresponding figure with the left mouse button.
After confirming with “Continue” the next window will open.

In this window the user will find the explanation of the

following procedure.
Clicking on “Next”, will automatically assign the function
Mag to the left mouse button. The actual window will be
closed. Now the user may set a special magnification From
this field size the number of scan fields will be calculated. .
Clicking “Done” will accept the magnification and switch to
the next window.

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The last window indicates the calculated number of scan
fields in X and Y direction. When double-clicking the left
mouse button on Field Overlap =, a percent value may be
entered for overlapping of fields. Depending on this value
there may be modifications in the number of fields.
Pressing the key “Finish” will finish the definition and close
the window.

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6 Special Applications and Settings

6.1 User Preferences

The function User Preferences provides the ability to enter special pre-settings for the user interface. The
window, which is subdivided into six index cards, is opened using the Pop-Up menu TOOLSÆ USER
PREFERENCES.

1.) Privileged User Directory Setup:

Enables modification of the user directory if this option has been authorized for the respective user in the
Administrator (see 2.1). When loading user-specific parameters (e.g. Load state, Load Annotation, Macro
Library etc.), this directory will be used.

2.) Privileged Image Directory Setup:

Allows modification of the image directory (see 2.1) if this option has been authorized for the respective
user in the Administrator. Enables loading images from this directory or saving images to this directory.

3.) SEM Conditions:

Emission Mode allows selection of automatic brightness and contrast of the detector image when switching
to the emission mode. If Auto Signal is switched Off, the user settings will be used for the respective
detector. Selecting Crosshairs you may select whether a graticule is to be displayed automatically when
selecting emission image. Two presettings are available for the focus wobbler. Activating Reduced Raster
will switch automatically to the scan mode reduced scan when selecting focus wobbler. Using Scan Rate you
may select the scan speed of the electron beam for scanning the sample.
When activating Beam Blanking the beam will be blanked by using the electromagnetic aperture system
after freezing the image. Thus, the sample will not be scanned while the image is frozen, minimizing beam
damage.

The selection Aperture Align provides the choice to select whether the settings for Aperture Align and Gun
Align, of the different apertures, are to be saved when storing special instrument settings using Save State
(see 4.1.4).
The selection, Beam Shift Mag., allows pre-selection of the magnification above which the center functions
Center Point and Center Feature are to be performed only by means of the beam shift.

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The field Magnification Display provides the ability to select the output device for the calculation of the
magnification. Selecting Polaroid 545 means that the magnification index refers always to the size of a
Polaroid. Modifications of the parameter Output to in the SEM Status- window will therefore not affect the
magnification index. If however Current Output Device has been selected, the user may decide on the output
device, which the magnification shall refer to. For this purpose, the parameter Output to may be selected in
the SEM Status- window. Double-clicking the left mouse button on this parameter will select the respective
device.

4.) Pressure – Language – User Level – Error Messages:

By clicking the different selections in Pressure Unit the pressure unit may be switched to Torr, Mbar and
Pascal.
In Language you may select the language to be used for the display of menus, parameters and for the
navigation texts. At present, switching to German and French is only partially possible for menus and
parameters. The navigation texts are only available in English for the moment.
The settings in User Access Level refer to the parameters and commands which can be selected e.g. in the
SEM Status window (see 4.4) or using the annotations (see 4.7) .The respective level can be set by clicking
Novice, Expert or Service.

Novice: frequently used parameters and commands.

Expert: parameters and commands which might be useful for an advanced user

Service: Activation of all available parameters and commands

The selections in Error Messages offer the ability to select how the software is to handle error messages

Acknowledge on event: Indication of error messages. If this key is activated, a window appears at each error
indicating the error to the user. Work can only be continued after acknowledgement
deactivating this key will write the respective message in a list of error messages. In
the SERVER, this list can be checked using Review Unacknowledged Messages or
deleted by clicking Clear Errors + Warnings.

Pop Up on Warning: If this key is activated, a pop up error message will appear for each error. If not, the
dialogue window will remain in the background.

Suppress Warning: If this key is activated the Warning message will be displayed in a dialog window. If
the key is not activated no Warning message will appear, however a message will be
written into the list of Errors and Warnings.

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5.) Stage:
The selection field Backlash allows the selection of the backlash correction for the different motorized axes.
This will increase the travel precision of the stage. When scanning certain sample areas, it may be advisable
to use a higher scan rate during the stage travel. If a corresponding area has been identified, you should
switch back to a lower scan rate to get a noise free image. Such a presetting is available using Fast
Scanning. When switched On, the system will switch to the scan rate selected in the selection bar whenever
the stage is moved. When the stage movement stops, the scan rate will be switched back to the value set
before stage movement began. The same function is valid for the use of noise reduction. (Noise Reduction).

6.) Magnification Table:

Up to 10 fixed magnification values can be entered into the magnification table to be activated later on by
clicking the key “F4”. The system will advance continuously from one magnification to the other. Each
clicking. of the key “F4” on the keyboard will set the next magnification value. By means of the key
combination. Shift + F4 operating with the magnification table will be completed and the original
magnification will be reset on the microscope.

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6.2 Bake out of the Ion Getter Pump (IGP)

Evacuation of the gun head is by means of a ion getter pump whose pumping ability will decrease in the
course of time. Regeneration is possible by heating to increase the pumping capability. Under normal
conditions, the vacuum in the gun assembly will decrease continuously. Once the vacuum has decreased to a
value in the upper 10-9 range (8 to 9*10-9 mbar) the IGP should be baked out. This bake out procedure can
only be started by authorized personnel (supervisor privilege see 2.1).
Bake out:
1.) Switch off the EHT and the gun.
2.) Remove the high voltage cable from the gun head, the EHT supply cable is attached by a plug
connection locked by a black cap with bayonet joint or by four screws. To remove the cable turn the
black safety cap to the left, or loosen the four screws and remove the plug straight upwards with the
cable . IN ORDER TO AVOID ANY MISALIGNMENT OF THE GUN HEAD YOU SHOULD
TRY NOT TO EXERT ANY SIDE FORCE.
3.) The cable plug on the gun head should be covered with aluminum foil to ensure the cleanliness of the
gun area. It is also recommended to protect the high-tension plug on the cable, against contamination by
covering it with aluminum foil or by using an antistatic bag (i.e. PCB foil packaging).
4.) Open the Bake out- window using the Pop-Up menu TOOLSÆ GO TO PANELÆ BAKEOUT.

In the window Bake out four different bake out cycles may be selected:

Quick: 2 hours heating/1 hour cooling

Overnight: 8 hours heating/2 hours cooling
Weekend: 40 hours heating/3 hours cooling
User: Individual setting of heating and cooling time. When
double-clicking the left mouse button on Bake out Heat a value between
1 and 200 hours may be entered. The same procedure is applicable for
Bake out Cool. Cooling periods from 1 to 5 hours will be possible.

5.) After selection of the desired bake out cycle, the bake out procedure may be started using Bake out
State. Start of the bake out process is only possible for users with supervisor privilege. In the User
Preferences (see 6.1) the USER ACCESS LEVELÆ SERVICE must be activated.
6.) At the end of the bake out re-insert the plug into the gun head, a pin has been fitted to the plug, which
will allow the cable to only fit in the correct position. After insertion of the plug the electric supply will
be locked again by means of the black protection cap with bayonet joint, or the four screws. AGAIN, BE
CAREFUL NOT TO EXERT ANY SIDE FORCE ON THE GUN HEAD!
7.) Now gun and EHT can be switched on again.

Bake out of the IGP is possible in normal operating or standby modes. If, after start of the bake out, the user
interface is to be switched off and the instrument set to standby mode, deactivate the function Partial Vent
on Standby, in Vacuum in the SEM Control window. When partially venting the sample chamber, the bake
out procedure will automatically be stopped.

When baking out the IGP intense heat will develop. You should therefore be careful not to place any
flammable objects on the protection grid behind the electron-optic column

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6.3 Special Scan Modes

Different scan modes are available in the LEO 32 software, used for adjustment procedures, imaging of tilted
samples or the display of different detector signals. These different options can be opened using the Pop-Up
menu SCANNING or by activating the corresponding symbol in the toolbar.

6.3.1 Reduced Scan (Reduced)

The reduced scan should be used especially for adjustments such as focusing, stigmation or for use of the
focus wobbler. After selecting reduced scan, a frame will be displayed on the screen. If the license
REDUCED has been installed, size and position of this frame can be varied. The frame will define the area
on the sample, which will be scanned by the electron beam. It can be burnt in a saved image if the control
box Annotation (see 4.5) has been activated when storing the image. In the stored image, this frame will be
represented as a white square.

6.3.2 Split Screen (Requires the Licence: SPLIT)

On selection of Split Screen, the image area will be subdivided in two zones. Each zone can be assigned
different detectors, and each zone can be frozen independantly from the other. The anchor symbol will
determine which zone detector selection, setting of brightness and contrast or the freezing/deleting will apply
to. Depending upon the side where the anchor has been placed (move the anchor by holding the left mouse
button and dragging the anchor to the desired side), all parameter settings will apply to this area. Double-
clicking the left mouse button on the anchor symbol will assign certain settings to both zones simultaneously

Parameter modifications will only apply to Parameter modifications will apply to

one image zone both image zones.

6.3.3 Magnification of a Feature (Dual Mag ) (Requires the Licence: DUALMAG)

The function Dual Mag enables the imaging of a zoomed image in the Split Screen mode without freezing
the image during the basic magnification. Upon selection of this function, the screen will be subdivided into
two zones and will therefore have the same appearance as Split Screen. Moving the mouse cursor to the
vertical line in the center of the screen will create a double arrow. The size of the frame can be varied by
holding the left mouse cursor and dragging it. In the right image field, the selected area will now be
displayed in the zoomed magnification. It is also possible to change the position of the frame. Another option
to enter a zoom factor is via the SEM Control- window Scanning (see
4.3.2). The frame may be burnt in a stored image if the control box
Annotation (see 4.5) has been activated when saving the image. This frame
will be represented as a white square in the stored image.
The dual mag is useful to point out a specific detail in an image when
observing an image of the sample at low magnification.

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6.3.4 Dynamic Focus (Dynamic Focus) (Requires the Licence: DYNFOCUS)

The function Dynamic Focus enables a dynamic adjustment of the focus

during the scanning of the beam on tilted sample surfaces. The window will
be opened using the Pop-Up menu SCANNINGÆ ROTATE/ TILT or Æ
DYNAMIC FOCUS. Using the control box Dyn. Focus the dynamic focus
can be switched on or off. As the dynamic focus is effective in the Y
image direction , the sample surface must be tilted so that the upper image
border is placed at the sample point with the highest working distance, the
lower image border must be positioned at the sample point with the
smallest working distance. If the sample surface is not tilted in the proper
direction, compensation is possible by use of Scan Rotation.

Setting up Dynamic Focus:

⇒ Open and activate the function Dynamic Focus

⇒ Check if FCF Setting has been set to 0%
⇒ Select reduced scan
⇒ Adjust the reduced scan to a thin horizontal line
⇒ Adjust the focus of the image in the center of the screen (use of the
hair-cross) at a slow scan rate
⇒ After focusing the image center, move the reduced scan to the upper or
lower image border
⇒ Adjust the focus, of the reduced area, by means of the scroll bar FCF
Setting at a slow scan rate (min. Scan Speed 10). The normal focus
must not be used for image optimization any more!
⇒ Switch off the reduced scan and scan the entire image using noise
reduction
⇒ Switch off the dynamic focus

6.3.5 Tilt Correction (Requires the Licence: TILTCOMP)

This function corrects the perspective reduction caused by the scanning of

tilted samples. At high tilt angles, the electron beam will scan a larger part
of the sample in the tilt direction. This will result in a distortion of the
image. An adjustment of the scanning amplitude in the tilt direction can
compensate this effect.
As with Scan Rotation, the window will be opened using the Pop-Up menu
SCANNINGÆ ROTATE/ TILT. The tilt angle correction can be switched
on or off using the control box Tilt Corrn. The respective tilt angle may be
entered by double-clicking the left mouse button on Tilt Angle or by using
the scroll bar. . Just as for the use of the dynamic focus, you must take into
consideration that the sample surface must be inclined in the screen Y
direction. The adjustment will be performed in the same way as dynamic
focus. For strongly tilted samples, the tilt correction should be used
together with the dynamic focus.
If the sample surface contains steps or other elevations, they will be more
distorted when using the tilt correction. A successful application of this
function is therefore only possible with relatively flat samples

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6.3.6 Scan Ratotion (Requires the Licence: SCANROT)

Scan Rotation allows an electronic rotation of the image by rotating the scan
direction. This window may be opened by means of the Pop-Up menu
SCANNINGÆ ROTATE/ TILT. Using the control box Scan Rot the scan
rotation may be switched on or off. Enter the required rotation angle by
double-clicking the left mouse button on Scan Rotation or by using the scroll
bar. The entered value will be saved when switching off the scan rotation and
reset when switching back on.

6.4 Image Processing (Requires the License: IMMATH)

The functions of Image Processing offer the ability to manipulate mathematically the content of the image
store: e.g. by use of Kernel functions, by adding or subtracting images or by detecting gray scale
distributions. They also allow simple calculations of surface fractions. Two image stores are available:
Buffer A and Buffer B. The image store A is permanently displayed on the screen whereas image store B is a
background store.
The window can be opened using IMAGEÆ IMAGE PROCESSING.

6.4.1 Manipulation of Images (Image Maths)

Click the key “Execute” to apply the preset operation to the respective image
store. By clicking Undo the last action can be undone. Depending on the
settings for Source and Destination, the operations will be performed from A
to B or vice versa.
Copy To: Copying the content of an image store to another image store
Exchange With:
Exchange of the contents of two image stores.
Add:
Adding the contents of both image stores. The result will be saved in image
store A. If the sum of gray scales of Pixel A+B is superior to 255, 255 will be
result value.
Subtract: Subtracting the content of both image stores. The result will be
stored in image store A. If the difference of gray scales of Pixel A+B is
inferior to 0, 0 will be result value.

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Min:
Identifying the minimum of each pixel in A and B and saving in A.

Max:
Identifying the maximum of each pixel in A and B and saving in A.

6.4.2 Gray Scale Detection (Threshold)

Threshold defines the threshold criteria.. Selections are: Black, White and
Gray.
Black:
Each pixel in the image store with a value inferior to the black threshold will
be colored red. (Black Threshold).
White:
Each pixel in the image store with a value superior to the white threshold
(White Threshold) will be colored red.
Gray:
Each pixel in the image store with a value superior to the black threshold and
inferior to the white threshold will be colored red.

The scroll bars Black Threshold and White Threshold allow setting the threshold values for black and white.

If certain gray scales are colored red in the image, the area fraction can be calculated by clicking the key
“Update”.

If stored images are processed by means of this function which contain annotations and measurements, the
gray scales of these objects will be integrated in the calculation and display.

6.4.3 Histogram Equalization

Clicking the key “Histogram Equalization: Store” the image store will be opened for the calculation of a
gray scale distribution which will improve the contrast of the image.

Clicking the key “Histogram Equalization: LUT” will transform the image
by using a Display- LUT so that work can be done with a live image.

Reset LUT will reset the calculated Display- LUT

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6.4.4 2D Filters

The function 2D Filters provides selecftion of a kernel which will be applied to the image in image store A
or B. The result of this tranformation will be normalised to the gray scale range 0 to 255. All predefined
kernels are based on a 3x3 matrix to which whole numbers have been assigned. Furthermore, an editor is
available to define matrices up to 5x5.
Using Source the store will be selected which the transformation is to be applied to. Nine predefined filters
are available. After selection of the filter start the transformation by clicking the key “Execute”. The last
calculation can be undone by pressing the key “Undo”.

Smooth:
Will smoothen the image
Sharpen:
Will increase the focus
Sharpen 2:
Will increase the focus
Horizontal Edge:
Will detect horizontal edges in the image
Vertical Edge:
Will detect vertical edges in the image
Edge Detect:
Will execute a nondirectional edge detection by means of a combined
detection of horizontal and vertical edges in the image.

Edge Detect 2:
Will execute a nondirectional edge detection by means of a combined detection of horizontal and vertical
edges in the image.
Laplacian:
Will detect edges in the image by performing a Laplace transformation using the four neighbor pixels.
Laplacian 2:
Will detect edges in the image by performing a Laplace transformation using the four neighbor pixels.

Pre-defined filters:

If you want to use user specific filters, User Defined must be selected in the menu Filters. After pressing the
key “Execute” a list will be displayed (Apply User Defined Filter) indicating any already existing filters. If
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no user specific filters have been defined yet, a warning message will first be displayed. After confirmation
of this message the window Apply User Defined Filter will be opened where already created filters can be
selected, edited or deleted and where new filters can be created by clicking the key “New”. Each filter can be
assigned a separate name. The Filter Kernel Matrix allows the user to define a new filter.

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6.5 Editing the Toolbar

Editing the toolbar can be done according to customer need. The toolbar editor is opened by using the Pop-
Up menu EDITÆ TOOLBAR. The left list will indicate all available symbols (52 at present). The symbols
of the actual toolbar will be listed in the window User Toolbar. Arranging the different symbols within the
toolbar is possible by selecting the corresponding symbol and clicking the “Move Up” or “Move Down”.
New symbols may be selected in the window Available Button Images and added to the actual toolbar by
clicking Add. In the same way symbols can be removed using Remove.
Edited toolbars can be saved using Save As with a file name. If toolbars have already been saved as a file
they can be loaded to the user interface by using Load. Clicking the key “Default” will load the standard
toolbar for the user interface.
If you want to modify the assignments of the different symbols, the corresponding configuration can be
edited by selecting the index tabs Left Mouse Click Button Assignments and Middle Mouse Click Button
Assignment. Selecting a symbol in User Toolbar Buttons will automatically display the respective function
assignment in the window Select Button Action. Activating another function in the selection list will modify
the assignment. It is also possible to attach a short explanation to the different symbols. This explanation will
pop up for a short time below the mouse cursor when positioning it on a symbol of the toolbar. This text will
give information on the actions performed on activating the corresponding symbol with the left or middle
mouse button.

Explanations for the already existing symbols can be opened using the selection window Tip Text. They are
also listed behind each symbol in the window User Toolbar. Entering new text or editing an already existing
text is possible by clicking the key “Resource” in the window Tip Text. It is recommended to separate the
descriptions for left and middle mouse button by a (/).
Modifications of the toolbar will have to be confirmed by clicking “apply” and “OK” to load the respective
modification to the user interface.

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6.5.1 Setting a New Symbol (Example)
The addition of a symbol to the actual toolbar and the assignment with special routines will be explained

below by means of an example. The assignment of the symbol will be as follows:

Clicking the left mouse button: left mouse button assignment: Beam Shift
Clicking the right mouse button: Opening the 4QBSD detector window.

First, click the corresponding symbol in the left bar with the left mouse button and copy it to the actual
toolbar by pressing the key “Add” . Then edit the assignment for the left mouse button by switching to the
index Tab Left Mouse Click Button Assignments . In the list SEM Control you may now open the different
submenus.

Commands: Contains various commands (e.g. EHT On, Scan Speed 3, etc.).
Dialogs: Contains the commands to open menus and windows in the LEO user interface.
Macros: Lists all macros, which are part of the standard macro library. If user macros have
been implemented to the library, they will be listed in this section.
Mouse: Contains various parameters to be set or adjusted by means of the mouse.
Parameter: Lists various commands to read or set important parameters of the microscope.
Special Function: Contains the two routines Restore The System Conditions and Save The System
Conditions (see 3.1.1).
Toggle: Lists digital parameters to be used as a switch (e.gScan Rot, Spot, etc.).

As the left mouse button shall be assigned the function Beam Shift and as this function can be performed by
means of the mouse, double-click the submenu Mouse and select the listed command Beam Shift X. A
rhombus in front of the denomination will symbolize the selection.

When activating the submenu Mouse, the right list Middle Mouse Button Adjustment will be activated
simultaneously. As many mouse functions can be aligned with only one mouse button, it is possible to assign
the middle mouse button to another routine.
Now for the assignment of the middle mouse button. First, select the index Tab Middle Mouse Button
Assignments. Open the menu for the LEO user interface by means of the middle mouse button, open the list
Dialogs and select the command 4QBSD. If you wish to add a short explanation for the symbol, switch to the

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index Tab Left Mouse Click Button Assignments and click the key “Resource”. This will activate the field
Tip Text: where you can enter the desired explanation text (e.g. Beam Shift/ 4QBSD).
To save the modifications in the actual toolbar, close the editor by clicking OK..
The symbol will now be displayed in the toolbar. By clicking it with the left mouse button, the mouse button
assignment will switch to beam shift. That means that the image field can be moved when pressing the left
mouse button. The middle mouse button will keep its original assignment. Clicking the symbol with the
middle mouse button will display the 4QBSD menu on the screen. (see 4.3.1).

6.5.2 Use of Bitmaps as Icon Symbols

It is also possible to use bitmaps in the toolbar. Each symbol available by default in the LEO user interface
has an internal number. The numeration of these symbols is listed in the table below. If you want to replace
one of these symbols by bitmap, the corresponding bitmap must have the file name Tooln.bmp. The letter

“n” will be the number of the replaced symbol. If you want to replace the symbol by the symbol
the file name must be “Tool30.bmp” .
User bitmaps can be created by means of the program MS Paint part of the Windows® operating system.
When creating a symbol it is important to file it with a size of 32x31 Pixel. This size can be set in MS Paint
in the menu ImageÆ Attribute (breadth 32- height 31 Pixel). After creation of the bitmap, it must be saved
as a 16-color-Bitmap.

Depending on the settings in the Administrator (see 2.1) the bitmap will have to be copied to the following
directories.

1. USE COMMON TOOLBAR is not activated:

a) To the corresponding user directory if the symbol shall only be available to the user.
b) To the directory “C:\Program Files\LEO\LEO32\Distrib” if the symbol shall be available to all users
excepting those which must use the COMMON toolbar

2. USE COMMON TOOLBAR is activated:

To the directory “C:\Program Files\LEO\LEO32\USER”.

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If you want to delete a symbol from the toolbar, it must be deleted in the corresponding directory. THE LEO
user interface must then be started again.

Symbol 1 Symbol 14 Symbol 27 Symbol 40

Symbol 2 Symbol 15 Symbol 28 Symbol 41

Symbol 3 Symbol 16 Symbol 29 Symbol 42

Symbol 4 Symbol 17 Symbol 30 Symbol 43

Symbol 5 Symbol 18 Symbol 31 Symbol 44

Symbol 6 Symbol 19 Symbol 32 Symbol 45

Symbol 7 Symbol 20 Symbol 33 Symbol 46

Symbol 8 Symbol 21 Symbol 34 Symbol 47

Symbol 9 Symbol 22 Symbol 35 Symbol 48

Symbol 10 Symbol 23 Symbol 36 Symbol 49

Symbol 11 Symbol 24 Symbol 37 Symbol 50

Symbol 12 Symbol 25 Symbol 38 Symbol 51

Symbol 13 Symbol 26 Symbol 39 Symbol 52

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6.6 Macro- Editor

By means of macros, certain control commands and routines of the SEM can be combined in a list. When
starting the macro, they will be processed one after the other. It is also possible to insert loops in a macro so
that certain conditions of the microscope will first be read before starting a routine or a command.
The Macro Editor will be opened using the Pop-Up menu TOOLSÆ MACRO EDITOR.

Menu: File

The menu File contains commands and routines necessary for creating, editing and saving macros. A macro
can be saved as a file on a storage device (Save Macro to File) or be implemented in the macro library (Save
Macro to Library). The macro library contains a composition of all macros available in a specific user list.
These macros may also be used for the assignment of symbols in the toolbar (see 6.5.1) and for programming
function keys (see 6.6.2).

New Macro: Creating a new macro. The macro must be given a name and a version number.

Edit Macro: Editing a macro in the macro library. Selecting this menu will open a window where the
corresponding macro can be selected from a list

Delete Macro: Deleting a macro in the macro library. Selecting this menu will open a window where the
corresponding macro can be selected from a list

Clear Editor: Deleting the content of the Editor

Save Macro To Library: Saving the macro in the macro library

Save As Macro To Library: Saving the macro in the macro library; the corresponding macro may be
assigned a new name before storing

Load Macro File: Loading a macro file from the actual user directory

Save Macro To File: Storing a macro in the actual user directory with the same name.

Save As Macro To File: Saving a macro in the actual user directory. The corresponding macro may
be assigned a new name before storing

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Save As Macro To Common File: If the macro is to be available to other users, it will be saved as a
common macro in the directory C:\Program Files\Leo\Leo32\User.

Macro Locations...:

List of all available macros in the actual user directory, the directory
C:\Program Files\Leo\Leo32\User, the directory C:\Program
Files\Leo\Leo32\Distrib and the actual macro library (Library).

Rename Macro: Change the name of the actual macro

Print...: Printing the macro text on the standard printer

Print Setup...: Open of the printer setting

Exit: Exits the macro Editor

Menu: Edit

The menu Edit provides the ability to edit or delete different program lines, to copy the content of the macro
editor to the buffer store or to insert the text in another Windows® application.

Undo: Undoing all modifications in the macro Editor since last storage

Edit Item: Editing a selected program line of the macro

Delete Item: Deleting a selected program line of the macro

Clipboard: Copying the macro text to the buffer store

Timeout...: Setting digital and analog parameters (see below) and editing of commands must be done
within a certain time. If within this space of time (timeout) the corresponding parameter
cannot be selected/modified or if a command cannot be edited, an inquiry will be displayed.
The user will now have to decide whether he wants to exit the macro, to ignore the command
and to go to the next program line or whether he wants to wait for the next timeout. Although
this timeout is set to 10 seconds by default, it can be modified using the command
Timeout....

Menu: View

Toolbar : Switching on and off the toolbar

Status Bar: Switching on and off the status bar

Menu: Insert

When activating the menu Insert, the different program lines of a macro will be inserted. It is possible to
insert commands, loops, decision structures, digital and analogous parameters or to open special window
within the Leo32 user interface. Within a macro, it also provides the ability to open another macro, which is
part of the macro library by clicking Open Macro. Furthermore, other Windows® may be started using the
command Execute Program.

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Decision Structure:

Two different kinds of loop constructions are possible. The IF THEN loop will enable a selection between
different instruction sequels depending on a condition status.

IF “condition” = true (or not true: IF NOT) then

Instruction sequel A
Optional: ELSE- instruction
Instruction sequel B (for the ELSE- part of the loop)
END IF

Example:
A macro is to be created which will allow automatic switch between SE and QBSD detector. First open the
Command New within the Pop-Up menu FILE. Assign a name to the macro (e.g. detector). Now select the
parameter Detector using INSERTÆ DECISION STRUCTUREÆ IF THEN and set it to SE2. This will
define the condition for the If loop. The next step is to define the instruction sequel A. Using INSERTÆ
DIGITAL PARAMETERÆ SET DIGITAL STATE the parameter Signal A= will be set to QBSD.

If you want, you may insert an ELSE instruction. Example: The detector QBSD has already been selected
and you want to switch back to the SE detector using the macro. To do so, INSERTÆ DECISION
STRUCTUREÆ ELSE. Now the instruction sequel B can be defined (INSERTÆ DIGITAL
PARAMETERÆ SET DIGITAL STATEÆ Signal A= SE2). To define the end of the IF loop, select
INSERTÆ DECISION STRUCTUREÆ END IF . Then define the end of the macro by clicking
INSERTÆ END A MACRO.

This macro can be added to the macro library by selecting FILEÆ SAVE MACRO TO LIBRARY. Thus, the
macro can also be used for a symbol of the toolbar (see 6.5.1).

By means of the WHILE loop, a sequence of instructions can be repeated as long as an entered condition is
still true.

WHILE “condition”= true (or not true: NOT WHILE) then

Instruction sequel
END WHILE

Example:
You want to create a macro switching to the function Center Point for map magnifications (Mag Range=1).
After centering a point, the macro will wait a short time. In this time, the user can modify the magnification,
e.g. to magnify a detail. If the magnification is still small, the system will switch again to the function Center
Point , and the macro will wait again. This instruction sequel will be performed until a respective detail has
been centered and magnified in a higher magnification.
First, open the Pop-Up menu FILE and select the command New. Assign a name to the new macro (e.g..
Center Point). Now click INSERTÆ DECISION STRUCTUREÆ WHILE and select the parameter Mag

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Range that will be set to 1. This will define the condition for the WHILE- loop. The next step will be to
define the instruction sequel. Click INSERTÆ SPECIAL UIF FUNCTION and select the function Center
Point.

To be sure that the mouse button assignment is set to Mag/Focus, click INSERTÆ MOUSE and assign the
magnification to the left mouse button and the focus to the middle mouse button. Then select INSERTÆ
DELAY to insert a waiting cycle which will enable the user to center a point and, if necessary, to modify the
magnification.

Finish the WHILE- loop using INSERTÆ DECISION STRUCTUREÆ END WHILE.
Finally, define the end of the macro by clicking INSERTÆ END A MACRO. The macro can be added to the
macro library using FILEÆ SAVE MACRO TO LIBRARY. By doing so, it will also be possible to use the
macro for a symbol of the toolbar (see 6.5.1).

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Digital Parameter: Inserting digital parameters in a macro.

Analogue Parameter: Inserting analogous parameters in a macro.

Command: Inserting a command in a macro.

Stage: Inserting instructions for the motorised axes of the sample stage.

Panels: Opening and closing windows of the LEO 32 user interface.

Open Macro: Opening a macro in the macro library.

Display Message:
The Routine Display Message provides the ability to display message on the screen. After confirming this
message with “OK” , the macro will continue to be processed. It is also possible to perform a Yes/No inquiry
within this message by clicking Enter A Message and activating Yes No Box. The result of this inquiry can
be saved in a flag to be evaluated later on.

Example:
A macro is to be created which will first ask whether the stage has been initialised. If it is not, the user shall
be asked a YES/NO inquiry . Answering “Yes” will initialise the stage; answering “No” will finish the
macro.
First, click the Pop-Up menu FILE and select the command New. Assign a name to this new macro (e.g.
Display Message). Now click INSERTÆ DECISION STRUCTUREÆ IF THEN and select the parameter
Stage Initialized which will set to NO. By doing so, the first inquiry will be realized. Now, insert the user
inquiry using INSERTÆ DISPLAY MESSAGE. In the upper part of the panel Message, you may enter a
message or a question. The YES/NO inquiry will be established by activating the field Yes No Box.

The result of the inquiry will be saved in the variable Flag 0. Using INSERTÆ DECISION
STRUCTUREÆ IF THEN a new loop will be inserted evaluating the variable Flag 0. If Flag 0 = 1
(answering YES to the question), the stage must be initialized. Click INSERTÆ COMMAND and insert the
command Stage init. As the macro is to stop if the answer is “No”, an ELSE instruction will be inserted in
the second IF THEN loop (INSERTÆ DECISION STRUCTUREÆ ELSE). After the ELSE- instruction,
ending the macro will be inserted using INSERTÆ END A MACRO . The two IF THEN loops will be
closed after selecting twice, INSERTÆ DECISION STRUCTUREÆ END IF.

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Finally, define the end of the macro using INSERTÆ END A MACRO. The macro may be saved to the
macro library by selecting FILEÆ SAVE MACRO TO LIBRARY . It will thus be possible to use this
macro also for a symbol of the toolbar (see 6.5.1).

Special UIF Function: Opening functions in the LEO32 user interface.

Mouse: Programming the mouse button assignment.

Knob: Programming the encoder of the hard panel (planned for Hardpanel Mark 2).

End A Macro: Inserting the instruction for ending a special macro.

Pause: Inserting a pause function in the macro. If this function is opened on processing the macro,
an inquiry will be displayed. The user will have to decide whether he wants to end the
macro, to ignore the command, to go to the next program line or to wait for the next timeout.

Delay: Inserting a delay loop in the macro.

Comment: Inserting a comment in the macro.

Execute Program: Open an external program using a macro.

Look Up Table: Open the Input- or Display-LUT and undoing the respective LUT.

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Configuration Conditions: Inserting the Configuration Conditions in a macro.

Gun Conditions: Inserting the Gun Conditions in a macro.

Setup Conditions: Inserting the Setup Conditions in a macro.

Application Conditions: Inserting the Application Conditions in a macro.

Menu: Library

Load User Library: Loading a user specific macro library (*.MLL). The actual macro library will be
replaced by this library.

Merge Libraries: Combination of the actual macro library with a user specific macro library. If both
libraries contain macros with the same name, the user will be asked which macro is
to be used for the new library.

Load Standard Library: Loading the standard library.

Merge Standard Library: Combination of the actual macro library with the standard macro library.
Macros with the same name will be replaced by the macro in the standard
library.

Save Library As: Saving the actual macro library in a file using a separate name.

Menu: Debug

Run: Starting the macro in the Editor.

Step: Processing the macro step by step in the Editor.

Continue: Going to the next instruction in the macro

Stop: Stopping the actual macro.

Stop All Macros: Stopping all running macros.

Menu: Generator

Save System Conditions: Saving the actual system settings in a file.

Menu: Help

Open of the help function.

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Many functions of the Pop-Up menu can be opened using the toolbar. Below you will find a list of the
different symbols.

Symbol Explanation Symbol Explanation

Creating a new macro Inserting an inquiry

Loading a macro from the library Inserting a delay function

Saving a macro to the library Inserting a delay function

Inserting a command Inserting an IF THEN- loop

Inserting a digital parameter Inserting END IF

Inserting an analog parameter Inserting the function ELSE

Inserting an analogous pair of Inserting a WHILE- loop

coordinates

Inserting a macro Inserting END WHILE

Inserting a function UIF Editing a macro

Inserting parameters which can be Processing a macro step by step

adjusted with the mouse

Inserting a comment Stopping the macro

6.6.1 The Macro “START”

When starting the LEO user interface, the software will browse the directory C:\PROGRAM
FILES\LEO\LEO32\USER for a macro with the name START.MLF. If this macro is not available, the
system will search in the actual user interface. If the macro exists, it will be processed immediately after
starting the LEO user interface. This enables the user to activate certain routines or external programs
immediately after the start.

Example:

The external program RemCon32, necessary for the communication between the SEM and another computer
(e.g. EDX system) shall be opened automatically after start of the LEO user interface..

1.) Click FILEÆ NEW and enter the name “START”.

2.) Select INSERTÆEXECUTE PROGRAM. The corresponding file can be selected using Browse.

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3.) Select INSERTÆ END A MACRO.
4.) Save the macro using FILEÆ SAVE AS MACRO TO COMMON FILE.

The macro will now be saved in the directory C:\PROGRAM FILES\LEO\LEO32\USER as file
START.MLF and will be available for each user. If only one specific user shall have access to this macro,
the file must be copied to the corresponding user directory and deleted from the directory USER.

6.6.2 Assignment of Macros to Function Keys

Using the corresponding function keys of the keyboard can also open macros. For this, the macro must be
assigned the name of the corresponding function key and be implemented to the macro library. The function
keys F5 - F8 und F11 and the key combinations Shift + corresponding function key are available.

Example:

The panel Specimen Current Monitor is to be opened by using the key combination Shift + F6.

1.) Open FILEÆ NEW and enter the name “Shift F6”.
2.) Select INSERTÆPANELSÆ SHOW PANELÆ SPECIMEN CURRENT MONITOR.
3.) Click INSERTÆ END A MACRO.
4.) Save the macro using FILEÆ SAVE MACRO TO LIBRARY.

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6.7 Saving Images in BMP and JPEG Format

The menu for image storage in BMP and JEPG format can be opened by clicking the right mouse button
within the scan area. After selection of Send toÆ BMP File... or Send toÆ JPEG File... the different panels
will be opened. Both windows are subdivided in two index cards.
As in the panel Export TIFF (see 4.5.1), existing files will be listed in the index Tab Save. A file name may
be assigned and the file saved in the corresponding image directory by clicking the key ”Save”. The other
settings in the fields Merge, Area and Dimensions will be as explained in 4.5.1. It is not possible to assign
User Text to these formats.
The index Tab Settings allows selection of the format of
the file name as well as an eventual Reduction.
If SEM images are stored in BMP or JPEG format, they
will always be saved as gray image with the corresponding
pallet. Saving the image as a colored image is not possible

Images in BMP or JPEG format cannot be reloaded to the LEO user interface.

The field JPEG Quality allows setting a value between 5 and 95. The smaller this value, the higher the
compaction (small storage need). By default, JPEG Quality 75 will be set.

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6.8 Magnification Calibration for Different Output Media

The magnification is defined as the ratio of edge length of the image displayed on an output device to edge
length of the scanned area on the sample surface. This value will therefore depend on the corresponding
output device. If a certain area of the sample is scanned and then displayed on the screen, the magnification
will have the value X1. If the same area is scanned and displayed on a Polaroid, this magnification will have
the value X2. Both images show the same sample area, but they have different magnifications. The value X2
will be 3-4 times less than the value X1 (depending on the size of the monitor), as a Polaroid will be 3-4
times smaller than the image area on a monitor.
The desired output device can be selected in the SEM Status- panel (see 4.4). If the parameter Output to is
listed in the index Tab Display, it can be modified by clicking the left mouse button. Selection of Display/
File (screen magnification), HRRU (photo unit) and Printer (standard printer) is possible. Depending on the
selected output device, the magnification will be calculated and displayed.
Another option is to open the User Preferences (see 6.1) in the index Tab SEM Conditions. The field
Magnification Display allows selecting the output device for the calculation of the magnification. Selecting
Polaroid 545 will always refer the magnification value to the size of a Polaroid. Modifications of the
parameters Output to in the SEM Status- window will not affect the magnification value. When selecting
Current Output Device , the calculation of the magnification will refer to the corresponding output device
(Output to).

6.8.1 Calibrate Output Device Magnification

For the calibration of the output device, the menu Magnification Calibration is opened using the Pop-Up
menu TOOLSÆ GO TO PANELÆ MAGNIFICATION CALIBRATION to display the window
represented below. Calibration can be done for the monitor and for the photo unit (HRRU). Calibrating the
printer is not necessary as the software will automatically read the corresponding data in the printer driver.
First, click Cal Mode= to select the setting Output Device. On the screen, two vertical lines will be displayed
whose position can be changed by means of the left mouse button. Click Output To= to select the desired
output device (Display/ File or HRRU). The distance of both lines will be measured. This value must be
entered to the field Output Dev cal actual. Clicking “OK” will save the calibration and close the window.
To calibrate the photo unit, select the setting HRRU in Output To=. Clicking the key “Photo” will edit the
image together with the vertical lines on the photo unit. Now the distance of both lines will be measured in
the photo to enter the value in the field Output Dev cal actual. Clicking the key “OK” will save the
calibration of the photo unit and close the panel.

6.8.2 Calibrate User Magnification

The selection of User Magnification in the field Cal Mode= provides the ability to calibrate the
magnification by means of a calibration standard. These standards are available for the various magnification
ranges and with different precision.

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After selecting User Magnification two vertical lines will appear on the screen. These lines will be
positioned in an image area where the exact distance is known (documents on standard). This distance will
be entered in Mag Cal Actual Width. Clicking the key “OK” will save the calibration and close the panel.
By default, calculation and setting of the magnification will be done when calibrating the SEM in the factory.
If you want to use the user specific calibration, click the right mouse button within the scan area and select
the command User Calibration Enable . Calculation and setting of the magnification will then be done using
the user specific calibration. This mode is symbolised by a star on the µ marker (see below).
To switch off the user specific magnification, select again User Calibration Enable.

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7 The Help System

The LEO 32 user interface includes an extensive help system offering explanations on the operation of the
microscope, additional options and optimization of images. There are several ways to open the help texts.
Using the Pop-Up menu HELP the different help texts can be selected.
By clicking HELPÆ HELP ON HELP a panel will pop up containing general explanations on the use with
the help texts

When clicking HELPÆ SEARCH the window above will be opened, listing important basics on the work
with the SEM in the index Tab Contents. Double-clicking the left mouse button on a book symbol will list
the explanations available on this subject. Opening of the corresponding help text is by clicking “Open”. The
index Tab Index contains an alphabetic list of all help texts. Clicking the index Tab Search allows browsing
the help texts for a special keyword.

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The panel Leo-32 Release Notes provides important information on the different software version. It
contains the explanation of new functions, eliminated software errors and particularities of the different
versions. Clicking the Pop-Up menu HELP -> RELEASE NOTES will open this window.

If no menus are opened in the LEO 32 user interface, opening HELPÆ LEO HELP or pressing the function
key “F1” will open the window below where the user will find basic information on the SEM and on the
handling of the software. Clicking the different titles with the left mouse button will open the respective
explanations.

Selecting HELPÆ KEY HELP or clicking the function key “F9” will indicate help texts for the use of the
keyboard. Many key combinations are also used in the LEO 32 user interface, e.g. combinations to open
menus or to start different routines. The help text LEO Keys will offer explanations for these different key
combinations.

If menus are opened in the LEO 32 user interface, clicking the function key “F1” will open the help text for
the specific menu. This provides the advantage that an explanation of the corresponding menu is now
possible during the operation of the SEM. Selecting OptionÆ Keep Help on Top Æ On Top using the Pop-
Up menu of the corresponding help panel will position the indicated help text in the foreground. Selecting
Standard will automatically displace the help window to the background when switching to the LEO 32 user
interface (clicking the menu bar or the scan area by means of the mouse); the help panel will not be
displayed on the screen any more. It will appear back on the screen when clicking the Windows- task bar or
using the key combination, ALT + TAB.

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A context sensitive help for the first steps when operating the microscope are available by pressing the key
combination SHIFT + F1. The mouse cursor will now become a question mark. In this mode, selecting a
function or a symbol with the left mouse button will display a help text of this specific symbol or menu. The
context sensitive help can be switched off by pressing the key “ESC”.

It is also possible to print the different help texts by selecting FileÆ Print Topic in the corresponding help
panel. The text will then be printed on a standard printer. When using the key combination Ctrl + C or
clicking the Pop-Up menu EditÆ Copy the help text will be copied to the buffer store to be added to other
Windows applications. Note however that only the text will be copied to the buffer store without the
graphics of the respective help menu.

The different help texts may include user remarks by selecting EditÆ Annotate in the respective Pop-Up
menu. You may then enter text in the window Annotate. This text will be stored in the help files when
pressing the key “Save”. A little paper clip will now be displayed in the left upper corner of the window to
symbolize that a remark has been entered on the respective subject. This remark is not user specific; that
means any user may use it by clicking the paper clip with the left mouse button. Each user will be able to edit
or delete such a remark.

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8 Important Keys and Key Combinations

Keys Function
F1 Opens the general help texts for the microscope

Shift + F1 Opens the context sensitive help

F2 Switching on and off the toolbar

Shift + F2 Performs a correction of the lens hysteresis

F3 Switches on and off open panels in the LEO user interface

Shift + F3 Switches on and off the PC plane

F4 Activates the magnification table, switching to the next set magnification

(see 6.1)- or undoing the Center Feature magnification (When pressing the
key F4 after use of the Center Feature function, the previous magnification
will be reset)

F5,F6, F, F8, F11(with or Reserved for user macros

without shift key)

F9 Opens the help for keys and key combinations

F12 (with or without shift Immediate stop of the sample stage

key)
Tab Switches between coarse and fine settings

CTRL + Tabulator Opens the Center Point function (see 5.3)

CTRL + Shift +Tabulator Opens the Center Feature function (see 5.4)

Home Resetting the image shift to 0

Scroll Lock Switching between freezing and deleeting of image store

Pause Stopping an activated macro

* Starts the function “Find Image”

CTRL + 2 Loads the actual image to the “Second Image Window”

CTRL + A Opens the Annotation Panel

CTRL + B Opens the window Toolbar View

CTRL + D Switches ON/OFF the data zone display

CTRL + E Opens the TIFF Export panel

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CTRL + F Performs an automatic fine focus

CTRL + Shift + F Performs an automatic coarse focus

CTRL + G Opens the SEM Control window

CTRL + I Opens the SEM Status window

CTRL + M Opens the Annotation window and starts point-to-point measurement

CTRL + O Opens the TIFF Import window

CTRL + P Displays the printer control window.

CTRL + S Performs an automatic astigmatism correction.

CTRL + Shift + S Performs an automatic astigmatism correction and a fine focus

CTRL + T Opens the Text Editor

CTRL + V Open the Vacuum Panel in the SEM Control window

Shift + arrow key (N) Starts the option Stage Scan (stage will drive to the first field)

+ Increases the scan speed by one value

- Decreases the scan rate by one value

Shift + double-clicking the Activates the Center Point function

left mouse button within the
image

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9 Optional Applications

9.1 Working with the Hard Panel/Joystick

By default, a joystick will be available for the control of the motorized axes of the sample stage. In the upper
display the actual coordinates of the stage will be entered. By means of the left big joystick it will be possible
to move the X and Y-axes. By turning the upper button the right or to the left, the rotation of the stage will be
controlled. The smaller right joystick will be available for the control of the Z-axis and for the stage kilt (T).
All axes are magnification compensated. When working with a lower magnification, the stage will move
relatively fast. When using higher magnification, the stage will move slower. The same principle applies to
the sensitivity of the joystick. When slightly moving the joystick, the corresponding axes will move slowly.
On stronger movement the stage will drive faster. Simultaneous control of the different axes is also possible.

1 - Control of the X and Y axes of the stage is by moving the

joystick to the corresponding direction and control of the stage
rotation is by turning the joystick to the right or to the left

2 - Control console

3 - Moving the Z and Tilt axes

4 - Display with the actual stage position(not on all panels)

It is also possible to control the stage by means of a hard panel, which will allow control of the motorized
axes of the sample stage as well as setting and alignment of special parameters by means of the
potentiometer. The different functions of the hard panel will be selected by pressing different keys. This will
result in a re-assignment of both potentiometers and of the joystick. The different parameters that can be set
by means of the potentiometer (Encoder) (14, 15) and joystick (16) are listed below.
The functions 1 to 7 are always assigned to the potentiometers, whereas setting of the stage coordinates is
possible by means of the potentiometers as well as by means of the joystick.

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1- Focus/ Magnification
2- Stigmator X/ Y
3- Image shift X/ Y
4- Image Rotation fine/coarse
5- Blocking the joystick
6- Adjustment of the apertures X/ Y
7- Centering the cathode X/ Y
8- Stage axes X/ Y (Potentiometer)
9- Stage axes X/ Y (Joystick)
10 - Stage axes Z/ T (Potentiometer)
11 - Stage axes Z (Joystick)
12 - Stage axes M/ R (Potentiometer)
13 - Stage axis R (Joystick)

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9.2 Airlock

The menu Airlock is opened using the Pop-Up menu TOOLSÆ GO TO PANELÆ AIRLOCK. This menu is
specially for SEMs with a sample airlock. In the field Separation Valve the user may control the V3 valve
(isolation valve between tip area and sample chamber). When clicking on “Close Column Chamber Valve”
the corresponding valve will be closed to be re-opened using Open Column Chamber Valve. The
corresponding status will be indicated in the field Column Chamber valve=. Opening the V3 valve is only
possible after reaching system vacuum (sample chamber). Closing this valve is only possible after switching
off the acceleration voltage.
Normally the vacuum will deteriorate due to the locking. Even after closing
the separation valve between sample chamber and airlock, the turbo pump
will need a certain time to pump the area of the sample chamber to a
corresponding vacuum. Opening the V3 valve will only be possible after
reaching this limit.
Some special sample airlocks may also be controlled using the LEO 32 user
interface by clicking the field Airlock. Clicking “Pump” will start the
pumping procedure of the airlock. When reaching the necessary vacuum, the
setting Yes will be displayed in the field Airlock Ready= . It is now possible
to open the separation valve between airlock and sample chamber and to
exchange the samples. After closing the separation valve, the sample airlock
can be vented by clicking on “Vent”.
Some airlocks have a “Stop function”. When pressing the key “Hold
Vacuum”, the pumps of the sample airlock will be switched off , but the
airlock will not be vented automatically.
To enable a semi-automatic exchange of samples, the keys “Specimen
Change” and “Resume Exchange” are available. Both keys will open a
macro listed in the directory C:\Program Files\Leo\Leo32\Distrib. These
macros contain basic settings for the sample exchange. They can be edited
and adapted to the requirements of the respective user and instrument.

Default parameters of the Macro “Specimen Change”:

1. Message asking if the stage has been initialised. If not, the macro will be stopped.
2. Activating the CCD camera (if adapted)
3. Asking if the electron beam has been switched on. YesÆ Switching off the high tension. If not, the
macro will be stopped.
4. Inquiry if an Airlock Control is available. YesÆ start of the pump procedure. If not, jump to the next
instruction.
5. Driving the stage to the position $exchange (this global variable contains the stage position for
airlocking samples)
6. Closing the V3 valve

If the macro has been processed without error, the message “Ready to exchange” will be displayed. Now
the valve between airlock and sample chamber can be opened to exchange the specimen. After doing so,
close the valve and press the key “Resume Exchange” .

Default Processing of the Macro “Resume Exchange”:

1. Finish the macro “Specimen Change”

2. Delay loop untill release of the vaccum (not more than 2000 seconds)
3. Opening the V3 valve
4. Venting the airlock (if Airlock Control has been installed)
5. Selection of the inlens detector as signal source
6. Closing the panel “Airlock”
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If the macro has been processed correctly, the message “Resume completed” will pop up. Now the
acceleration voltage may be switched on to continue the work on the microscope.

On the first opening of the macro “Specimen Change” the message below will be displayed to inform the
user that the macro must first be adapted. After clicking “OK” the message will be closed and the macro
finished.

Editing the macro will be done using the Macro Editor by opening the Pop-Up menu TOOLSÆ MACRO
EDITOR... . After start of the Editor, the file “Specimen Change.MLF” will be loaded to the Editor using
the Pop-Up menu FileÆ Load Macro File. This file is saved in the directory C:\Program
Files\Leo\Leo32\Distrib.

Editing the Macro:

1.) Delete the message (Message: This is the...) and the command End This Macro in line 5
2.) Select of the CCD camera in line 10 (if adapted)
3.) Delete the command Stage Go To T= 0.0 Deg and the following delay loop in line 30 if the stage is not
equipped with a motorised tilt axis
4.) Control whether the global position $EXCHANGE is available and whether it contains the correct
coordinates for the airlock position (if not, the position $EXCHANGE must be set using the stage
coordinate storage (see 5.2)

The macro “resume exchange” can also be edited by the user. It is in the same directory as the macro
“Specimen Change”. It will be useful for example to insert new commands as from line 13 to drive the stage
to a special position or to switch on the acceleration voltage automatically.

After editing a macro, it will have to be re-saved. If it is implemented to the macro library by using the Pop-
Up menu FILEÆSAVE MACRO TO LIBRARY , it will only be available for the respective user in his
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directory. If the macro is to be used by all users, it must be saved using FILEÆ SAVE AS MACRO TO
COMMON FILE.

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9.3 Gun Monitor Utility

The program Gun Monitor Utility provides the ability to record important parameters of the microscope in
certain intervals when operating the LEO user interface and to display them in form of a graph. The menu
may be opened using the Windows®-interface STARTÆ PROGRAMÆ LEO-32 SERVICEÆ GUN
MONITOR UTILITY.
Clicking the Pop-Up menu MONITORÆ START will start the record. Using the window Display Options
(Pop-Up menu: MONITORÆ OPTIONS...) selection of the different channels and of the colors will be
possible (8 channels are available). Six of the eight channels are pre-defined to record extractor voltage,
extractor tension, filament heating current, vacuum in the tip area, liner tube voltage and acceleration
voltage. Removing the check next to the parameter by clicking with the left mouse button will suppress the
recording of this parameter. The two parameters at the end of the list may be edited freely by the user by
selecting one of the parameters proposed in the respective list.
The square close to the parameter indicates the color assigned to the parameter in the diagram. Changing this
color is possible by clicking on the square with the left mouse button. When doing so, a color pallet will be
displayed allowing the selection of a new color. The columns Min. Value and Max. Value will indicate
minimum and maximum values of the different parameters. These limits, which will affect the presentation
in the diagram, can be modified manually.
After entering all settings, the panel will be closed by clicking “OK”. Pressing the key “Default” will undo
these settings and return to the basic condition.

The monitor interval of the different parameters can be set in the window
Monitor Interval... which can be opened using the Pop-Up menu
MONITORÆ Interval... or by using the corresponding symbol in the toolbar.
Settings will be possible between 1 and 60 seconds. After selection of the
interval, the window will be closed by clicking “OK”.

After starting the monitor, the different values of the parameters will be displayed in the diagram with the
respective colors. The scale in the basic condition has been selected to enable the presentation of all values of
the different parameters in one diagram. Placing the cursor to one of the graphs will indicate the
corresponding value and the time in the lower left part of the panel Gun Monitor.
The record can be stopped using the Pop-Up menu MONITORÆ STOP. Selecting FILEÆ PRINT... will
output the diagram to the printer. The different values can be saved in a separate file by selecting FILEÆ
SAVE AS... in the Pop-Up menu to assign a file name. The data will then be saved in the file *.MON and can
be reloaded to the program later on by clicking FILEÆ OPEN... in the Pop-Up menu to be displayed as a
graph again.
LEO Electron Microscopy Ltd 133
Another ability to save data is to click FILEÆ EXPORT DATA. The recorded values will then be saved to a
separate *.CSV file . This file format can be read by many Windows® applications (Word, Word Pad, Excel
etc.) so that the data will be available for processing in other programs. The example below shows a loaded
*.CSV file in the program Word Pad.

Gun Run up Data starting Friday March 17 2000: 10:35:09

Time, Filament I, Extractor V, Extractor I, Gun Vacuum, Liner V, EHT V, Stigmation X, Stigmation Y
(Sec), (mA), (V), (uA), (mBar), (V), (V), (%), (%)

3, 2285, 4200, 200, 2.22e-006, 8000, 3000, 0, 0

6, 2285, 4200, 200, 2.22e-006, 8000, 3000, 0, 0
9, 2285, 4200, 200, 2.22e-006, 8000, 10000, 0, 0
12, 2285, 4200, 200, 2.22e-006, 8000, 10000, 0, 0
15, 2285, 4200, 200, 2.22e-006, 8000, 10000, 7.8975, -10.4325
18, 2285, 4200, 200, 2.22e-006, 8000, 10000, 9.165, -10.8225
21, 2285, 4200, 200, 2.22e-006, 8000, 10000, 16.0875, 3.705
25, 2285, 4200, 200, 2.22e-006, 8000, 10000, 21.255, 14.3325
28, 2285, 4200, 200, 2.22e-006, 8000, 10000, 21.255, 14.3325
31, 2285, 4200, 200, 2.22e-006, 8000, 10000, 21.255, 14.3325
34, 2285, 4200, 200, 2.22e-006, 8000, 7000, 21.255, 14.3325
37, 2285, 4200, 200, 2.22e-006, 8000, 7000, 56.0625, 56.16
40, 2285, 4200, 200, 2.22e-006, 8000, 7000, 56.8425, 57.0375

Many of the different commands and panels can be opened by means of the toolbar by clicking the symbols
explained below.

Symbol Explanation Symbol Explanation

New record of the parameters; deleting Interrupting the record
the graphics in the diagram

Loading saved data Starting the record

Saving the monitored data Opening the window Display Options

Saving the monitored data to a *.CSV file Opening the window Monitor Interval...

Printing the diagram (Zoom In)

Display of the gun monitor version Default display of the X axis

Stopping the record (Zoom Out)

134 LEO Electron Microscopy Ltd

9.4 RemCon32 (requires the license REMCON)

The program RemCon32 provides the access to remote control of the SEM using a serial interface (RS232).
This allows reading and controlling special parameters of the microscope. This communication is frequently
utilized when using EDX/WDX systems.
When using the program RemCon32, care should be taken to first start the LEO user interface, then the
program RemCon32 and lastly the respective control program. The program will be opened using the
Windows®- plane STARTÆ PROGRAMÆ LEO-32Æ RemCon32. As this program is frequently used,
especially if an EDX/WDX system has been adapted, it can be started automatically together with the LEO-
32 user interface by modifying the macro “START” and saving it in the respective user directory (see 6.6.1).
For correct communications it is important that the settings on the selected port (serial interface COM1,
COM2 etc.) are correct and that the respective port has been activated for communication. Opening of the
window Communication Settings will be by using the Pop-Up menu COMMSÆ SETTINGS. The graph
below shows the default settings for a selected port. If Open port and minimize has been selected, the port
will be opened automatically on start of the program RemCon32. At the same time, the window will be
diminished to appear only in the Windows® task bar. Selecting COMMSÆ ECHO ON will indicate the
communicated commands and answers in the window RemCon32.
For test purposes it may also be useful to operate the program in Local Mode by selecting the menu
COMMSÆ LOCAL MODE using the Pop-Up menu. By doing so, it will be possible to enter commands and
inquiries manually in the panel RemCon32. If correct communication has been established, the
corresponding answer will be displayed in the window or the corresponding command will be executed in
the LEO 32 user interface.
The respective RS232- protocol, i.e. a list of all RemCon32 commands applicable to LEO 32 software will
be available on request at LEO GmbH.

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9.5 Important Software Licenses

Name of License Description Explanation of the License

15XX-ACCOUNT User Accounting Automatic registration of special parameters during a
working session to enable the Administrator to retrace
which user has been operating the SEM at what times. For
each user, the number of saved TIFF images, output
photos and prints will be saved (see 9.8).
15XX-CENTER Center Feature/ Stage Contains the two centering functions center point and
Map center feature. It is also possible to use the function stage
map (see 5.3, 5.4, 5.6).
15XX-CLIP Cut & Paste Copying and inserting SEM images to and from the buffer
store (see 3.2.5).
15XX-COMPU Compucentric Stage Compucentric software to allow tilt-eucentric and
Software rotation-eucentric control of a non-eucentric stage (see
5.9).
15XX-DUALMAG Dual Magnification This function allows the display of a zoomed image in the
mode Split Screen without freezing the lower
magnification image. (see 6.3.3).
15XX-DYNFOCUS Dynamic Focus Enables a dynamic adjustment of the focus during the
beam pass on tilted sample surfaces (see 6.3.4).
15XX-GAMMALUT Input Gamma Release of the function Input LUT (see 3.2.1). Enables the
individual adjustment of the input transfer characteristic
of a detector
15XX-GRATICULE Graticule Inserting a graticule on the screen (see 3.3.3). The
distance between the lines can be set between 50 and 512
15XX-IMMATH Image Processing Provides mathematic manipulation of the image store, e.g.
by using Kernel functions, adding or subtracting images
or by means of the detection of gray scale distribution.
(see 6.4).
15XX-INVERT Input Signal Invert Inverting a signal by means of Input- LUT (see 3.2.1)
15XX-MEASA Advanced Measurement Expanded measurement possibilities such as measuring
squares or inserting horizontal/vertical measuring lines
(see 4.7.1).
15XX-REDUCED Adjustable Reduced Use of a small raster window, adjustable in size and
Raster position. Useful for the adjustment of parameters such as
focus or stigmator (see 6.3.1).
15XX-REMARCH FTP Remote Archiving Sending files to a FTP server
15XX-REMCON RS 232 Remote Control Reading or setting special parameters of the SEM using
the serial interface (see 9.4).
15XX-SCANEXP Scan Rate Expansion 15 different scan rates (instead of 3 by default) (see 3.7).
15XX-SCANROT Scan Rotation Allows an electronic rotation of the image by rotating the
scan direction (see 6.3.6)
15XX-SIGMIX Signal Mixing Continuous mix of two detector signals in the range 0 to
100% (see 4.3.1).

15XX-SPLIT Split Screen When selecting the function Split Screen, the screen will
be subdivided in two zones. Each zone can be assigned
different detectors and each zone can be frozen
independently from the other (see 6.3.2)
136 LEO Electron Microscopy Ltd
15XX-SPOT Spot Mode Spot by spot positioning of the electron beam on a defined
point of the sample (see 4.3.2).
15XX-STAGECO Stage co-ordinate store Saving stage coordinates together with the magnification
and reopen and the working distance (see 5.2). These positions can be
moved to automatically.
15XX-STAGEREG Stage Registration Definition of user specific coordinate systems for the
specimen stage (see 5.8)
15XX-STAGESCAN Stage Scan This software option provides the ability to examine a
sample area by using a series of exactly defined, regularly
dispersed image fields (see 5.5)
15XX-STDAPI API API OCX- protocol to write user routines in the LEO user
interface by means of Visual Basic, Visual C++ and Java
15XX-SURVEY Stage Survey Mode To adjust automatically magnifications and working
distances for two different application modes (see 5.7)
15XX-TILTCOMP Tilt Compensation By means of this function, it is possible to correct the
perceived distortion caused when scanning tilted samples
(see 6.3.5).
15XX-XRAY Simple X- Ray dot map/ Imaging analogous EDX mappings and lines cans (see
Linescan 4.3.7).

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9.6 Water Flow/ Temperature

Flow and temperature of the cooling water in the system are controlled continuously to avoid an overheating
of the electronics. If the flow is interrupted or if the temperature rises beyond the set limit (Water Temp
Limit), the system will automatically be driven to safety mode. The power supply for the stage control and
the electron optic will be switched off and the window below will pop up. After eliminating the error,
clicking the key “Reset Overheat” will reactivate the power supply for the system .
This window can also be opened using the Pop-Up menu TOOLSÆ GO TO PANELÆ WATER FLOW/
TEMPERATURE.

Stage Too Hot:

Indicates the electronic status for the stage. The indication “Yes” will drive the
system to the safety mode.

EO Too Hot:
Indicates the electronic status for the electron optics. The indication “Yes” will
drive the system to the safety mode

Water OK:
Indicates the cooling water flow. The indication “No” will drive the system to
the safety mode as the flow is insufficient or has been interrupted.

Water Temp:
If the system is in safety mode, this case will indicate the actual temperature of the cooling water.

Water Temp Limit:

Indicates the limit value for the temperature of the cooling water. If this value is exceeded, the system will
drive to the safety mode.

SEM Overheat:
Status indication for the temperature of the cooling water.

OK: Temperature of the cooling water is okay.

Too Hot: The temperature of the cooling water is too high; the system will drive to the safety mode.

Monitor: The error has been eliminated. The system is waiting for the user to reset the safety mode.

Key Reset Overheat:

Resetting the safety mode after elimination of the error.

Key Close:
Closing the panel Water Flow/ Temperature.

138 LEO Electron Microscopy Ltd

9.7 Working with the Specimen Current Monitor

A specimen current monitor option may be installed on the SEM. For the control of this current meter, the
window Specimen Current Monitor is available which can be opened using the Pop-Up menu TOOLSÆ
GO TO PANELÆ SPECIMEN CURRENT MONITOR.
When activating the control box SCM On, measurements will be displayed in the field Specimen I =. The
system will automatically switch to the various measuring ranges. When activating the control box Spot, spot
mode will be switched on (see 4.3.2).
The beam current will be measured by means of a Faraday cup that consists
of a strongly absorbing material (usually carbon) with a hole covered by an
electron-microscope aperture (aperture 30-100µm). To measure the probe
current, the magnification on the instrument is set so that the complete beam
enters the hollow through the aperture opening. When switching on the
Specimen Current Monitor, the grounding of the sample holder (sample
stage) will be interrupted and a pico-ammeter will be inserted (Specimen
Current Monitors). If the beam is focused into the (or spot mode is set on the) Faraday cup, the measured
current will be the same as the entering beam current.
A similar measurement can be performed on real samples. To avoid strong divergences of the measured
value, it is recommended to use the spot mode. The primary electron beam impinging on the sample will
release interactive processes. The sample will not emit mainly SE and BSE electrons. When using very thin
samples, there may also occur a transmission of single electrons. If there is no charging of the specimen, the
measured current will be equivalent to the electrons absorbed in the sample (specimen current).

Measuring the beam current by means of the Measuring the beam current on a real sample
Faraday cup

1 - aperture PE – primary electron beam

2 – primary electron beam SE – SE electron
3 - Faraday cup with absorbed RE and SE electrons BSE – RE electron
4 – pico-ammeter TE- transmitted electrons (only on very thin samples)
SC – electrons absorbed in the sample (specimen
current)

IPE= ISE+IBSE+ITE+ISC ISC= IPE-ISE-IBSE-ITE

LEO Electron Microscopy Ltd 139

9.8 Accounting (Requires the License: ACCOUNT)

The software Accounting provides the ability to record important information on the different working
sessions on the microscope in a separate data base file. Later on the Administrator can refer to this
information. It will thus be possible to document the rate of capacity utilization or to list the times of the
working sessions for the different users.

The menu Accounting must be opened using the Administrator (see paragraph 2) (Supervisor privilege) and
contains the following different submenus:

Create Database: Creating an empty file (account.mdb) in the directory C:\Program Files\ LEO\
LEO32\ System. If a file has already been created, a warning message will pop up.
Active: Switching on/off the record to the data base file.
Owners: Opening the window Account Owners (see below).
Delete Up To: Deleting records from a defined date. Example: If you want to delete all records
from February 06, 2000 until the generation date (July 19, 1999), enter 07-Feb-00 in
the window Delete session records. A safety inquiry will be displayed before
deleting the data.
Compact Database: Due to the modification of data within the database, the file may get fragments
using unnecessarily storage place. When opening Compact Database, a
defragmentation will be performed after creating a safety copy (account.bak) in the
directory \LEO32\System. If errors appear on defragmentation, delete the file
“account.mdb” and change the name of the file “account.bak” to “account.mdb”, to
reset the original condition.
Repair Database: Errors in the database may result from incomplete records caused, for example, by a
software crash. The routine Repair Database will try to repair these errors in the
database. After opening Repair Database you should also apply the routine
Compact Database to the file.
Review: Listing the different working sessions in a separate window (see below).

140 LEO Electron Microscopy Ltd

9.8.1 Review
When clicking ACCOUNTINGÆ REVIEW a panel will be displayed listing the different records of the file
“account.mdb”. On each working session on the microscope, the following data will be stored: date, user
name, the LEO 32 user interface starting time, the LEO 32 user interface closing time, duration of the
working session, number of exposed photos, number of prints using the LEO 32 user interface, number of
saved TIFF files and status of the data base record (Normal, Abnormal etc.). Four different status indications
are possible:

Normal: Record of the data base has been activated (√ Activate); working session has been finished
normally
Abnormal: Working session has been finished abnormally, e.g. due to a software crash
ON: Record of the data base switched on
OFF: Record of the data base switched off

By default, the list of files will be represented as in the graph below. The different records are sorted
primarily on day of working session, then month and year. Selecting User Name in the field Sort sessions by
will list the files by user names.
If you only wish to indicate the total of working sessions of the different users you will have to select
Accounts in the field Display. This will list the different users with the respective number of working
sessions, the total of working hours and the number of output photos and prints as well as the number of
saved TIFF files (see right graph below).
It is also possible to list one specific user by clicking Select username and selecting a user in the field User
Name selection
If Owners have been defined (see 9.8.2), which may include several users, selecting a corresponding Owner
in Select Owner, will compose a list based on the Owner.
For the selection of different periods you may use the field Log On Data selection. Example: If you want a
list including all working sessions from January 8, 2000 up to March 8, 2000, enter From 08-Jan-2000 and
To 09-Mar-2000. Activating the green check will list the corresponding interval.

The database file “account.mdb” can be loaded and processed using other Windows programs (e.g.
Microsoft Access). It is also possible to copy certain files to the buffer store by clicking COPY and to insert
them to other programs (e.g. Microsoft Word, Microsoft Excel etc.). The content of the respective panel
will be printed on the standard printer by clicking PRINT in the Pop-Up menu.

LEO Electron Microscopy Ltd 141

9.8.2 Owners
Different users belonging to the same institute or product unit are grouped under one Owner. Each user can
only have one Owner. Editing an Owner is by the Pop-Up menu ADMINISTRATOR ACCOUNTINGÆ
OWNERS. Now the window Account Owners will be opened where already created Owners will be listed.
Creating a new Owner is done using the Pop-Up menu OWNERSÆ NEW . In the panel Creating new
Owner it is possible to enter the complete address of the respective institute or product unit. The fields Name
and Company must be filled in. Close the window by clicking “OK”. The new Owner will now be
displayed. When activating an owner (clicking the left mouse button) and selecting OWNERSHIPÆ ADD
using the Pop-Up menu, the different users can be selected in the window Select Username to add. The users
belonging to the corresponding Owner will be indicated in the list Owned Usernames. If a user name is to be
deleted from the corresponding Owner, select the user name and delete it from the list by clicking
OWNERSHIPÆ REMOVE.

The Owner with the name User 1 contains the users

Ack, Guest and Mustermann. When selecting User
1 in the field Select Owner, all working sessions of
these users will be listed.

142 LEO Electron Microscopy Ltd

10 Index
Dual Magnification 26, 35, 41, 100
A Dwell Time 40
Dynamic Focus 26, 28
account.mdb 140
Accounting 140
Administrator 8, 27
E
Airlock 12, 27, 130 Edit 16
Annotation 18, 21, 22, 35, 58 EHT 11, 23, 30, 34, 37, 43
General 63 EHT Off @ Log Off 11, 43
Measurement & Results 62 Emission 23, 40, 44, 96
Standard 62 Encoder 128
Aperture 23, 37 Exit 15, 32, 43
As Seen 18, 50 Ext Scan Control 28
Auto Focus 35 Extractor 43
Auto Stigmation 35
AutoBC 30, 35, 38 F
Filament Age 48
B Filament Current 11, 43
Backlash 72, 77, 92, 98 File 14
Bakeout 11, 27, 42 24 Bit Colour 50
Beam Blanked 44, 96 File information 19, 51
Beam Shift 23, 27, 45, 75, 96 File Name
Next 50
C No. 50
File Nr. 50
Calibrate Stage Centre 27, 85 Filter 25, 104
Calibrate Stigmation 27 Find Image 25
Calibration Wizard 8 Fine 31
Capture Now 28 Fit to Image 52
CCD 13, 35 Focus Wobble 35, 44
Centre 51 Frame Average 41
Centre Feature 75, 80, 96 Freeze 24, 35, 41
Centre Point 75, 80, 96 FTP Remote Archiving 8
Chamberscope 35
Clipboard 18
Coarse 31
G
Collector Bias 38, 39 Gamma 38
Colour Merge 49, 71 Go To 46, 91
COMPO 38, 39 Goto Panel 27
Compucentric Set Up 27, 87 Graticule 21
Compucentric Software 26 Gun 23, 37, 42
Copy 25 Gun Align 44
Crosshairs 21, 96 Gun Monitor Utility 8, 133
current.adz 20, 21, 67 Gun Service 8, 23
current.anp 64 Gun Setup 23
Cycle Time 40
H
D HFP Status 20
data.vac 8, 9 Hide 20, 22
Delta 91
Detector 24, 37
Dimensions 19, 49

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I P
Image 24 PAL 13
Image Capture Mode 28 Pallette 50
Image Directory 10 Partial Vent On Standby 11
Image Gallery 24, 25, 52 Password 7, 11
Image Processing 24, 25, 102 Photo No. 50
Image Reduction 51 Print Image 14, 25, 36
Inlens- Detector 31, 37, 39 Print No. 71
Input LUT 16, 21 Print Setup 14, 36
Insert Protected Z 11, 46, 92
Annotation Text 18 Pump 42
Point to Point Marker 18
Invert R
Display LUT 56
Input LUT 17, 38 ReadMe 8
Reduced 26, 35, 40
Reduction 18
J Release Notes 8
Joystick Disable 46, 93, 129 RemCon32 8, 135
Remote Control 135
L Reset
Display LUT 55
Leave Gun On At Shutdown 11, 43 Input LUT 17
Line Scan 26, 40 Restore 14, 34
Load Rotate Limit 12
Annotation 15 RS232 135
Display LUT 55
Image 14
Input LUT 17
S
State 14, 33 Save
Log Off 15, 32, 43 Annotation 15
For Restore 14
M Image 14, 36
Input LUT 17
Magnification Calibration 28 State 14
Magnification Table 98 Scan Rotation 26
Merge 18 Scan Speed 26, 40
Mixing 24, 38 Scanning 26, 37, 40
Move XY Only 73 SE- Detector 31, 39
Second Image Window 24, 25
N SEM Conditions (User Preferences) 96
Noise Reduction 24, 31, 41, 98 SEM Control- Fenster 24, 26
Normal 26, 35, 40 SEM User Interface 7, 8
NTSC 13 Show 20
Shutdown 43
O Signal Adjust 24, 28, 35, 38
Specimen Change 26, 34, 42
Origin 19, 51 Specimen Current Monitor 28
Other Settings (Administrator) 11 Split Screen 26, 35, 40, 79
Output Device 48, 120 Spot- Modus 26, 41
Overlay 49, 71 Stage 12, 26, 37
Owner 142 Stage Admin 8
Stage Horizontal Alignment 28, 90
Stage Initialise 72
Stage Limits 28

144 LEO Electron Microscopy Ltd

Stage Navigation 92 Upgrade User Database 9
Stage Points List 28, 93 User Calibration Enable 121
Stage Registered Movement 28, 83 User Directory 10
Stage Registration 28, 82 User Max EHT 11, 43
Stage Scan 28, 94 User Name 7
Stage XY+Z 77, 92 User Preferences 27, 96, 99
Standard 14 User Text 49
Step Frame 19, 51
Stigmation 23, 28, 35, 45 V
Stigmator 23, 28, 35, 45
Store Resolution 19, 26, 40, 49 Vacuum 26, 37, 42
Supervisor 27, 43, 74, 140 Vent 42
Survey Mode 80
W
T Water Flow/ Temperature 28
Tilt Correction 26, 28, 77
Tool Tips 20, 34, 108 X
Toolbar 17 X- Ray 24, 37, 46
Tools 27 X- Ray Line Scan 26, 41
TOPO 38, 39 X- Ray Threshold 47
Track Z 46, 92 X,Y 19, 51

U Z
Unfreeze 24, 35, 41 Z move on Vent 11, 46, 92
Unhide 20, 22

LEO Electron Microscopy Ltd 145